KR920000590B1 - 박막 제조방법 - Google Patents

박막 제조방법 Download PDF

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Publication number
KR920000590B1
KR920000590B1 KR1019860005952A KR860005952A KR920000590B1 KR 920000590 B1 KR920000590 B1 KR 920000590B1 KR 1019860005952 A KR1019860005952 A KR 1019860005952A KR 860005952 A KR860005952 A KR 860005952A KR 920000590 B1 KR920000590 B1 KR 920000590B1
Authority
KR
South Korea
Prior art keywords
thin film
predetermined
metal
reaction gas
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860005952A
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English (en)
Korean (ko)
Other versions
KR870001326A (ko
Inventor
마사시 가사야
Original Assignee
지이제루 기기 가부시기가이샤
모찌쯔끼 가즈시게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 지이제루 기기 가부시기가이샤, 모찌쯔끼 가즈시게 filed Critical 지이제루 기기 가부시기가이샤
Publication of KR870001326A publication Critical patent/KR870001326A/ko
Application granted granted Critical
Publication of KR920000590B1 publication Critical patent/KR920000590B1/ko
Expired legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/027—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Insulating Bodies (AREA)
KR1019860005952A 1985-07-22 1986-07-22 박막 제조방법 Expired KR920000590B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-160216 1985-07-22
JP60160216A JPS6222314A (ja) 1985-07-22 1985-07-22 薄膜製造方法

Publications (2)

Publication Number Publication Date
KR870001326A KR870001326A (ko) 1987-03-13
KR920000590B1 true KR920000590B1 (ko) 1992-01-16

Family

ID=15710240

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860005952A Expired KR920000590B1 (ko) 1985-07-22 1986-07-22 박막 제조방법

Country Status (4)

Country Link
JP (1) JPS6222314A (https=)
KR (1) KR920000590B1 (https=)
DE (1) DE3624772A1 (https=)
GB (1) GB2178064A (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63303054A (ja) * 1987-06-04 1988-12-09 Toyota Motor Corp 多層膜の形成方法
DE3726731A1 (de) * 1987-08-11 1989-02-23 Hartec Ges Fuer Hartstoffe Und Verfahren zum aufbringen von ueberzuegen auf gegenstaende mittels magnetfeldunterstuetzter kathodenzerstaeubung im vakuum
DE3737404A1 (de) * 1987-11-04 1989-05-18 Bartl Josef Franz Verfahren und einrichtung zur erzeugung haftfester vakuumbeschichtungen
GB9005321D0 (en) * 1990-03-09 1990-05-02 Matthews Allan Modulated structure composites produced by vapour disposition
JPH04368A (ja) * 1990-04-17 1992-01-06 Riken Corp 耐摩耗性被膜及びその製造法
DE69428253T2 (de) 1993-11-12 2002-06-27 Ppg Industries Ohio, Inc. Haltbare Sputterschicht aus Metalloxid
US5672386A (en) * 1994-10-27 1997-09-30 Kabushiki Kaisha Riken Process for forming a coating of chromium and nitrogen having good wear resistance properties
US5587227A (en) * 1994-10-27 1996-12-24 Kabushiki Kaisha Riken Coating of chromium and nitrogen having good wear resistance properties

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3791852A (en) * 1972-06-16 1974-02-12 Univ California High rate deposition of carbides by activated reactive evaporation
JPS5941510B2 (ja) * 1979-07-24 1984-10-08 双葉電子工業株式会社 酸化ベリリウム膜とその形成方法
JPS58221271A (ja) * 1982-06-18 1983-12-22 Citizen Watch Co Ltd イオンプレ−テイング法による被膜形成方法
JPS60234965A (ja) * 1984-05-04 1985-11-21 Diesel Kiki Co Ltd 薄膜製造方法

Also Published As

Publication number Publication date
DE3624772C2 (https=) 1988-07-21
JPH0467724B2 (https=) 1992-10-29
KR870001326A (ko) 1987-03-13
JPS6222314A (ja) 1987-01-30
GB2178064A (en) 1987-02-04
DE3624772A1 (de) 1987-01-22
GB8617904D0 (en) 1986-08-28

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