JPH0438322B2 - - Google Patents
Info
- Publication number
- JPH0438322B2 JPH0438322B2 JP61021049A JP2104986A JPH0438322B2 JP H0438322 B2 JPH0438322 B2 JP H0438322B2 JP 61021049 A JP61021049 A JP 61021049A JP 2104986 A JP2104986 A JP 2104986A JP H0438322 B2 JPH0438322 B2 JP H0438322B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- illuminance distribution
- light source
- irradiated surface
- shows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/04—Simple or compound lenses with non-spherical faces with continuous faces that are rotationally symmetrical but deviate from a true sphere, e.g. so called "aspheric" lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61021049A JPS62178207A (ja) | 1986-01-31 | 1986-01-31 | 照明用の光学系 |
| US07/003,957 US4852980A (en) | 1986-01-31 | 1987-01-16 | Optical system |
| KR1019870000633A KR910001503B1 (ko) | 1986-01-31 | 1987-01-27 | 조명용의 광학계 |
| DE87101235T DE3785938T2 (de) | 1986-01-31 | 1987-01-29 | Optisches System. |
| EP87101235A EP0231029B1 (en) | 1986-01-31 | 1987-01-29 | Optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61021049A JPS62178207A (ja) | 1986-01-31 | 1986-01-31 | 照明用の光学系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62178207A JPS62178207A (ja) | 1987-08-05 |
| JPH0438322B2 true JPH0438322B2 (enExample) | 1992-06-24 |
Family
ID=12044062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61021049A Granted JPS62178207A (ja) | 1986-01-31 | 1986-01-31 | 照明用の光学系 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4852980A (enExample) |
| EP (1) | EP0231029B1 (enExample) |
| JP (1) | JPS62178207A (enExample) |
| KR (1) | KR910001503B1 (enExample) |
| DE (1) | DE3785938T2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2739712B2 (ja) * | 1986-05-14 | 1998-04-15 | キヤノン株式会社 | 照明光学系,焼付装置及び回路製造方法 |
| EP0299475B1 (en) * | 1987-07-17 | 1994-09-14 | Dainippon Screen Mfg. Co., Ltd. | Optical system for effecting increased irradiance in peripheral area of object |
| JPH0734057B2 (ja) * | 1987-08-07 | 1995-04-12 | 大日本スクリ−ン製造株式会社 | 照明用レンズ |
| US4953937A (en) * | 1988-05-17 | 1990-09-04 | Olympus Optical Co., Ltd. | Illumination optical system |
| JP2696360B2 (ja) * | 1988-10-28 | 1998-01-14 | 旭光学工業株式会社 | 照明光学装置 |
| US5485316A (en) * | 1991-10-25 | 1996-01-16 | Olympus Optical Co., Ltd. | Illumination optical system for endoscopes |
| GB9916715D0 (en) | 1999-07-19 | 1999-09-15 | Secr Defence | Compound lens arrangement for use in lens arrays |
| US7090357B2 (en) * | 2003-12-23 | 2006-08-15 | 3M Innovative Properties Company | Combined light source for projection display |
| US7300177B2 (en) * | 2004-02-11 | 2007-11-27 | 3M Innovative Properties | Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture |
| US7427146B2 (en) * | 2004-02-11 | 2008-09-23 | 3M Innovative Properties Company | Light-collecting illumination system |
| US7246923B2 (en) * | 2004-02-11 | 2007-07-24 | 3M Innovative Properties Company | Reshaping light source modules and illumination systems using the same |
| US7390097B2 (en) * | 2004-08-23 | 2008-06-24 | 3M Innovative Properties Company | Multiple channel illumination system |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3702395A (en) * | 1970-10-09 | 1972-11-07 | Us Navy | Condenser system for high intensity light source |
| DE2803277A1 (de) * | 1978-01-26 | 1979-08-02 | Bosch Gmbh Robert | Vorrichtung zur belichtung einer auf eine oberflaeche eines substrats aufgebrachten fotolackschicht |
| JPS5620428A (en) * | 1979-07-27 | 1981-02-26 | Olympus Optical Co | Lighting optical system for endoscope |
| JPS5759490Y2 (enExample) * | 1979-09-13 | 1982-12-18 | ||
| DD146213A1 (de) * | 1979-09-20 | 1981-01-28 | Pentacon K Veb | Zweiteiliges asphaerisches kondensorsystem |
| JPS56101116A (en) * | 1980-01-17 | 1981-08-13 | Minolta Camera Co Ltd | Fisheye lens |
| JPS5895706A (ja) * | 1981-12-02 | 1983-06-07 | Olympus Optical Co Ltd | 内視鏡用照明光学系 |
| EP0083394B1 (en) * | 1981-12-31 | 1986-04-09 | International Business Machines Corporation | A method and apparatus for providing a uniform illumination of an area |
-
1986
- 1986-01-31 JP JP61021049A patent/JPS62178207A/ja active Granted
-
1987
- 1987-01-16 US US07/003,957 patent/US4852980A/en not_active Expired - Fee Related
- 1987-01-27 KR KR1019870000633A patent/KR910001503B1/ko not_active Expired
- 1987-01-29 DE DE87101235T patent/DE3785938T2/de not_active Expired - Fee Related
- 1987-01-29 EP EP87101235A patent/EP0231029B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0231029A3 (en) | 1989-07-19 |
| EP0231029B1 (en) | 1993-05-26 |
| KR910001503B1 (ko) | 1991-03-09 |
| DE3785938T2 (de) | 1994-01-05 |
| KR870007440A (ko) | 1987-08-19 |
| JPS62178207A (ja) | 1987-08-05 |
| US4852980A (en) | 1989-08-01 |
| EP0231029A2 (en) | 1987-08-05 |
| DE3785938D1 (de) | 1993-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69424138T2 (de) | Projektionsbelichtungsvorrichtung | |
| US6560031B1 (en) | Optical projection lens system | |
| JP3608580B2 (ja) | 照明光学装置、露光装置、露光方法、及びフライアイレンズ | |
| EP1245984A3 (en) | A projection optical system, a projection exposure apparatus, and a projection exposure method | |
| JPH0438322B2 (enExample) | ||
| JPS60218635A (ja) | 照明装置 | |
| JPH1197344A5 (enExample) | ||
| US20020001141A1 (en) | Optical projection system | |
| US6590715B2 (en) | Optical projection system | |
| KR910008066B1 (ko) | 피조사면의 주변부의 조도를 증가시키는 광학계 | |
| JPS6232414A (ja) | 接眼レンズ | |
| US4380390A (en) | Exposure correcting device | |
| JP2002139696A (ja) | ビーム強度分布変換光学系を備えた照明装置 | |
| KR910001504B1 (ko) | 평행광 조명용의 광학계 | |
| JPS6275609A (ja) | マイクロフイルム用投影レンズ | |
| JP3026648B2 (ja) | 等倍投影レンズ | |
| JPH10333030A (ja) | 精密複写レンズ | |
| JPH09329742A5 (enExample) | ||
| JPH0731306B2 (ja) | 照明用レンズ | |
| JP2720154B2 (ja) | 平行光照明用の照明装置 | |
| JPH0548441B2 (enExample) | ||
| RU2057355C1 (ru) | Фотографический объектив | |
| KR0141164B1 (ko) | 프로젝터용 투영광학계 | |
| CN109633872A (zh) | 小视场紫外物镜光学系统、紫外物镜、紫外探测器 | |
| JPS62150315A (ja) | 照明光学系 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |