KR900007144A - 할로겐가스 레이저의 가스 제어장치 - Google Patents

할로겐가스 레이저의 가스 제어장치

Info

Publication number
KR900007144A
KR900007144A KR1019890013643A KR890013643A KR900007144A KR 900007144 A KR900007144 A KR 900007144A KR 1019890013643 A KR1019890013643 A KR 1019890013643A KR 890013643 A KR890013643 A KR 890013643A KR 900007144 A KR900007144 A KR 900007144A
Authority
KR
South Korea
Prior art keywords
control device
gas
halogen
laser
gas control
Prior art date
Application number
KR1019890013643A
Other languages
English (en)
Other versions
KR930000552B1 (ko
Inventor
다께오 요시오까
다다오 미나가와
Original Assignee
미쯔비시덴끼 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쯔비시덴끼 가부시끼가이샤 filed Critical 미쯔비시덴끼 가부시끼가이샤
Publication of KR900007144A publication Critical patent/KR900007144A/ko
Application granted granted Critical
Publication of KR930000552B1 publication Critical patent/KR930000552B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
KR1019890013643A 1988-10-20 1989-09-22 할로겐가스 레이저의 가스 제어장치 KR930000552B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP88-265470 1988-10-20
JP63265470A JPH02112292A (ja) 1988-10-20 1988-10-20 ハロゲンガスレーザのガス制御装置

Publications (2)

Publication Number Publication Date
KR900007144A true KR900007144A (ko) 1990-05-09
KR930000552B1 KR930000552B1 (ko) 1993-01-25

Family

ID=17417617

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890013643A KR930000552B1 (ko) 1988-10-20 1989-09-22 할로겐가스 레이저의 가스 제어장치

Country Status (6)

Country Link
US (1) US5005181A (ko)
JP (1) JPH02112292A (ko)
KR (1) KR930000552B1 (ko)
CA (1) CA2001035A1 (ko)
DE (1) DE3935084A1 (ko)
GB (1) GB2224879B (ko)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228086A (ja) * 1989-02-28 1990-09-11 Central Glass Co Ltd フッ素系エキシマレーザーの出力安定化制御方法およびその装置
DE4009850C1 (ko) * 1990-03-27 1991-11-07 Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh, 3400 Goettingen, De
US5214658A (en) * 1990-07-27 1993-05-25 Ion Laser Technology Mixed gas ion laser
EP0575324A1 (en) * 1990-07-27 1993-12-29 Ion Laser Technology Mixed gas ion laser
DE4206803C2 (de) * 1992-03-04 1994-02-10 Lambda Physik Gmbh Verfahren zum Nachfüllen von Halogengas in das Gasreservoir eines Excimer-Lasers
GB2269266B (en) * 1992-07-30 1995-11-22 Eev Ltd Metal vapour laser apparatus
DE19613502C2 (de) * 1996-04-04 1998-07-09 Heraeus Noblelight Gmbh Langlebiger Excimerstrahler und Verfahren zu seiner Herstellung
US6282013B1 (en) 1997-04-30 2001-08-28 Lasermed, Inc. System for curing polymeric materials, such as those used in dentistry, and for tailoring the post-cure properties of polymeric materials through the use of light source power modulation
US6008264A (en) 1997-04-30 1999-12-28 Laser Med, Inc. Method for curing polymeric materials, such as those used in dentistry, and for tailoring the post-cure properties of polymeric materials through the use of light source power modulation
WO1999021505A1 (en) 1997-10-29 1999-05-06 Bisco, Inc. Dental composite light curing system
US6116900A (en) * 1997-11-17 2000-09-12 Lumachem, Inc. Binary energizer and peroxide delivery system for dental bleaching
US6200134B1 (en) 1998-01-20 2001-03-13 Kerr Corporation Apparatus and method for curing materials with radiation
US6240117B1 (en) 1998-01-30 2001-05-29 Cymer, Inc. Fluorine control system with fluorine monitor
US5978406A (en) * 1998-01-30 1999-11-02 Cymer, Inc. Fluorine control system for excimer lasers
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US6157661A (en) * 1999-05-12 2000-12-05 Laserphysics, Inc. System for producing a pulsed, varied and modulated laser output
US6609540B1 (en) 1999-06-24 2003-08-26 Showa Denko Kabushiki Kaisha Method and apparatus for supplying fluorine gas
JP2001024265A (ja) * 1999-07-05 2001-01-26 Komatsu Ltd 超狭帯域化フッ素レーザ装置
WO2001055684A2 (en) 2000-01-25 2001-08-02 Lambda Physik Ag Energy monitor for molecular fluorine laser
JP3985416B2 (ja) * 2000-03-02 2007-10-03 松下電器産業株式会社 ガスレーザ発振装置
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
US20080130701A1 (en) * 2006-12-05 2008-06-05 Asml Netherlands B.V. Gas laser apparatus and method
US9072572B2 (en) 2009-04-02 2015-07-07 Kerr Corporation Dental light device
US9066777B2 (en) 2009-04-02 2015-06-30 Kerr Corporation Curing light device
WO2013078456A2 (en) 2011-11-23 2013-05-30 Ipg Microsystems Llc Continuous mass flow gas replenishment for gas lasing devices
US20170133813A1 (en) * 2015-11-09 2017-05-11 Transformation Point Technologies, LLC Lasing gas recycling

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674099A (en) * 1984-05-01 1987-06-16 Turner Robert E Recycling of gases for an excimer laser
US4723254A (en) * 1984-05-01 1988-02-02 Turner Robert E Recycling apparatus for an excimer laser
US4722090A (en) * 1985-03-18 1988-01-26 Mitsubishi Denki Kabushiki Kaisha Excimer laser equipment
CA1298959C (en) * 1985-09-28 1992-04-21 Kohzo Hakuta Method of refining rare gas halide excimer laser gas
IT1229210B (it) * 1988-03-31 1991-07-25 Central Glass Co Ltd Metodo e dispositivo per analizzare gas contenenti fluoro.

Also Published As

Publication number Publication date
CA2001035A1 (en) 1990-04-20
GB2224879A (en) 1990-05-16
KR930000552B1 (ko) 1993-01-25
US5005181A (en) 1991-04-02
GB2224879B (en) 1993-04-14
GB8921491D0 (en) 1989-11-08
JPH02112292A (ja) 1990-04-24
DE3935084A1 (de) 1990-04-26

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