JPS5496368A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5496368A JPS5496368A JP272178A JP272178A JPS5496368A JP S5496368 A JPS5496368 A JP S5496368A JP 272178 A JP272178 A JP 272178A JP 272178 A JP272178 A JP 272178A JP S5496368 A JPS5496368 A JP S5496368A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- sio
- solution
- pbo
- burning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
PURPOSE: To form the glass protective film by obtaining the mixture solution of each component of the glass dissolved into the organic solvent and then coating the mixture solution with burning.
CONSTITUTION: The glass solution is made by dissolving one of ZnO-B2O3-SiO2, PbO-SiO2-Al2O3 and PbO-SiO2-B2O3-Al2O3 into alcohol. The solution is then coated on the substrate via the spinner, the spray or through soaking method, etc. to from the glass film after burning and fusion. In such way, a uniform film thickness can be obtained, thus solving the pinhole problem and at the same time enhancing greatly the using efficiency of the glass.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP272178A JPS5496368A (en) | 1978-01-17 | 1978-01-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP272178A JPS5496368A (en) | 1978-01-17 | 1978-01-17 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5496368A true JPS5496368A (en) | 1979-07-30 |
Family
ID=11537163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP272178A Pending JPS5496368A (en) | 1978-01-17 | 1978-01-17 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5496368A (en) |
-
1978
- 1978-01-17 JP JP272178A patent/JPS5496368A/en active Pending
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