KR950001864A - 비정질 경질 탄소막 및 그 제조 방법 - Google Patents

비정질 경질 탄소막 및 그 제조 방법 Download PDF

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KR950001864A
KR950001864A KR1019940012985A KR19940012985A KR950001864A KR 950001864 A KR950001864 A KR 950001864A KR 1019940012985 A KR1019940012985 A KR 1019940012985A KR 19940012985 A KR19940012985 A KR 19940012985A KR 950001864 A KR950001864 A KR 950001864A
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carbon film
amorphous hard
hard carbon
nitrogen
substrate
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KR1019940012985A
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KR0134942B1 (ko
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겐다로 쇼오
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이다가끼 유끼오
가부시기 가이샤 젝셀
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M59/00—Pumps specially adapted for fuel-injection and not provided for in groups F02M39/00 -F02M57/00, e.g. rotary cylinder-block type of pumps
    • F02M59/44—Details, components parts, or accessories not provided for in, or of interest apart from, the apparatus of groups F02M59/02 - F02M59/42; Pumps having transducers, e.g. to measure displacement of pump rack or piston
    • F02M59/445—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/06—Silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/08—Ceramics; Oxides
    • F05C2203/0804—Non-oxide ceramics
    • F05C2203/0808—Carbon, e.g. graphite
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)

Abstract

탄소, 규소 및 질소를 원료로 하여 플라즈마 또는 이온 비임을 사용해서 기재상에 증착시켜서 된 규소 및 질소를 함유하는 비정질 경질 탄소막을 제공한다. 또한, 탄소 원료, 규소 원료 및 질소 원료를 기재가 설치된 증착실내에 도입하여 상기 기재상에 탄소막을 증착시킴을 특징으로 하는 규소와 질소를 함유하는 비정질 경질 탄소막을 기판상에 증착시키는 방법도 제공한다. 상기 비정질 경질 탄소막으로 피복한 접동부분을 가진 기계부품 및 기계부품의 접동부분 표면에 상기 탄소막을 피복하는 비정질 경질 탄소막의 이용 방법도 아울러 제공한다.

Description

비정질 경질 탄소막 및 그 제조 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 실시예 1 에 사용된 평행 평판형 RF플라즈마 CVD법의 장치의 개략설명도, 제 2 도는 실시예 1 의 비정질 경질 탄소막에 대해서의 라만 분광 광도계에 의해 측정된 스펙트럼을 나타낸 도면, 제 3 도는 실시예1 및 비교예 1의 비정질 경질 탄소막에 대해서의 마모 시험 결과를 나타낸 도면.

Claims (13)

  1. 기재상에 증착시킨 비정질 경질 탄소막으로서 더욱이 규소와 질소를 함유하는 비정질 경질 탄소막.
  2. 제 1 항에 있어서, 탄소막중의 수소의 함유량이 약 0.5~5.0×1022원자/㎤인 비정질 경질 탄소막.
  3. 제 1 항 또는 제 2 항 있어서, 탄소막중의 규소의 함유량이 약 10~35원자%인 비정질 경질 탄소막.
  4. 제 1 항에 있어서, 탄소막중의 질소 함유량이 약 0.1~10원자%인 비정질 경질 탄소막.
  5. 제 1 항에 있어서, 기재가 철 합금 또는 알루미늄 합금제의 기계부품인 비정질 경질 탄소막.
  6. 제 1 항에 있어서, 비정질 경질 탄소막의 비커스 경도가 2000~5000인 비정질 경질 탄소막.
  7. 제 1 항에 있어서, 탄소막의 막두께가 0.1~30㎛인 비정질 경질 탄소막.
  8. 탄소 원료, 규소 원료 및 질소 원료를 기재를 설치한 증착실에 도입하여 상기 기재상에 규소 및 질소를 함유하는 비정질 경질 탄소막을 증착시키는 비정질 경질 탄소막 증착 방법.
  9. 제 8 항에 있어서, 탄소 원료가 탄화 수소이고 규소 원료가 유기규소 화합물이며 질소 원료가 질소 또는 질소 함유 화합물인 방법.
  10. 제 8 항에 있어서,증착을 플라즈마 도는 이온 비임을 사용하여 실시하는 방법.
  11. 접동부분을 가진 기계부품으로서 적어도 상기 접동부분을 제 1 항 기재의 비정질 경질 탄소막으로 피복한 기계부품.
  12. 제11항에 있어서, 접동부분을 가진 기계부품이 콤프레서 또는 연료 분사 펌프의 접동부품인 기계부품.
  13. 기계부품의 접동부분의 표면에 비정질 경질 탄소막을 증착시키는 제 1 항 기계의 비정질 경질 탄소막의 이용 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940012985A 1993-06-11 1994-06-09 비정질 경질 탄소막 및 그 제조 방법 KR0134942B1 (ko)

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JP16643993 1993-06-11
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Publication number Publication date
US5616374A (en) 1997-04-01
DE4420262A1 (de) 1994-12-15
US5843571A (en) 1998-12-01
DE4420262C2 (de) 1999-07-22
KR0134942B1 (ko) 1998-06-15

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