KR940002511B1 - 산화주석 박막 가스 센서 소자 - Google Patents

산화주석 박막 가스 센서 소자 Download PDF

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Publication number
KR940002511B1
KR940002511B1 KR1019860700721A KR860700721A KR940002511B1 KR 940002511 B1 KR940002511 B1 KR 940002511B1 KR 1019860700721 A KR1019860700721 A KR 1019860700721A KR 860700721 A KR860700721 A KR 860700721A KR 940002511 B1 KR940002511 B1 KR 940002511B1
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KR
South Korea
Prior art keywords
plane
gas sensor
tin oxide
thin film
half width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019860700721A
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English (en)
Korean (ko)
Other versions
KR880700261A (ko
Inventor
다께시 마쓰모또
오사무 오까다
유우지 나까무라
Original Assignee
오오사까 가스 가부시끼가이샤
오오니시 마시후미
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Application filed by 오오사까 가스 가부시끼가이샤, 오오니시 마시후미 filed Critical 오오사까 가스 가부시끼가이샤
Publication of KR880700261A publication Critical patent/KR880700261A/ko
Application granted granted Critical
Publication of KR940002511B1 publication Critical patent/KR940002511B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1019860700721A 1985-02-20 1986-02-19 산화주석 박막 가스 센서 소자 Expired - Fee Related KR940002511B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60032228A JPS61191954A (ja) 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子
JP32228/1985 1985-02-20
PCT/JP1986/000077 WO1986004989A1 (en) 1985-02-20 1986-02-19 Gas sensor element of tin oxide film

Publications (2)

Publication Number Publication Date
KR880700261A KR880700261A (ko) 1988-02-22
KR940002511B1 true KR940002511B1 (ko) 1994-03-25

Family

ID=12353109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860700721A Expired - Fee Related KR940002511B1 (ko) 1985-02-20 1986-02-19 산화주석 박막 가스 센서 소자

Country Status (4)

Country Link
JP (1) JPS61191954A (enrdf_load_stackoverflow)
KR (1) KR940002511B1 (enrdf_load_stackoverflow)
GB (2) GB2182448B (enrdf_load_stackoverflow)
WO (1) WO1986004989A1 (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643978B2 (ja) * 1986-06-27 1994-06-08 大阪瓦斯株式会社 ガスセンサ及びその製造方法
GB9512929D0 (en) * 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US6134944A (en) * 1999-04-29 2000-10-24 The Regents Of The University Of California System and method for preconcentrating, identifying, and quantifying chemical and biological substances
JP5350593B2 (ja) 2007-01-15 2013-11-27 キャタピラー エス エー アール エル パネルの製造方法
DE102013218840A1 (de) 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung
CN104568002B (zh) * 2014-12-26 2017-05-03 昆山工研院新型平板显示技术中心有限公司 环境检测装置
CN107315034B (zh) 2016-04-26 2021-06-08 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN107315033B (zh) 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN106092200A (zh) * 2016-07-08 2016-11-09 南京信息工程大学 一种环境检测装置
CN110114662B (zh) 2016-12-28 2022-03-18 新唐科技日本株式会社 气体检测装置、气体检测系统、燃料电池汽车及气体检测方法
US11536677B2 (en) 2016-12-28 2022-12-27 Nuvoton Technology Corporation Japan Gas detection device, gas sensor system, fuel cell vehicle, and hydrogen detection method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424094A (en) * 1977-07-26 1979-02-23 Fuji Electric Co Ltd Production of gas detecting element
JPS5811844A (ja) * 1981-07-15 1983-01-22 Matsushita Electric Ind Co Ltd Ｎｏ↓２ガス検知器及び検知方法
JPS5983046A (ja) * 1982-11-02 1984-05-14 Hitachi Ltd ガスセンサおよびその製造方法
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器

Also Published As

Publication number Publication date
KR880700261A (ko) 1988-02-22
JPS61191954A (ja) 1986-08-26
GB2182448B (en) 1989-01-11
GB2182448A (en) 1987-05-13
JPH053895B2 (enrdf_load_stackoverflow) 1993-01-18
WO1986004989A1 (en) 1986-08-28
GB8624904D0 (en) 1986-11-19
GB8625006D0 (en) 1986-11-19

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