KR910001503B1 - 조명용의 광학계 - Google Patents

조명용의 광학계 Download PDF

Info

Publication number
KR910001503B1
KR910001503B1 KR1019870000633A KR870000633A KR910001503B1 KR 910001503 B1 KR910001503 B1 KR 910001503B1 KR 1019870000633 A KR1019870000633 A KR 1019870000633A KR 870000633 A KR870000633 A KR 870000633A KR 910001503 B1 KR910001503 B1 KR 910001503B1
Authority
KR
South Korea
Prior art keywords
optical system
irradiated surface
incident
light source
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019870000633A
Other languages
English (en)
Korean (ko)
Other versions
KR870007440A (ko
Inventor
노부이찌 나가다
Original Assignee
다이닛 뽕 스쿠링세이소우 가부시키가이샤
이시다 도쿠지로오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이닛 뽕 스쿠링세이소우 가부시키가이샤, 이시다 도쿠지로오 filed Critical 다이닛 뽕 스쿠링세이소우 가부시키가이샤
Publication of KR870007440A publication Critical patent/KR870007440A/ko
Application granted granted Critical
Publication of KR910001503B1 publication Critical patent/KR910001503B1/ko
Expired legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
KR1019870000633A 1986-01-31 1987-01-27 조명용의 광학계 Expired KR910001503B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP21049 1986-01-31
JP61021049A JPS62178207A (ja) 1986-01-31 1986-01-31 照明用の光学系
JP61-21049 1986-01-31

Publications (2)

Publication Number Publication Date
KR870007440A KR870007440A (ko) 1987-08-19
KR910001503B1 true KR910001503B1 (ko) 1991-03-09

Family

ID=12044062

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870000633A Expired KR910001503B1 (ko) 1986-01-31 1987-01-27 조명용의 광학계

Country Status (5)

Country Link
US (1) US4852980A (enExample)
EP (1) EP0231029B1 (enExample)
JP (1) JPS62178207A (enExample)
KR (1) KR910001503B1 (enExample)
DE (1) DE3785938T2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2739712B2 (ja) * 1986-05-14 1998-04-15 キヤノン株式会社 照明光学系，焼付装置及び回路製造方法
EP0299475B1 (en) * 1987-07-17 1994-09-14 Dainippon Screen Mfg. Co., Ltd. Optical system for effecting increased irradiance in peripheral area of object
JPH0734057B2 (ja) * 1987-08-07 1995-04-12 大日本スクリ−ン製造株式会社 照明用レンズ
US4953937A (en) * 1988-05-17 1990-09-04 Olympus Optical Co., Ltd. Illumination optical system
JP2696360B2 (ja) * 1988-10-28 1998-01-14 旭光学工業株式会社 照明光学装置
US5485316A (en) * 1991-10-25 1996-01-16 Olympus Optical Co., Ltd. Illumination optical system for endoscopes
GB9916715D0 (en) 1999-07-19 1999-09-15 Secr Defence Compound lens arrangement for use in lens arrays
US7090357B2 (en) * 2003-12-23 2006-08-15 3M Innovative Properties Company Combined light source for projection display
US7300177B2 (en) * 2004-02-11 2007-11-27 3M Innovative Properties Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture
US7427146B2 (en) * 2004-02-11 2008-09-23 3M Innovative Properties Company Light-collecting illumination system
US7246923B2 (en) * 2004-02-11 2007-07-24 3M Innovative Properties Company Reshaping light source modules and illumination systems using the same
US7390097B2 (en) * 2004-08-23 2008-06-24 3M Innovative Properties Company Multiple channel illumination system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3702395A (en) * 1970-10-09 1972-11-07 Us Navy Condenser system for high intensity light source
DE2803277A1 (de) * 1978-01-26 1979-08-02 Bosch Gmbh Robert Vorrichtung zur belichtung einer auf eine oberflaeche eines substrats aufgebrachten fotolackschicht
JPS5620428A (en) * 1979-07-27 1981-02-26 Olympus Optical Co Lighting optical system for endoscope
JPS5759490Y2 (enExample) * 1979-09-13 1982-12-18
DD146213A1 (de) * 1979-09-20 1981-01-28 Pentacon K Veb Zweiteiliges asphaerisches kondensorsystem
JPS56101116A (en) * 1980-01-17 1981-08-13 Minolta Camera Co Ltd Fisheye lens
JPS5895706A (ja) * 1981-12-02 1983-06-07 Olympus Optical Co Ltd 内視鏡用照明光学系
EP0083394B1 (en) * 1981-12-31 1986-04-09 International Business Machines Corporation A method and apparatus for providing a uniform illumination of an area

Also Published As

Publication number Publication date
EP0231029A3 (en) 1989-07-19
EP0231029B1 (en) 1993-05-26
DE3785938T2 (de) 1994-01-05
KR870007440A (ko) 1987-08-19
JPH0438322B2 (enExample) 1992-06-24
JPS62178207A (ja) 1987-08-05
US4852980A (en) 1989-08-01
EP0231029A2 (en) 1987-08-05
DE3785938D1 (de) 1993-07-01

Similar Documents

Publication Publication Date Title
US4498742A (en) Illumination optical arrangement
US4948238A (en) Optical projection system
USRE38421E1 (en) Exposure apparatus having catadioptric projection optical system
JP3608580B2 (ja) 照明光学装置、露光装置、露光方法、及びフライアイレンズ
KR910001503B1 (ko) 조명용의 광학계
US6366410B1 (en) Reticular objective for microlithography-projection exposure installations
US4247176A (en) Optical system for eye fundus inspection apparatus
KR910008066B1 (ko) 피조사면의 주변부의 조도를 증가시키는 광학계
JPS63165837A (ja) 高さを減少された透過性オーバーヘッド・プロジェクタ
US4322137A (en) Fundus observation and photographing optical system
US2604002A (en) Optical infinity sight
EP0059193B1 (en) An optical system for projection
KR910001504B1 (ko) 평행광 조명용의 광학계
US4435039A (en) Method and apparatus for improving image quality of a reduction/enlargement gradient index lens array
JPS6275609A (ja) マイクロフイルム用投影レンズ
US3097255A (en) Corrector for image-forming optical assemblies
CN113126281B (zh) 宽谱线高分辨率光学系统
JPH10333030A (ja) 精密複写レンズ
JP2720154B2 (ja) 平行光照明用の照明装置
JPH06349699A (ja) 走査型反射屈折投影露光装置
CN219533493U (zh) 一种75mm工业镜头
US20250199276A1 (en) Projection system and illumination device
KR0141164B1 (ko) 프로젝터용 투영광학계
JPH0731306B2 (ja) 照明用レンズ
RU2057355C1 (ru) Фотографический объектив

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

St.27 status event code: A-2-2-Q10-Q13-nap-PG1605

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

FPAY Annual fee payment

Payment date: 19940319

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 19950310

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 19950310

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000