KR920017947A - 질화규소붕소 세라믹 및 전구체 화합물, 이들의 제조방법 및 용도 - Google Patents

질화규소붕소 세라믹 및 전구체 화합물, 이들의 제조방법 및 용도 Download PDF

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KR920017947A
KR920017947A KR1019920003519A KR920003519A KR920017947A KR 920017947 A KR920017947 A KR 920017947A KR 1019920003519 A KR1019920003519 A KR 1019920003519A KR 920003519 A KR920003519 A KR 920003519A KR 920017947 A KR920017947 A KR 920017947A
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ceramic
compound
bcl
temperature
boron
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얀센 마르틴
발두스 한스-페터
바그너 올리버
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만프레드 초벌, 요아힘 그렘
바이엘 아크티엔게젤샤프트
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00Boron; Compounds thereof
    • C01B35/06Boron halogen compounds
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/064Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00Boron; Compounds thereof
    • C01B35/08Compounds containing boron and nitrogen, phosphorus, oxygen, sulfur, selenium or tellurium
    • C01B35/14Compounds containing boron and nitrogen, phosphorus, sulfur, selenium or tellurium
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062Borides, Nitrides or Silicides
    • C04B41/5066Silicon nitride

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  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
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Abstract

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Description

질화규소붕소 세라믹 및 전구체 화합물, 이들의 제조방법 및 용도
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (15)

  1. 하기 일반식(Ⅲ)의 트리클로로실릴아미노보란.
    Cl3Si-NH-BCIX (Ⅲ)
    상기 식에서, X는 -Cl 또는 -NH-Si-Cl3이다.
  2. 1, 1, 1-트리클로로-3, 3, 3-트리메틸디실라잔을 -50℃ 내지 50℃의 온도에서 BCl3와 반응시킨 후, 반응 혼합물을 분별화시킴을 특징으로 하여, 제1항의 트리클로로실릴아미노보란을 제조하는 방법.
  3. 제2항에 있어서, 삼염화붕소에 대한 1, 1, 1-트리클로로-3, 3, 3-트리메틸디실라잔의 비를 1 : 1 내지 1 : 10으로 하여 Cl3Si-NH-BCl2를 제조하는 방법.
  4. 제2항에 있어서, 삼염화붕소에 대한 1, 1, 1-트리클로로-3, 3, 3-트리메틸디실라잔의 비를 1.5 : 1 내지 10 : 1로 하여 Cl3Si-NHBClNH-Si-Cl3를 제조하는 방법.
  5. 제1항의 화합물을 -200℃ 내지 1,400℃의 온도에서 고형상, 액상 또는 기체상 암모니아로 가암모니아 분해 반응시키고, 수득된 생성물을 800 내지 1,400℃의 온도에서 N2아르곤, NH3또는 이들의 혼합물 중에서 하소시킴을 특징으로 하여, 질화규소붕소 세라믹 분말을 제조하는 방법.
  6. 세라믹이 필수적으로 Si-N-B-N-결합 및 98중량% 이상의 Si, N 및 B 원소로 이루어진, 제5항에 따른 방법으로 제조된 무정형 질화규소붕소 세라믹 분말.
  7. 제6항에 따른 무정형 질화규소붕소 세라믹 분말을 1,400℃ 내지 2,100℃의 온도에서 결정화시킴으로써 수득할 수 있는, Si3N4및 BN이 분자상 분산 분포된 상태로 존재하는 Si3N4및 BN의 결정성 세라믹 분말 복합체.
  8. 일반식(Ⅳ) 또는 (Ⅴ)의 보론 실라잔 화합물.
    또는
    상기 식에서, Z는 -Cl 또는 -NRR'이고, 단, 하나 이상의 Z는 -NRR'이며, R 및 R'는 동일하거나 상이하며, 각각 수소, C1-C6-알킬, 페닐 또는 비닐이다.
  9. 구조식 Cl3-Si-NH-BCl2또는 Cl3Si-NH-BCl-NH-SiCl3의 보로실라잔 화합물을 80℃ 내지 300℃의 온도하에 용매 중에서 보로실라잔 1몰당 10몰 이상의 오가닐아민과 반응시킴을 특징으로 하여, 제8항의 화합물을 제조하는 방법.
  10. 제8항에 따른 보로실라잔 화합물을 개방 또는 밀폐계중에서 정압 또는 승압하에 -20℃ 내지 300℃의 온도에서 암모니아와 반응시키거나 열중합시킴으로써 수득한 올리고- 또는 폴리보로실라잔.
  11. 각각의 규소 또는 붕소 원자의 제1배위권이, 그룹 R(여기서, R은 H, C1-C6-알킬, 비닐 또는 페닐이다)로 치환된 질소원자들만으로 이루어진, 반복구조단위, ≡Si-NH-B≡를 함유하는 올리고- 또는 폴리보로실라잔 화합물.
  12. 제11항에 있어서, 구조식 Cl3Si-NH-BCl2또는 Cl3Si-NH-BCl-NH-SiCl3의 화합물을 일반식 R2NH 또는 RNH2(여기서, R은 C1-C6-알킬, 비닐 또는 페닐이다)의 오가닐아미노 화합물과 반응시킴으로써 수득한 올리고- 또는 폴리보로실라잔 화합물.
  13. 제11항에 따른 올리고머성 또는 중합성 폴리보로실라잔 화합물을 불활성 대기 또는 NH3-함유 대기하에 800 내지 2,100℃ 온도에서 열분해시킴을 특징으로 하여, 세라믹 물질을 제조하는 방법.
  14. 세라믹이 필수적으로 N-Si-N-B-N 결합 서열로 이루어지고, 98중량% 이상의 Si, N, B 및 C 원소를 함유하는 제13항에 따른 방법으로 제조된 세라믹 물질.
  15. 제11항의 폴리보로실라잔으로부터 제조된 세라믹 섬유, 세라믹 피복물 및 세라믹 성형품.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920003519A 1991-03-06 1992-03-04 질화 붕소 규소 세라믹 전구체 화합물, 이들의 제조방법 및 용도 KR100201187B1 (ko)

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Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241288A1 (de) * 1992-12-08 1994-06-09 Bayer Ag Polymere Borosilazane und Alumosilazane, Verfahren zu ihrer Herstellung sowie deren Verwendung
DE4241287A1 (de) * 1992-12-08 1994-06-09 Bayer Ag Siliciumaluminiumnitridkeramik und Vorläuferverbindungen, Verfahren zu ihrer Herstellung sowie deren Verwendung
DE4314497A1 (de) * 1993-05-03 1994-11-10 Bayer Ag Polymere multinäre Azane, Verfahren zu deren Herstellung und deren Verwendung
EP0659806B1 (de) * 1993-12-23 2000-09-27 Bayer Ag Präkeramische Polyborosilazane, Verfahren zu deren Herstellung sowie daraus erhältliches keramisches Material
DE4403839A1 (de) * 1993-12-23 1995-06-29 Bayer Ag Präkeramische Polyborosilazane, Verfahren zu deren Herstellung sowie daraus erhaltenes keramisches Material
DE4425312A1 (de) * 1994-07-18 1996-01-25 Bayer Ag Sinterwerkstoffe auf Basis von Si¶3¶N¶4¶/BN sowie Verfahren zu ihrer Herstellung
DE19530404A1 (de) * 1995-08-18 1997-02-20 Bayer Ag Neue keramische Fasern im System Silicium-Bor-Stickstoff-Kohlenstoff
US5866705A (en) * 1996-07-15 1999-02-02 Bayer Aktiengesellschaft Polymeric silaborocarboazanes, a process for their preparation and their use
DE19628448A1 (de) * 1996-07-15 1998-01-22 Bayer Ag Polymere Silaborocarboazane, ein Verfahren zu deren Herstellung und deren Verwendung
DE19635848C1 (de) * 1996-09-04 1997-04-24 Daimler Benz Ag Verfahren zur Beschichtung von Substraten
US6093840A (en) * 1997-04-03 2000-07-25 Bayer Aktiengesellschaft Silylalkylboranes, oligo or polyborocarbosilazanes and silicon carbonitride ceramics
DE59805106D1 (de) * 1997-04-03 2002-09-12 Bayer Ag Borhaltige carbosilane, borhaltige oligo- oder polycarbosilazane und siliciumborcarbonitridkeramiken
DE19741460A1 (de) * 1997-09-19 1999-03-25 Max Planck Gesellschaft Synthese borhaltiger Polysilazane durch Hydrosilylierungsreaktionen von Hydridosilylethylboranen mit vinylierten Polysilazanen sowie deren Überführung in keramische Materialien
DE19741459A1 (de) * 1997-09-19 1999-03-25 Max Planck Gesellschaft Synthese borhaltiger Polysilazane durch katalytisch induzierte dehydrierende Kupplungsreaktionen von Hydridosilylethylboranen mit Ammoniak, primären Aminen und polymeren Silazanen sowie deren Überführung in keramische Materialien
DE19954079B4 (de) * 1999-11-10 2006-08-24 Deutsche Institute für Textil- und Faserforschung Stuttgart Institut für Chemiefasern Verfahren zur Herstellung nichtoxidischer, amorpher oder kristalliner Keramikfasern
EP1317462B1 (de) * 2000-09-14 2005-06-01 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Siliciumborkarbonitridkeramiken und vorlaeuferverbindungen, verfahren zu deren herstellung und verwendung
DE10045428A1 (de) 2000-09-14 2002-03-28 Max Planck Gesellschaft Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zu deren Herstellung sowie deren Verwendung
US7198747B2 (en) 2000-09-18 2007-04-03 President And Fellows Of Harvard College Fabrication of ceramic microstructures
US7297649B2 (en) 2001-09-14 2007-11-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Silicoboroncarbonitride ceramics and precursor compounds, method for the production and use thereof
DE102004059942B4 (de) * 2004-12-13 2006-10-26 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Kontinuierliches Verfahren für Silazanspaltungen, insbesondere für die Herstellung von molekularen Einkomponentenvorläufern für nichtoxidische Keramiken
DE102005005383A1 (de) 2005-02-05 2006-08-10 Degussa Ag Verfahren zur kontinuierlichen Herstellung kohlenstoffhaltiger Mono-, Oligo- und/oder Polyborosilazane
DE102005042813A1 (de) * 2005-09-08 2007-03-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren zur kontinuierlichen Herstellung und Isolierung löslicher präkeramischer Oligomere und/oder Polymere
EP1783245B1 (de) * 2005-11-04 2018-01-24 Oerlikon Surface Solutions AG, Pfäffikon Werkzeug oder verschleissteil sowie ein pvd-beschichtungsverfahren zum aufbringen einer oberflächenschicht auf einem werkzeug oder verschleissteil
DE102006051757A1 (de) * 2006-11-02 2008-05-08 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Leuchtstoffe
EP1983075A1 (de) * 2007-04-20 2008-10-22 Siemens Aktiengesellschaft Polymerbasierte Keramikbeschichtungen zum Schutz von Oberflächen vor Fluoridionen bei einem Reinigungsprozess
DE102008018062A1 (de) 2008-04-09 2009-10-15 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Silicium-Bor-Kohlenstoff-Stickstoff-Keramiken und Vorläuferverbindungen, Verfahren zur salzfreien Polymerisation von RnHal3-nSi-X-BRmHal2-m
JP4667520B2 (ja) * 2009-03-31 2011-04-13 三井金属鉱業株式会社 窒化ケイ素基複合セラミックス及びその製造方法
DE102009034090A1 (de) 2009-07-21 2011-01-27 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren zur Darstellung anorganischer Harze auf der Basis wasserstofffreier, polymerer Isocyanate zur Darstellung nitridischer, carbidischer und carbonitridischer Netzwerke und deren Verwendung als Schutzüberzüge
DE102009056371A1 (de) 2009-11-30 2011-07-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Polysilan-Polycarbonsilane mit reduziertem Kohlenstoffgehalt auf Basis von Methylchlorpolysilanen sowie daraus hergestellte Keramiken
CN102408238B (zh) * 2011-07-26 2013-06-05 东华大学 一种硅硼氮陶瓷纤维前驱体原丝的制备方法
WO2013119806A1 (en) * 2012-02-07 2013-08-15 Kansas State University Research Foundation Boron-modified silazanes for synthesis of sibnc ceramics
KR102698026B1 (ko) * 2016-09-28 2024-08-21 삼성전자주식회사 유전막 형성 방법 및 반도체 장치의 제조 방법
KR20220116909A (ko) 2021-02-16 2022-08-23 기술자숲 주식회사 영상기반 구직자 매칭 시스템 및 그 방법
CN113120908B (zh) * 2021-04-13 2023-12-29 中民驰远实业有限公司 一种α-Si3N4/SiC耐火材料复合粉体制备方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1300298B (de) * 1963-05-09 1969-07-31 Bayer Ag Verfahren zur Herstellung polymerer Bor, Stickstoff und Schwefel enthaltender, organischer Verbindungen
US3265737A (en) * 1964-11-03 1966-08-09 Du Pont Boron amines and process for formation thereof
US4007049A (en) * 1968-08-06 1977-02-08 The United States Of America As Represented By The Secretary Of The Air Force Thermal shock resistant ceramic composite
US4304870A (en) * 1980-02-20 1981-12-08 The United States Of America As Represented By The Secretary Of The Navy Ablative-resistant dielectric ceramic articles
US4707556A (en) * 1987-02-13 1987-11-17 Ultrasystems Defense And Space, Inc. Boron nitride polymeric precursors
FR2620454B1 (fr) * 1987-09-11 1989-12-22 Rhone Poulenc Chimie Polymeres a base de bore et d'azote utilisables notamment pour la fabrication de produits et articles ceramiques a base de nitrure de bore, ainsi que leur procede de preparation
FR2637602B1 (fr) * 1988-10-06 1990-12-14 Rhone Poulenc Chimie Procede de synthese de polymeres a base de bore et d'azote precurseurs de nitrure de bore et produits susceptibles d'etre ainsi obtenus
US5030744A (en) * 1989-03-23 1991-07-09 Tonen Corporation Polyborosilazane and process for producing same
FR2645869B1 (fr) * 1989-04-13 1993-01-22 Rhone Poulenc Chimie Utilisation de polymeres a base de bore et d'azote comme precurseurs de ceramiques a base de nitrure de bore et produits ceramiques ainsi obtenus
US5171736A (en) * 1989-10-16 1992-12-15 Massachusetts Institute Of Technology Preceramic organosilicon-boron polymers

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EP0502399A2 (de) 1992-09-09
JPH05124812A (ja) 1993-05-21
KR100201187B1 (ko) 1999-06-15
EP0502399A3 (en) 1993-03-10
JP3130117B2 (ja) 2001-01-31
CA2062218C (en) 2002-01-29
US5312942A (en) 1994-05-17
EP0502399B1 (de) 1996-05-15
CA2062218A1 (en) 1992-09-07
US5233066A (en) 1993-08-03
DE59206265D1 (de) 1996-06-20

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