KR940001471A - Manufacturing method of solar cell with antireflection film - Google Patents
Manufacturing method of solar cell with antireflection film Download PDFInfo
- Publication number
- KR940001471A KR940001471A KR1019920009943A KR920009943A KR940001471A KR 940001471 A KR940001471 A KR 940001471A KR 1019920009943 A KR1019920009943 A KR 1019920009943A KR 920009943 A KR920009943 A KR 920009943A KR 940001471 A KR940001471 A KR 940001471A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- spray
- gun
- solar cell
- inches
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract 6
- 239000007921 spray Substances 0.000 claims abstract 6
- 238000005507 spraying Methods 0.000 claims abstract 5
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims abstract 4
- 238000000034 method Methods 0.000 claims abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract 2
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 claims 4
- 239000006117 anti-reflective coating Substances 0.000 claims 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
본 발명은 태양전지의 반사방지막 형성시, 사용물질을 줄이고 열처리와 동시 스프레이 조건을 달리하면서 스프레이 코팅하므로서 제조공정의 간소화를 비롯한 효율을 향상시킨 관한것으로, 단결정 실리콘 웨이퍼를 이용한 태양전지의 반사방지 막을 형성함에 있어서, 반사 방지막 재료로서 titanium isopr n-butyl acetate을 혼합한 용액을 이용하여 예열된 웨이퍼에 걸프레이(spray)코팅시, 상기 용액의 분사압력이 40-30(putt). 상기 용액을 건(gun)가지 운반해주는 원료압력(material pressure)이 15-10[inches water], 웨이퍼가 건(gun)의 한 스트로크(stroke)때마다 전진하는 거리를 나타내는 데이블인덱스(table index)가 1.2-1.0[inches/stroke], 스프레이건이 웨이퍼를 횡단하는 속도를 나타내는 트레버스 스피드(traverse speed)를 18-15[inches/sec]로 하여 스프레이 코팅함을 특징으로 하는 반사방지막을 형성한 태양전지의 제조방법에 관한 기술이다.The present invention relates to the improvement of efficiency, including the simplification of the manufacturing process by spray coating while reducing the use material and varying the heat treatment and simultaneous spray conditions when forming the anti-reflection film of the solar cell. In forming, when spray coating the preheated wafer using a solution containing titanium isopr n-butyl acetate as an anti-reflection film material, the spray pressure of the solution is 40-30 (putt). A table index representing the distance at which the material pressure to deliver the solution to the gun is 15-10 [inches water], and the wafer advances with each stroke of the gun. Is 1.2-1.0 [inches / stroke], and a spray coating with a traverse speed of 18-15 [inches / sec] representing the speed at which the spray gun traverses the wafer. It is a technique relating to the manufacturing method of.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 본 발명의 태양전지 제조공정도,1 is a solar cell manufacturing process of the present invention,
제7도는 전면전극 그리드 패턴도,7 is a front electrode grid pattern diagram,
제9도는 본 발명의 태양전지 구조도.9 is a structural diagram of a solar cell of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920009943A KR0151162B1 (en) | 1992-06-09 | 1992-06-09 | Fabricating method for anti reflection layer of solar cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920009943A KR0151162B1 (en) | 1992-06-09 | 1992-06-09 | Fabricating method for anti reflection layer of solar cell |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940001471A true KR940001471A (en) | 1994-01-11 |
KR0151162B1 KR0151162B1 (en) | 1998-10-01 |
Family
ID=19334379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920009943A KR0151162B1 (en) | 1992-06-09 | 1992-06-09 | Fabricating method for anti reflection layer of solar cell |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0151162B1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100977330B1 (en) * | 2007-03-29 | 2010-08-20 | 어플라이드 머티어리얼스, 인코포레이티드 | Method for producing an anti-reflection or passivation layer for solar cells |
KR100950930B1 (en) * | 2009-05-22 | 2010-04-01 | 동국대학교 산학협력단 | Apparatus and method for anti-reflective layer onto solar cell |
-
1992
- 1992-06-09 KR KR1019920009943A patent/KR0151162B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0151162B1 (en) | 1998-10-01 |
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