KR910007105B1 - 웨이퍼보드 반송용치구(治具) - Google Patents

웨이퍼보드 반송용치구(治具) Download PDF

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Publication number
KR910007105B1
KR910007105B1 KR1019880008741A KR880008741A KR910007105B1 KR 910007105 B1 KR910007105 B1 KR 910007105B1 KR 1019880008741 A KR1019880008741 A KR 1019880008741A KR 880008741 A KR880008741 A KR 880008741A KR 910007105 B1 KR910007105 B1 KR 910007105B1
Authority
KR
South Korea
Prior art keywords
jig
wafer board
board
wafer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019880008741A
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English (en)
Korean (ko)
Other versions
KR890017792A (ko
Inventor
토시토 후꾸오까
히로유끼 기무라
Original Assignee
신에쯔 세끼에이 가부시끼가이샤
아이하라 데루히꼬
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 신에쯔 세끼에이 가부시끼가이샤, 아이하라 데루히꼬 filed Critical 신에쯔 세끼에이 가부시끼가이샤
Publication of KR890017792A publication Critical patent/KR890017792A/ko
Application granted granted Critical
Publication of KR910007105B1 publication Critical patent/KR910007105B1/ko
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019880008741A 1988-05-24 1988-07-14 웨이퍼보드 반송용치구(治具) Expired KR910007105B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP63-68286 1988-05-24
JP62-68286(U) 1988-05-24
JP1988068286U JPH01171027U (https=) 1988-05-24 1988-05-24

Publications (2)

Publication Number Publication Date
KR890017792A KR890017792A (ko) 1989-12-18
KR910007105B1 true KR910007105B1 (ko) 1991-09-18

Family

ID=31293612

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880008741A Expired KR910007105B1 (ko) 1988-05-24 1988-07-14 웨이퍼보드 반송용치구(治具)

Country Status (2)

Country Link
JP (1) JPH01171027U (https=)
KR (1) KR910007105B1 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612760B2 (ja) * 1984-07-09 1994-02-16 東芝セラミックス株式会社 石英ガラス製ウェハボ−ト搬送治具

Also Published As

Publication number Publication date
KR890017792A (ko) 1989-12-18
JPH01171027U (https=) 1989-12-04

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