KR940004355U - 반도체 웨이퍼용 튀저 - Google Patents

반도체 웨이퍼용 튀저

Info

Publication number
KR940004355U
KR940004355U KR2019920012739U KR920012739U KR940004355U KR 940004355 U KR940004355 U KR 940004355U KR 2019920012739 U KR2019920012739 U KR 2019920012739U KR 920012739 U KR920012739 U KR 920012739U KR 940004355 U KR940004355 U KR 940004355U
Authority
KR
South Korea
Prior art keywords
chipper
semiconductor wafer
wafer
semiconductor
Prior art date
Application number
KR2019920012739U
Other languages
English (en)
Other versions
KR0139150Y1 (ko
Inventor
김대광
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019920012739U priority Critical patent/KR0139150Y1/ko
Publication of KR940004355U publication Critical patent/KR940004355U/ko
Application granted granted Critical
Publication of KR0139150Y1 publication Critical patent/KR0139150Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Elimination Of Static Electricity (AREA)
KR2019920012739U 1992-07-10 1992-07-10 반도체 웨이퍼용 튀저 KR0139150Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019920012739U KR0139150Y1 (ko) 1992-07-10 1992-07-10 반도체 웨이퍼용 튀저

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019920012739U KR0139150Y1 (ko) 1992-07-10 1992-07-10 반도체 웨이퍼용 튀저

Publications (2)

Publication Number Publication Date
KR940004355U true KR940004355U (ko) 1994-02-24
KR0139150Y1 KR0139150Y1 (ko) 1999-04-15

Family

ID=19336483

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019920012739U KR0139150Y1 (ko) 1992-07-10 1992-07-10 반도체 웨이퍼용 튀저

Country Status (1)

Country Link
KR (1) KR0139150Y1 (ko)

Also Published As

Publication number Publication date
KR0139150Y1 (ko) 1999-04-15

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