JPH07153720A - ダイシング装置のウェハ自給装置 - Google Patents

ダイシング装置のウェハ自給装置

Info

Publication number
JPH07153720A
JPH07153720A JP5321200A JP32120093A JPH07153720A JP H07153720 A JPH07153720 A JP H07153720A JP 5321200 A JP5321200 A JP 5321200A JP 32120093 A JP32120093 A JP 32120093A JP H07153720 A JPH07153720 A JP H07153720A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
stocker
wafer
stage
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5321200A
Other languages
English (en)
Japanese (ja)
Inventor
Tei Adachi
禎 足立
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP5321200A priority Critical patent/JPH07153720A/ja
Priority to GB9423850A priority patent/GB2284303B/en
Priority to KR1019940031393A priority patent/KR950015630A/ko
Priority to TW083111332A priority patent/TW252213B/zh
Publication of JPH07153720A publication Critical patent/JPH07153720A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P72/00—
    • H10P52/00—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5321200A 1993-11-26 1993-11-26 ダイシング装置のウェハ自給装置 Pending JPH07153720A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP5321200A JPH07153720A (ja) 1993-11-26 1993-11-26 ダイシング装置のウェハ自給装置
GB9423850A GB2284303B (en) 1993-11-26 1994-11-25 Automatic wafer handler for a dicing machine
KR1019940031393A KR950015630A (ko) 1993-11-26 1994-11-26 자동 웨이퍼 핸들러를 구비한 다이싱 머신
TW083111332A TW252213B (enExample) 1993-11-26 1994-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5321200A JPH07153720A (ja) 1993-11-26 1993-11-26 ダイシング装置のウェハ自給装置

Publications (1)

Publication Number Publication Date
JPH07153720A true JPH07153720A (ja) 1995-06-16

Family

ID=18129915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5321200A Pending JPH07153720A (ja) 1993-11-26 1993-11-26 ダイシング装置のウェハ自給装置

Country Status (4)

Country Link
JP (1) JPH07153720A (enExample)
KR (1) KR950015630A (enExample)
GB (1) GB2284303B (enExample)
TW (1) TW252213B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013031048A1 (ja) * 2011-08-30 2013-03-07 パナソニック株式会社 液剤塗布装置及び液剤塗布方法
JP2016016525A (ja) * 2014-07-04 2016-02-01 三星ダイヤモンド工業株式会社 基板加工装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111604810B (zh) * 2020-07-24 2020-11-03 杭州众硅电子科技有限公司 一种晶圆传输设备、化学机械平坦化装置及晶圆传输方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013031048A1 (ja) * 2011-08-30 2013-03-07 パナソニック株式会社 液剤塗布装置及び液剤塗布方法
JP2016016525A (ja) * 2014-07-04 2016-02-01 三星ダイヤモンド工業株式会社 基板加工装置

Also Published As

Publication number Publication date
GB2284303A (en) 1995-05-31
KR950015630A (ko) 1995-06-17
GB2284303B (en) 1997-10-08
TW252213B (enExample) 1995-07-21
GB9423850D0 (en) 1995-01-11

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