KR950004820U - Wafer Fixer of Plasma CD Equipment - Google Patents

Wafer Fixer of Plasma CD Equipment

Info

Publication number
KR950004820U
KR950004820U KR2019930014246U KR930014246U KR950004820U KR 950004820 U KR950004820 U KR 950004820U KR 2019930014246 U KR2019930014246 U KR 2019930014246U KR 930014246 U KR930014246 U KR 930014246U KR 950004820 U KR950004820 U KR 950004820U
Authority
KR
South Korea
Prior art keywords
fixer
wafer
plasma
equipment
wafer fixer
Prior art date
Application number
KR2019930014246U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930014246U priority Critical patent/KR950004820U/en
Publication of KR950004820U publication Critical patent/KR950004820U/en

Links

KR2019930014246U 1993-07-28 1993-07-28 Wafer Fixer of Plasma CD Equipment KR950004820U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930014246U KR950004820U (en) 1993-07-28 1993-07-28 Wafer Fixer of Plasma CD Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930014246U KR950004820U (en) 1993-07-28 1993-07-28 Wafer Fixer of Plasma CD Equipment

Publications (1)

Publication Number Publication Date
KR950004820U true KR950004820U (en) 1995-02-18

Family

ID=60917664

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930014246U KR950004820U (en) 1993-07-28 1993-07-28 Wafer Fixer of Plasma CD Equipment

Country Status (1)

Country Link
KR (1) KR950004820U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970030282A (en) * 1995-11-28 1997-06-26 김광호 Ceramic spacers of plasma C, V, D devices
KR100460799B1 (en) * 1997-06-23 2005-05-17 삼성전자주식회사 Plasma Treatment Equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970030282A (en) * 1995-11-28 1997-06-26 김광호 Ceramic spacers of plasma C, V, D devices
KR100460799B1 (en) * 1997-06-23 2005-05-17 삼성전자주식회사 Plasma Treatment Equipment

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application