KR950004820U - Wafer Fixer of Plasma CD Equipment - Google Patents
Wafer Fixer of Plasma CD EquipmentInfo
- Publication number
- KR950004820U KR950004820U KR2019930014246U KR930014246U KR950004820U KR 950004820 U KR950004820 U KR 950004820U KR 2019930014246 U KR2019930014246 U KR 2019930014246U KR 930014246 U KR930014246 U KR 930014246U KR 950004820 U KR950004820 U KR 950004820U
- Authority
- KR
- South Korea
- Prior art keywords
- fixer
- wafer
- plasma
- equipment
- wafer fixer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930014246U KR950004820U (en) | 1993-07-28 | 1993-07-28 | Wafer Fixer of Plasma CD Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930014246U KR950004820U (en) | 1993-07-28 | 1993-07-28 | Wafer Fixer of Plasma CD Equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950004820U true KR950004820U (en) | 1995-02-18 |
Family
ID=60917664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930014246U KR950004820U (en) | 1993-07-28 | 1993-07-28 | Wafer Fixer of Plasma CD Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950004820U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR970030282A (en) * | 1995-11-28 | 1997-06-26 | 김광호 | Ceramic spacers of plasma C, V, D devices |
KR100460799B1 (en) * | 1997-06-23 | 2005-05-17 | 삼성전자주식회사 | Plasma Treatment Equipment |
-
1993
- 1993-07-28 KR KR2019930014246U patent/KR950004820U/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR970030282A (en) * | 1995-11-28 | 1997-06-26 | 김광호 | Ceramic spacers of plasma C, V, D devices |
KR100460799B1 (en) * | 1997-06-23 | 2005-05-17 | 삼성전자주식회사 | Plasma Treatment Equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |