KR920013729U - 반도체 웨이퍼용 핀셋 - Google Patents
반도체 웨이퍼용 핀셋Info
- Publication number
- KR920013729U KR920013729U KR2019900019474U KR900019474U KR920013729U KR 920013729 U KR920013729 U KR 920013729U KR 2019900019474 U KR2019900019474 U KR 2019900019474U KR 900019474 U KR900019474 U KR 900019474U KR 920013729 U KR920013729 U KR 920013729U
- Authority
- KR
- South Korea
- Prior art keywords
- tweezers
- semiconductor wafers
- wafers
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019900019474U KR970004976Y1 (ko) | 1990-12-11 | 1990-12-11 | 반도체 웨이퍼용 핀셋 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019900019474U KR970004976Y1 (ko) | 1990-12-11 | 1990-12-11 | 반도체 웨이퍼용 핀셋 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920013729U true KR920013729U (ko) | 1992-07-27 |
KR970004976Y1 KR970004976Y1 (ko) | 1997-05-22 |
Family
ID=19306734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019900019474U KR970004976Y1 (ko) | 1990-12-11 | 1990-12-11 | 반도체 웨이퍼용 핀셋 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970004976Y1 (ko) |
-
1990
- 1990-12-11 KR KR2019900019474U patent/KR970004976Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR970004976Y1 (ko) | 1997-05-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050822 Year of fee payment: 9 |
|
EXPY | Expiration of term |