KR920015754U - 웨이퍼의 에지칩 테스트회로 - Google Patents
웨이퍼의 에지칩 테스트회로Info
- Publication number
- KR920015754U KR920015754U KR2019910000515U KR910000515U KR920015754U KR 920015754 U KR920015754 U KR 920015754U KR 2019910000515 U KR2019910000515 U KR 2019910000515U KR 910000515 U KR910000515 U KR 910000515U KR 920015754 U KR920015754 U KR 920015754U
- Authority
- KR
- South Korea
- Prior art keywords
- test circuit
- wafer edge
- chip test
- edge chip
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019910000515U KR970007077Y1 (ko) | 1991-01-15 | 1991-01-15 | 웨이퍼의 에지칩 테스트회로 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019910000515U KR970007077Y1 (ko) | 1991-01-15 | 1991-01-15 | 웨이퍼의 에지칩 테스트회로 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920015754U true KR920015754U (ko) | 1992-08-17 |
KR970007077Y1 KR970007077Y1 (ko) | 1997-07-15 |
Family
ID=19309802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019910000515U KR970007077Y1 (ko) | 1991-01-15 | 1991-01-15 | 웨이퍼의 에지칩 테스트회로 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970007077Y1 (ko) |
-
1991
- 1991-01-15 KR KR2019910000515U patent/KR970007077Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR970007077Y1 (ko) | 1997-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20041018 Year of fee payment: 8 |
|
LAPS | Lapse due to unpaid annual fee |