KR910008807A - 미세패턴의 형성방법 - Google Patents

미세패턴의 형성방법

Info

Publication number
KR910008807A
KR910008807A KR1019900017013A KR900017013A KR910008807A KR 910008807 A KR910008807 A KR 910008807A KR 1019900017013 A KR1019900017013 A KR 1019900017013A KR 900017013 A KR900017013 A KR 900017013A KR 910008807 A KR910008807 A KR 910008807A
Authority
KR
South Korea
Prior art keywords
formation method
fine pattern
fine
pattern
formation
Prior art date
Application number
KR1019900017013A
Other languages
English (en)
Other versions
KR960013504B1 (ko
Inventor
유키마사 요시다
이사히로 하세가와
Original Assignee
가부시키가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 도시바 filed Critical 가부시키가이샤 도시바
Publication of KR910008807A publication Critical patent/KR910008807A/ko
Application granted granted Critical
Publication of KR960013504B1 publication Critical patent/KR960013504B1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70433—Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1019900017013A 1989-10-25 1990-10-24 미세패턴의 형성방법 KR960013504B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1276014A JPH03139821A (ja) 1989-10-25 1989-10-25 微細パターンの形成方法
JP1-276014 1989-10-25

Publications (2)

Publication Number Publication Date
KR910008807A true KR910008807A (ko) 1991-05-31
KR960013504B1 KR960013504B1 (ko) 1996-10-05

Family

ID=17563585

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900017013A KR960013504B1 (ko) 1989-10-25 1990-10-24 미세패턴의 형성방법

Country Status (3)

Country Link
US (1) US5100508A (ko)
JP (1) JPH03139821A (ko)
KR (1) KR960013504B1 (ko)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3027990B2 (ja) * 1991-03-18 2000-04-04 富士通株式会社 半導体装置の製造方法
US5258098A (en) * 1991-06-17 1993-11-02 Cycam, Inc. Method of production of a surface adapted to promote adhesion
IT1251393B (it) * 1991-09-04 1995-05-09 St Microelectronics Srl Procedimento per la realizzazione di strutture metrologiche particolarmente per l'analisi dell'accuratezza di strumenti di misura di allineamento su substrati processati.
US5338397A (en) * 1993-10-01 1994-08-16 Motorola, Inc. Method of forming a semiconductor device
KR0128828B1 (ko) * 1993-12-23 1998-04-07 김주용 반도체 장치의 콘택홀 제조방법
US5533634A (en) * 1994-09-01 1996-07-09 United Microelectronics Corporation Quantum chromeless lithography
US5876883A (en) * 1995-12-27 1999-03-02 Vlsi Technology, Inc. Method forming focus/exposure matrix on a wafer using overlapped exposures
US6087263A (en) * 1998-01-29 2000-07-11 Micron Technology, Inc. Methods of forming integrated circuitry and integrated circuitry structures
US6136517A (en) * 1998-03-06 2000-10-24 Raytheon Company Method for photo composition of large area integrated circuits
US6593064B1 (en) * 1998-06-19 2003-07-15 Creo Inc. High resolution optical stepper
JP2000173897A (ja) * 1998-12-08 2000-06-23 Mitsubishi Electric Corp 露光精度制御方法、装置および記録媒体
US6204187B1 (en) * 1999-01-06 2001-03-20 Infineon Technologies North America, Corp. Contact and deep trench patterning
JP2001147515A (ja) * 1999-09-07 2001-05-29 Ricoh Co Ltd フォトマスク設計方法、フォトマスク設計装置、コンピュータ読取可能な記憶媒体、フォトマスク、フォトレジスト、感光性樹脂、基板、マイクロレンズ及び光学素子
US7018418B2 (en) * 2001-01-25 2006-03-28 Tecomet, Inc. Textured surface having undercut micro recesses in a surface
US6599322B1 (en) 2001-01-25 2003-07-29 Tecomet, Inc. Method for producing undercut micro recesses in a surface, a surgical implant made thereby, and method for fixing an implant to bone
US6620332B2 (en) * 2001-01-25 2003-09-16 Tecomet, Inc. Method for making a mesh-and-plate surgical implant
KR100741110B1 (ko) * 2006-02-15 2007-07-19 삼성에스디아이 주식회사 광 파이버 및 플라즈마 디스플레이 패널의 전극 형성 방법
JP2009135169A (ja) 2007-11-29 2009-06-18 Tokyo Electron Ltd 基板処理システムおよび基板処理方法
JP4906140B2 (ja) * 2010-03-29 2012-03-28 東京エレクトロン株式会社 基板処理システム
JP4906141B2 (ja) * 2010-03-29 2012-03-28 東京エレクトロン株式会社 基板処理システム
CN104122756B (zh) * 2013-04-28 2016-12-28 无锡华润上华科技有限公司 判断光刻版套刻精度一致性的方法和光刻机
US10687956B2 (en) 2014-06-17 2020-06-23 Titan Spine, Inc. Corpectomy implants with roughened bioactive lateral surfaces
KR102367248B1 (ko) * 2015-05-12 2022-02-25 삼성디스플레이 주식회사 터치 스크린 패널
TWI726940B (zh) 2015-11-20 2021-05-11 美商泰坦脊柱股份有限公司 積層製造整形外科植入物之方法
CN109688979A (zh) 2016-08-03 2019-04-26 泰坦脊椎公司 增强骨诱导的植入物表面

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607267A (en) * 1967-10-09 1971-09-21 Motorola Inc Precision alignment of photographic masks
US3615466A (en) * 1968-11-19 1971-10-26 Ibm Process of producing an array of integrated circuits on semiconductor substrate

Also Published As

Publication number Publication date
KR960013504B1 (ko) 1996-10-05
JPH0574209B2 (ko) 1993-10-18
US5100508A (en) 1992-03-31
JPH03139821A (ja) 1991-06-14

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