KR920008467A - 분절체의 표면지형 측정장치 및 방법 - Google Patents

분절체의 표면지형 측정장치 및 방법 Download PDF

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Publication number
KR920008467A
KR920008467A KR1019910018167A KR910018167A KR920008467A KR 920008467 A KR920008467 A KR 920008467A KR 1019910018167 A KR1019910018167 A KR 1019910018167A KR 910018167 A KR910018167 A KR 910018167A KR 920008467 A KR920008467 A KR 920008467A
Authority
KR
South Korea
Prior art keywords
segment
light beam
signal
parallel light
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019910018167A
Other languages
English (en)
Korean (ko)
Inventor
죤 챈들리 폴
Original Assignee
원본미기재
필킹턴 피엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 필킹턴 피엘씨 filed Critical 원본미기재
Publication of KR920008467A publication Critical patent/KR920008467A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1019910018167A 1990-10-17 1991-10-16 분절체의 표면지형 측정장치 및 방법 Withdrawn KR920008467A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9022477A GB2248926B (en) 1990-10-17 1990-10-17 Apparatus for determining the surface topography of an article
GB9022477.5 1990-10-17

Publications (1)

Publication Number Publication Date
KR920008467A true KR920008467A (ko) 1992-05-28

Family

ID=10683825

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910018167A Withdrawn KR920008467A (ko) 1990-10-17 1991-10-16 분절체의 표면지형 측정장치 및 방법

Country Status (6)

Country Link
US (1) US5298974A (enExample)
EP (1) EP0481649A3 (enExample)
JP (1) JPH04331358A (enExample)
KR (1) KR920008467A (enExample)
GB (1) GB2248926B (enExample)
TW (1) TW224158B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH693968A5 (de) * 1993-04-21 2004-05-14 Fraunhofer Ges Forschung Verfahren und Vorrichtung fuer die Topographiepruefung von Oberflaechen.
US6088104A (en) * 1994-12-02 2000-07-11 Veridian Erim International, Inc. Surface characterization apparatus
JP3288933B2 (ja) * 1996-02-28 2002-06-04 旭光学工業株式会社 電子現像型記録媒体の電圧制御装置
US6166808A (en) * 1996-12-24 2000-12-26 U.S. Philips Corporation Optical height meter, surface-inspection device provided with such a height meter, and lithographic apparatus provided with the inspection device
US6618492B1 (en) * 2000-06-26 2003-09-09 Georgia-Pacific Resins, Inc. System and method for measurement of adhesive resin distribution on wood flakes using a scanner
FR2814808B1 (fr) * 2000-10-02 2002-12-20 Essilor Int Procede de lecture optique de la forme d'un profile et application au releve du bord interieur d'un cercle de monture de lunettes.
US7477388B1 (en) 2001-01-09 2009-01-13 J.A. Woollam Co., Inc. Sample masking in ellipsometer and the like systems including detection of substrate backside reflections
DE102004012134B4 (de) * 2004-03-12 2006-06-29 Nanofilm Technologie Gmbh Ellipsometer mit Blendenanordnung
CN101258387A (zh) * 2005-07-05 2008-09-03 马特森技术公司 确定半导体晶片的光学属性的方法与系统
US8058634B2 (en) * 2008-12-16 2011-11-15 Corning Incorporated Method and apparatus for determining sheet position using information from two distinct light beams each at a different position and a different angle
WO2011155447A1 (ja) 2010-06-07 2011-12-15 旭硝子株式会社 形状測定装置、形状測定方法、およびガラス板の製造方法
CN102939513B (zh) 2010-06-15 2016-09-07 旭硝子株式会社 形状测定装置、形状测定方法及玻璃板的制造方法
US9140655B2 (en) * 2012-12-27 2015-09-22 Shenzhen China Star Optoelectronics Technology Co., Ltd. Mother glass inspection device and mother glass inspection method
TWI673491B (zh) * 2017-02-17 2019-10-01 特銓股份有限公司 光箱結構及應用彼光學檢測設備

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3748048A (en) * 1971-11-01 1973-07-24 Gen Motors Corp Method of detecting changes of a specular surface
US3857637A (en) * 1973-01-10 1974-12-31 Ppg Industries Inc Surface distortion analyzer
GB1580196A (en) * 1976-05-27 1980-11-26 Ferranti Ltd Gloss measuring surface inspection systems
US4158507A (en) * 1977-07-27 1979-06-19 Recognition Equipment Incorporated Laser measuring system for inspection
LU82230A1 (fr) * 1980-03-07 1981-10-30 Centre Rech Metallurgique Procede de controle de la qualite des surfaces
IT1155486B (it) * 1982-04-02 1987-01-28 Fiat Ricerche Procedimento e dispositivo per il controllo della rugosita superficiale di un pezzo in particolare di un pezzo a superficie cilindrica che ha subito una lavorazione meccanica
BE893365A (fr) * 1982-05-28 1982-09-16 Centre Rech Metallurgique Procede et dispositif pour ameliorer le controle de la qualite d'une surface
GB2128734B (en) * 1982-10-08 1986-02-19 Nat Res Dev Irradiative probe system
EP0290013B1 (en) * 1987-05-06 1996-03-13 Fuji Photo Film Co., Ltd. Densitometer and its use
JPH0269610A (ja) * 1988-09-05 1990-03-08 Fujitsu Ltd 表面うねり計測装置
US4929846A (en) * 1988-10-05 1990-05-29 Ford Motor Company Surface quality analyzer apparatus and method
US5122672A (en) * 1990-09-07 1992-06-16 Ford Motor Company Surface quality analyzer apparatus and method

Also Published As

Publication number Publication date
EP0481649A2 (en) 1992-04-22
GB2248926B (en) 1994-08-31
GB2248926A (en) 1992-04-22
TW224158B (enExample) 1994-05-21
EP0481649A3 (en) 1993-03-17
JPH04331358A (ja) 1992-11-19
GB9022477D0 (en) 1990-11-28
US5298974A (en) 1994-03-29

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19911016

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid