KR930002810A - 압력측정장치 - Google Patents

압력측정장치 Download PDF

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Publication number
KR930002810A
KR930002810A KR1019920005504A KR920005504A KR930002810A KR 930002810 A KR930002810 A KR 930002810A KR 1019920005504 A KR1019920005504 A KR 1019920005504A KR 920005504 A KR920005504 A KR 920005504A KR 930002810 A KR930002810 A KR 930002810A
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KR
South Korea
Prior art keywords
fluid
pressure
measured
measuring device
seal diaphragm
Prior art date
Application number
KR1019920005504A
Other languages
English (en)
Other versions
KR0163443B1 (ko
Inventor
미쯔루 다마이
히로노부 야오
마사오 사이또
Original Assignee
나까오 다께시
후지덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP16317191A external-priority patent/JP2838921B2/ja
Application filed by 나까오 다께시, 후지덴끼 가부시끼가이샤 filed Critical 나까오 다께시
Publication of KR930002810A publication Critical patent/KR930002810A/ko
Application granted granted Critical
Publication of KR0163443B1 publication Critical patent/KR0163443B1/ko

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

내용 없음.

Description

압력측정장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 제1실시예에 있어서의 요부단면도.
제2도는 제2의 실시예에 있어서의 요부단면도.
제3도는 제3의 실시예에 있어서의 요부단면도.
제4도는 제4의 실시예에 있어서의 요부단면도.
제5도는 각 실시예의 공통된 단면도.

Claims (8)

  1. 피측정유체와 이 프측정유체에 의한 압력변동을 압력검출부에 전달하는 압력전달용의 매체를 격리하는 씰다이어프럼을 구비하는 압력측정장치에 있어서, 상기 씰다이어프럼의 피측저유체측의 표면에 비도전성막을 코팅하여서 된 것을 특징으로 하는 압력측정장치.
  2. 제1항에 있어서, 상기 씰다이어프럼의 피측정유체측 표면에 비도전성막을 복수층 코팅하여서 된 것을 특징으로 하는 압력측정장치.
  3. 제1항에 있어서, 상기 씰다이어프럼의 피츠정유체측 표면에 피측정유체에 대하여 내식성을 갖는 재료로된 제1의 비도전성막과, 이 제1의 비도전성막 및 씰다이어프럼 모재에 대하여 양호한 밀착성을 가진 재료로된 제2의 비도전성막과를 상기 제1의 비도전성막이 피측정유체 접촉측이 되도록 순차 적층코팅하여서 된 것을 특징으로 하는 압력측정장치.
  4. 제1항에 있어서, 상기 씰다이어프럼의 피측정유체측 표면에 비도전성막과, 수소가 확산하기 어려운 금속재료로된 수소확산 저지막과를 상기 비도전성막이 피측정유체접촉측이 되도록 순차 적층코팅하여서 된 것을 특징으로 하는 압력측정장치.
  5. 제4항에 있어서, 상기 수소확산저지막은 금 또는 텅스텐으로 된 것을 특징으로 하는 압력측정장치.
  6. 제1항 내지 제5항중의 어느 한 항에 있어서, 상기 비도전성막은 세라믹으로 된 것을 특징으로 하는 압력측정장치.
  7. 피측정유체와 이 피측정유체에 의한 압력변동을 압력검출부에 전달하는 압력전달용의 매체와를 격리하는 씰다이아프럼과 상기 씰다이어프럼을 외측에서 복개하여 이 씰다이어프럼과의 사이에 압력도입공간을 형성하는 커버와, 상기 압력도입공간과 피측정유체의 흐르는 관로와를 연통하는 연결관과를 구비하는 압력측정장치에 있어서, 상기 씰다이어프럼의 피측정유체측의 표면에 비도전성막을 코팅함과 동시에 상기 커버 및 연결관의 내면에 내식성수지재료를 코팅하여서 된 것을 특징으로 하는 압력측정장치.
  8. 제7항에 있어서, 상기 내식성수지 재료는 4블화에틸렌인 것을 특징으로 하는 압력측정장치.
    ※ 참고사항: 최초출원 내용에 의하여 공개하는 것임.
KR1019920005504A 1991-07-04 1992-04-02 압력측정장치 KR0163443B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP91-163171 1991-07-04
JP16317191A JP2838921B2 (ja) 1990-10-05 1991-07-04 圧力測定装置

Publications (2)

Publication Number Publication Date
KR930002810A true KR930002810A (ko) 1993-02-23
KR0163443B1 KR0163443B1 (ko) 1999-03-30

Family

ID=15768594

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920005504A KR0163443B1 (ko) 1991-07-04 1992-04-02 압력측정장치

Country Status (5)

Country Link
US (2) US5400655A (ko)
EP (1) EP0521246B1 (ko)
KR (1) KR0163443B1 (ko)
AU (1) AU654000B2 (ko)
DE (1) DE69212734T2 (ko)

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DE4406021B4 (de) * 1994-02-24 2004-07-22 Braun, Dieter, Dr. Druckmeßeinrichtung
JP2852602B2 (ja) * 1994-03-17 1999-02-03 株式会社山武 圧力測定装置
DE4413274A1 (de) * 1994-04-16 1995-10-19 Sel Alcatel Ag Drucksensor
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
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JP7192839B2 (ja) * 2020-10-08 2022-12-20 横河電機株式会社 ダイアフラムシール及びそのメンテナンス方法
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Also Published As

Publication number Publication date
US5400655A (en) 1995-03-28
US5551299A (en) 1996-09-03
EP0521246A2 (en) 1993-01-07
DE69212734D1 (de) 1996-09-19
EP0521246B1 (en) 1996-08-14
AU1403592A (en) 1993-01-07
DE69212734T2 (de) 1996-12-05
KR0163443B1 (ko) 1999-03-30
EP0521246A3 (en) 1993-12-01
AU654000B2 (en) 1994-10-20

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