KR950001864A - 비정질 경질 탄소막 및 그 제조 방법 - Google Patents

비정질 경질 탄소막 및 그 제조 방법 Download PDF

Info

Publication number
KR950001864A
KR950001864A KR1019940012985A KR19940012985A KR950001864A KR 950001864 A KR950001864 A KR 950001864A KR 1019940012985 A KR1019940012985 A KR 1019940012985A KR 19940012985 A KR19940012985 A KR 19940012985A KR 950001864 A KR950001864 A KR 950001864A
Authority
KR
South Korea
Prior art keywords
carbon film
amorphous hard
hard carbon
nitrogen
substrate
Prior art date
Application number
KR1019940012985A
Other languages
English (en)
Other versions
KR0134942B1 (ko
Inventor
겐다로 쇼오
Original Assignee
이다가끼 유끼오
가부시기 가이샤 젝셀
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이다가끼 유끼오, 가부시기 가이샤 젝셀 filed Critical 이다가끼 유끼오
Publication of KR950001864A publication Critical patent/KR950001864A/ko
Application granted granted Critical
Publication of KR0134942B1 publication Critical patent/KR0134942B1/ko

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M59/00Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps
    • F02M59/44Details, components parts, or accessories not provided for in, or of interest apart from, the apparatus of groups F02M59/02 - F02M59/42; Pumps having transducers, e.g. to measure displacement of pump rack or piston
    • F02M59/445Selection of particular materials
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00Non-metallic inorganic materials
    • F05C2203/06Silicon
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05CINDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00Non-metallic inorganic materials
    • F05C2203/08Ceramics; Oxides
    • F05C2203/0804Non-oxide ceramics
    • F05C2203/0808Carbon, e.g. graphite
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

탄소, 규소 및 질소를 원료로 하여 플라즈마 또는 이온 비임을 사용해서 기재상에 증착시켜서 된 규소 및 질소를 함유하는 비정질 경질 탄소막을 제공한다. 또한, 탄소 원료, 규소 원료 및 질소 원료를 기재가 설치된 증착실내에 도입하여 상기 기재상에 탄소막을 증착시킴을 특징으로 하는 규소와 질소를 함유하는 비정질 경질 탄소막을 기판상에 증착시키는 방법도 제공한다. 상기 비정질 경질 탄소막으로 피복한 접동부분을 가진 기계부품 및 기계부품의 접동부분 표면에 상기 탄소막을 피복하는 비정질 경질 탄소막의 이용 방법도 아울러 제공한다.

Description

비정질 경질 탄소막 및 그 제조 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 실시예 1 에 사용된 평행 평판형 RF플라즈마 CVD법의 장치의 개략설명도, 제 2 도는 실시예 1 의 비정질 경질 탄소막에 대해서의 라만 분광 광도계에 의해 측정된 스펙트럼을 나타낸 도면, 제 3 도는 실시예1 및 비교예 1의 비정질 경질 탄소막에 대해서의 마모 시험 결과를 나타낸 도면.

Claims (13)

  1. 기재상에 증착시킨 비정질 경질 탄소막으로서 더욱이 규소와 질소를 함유하는 비정질 경질 탄소막.
  2. 제 1 항에 있어서, 탄소막중의 수소의 함유량이 약 0.5~5.0×1022원자/㎤인 비정질 경질 탄소막.
  3. 제 1 항 또는 제 2 항 있어서, 탄소막중의 규소의 함유량이 약 10~35원자%인 비정질 경질 탄소막.
  4. 제 1 항에 있어서, 탄소막중의 질소 함유량이 약 0.1~10원자%인 비정질 경질 탄소막.
  5. 제 1 항에 있어서, 기재가 철 합금 또는 알루미늄 합금제의 기계부품인 비정질 경질 탄소막.
  6. 제 1 항에 있어서, 비정질 경질 탄소막의 비커스 경도가 2000~5000인 비정질 경질 탄소막.
  7. 제 1 항에 있어서, 탄소막의 막두께가 0.1~30㎛인 비정질 경질 탄소막.
  8. 탄소 원료, 규소 원료 및 질소 원료를 기재를 설치한 증착실에 도입하여 상기 기재상에 규소 및 질소를 함유하는 비정질 경질 탄소막을 증착시키는 비정질 경질 탄소막 증착 방법.
  9. 제 8 항에 있어서, 탄소 원료가 탄화 수소이고 규소 원료가 유기규소 화합물이며 질소 원료가 질소 또는 질소 함유 화합물인 방법.
  10. 제 8 항에 있어서,증착을 플라즈마 도는 이온 비임을 사용하여 실시하는 방법.
  11. 접동부분을 가진 기계부품으로서 적어도 상기 접동부분을 제 1 항 기재의 비정질 경질 탄소막으로 피복한 기계부품.
  12. 제11항에 있어서, 접동부분을 가진 기계부품이 콤프레서 또는 연료 분사 펌프의 접동부품인 기계부품.
  13. 기계부품의 접동부분의 표면에 비정질 경질 탄소막을 증착시키는 제 1 항 기계의 비정질 경질 탄소막의 이용 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940012985A 1993-06-11 1994-06-09 비정질 경질 탄소막 및 그 제조 방법 KR0134942B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP93-166439 1993-06-11
JP16643993 1993-06-11

Publications (2)

Publication Number Publication Date
KR950001864A true KR950001864A (ko) 1995-01-04
KR0134942B1 KR0134942B1 (ko) 1998-06-15

Family

ID=15831429

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940012985A KR0134942B1 (ko) 1993-06-11 1994-06-09 비정질 경질 탄소막 및 그 제조 방법

Country Status (3)

Country Link
US (2) US5616374A (ko)
KR (1) KR0134942B1 (ko)
DE (1) DE4420262C2 (ko)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410144B2 (en) * 1995-03-08 2002-06-25 Southwest Research Institute Lubricious diamond-like carbon coatings
EP1067210A3 (en) * 1996-09-06 2002-11-13 Sanyo Electric Co., Ltd. Method for providing a hard carbon film on a substrate and electric shaver blade
DE19707232A1 (de) * 1997-02-24 1998-08-27 Betonwerk C Schmidt Gmbh Abt C Spinnring und Läufer für Ringspinnmaschinen
US6802457B1 (en) 1998-09-21 2004-10-12 Caterpillar Inc Coatings for use in fuel system components
US6416865B1 (en) * 1998-10-30 2002-07-09 Sumitomo Electric Industries, Ltd. Hard carbon film and surface acoustic-wave substrate
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
JP2003501555A (ja) * 1999-06-08 2003-01-14 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム ドープダイヤモンド状カーボン皮膜
CN1170003C (zh) * 1999-06-18 2004-10-06 日新电机株式会社 碳膜及其形成方法以及碳膜被覆物品及其制造方法
US6715693B1 (en) * 2000-02-15 2004-04-06 Caterpillar Inc Thin film coating for fuel injector components
ES2256110T3 (es) 2000-05-09 2006-07-16 Kabushiki Kaisha Riken Pelicula de carbono amorfo que contiene oxido.
US6739238B2 (en) 2000-11-20 2004-05-25 Nissan Motor Co., Ltd. Sliding structure for a reciprocating internal combustion engine and a reciprocating internal combustion engine using the sliding structure
US7537835B2 (en) * 2001-09-27 2009-05-26 Kabushiki Kaisha Toyota Chuo Kenkyusho High friction sliding member
JP2003184883A (ja) 2001-12-20 2003-07-03 Nissan Motor Co Ltd 軸受摺動部材
JP3555891B2 (ja) * 2002-02-22 2004-08-18 新日本石油株式会社 低摩擦摺動材料及びこれに用いる潤滑油組成物
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
EP1479946B1 (en) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Piston for internal combustion engine
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
EP1666573B1 (en) 2003-08-06 2019-05-15 Nissan Motor Company Limited Low-friction sliding mechanism and method of friction reduction
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
DE602004010207T2 (de) * 2003-08-11 2008-09-25 Nissan Motor Co., Ltd., Yokohama Kraftstoffgeschmierte Vorrichtung
JP2005090489A (ja) * 2003-08-11 2005-04-07 Nissan Motor Co Ltd 内燃機関用バルブリフター
EP1507088B1 (en) * 2003-08-13 2007-08-29 Nissan Motor Company, Limited Structure for connecting piston to crankshaft
JP4539205B2 (ja) * 2003-08-21 2010-09-08 日産自動車株式会社 冷媒圧縮機
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (en) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Transmission comprising low-friction sliding members and transmission oil therefor
FR2867247B1 (fr) * 2004-03-05 2006-06-02 Skf Ab Dispositif de galet tendeur
CN101133184A (zh) * 2005-03-02 2008-02-27 株式会社荏原制作所 涂覆金刚石的轴承或密封结构及包含它们的流体机械
FR2891554B1 (fr) * 2005-10-03 2008-01-11 Hef Soc Par Actions Simplifiee Revetement anti-corrosion a base de silicium, de carbone, d'hydrogene et d'azote.
JP4784248B2 (ja) * 2005-10-05 2011-10-05 トヨタ自動車株式会社 摺動構造及び摺動方法
GB2452190B (en) 2006-05-17 2011-12-28 G & H Technologies Llc Wear resistant depositied coating, method of coating deposition and applications therefor
US8987039B2 (en) * 2007-10-12 2015-03-24 Air Products And Chemicals, Inc. Antireflective coatings for photovoltaic applications
US20090096106A1 (en) * 2007-10-12 2009-04-16 Air Products And Chemicals, Inc. Antireflective coatings
US8080324B2 (en) * 2007-12-03 2011-12-20 Kobe Steel, Ltd. Hard coating excellent in sliding property and method for forming same
JP2009155721A (ja) * 2007-12-03 2009-07-16 Kobe Steel Ltd 摺動性に優れる硬質皮膜とその硬質皮膜の形成方法
KR101468666B1 (ko) * 2011-06-06 2014-12-04 다이요 가가쿠 고교 가부시키가이샤 비정질 탄소막층에의 발수 발유층을 고정시키는 방법 및 해당 방법에 의해 형성된 적층체
US9054295B2 (en) 2011-08-23 2015-06-09 Micron Technology, Inc. Phase change memory cells including nitrogenated carbon materials, methods of forming the same, and phase change memory devices including nitrogenated carbon materials
DE102012219930A1 (de) 2012-10-31 2014-04-30 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung
JP6453826B2 (ja) * 2016-09-28 2019-01-16 トヨタ自動車株式会社 摺動部材およびその製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926080A1 (de) * 1979-06-28 1981-01-08 Philips Patentverwaltung Mittel zur trockenschmierung
JPS58126972A (ja) * 1982-01-22 1983-07-28 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金工具
CA1232228A (en) * 1984-03-13 1988-02-02 Tatsuro Miyasato Coating film and method and apparatus for producing the same
DE3609456A1 (de) * 1985-03-23 1986-10-02 Canon K.K., Tokio/Tokyo Waermeerzeugender widerstand und waermeerzeugendes widerstandselement unter benutzung desselben
GB2175252B (en) * 1985-03-25 1990-09-19 Canon Kk Thermal recording head
JPH06952B2 (ja) * 1985-04-18 1994-01-05 鐘淵化学工業株式会社 硬質カ−ボン膜
EP0221531A3 (en) * 1985-11-06 1992-02-19 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha High heat conductive insulated substrate and method of manufacturing the same
DD258341A3 (de) * 1986-03-14 1988-07-20 Hochvakuum Dresden Veb Verfahren zur herstellung haftfester ic-schichten
KR900008505B1 (ko) * 1987-02-24 1990-11-24 세미콘덕터 에너지 라보라터리 캄파니 리미티드 탄소 석출을 위한 마이크로파 강화 cvd 방법
AU631037B2 (en) * 1989-12-28 1992-11-12 Kabushiki Kaisha Toyota Chuo Kenkyusho Hard and lubricant thin film of amorphous carbon-hydrogen-silicon, iron base metallic material coated therewith, and the process for producing the same
US5393577A (en) * 1990-06-19 1995-02-28 Nec Corporation Method for forming a patterned layer by selective chemical vapor deposition
JP3071854B2 (ja) * 1991-03-27 2000-07-31 株式会社半導体エネルギー研究所 ダイヤモンド膜作製方法およびその評価方法
US5541003A (en) * 1991-10-31 1996-07-30 Tdk Corporation Articles having diamond-like protective thin film
US5249554A (en) * 1993-01-08 1993-10-05 Ford Motor Company Powertrain component with adherent film having a graded composition

Also Published As

Publication number Publication date
US5843571A (en) 1998-12-01
DE4420262A1 (de) 1994-12-15
US5616374A (en) 1997-04-01
DE4420262C2 (de) 1999-07-22
KR0134942B1 (ko) 1998-06-15

Similar Documents

Publication Publication Date Title
KR950001864A (ko) 비정질 경질 탄소막 및 그 제조 방법
Tamor et al. Raman ‘‘fingerprinting’’of amorphous carbon films
Weissmantel et al. Preparation of hard coatings by ion beam methods
Kaufman et al. Symmetry breaking in nitrogen-doped amorphous carbon: Infrared observation of the Raman-active G and D bands
Thärigen et al. Hard amorphous CSixNy thin films deposited by RF nitrogen plasma assisted pulsed laser ablation of mixed graphite/Si3N4-targets
US7942111B2 (en) Method and device for vacuum-coating a substrate
CA2110563A1 (en) Powertrain component with adherent film having a graded composition
Miyake et al. Improved microscratch hardness of ion‐plated carbon film by nitrogen inclusion evaluated by atomic force microscope
Ham et al. Diamond‐like carbon films grown by a large‐scale direct current plasma chemical vapor deposition reactor: System design, film characteristics, and applications
Tanaka et al. Hardness and structure of a-CNx films synthesized by chemical vapor deposition
Costa et al. Effect of hydrogen incorporation on the mechanical properties of DLC films deposited by HiPIMS in DOMS mode
Tang et al. Influence of hydrogen on the structure of amorphous carbon
Tanabe et al. Characterization and modification of amorphous carbon films consisting of sp2 and sp3 bonds using magneto-plasma dynamic arc-jet
Škorić et al. Structure, hardness and adhesion of thin coatings deposited by PVD, IBAD on nitrided steels
Damasceno et al. Deposition and evaluation of DLC–Si protective coatings for polycarbonate materials
US20050000796A1 (en) Method for the manufacture of an article and an article
Yamashita et al. Cross-sectional transmission electron microscopy observations of c-BN films deposited on Si by ion-beam-assisted deposition
Lejeune et al. Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films
Chien et al. Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering
ATE246738T1 (de) Kathodisches vakuum-bogenverdampfungsverfahren für die herstellung von verschleissfesten beschichtungen
Kuhr et al. Hydrogen incorporation during nucleation and growth of c-BN films
Roth et al. Large area and three-dimensional deposition of diamond-like carbon films for industrial applications
Kozłowski et al. Properties of carbides, nitrides and carbonitrides based on Ti and Mo multicomponent layers
Valentini et al. Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects
Taki et al. Amorphous carbon nitride hard coatings by multistep shielded arc ion plating

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20080108

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee