KR950001978A - 두 표면의 평행도 측정방법 및 장치 - Google Patents

두 표면의 평행도 측정방법 및 장치 Download PDF

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Publication number
KR950001978A
KR950001978A KR1019940014802A KR19940014802A KR950001978A KR 950001978 A KR950001978 A KR 950001978A KR 1019940014802 A KR1019940014802 A KR 1019940014802A KR 19940014802 A KR19940014802 A KR 19940014802A KR 950001978 A KR950001978 A KR 950001978A
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KR
South Korea
Prior art keywords
autocollimator
dispersion
determining
parallelism
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019940014802A
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English (en)
Korean (ko)
Inventor
트리에드 하베이 죠지
스테븐 코발칙 조셉
에이. 트레더 랄프
Original Assignee
알. 비. 레비
에이티앤드티 코포레이션
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Publication date
Application filed by 알. 비. 레비, 에이티앤드티 코포레이션 filed Critical 알. 비. 레비
Publication of KR950001978A publication Critical patent/KR950001978A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1019940014802A 1993-06-28 1994-06-27 두 표면의 평행도 측정방법 및 장치 Ceased KR950001978A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/082,647 US5461472A (en) 1993-06-28 1993-06-28 Method and apparatus for measuring the parallelism of two surfaces
US082,647 1993-06-28

Publications (1)

Publication Number Publication Date
KR950001978A true KR950001978A (ko) 1995-01-04

Family

ID=22172491

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940014802A Ceased KR950001978A (ko) 1993-06-28 1994-06-27 두 표면의 평행도 측정방법 및 장치

Country Status (5)

Country Link
US (1) US5461472A (enExample)
EP (1) EP0631107A1 (enExample)
JP (1) JPH07139919A (enExample)
KR (1) KR950001978A (enExample)
TW (1) TW272255B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020033297A (ko) * 2000-10-30 2002-05-06 남희영 게임영역 확장형 바둑게임 관리 유니트 및 이를 이용한바둑게임 관리방법
KR102155059B1 (ko) 2019-09-24 2020-09-11 한국생산기술연구원 대상물 평행도 교정장치 및 이의 작동방법

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6301007B1 (en) * 1998-05-29 2001-10-09 The Regents Of The University Of California Machine tool locator
US6633387B1 (en) 1999-10-07 2003-10-14 Mitutoyo Corporation Method and apparatus for measuring opposite surfaces
RU2180727C2 (ru) * 2000-03-22 2002-03-20 Серов Владимир Георгиевич Фотоэлектрический автоколлимационный датчик крена
US6674521B1 (en) * 2000-05-12 2004-01-06 The Regents Of The University Of Michigan Optical method and system for rapidly measuring relative angular alignment of flat surfaces
EP1495308B1 (en) * 2002-04-15 2018-08-29 FORCE Technology Apparatus for measuring light reflections of an object and use thereof
JP2004317424A (ja) * 2003-04-18 2004-11-11 Pioneer Electronic Corp オートコリメータ
US7327452B2 (en) * 2004-08-09 2008-02-05 Credence Systems Corporation Light beam apparatus and method for orthogonal alignment of specimen
RU2384811C1 (ru) * 2008-11-17 2010-03-20 Федеральное государственное унитарное предприятие Научно-исследовательский институт комплексных испытаний оптико-электронных приборов и систем (ФГУП НИИКИ ОЭП) Автоколлиматор для измерения угла скручивания
WO2010085655A2 (en) * 2009-01-23 2010-07-29 University Of Washington Cytometer with automatic continuous alignment correction
RU2408840C1 (ru) * 2009-10-29 2011-01-10 Российская Федерация, от имени которой выступает Министерство обороны Российской Федерации Устройство определения пространственной ориентации объектов
KR101371945B1 (ko) 2013-02-05 2014-03-12 순천대학교 산학협력단 롤 평행도 측정 장치
CA3046437A1 (en) 2016-12-16 2018-06-21 Universitat Basel Apparatus and method for determining the orientation and position of two rigid bodies
US10855981B2 (en) * 2018-09-07 2020-12-01 Trw Automotive U.S. Llc Testing module for fixed focus camera module evaluation
CN109387162A (zh) * 2018-12-08 2019-02-26 中国航空工业集团公司洛阳电光设备研究所 一种平面平行度批量测量方法
CN110207623A (zh) * 2019-06-27 2019-09-06 东莞市宇瞳光学科技股份有限公司 平行度测量装置及方法、打压机平行度测量系统及方法
CN111426334A (zh) * 2020-03-25 2020-07-17 中船九江精达科技股份有限公司 一种实现工作台面高精密水平基准调平方法及其调平装置
CN117355934A (zh) * 2021-06-01 2024-01-05 库利克和索夫工业公司 电子部件接合机以及在这种接合机上测量距离的方法
US12055385B1 (en) * 2021-07-26 2024-08-06 Lumus Ltd. Methods and systems for validating parallelism between internal facets
GB2614526A (en) * 2021-11-16 2023-07-12 Element Six Tech Ltd Method and apparatus for processing diamond surface
KR20230167994A (ko) 2022-06-03 2023-12-12 삼성전자주식회사 평행도 측정용 광학 어셈블리, 이를 포함한 광학 장치, 다이 본딩 시스템 및 이를 이용한 다이 본딩 방법
CN115683578B (zh) * 2022-10-12 2025-09-02 河南驭波科技有限公司 一种非接触测量不透光光学平面零件平行和垂直的方法
CN119223166B (zh) * 2024-12-04 2025-03-14 杭州泓芯微半导体有限公司 轨道式端板尺寸跳动检测装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0055884A3 (en) * 1980-09-16 1983-03-30 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Optical instrument for measuring the divergence of two approximately colinear optical axes
US4560274A (en) * 1983-04-27 1985-12-24 Rca Corporation Optical alignment for workpiece
JPS60220807A (ja) * 1984-04-17 1985-11-05 Agency Of Ind Science & Technol ロ−リングも測定できるオ−トコリメ−タ用反射鏡
DE3624253A1 (de) * 1986-07-18 1988-01-21 Krupp Gmbh Fotoelektrisch abgetasteter kollimator
US4774405A (en) * 1987-05-26 1988-09-27 The United States Of America As Represented By The Secretary Of The Air Force Real time autocollimator device for aligning two surfaces in parallel
FR2627874B1 (fr) * 1988-02-29 1995-06-16 Framatome Sa Systeme d'alignement d'un faisceau de puissance
FR2657959B1 (fr) * 1990-02-06 1992-04-30 Superba Sa Procede et dispositif pour mesurer la torsion d'un fil textile.
US5144486A (en) * 1990-10-01 1992-09-01 Spectra-Physics Laserplane, Inc. Laser beam apparatus for providing multiple reference beams

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020033297A (ko) * 2000-10-30 2002-05-06 남희영 게임영역 확장형 바둑게임 관리 유니트 및 이를 이용한바둑게임 관리방법
KR102155059B1 (ko) 2019-09-24 2020-09-11 한국생산기술연구원 대상물 평행도 교정장치 및 이의 작동방법

Also Published As

Publication number Publication date
TW272255B (enExample) 1996-03-11
EP0631107A1 (en) 1994-12-28
US5461472A (en) 1995-10-24
JPH07139919A (ja) 1995-06-02

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