KR930002810A - 압력측정장치 - Google Patents
압력측정장치 Download PDFInfo
- Publication number
- KR930002810A KR930002810A KR1019920005504A KR920005504A KR930002810A KR 930002810 A KR930002810 A KR 930002810A KR 1019920005504 A KR1019920005504 A KR 1019920005504A KR 920005504 A KR920005504 A KR 920005504A KR 930002810 A KR930002810 A KR 930002810A
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- pressure
- measured
- measuring device
- seal diaphragm
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 제1실시예에 있어서의 요부단면도.
제2도는 제2의 실시예에 있어서의 요부단면도.
제3도는 제3의 실시예에 있어서의 요부단면도.
제4도는 제4의 실시예에 있어서의 요부단면도.
제5도는 각 실시예의 공통된 단면도.
Claims (8)
- 피측정유체와 이 프측정유체에 의한 압력변동을 압력검출부에 전달하는 압력전달용의 매체를 격리하는 씰다이어프럼을 구비하는 압력측정장치에 있어서, 상기 씰다이어프럼의 피측저유체측의 표면에 비도전성막을 코팅하여서 된 것을 특징으로 하는 압력측정장치.
- 제1항에 있어서, 상기 씰다이어프럼의 피측정유체측 표면에 비도전성막을 복수층 코팅하여서 된 것을 특징으로 하는 압력측정장치.
- 제1항에 있어서, 상기 씰다이어프럼의 피츠정유체측 표면에 피측정유체에 대하여 내식성을 갖는 재료로된 제1의 비도전성막과, 이 제1의 비도전성막 및 씰다이어프럼 모재에 대하여 양호한 밀착성을 가진 재료로된 제2의 비도전성막과를 상기 제1의 비도전성막이 피측정유체 접촉측이 되도록 순차 적층코팅하여서 된 것을 특징으로 하는 압력측정장치.
- 제1항에 있어서, 상기 씰다이어프럼의 피측정유체측 표면에 비도전성막과, 수소가 확산하기 어려운 금속재료로된 수소확산 저지막과를 상기 비도전성막이 피측정유체접촉측이 되도록 순차 적층코팅하여서 된 것을 특징으로 하는 압력측정장치.
- 제4항에 있어서, 상기 수소확산저지막은 금 또는 텅스텐으로 된 것을 특징으로 하는 압력측정장치.
- 제1항 내지 제5항중의 어느 한 항에 있어서, 상기 비도전성막은 세라믹으로 된 것을 특징으로 하는 압력측정장치.
- 피측정유체와 이 피측정유체에 의한 압력변동을 압력검출부에 전달하는 압력전달용의 매체와를 격리하는 씰다이아프럼과 상기 씰다이어프럼을 외측에서 복개하여 이 씰다이어프럼과의 사이에 압력도입공간을 형성하는 커버와, 상기 압력도입공간과 피측정유체의 흐르는 관로와를 연통하는 연결관과를 구비하는 압력측정장치에 있어서, 상기 씰다이어프럼의 피측정유체측의 표면에 비도전성막을 코팅함과 동시에 상기 커버 및 연결관의 내면에 내식성수지재료를 코팅하여서 된 것을 특징으로 하는 압력측정장치.
- 제7항에 있어서, 상기 내식성수지 재료는 4블화에틸렌인 것을 특징으로 하는 압력측정장치.※ 참고사항: 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP91-163171 | 1991-07-04 | ||
JP16317191A JP2838921B2 (ja) | 1990-10-05 | 1991-07-04 | 圧力測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR930002810A true KR930002810A (ko) | 1993-02-23 |
KR0163443B1 KR0163443B1 (ko) | 1999-03-30 |
Family
ID=15768594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920005504A KR0163443B1 (ko) | 1991-07-04 | 1992-04-02 | 압력측정장치 |
Country Status (5)
Country | Link |
---|---|
US (2) | US5400655A (ko) |
EP (1) | EP0521246B1 (ko) |
KR (1) | KR0163443B1 (ko) |
AU (1) | AU654000B2 (ko) |
DE (1) | DE69212734T2 (ko) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5483834A (en) * | 1993-09-20 | 1996-01-16 | Rosemount Inc. | Suspended diaphragm pressure sensor |
WO1995008759A1 (en) * | 1993-09-24 | 1995-03-30 | Rosemount Inc. | Pressure transmitter isolation diaphragm |
DE4435909C2 (de) * | 1993-10-08 | 2000-06-15 | Hitachi Ltd | Druckmeßvorrichtung mit einer Membran |
DE4406021B4 (de) * | 1994-02-24 | 2004-07-22 | Braun, Dieter, Dr. | Druckmeßeinrichtung |
JP2852602B2 (ja) * | 1994-03-17 | 1999-02-03 | 株式会社山武 | 圧力測定装置 |
DE4413274A1 (de) * | 1994-04-16 | 1995-10-19 | Sel Alcatel Ag | Drucksensor |
US5731522A (en) * | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US6038961A (en) * | 1998-03-02 | 2000-03-21 | Rosemount Inc. | Flush mount remote seal |
DE19812785A1 (de) * | 1998-03-24 | 1999-10-07 | Beru Ag | Schutzrohre für Glüh- und Meßelemente |
US6120033A (en) * | 1998-06-17 | 2000-09-19 | Rosemount Inc. | Process diaphragm seal |
US6543291B1 (en) * | 2000-01-06 | 2003-04-08 | Kulite Semiconductor Products, Inc. | Wet-to-wet pressure sensing assembly |
DE50016091D1 (de) * | 2000-02-22 | 2011-05-19 | Endress & Hauser Gmbh & Co Kg | Drucksensor |
DE10114666A1 (de) * | 2001-03-23 | 2002-09-26 | Bernhard Trier | Differenzdrucksensor |
DE10114665A1 (de) * | 2001-03-23 | 2002-09-26 | Bernhard Trier | Drucksensor mit Membran |
DE10130376B4 (de) * | 2001-06-23 | 2009-01-29 | Abb Ag | Differenzdrucksensor |
DE10130375B4 (de) * | 2001-06-23 | 2009-01-29 | Abb Ag | Differenzdrucksensor |
US7021148B2 (en) | 2002-04-30 | 2006-04-04 | Baxter International Inc. | Apparatus and method for sealing pressure sensor membranes |
DE10227479A1 (de) * | 2002-06-19 | 2004-01-08 | Endress + Hauser Gmbh + Co. Kg | Druckmeßgerät |
DE10308820B4 (de) * | 2003-02-27 | 2006-10-12 | Ifm Electronic Gmbh | Sensor, Meßzelle zur Verwendung in einem Sensor und Verfahren zur Herstellung einer Meßzelle |
US7306370B2 (en) * | 2003-07-31 | 2007-12-11 | Kraft Foods Holdings, Inc. | Shrouded flexible packages |
JP2005274265A (ja) * | 2004-03-24 | 2005-10-06 | Nippon M K S Kk | 流量計 |
JP2006208225A (ja) * | 2005-01-28 | 2006-08-10 | Nippon M K S Kk | 差圧センサー |
DE502006008139D1 (de) * | 2005-07-20 | 2010-12-02 | Kistler Holding Ag | Sensoreinheit |
US7490519B2 (en) * | 2005-09-30 | 2009-02-17 | General Electric Company | System and method for sensing differential pressure |
DE102005059661A1 (de) * | 2005-12-12 | 2007-06-14 | Endress + Hauser Gmbh + Co. Kg | Trennmembran, Druckmessvorrichtung mit Trennmembran, Druckmittler mit Trennmembran und Druckmessvorrichtung mit einem solchen Druckmittler |
DE102006056173A1 (de) * | 2006-11-27 | 2008-06-05 | Endress + Hauser Gmbh + Co. Kg | Trennmembran für hydraulische Druckmittler sowie Druckmittler und Druckmessgeräte mit solchen Trennmembranen |
KR101004400B1 (ko) * | 2008-11-03 | 2010-12-28 | 삼성에스디아이 주식회사 | 이차 전지용 내압 측정 장치 |
CN103003671B (zh) | 2010-05-12 | 2016-05-18 | Ifm电子股份有限公司 | 用于连接测量仪器和包含待测介质的容器的装置 |
JP7192839B2 (ja) * | 2020-10-08 | 2022-12-20 | 横河電機株式会社 | ダイアフラムシール及びそのメンテナンス方法 |
CN117160247A (zh) * | 2022-06-03 | 2023-12-05 | 威卡亚力山大维甘德欧洲两合公司 | 具有层结构的膜装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE264758C (ko) * | ||||
US4109535A (en) * | 1974-11-25 | 1978-08-29 | Ametek, Inc. | Diaphragm seal for pressure sensing instrument |
US4411158A (en) * | 1981-04-14 | 1983-10-25 | Ametek, Inc. | Apparatus for sensing the condition of a fluid |
DE3121799A1 (de) * | 1981-06-02 | 1982-12-23 | Alexander Wiegand Gmbh U. Co Armaturen- U. Manometerfabrik, 8763 Klingenberg | Messmembrane gegen druckmedien-diffusion |
JPS58180927A (ja) * | 1982-04-16 | 1983-10-22 | Toshiba Corp | 半導体感圧素子の保護装置 |
US4539998A (en) * | 1983-04-29 | 1985-09-10 | American Hospital Supply Corporation | Pressure transducer assembly |
JPS59224534A (ja) * | 1983-06-03 | 1984-12-17 | Citizen Watch Co Ltd | 圧力電気変換器 |
US4498070A (en) * | 1983-06-30 | 1985-02-05 | Lirman Irving R | Semi-conductor transducer and method of making the same |
JPS6140558A (ja) * | 1984-07-31 | 1986-02-26 | Japan Storage Battery Co Ltd | ガルバニ電池式酸素センサ− |
JPS61194326A (ja) * | 1985-02-25 | 1986-08-28 | Toshiba Corp | 圧力.差圧伝送器 |
US4837068A (en) * | 1987-01-27 | 1989-06-06 | The Foxboro Company | Compliant diaphragm material |
US4920972A (en) * | 1987-01-27 | 1990-05-01 | Medex, Inc. | Gel-filled blood pressure transducer |
US4798089A (en) * | 1987-03-12 | 1989-01-17 | Rosemount Inc. | Isolator apparatus |
US4823605A (en) * | 1987-03-18 | 1989-04-25 | Siemens Aktiengesellschaft | Semiconductor pressure sensor with casing and method for its manufacture |
DD264758A1 (de) * | 1987-10-26 | 1989-02-08 | Teltov Geraete Regler | Druckaufnahmeeinheit von druckmesseinrichtungen fuer diffundierende medien |
JPH01155227A (ja) * | 1987-12-11 | 1989-06-19 | Aisin Seiki Co Ltd | 多層薄膜絶縁層 |
JPH0769302B2 (ja) * | 1989-12-18 | 1995-07-26 | 日本電池株式会社 | ガルバニ電池式可燃性ガスセンサ |
-
1992
- 1992-04-02 KR KR1019920005504A patent/KR0163443B1/ko not_active IP Right Cessation
- 1992-04-03 DE DE69212734T patent/DE69212734T2/de not_active Expired - Lifetime
- 1992-04-03 AU AU14035/92A patent/AU654000B2/en not_active Ceased
- 1992-04-03 EP EP92105830A patent/EP0521246B1/en not_active Expired - Lifetime
- 1992-04-03 US US07/863,113 patent/US5400655A/en not_active Expired - Lifetime
-
1994
- 1994-08-25 US US08/296,151 patent/US5551299A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5400655A (en) | 1995-03-28 |
US5551299A (en) | 1996-09-03 |
EP0521246A2 (en) | 1993-01-07 |
DE69212734D1 (de) | 1996-09-19 |
EP0521246B1 (en) | 1996-08-14 |
AU1403592A (en) | 1993-01-07 |
DE69212734T2 (de) | 1996-12-05 |
KR0163443B1 (ko) | 1999-03-30 |
EP0521246A3 (en) | 1993-12-01 |
AU654000B2 (en) | 1994-10-20 |
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