KR900006081B1 - Waste gas extruding apparatus - Google Patents

Waste gas extruding apparatus

Info

Publication number
KR900006081B1
KR900006081B1 KR8501823A KR850001823A KR900006081B1 KR 900006081 B1 KR900006081 B1 KR 900006081B1 KR 8501823 A KR8501823 A KR 8501823A KR 850001823 A KR850001823 A KR 850001823A KR 900006081 B1 KR900006081 B1 KR 900006081B1
Authority
KR
South Korea
Prior art keywords
pump
rotary pump
waste gas
exhaust
exhaust gases
Prior art date
Application number
KR8501823A
Other languages
English (en)
Other versions
KR850006229A (ko
Inventor
Tsudomu Tsukada
Isao Asaishi
Datsnori Goizmi
Gouzi Ikeda
Original Assignee
Nichiden Anerba Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichiden Anerba Co Ltd filed Critical Nichiden Anerba Co Ltd
Publication of KR850006229A publication Critical patent/KR850006229A/ko
Application granted granted Critical
Publication of KR900006081B1 publication Critical patent/KR900006081B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Semiconductors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Treating Waste Gases (AREA)
KR8501823A 1984-03-21 1985-03-20 Waste gas extruding apparatus KR900006081B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59053894A JPS60198394A (ja) 1984-03-21 1984-03-21 真空処理装置の排気装置
JP53894 1984-03-21

Publications (2)

Publication Number Publication Date
KR850006229A KR850006229A (ko) 1985-10-02
KR900006081B1 true KR900006081B1 (en) 1990-08-22

Family

ID=12955430

Family Applications (1)

Application Number Title Priority Date Filing Date
KR8501823A KR900006081B1 (en) 1984-03-21 1985-03-20 Waste gas extruding apparatus

Country Status (4)

Country Link
US (1) US4655800A (ko)
JP (1) JPS60198394A (ko)
KR (1) KR900006081B1 (ko)
GB (1) GB2156236B (ko)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6784033B1 (en) * 1984-02-15 2004-08-31 Semiconductor Energy Laboratory Co., Ltd. Method for the manufacture of an insulated gate field effect semiconductor device
US5780313A (en) 1985-02-14 1998-07-14 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating semiconductor device
JPH0752718B2 (ja) 1984-11-26 1995-06-05 株式会社半導体エネルギー研究所 薄膜形成方法
US6786997B1 (en) 1984-11-26 2004-09-07 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
JP2564663B2 (ja) * 1989-10-30 1996-12-18 株式会社半導体エネルギー研究所 気相エッチング装置
JP2564664B2 (ja) * 1989-10-30 1996-12-18 株式会社半導体エネルギー研究所 気相エッチング方法
JP2580928Y2 (ja) * 1991-08-22 1998-09-17 日本電気株式会社 気相成長装置
TW241375B (ko) * 1993-07-26 1995-02-21 Air Prod & Chem
US5714011A (en) * 1995-02-17 1998-02-03 Air Products And Chemicals Inc. Diluted nitrogen trifluoride thermal cleaning process
DE19601436A1 (de) * 1996-01-17 1997-07-24 Siegfried Dr Ing Straemke Verfahren und Vorrichtung zur Oberflächenbehandlung von Werkstücken
KR0183912B1 (ko) * 1996-08-08 1999-05-01 김광호 다중 반응 챔버에 연결된 펌핑 설비 및 이를 사용하는 방법
US6161575A (en) * 1998-08-28 2000-12-19 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for preventing chamber contamination
CN1257999C (zh) * 2001-01-09 2006-05-31 应用材料有限公司 基片处理过程中用于消除废白粉的装置
DE10136022B4 (de) * 2001-07-24 2006-01-12 Robert Bosch Gmbh Verfahren zur Vermeidung oder Beseitigung von Ausscheidungen im Abgasbereich einer Vakuumanlage
KR100809852B1 (ko) * 2007-05-17 2008-03-04 (주)엘오티베큠 일체형 진공발생장치
CN114929934A (zh) * 2020-01-10 2022-08-19 朗姆研究公司 用于提高粗抽泵的性能的氨气减排

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2333748A (en) * 1941-06-25 1943-11-09 Hercules Powder Co Ltd Treatment of chlorine
US3059396A (en) * 1958-01-07 1962-10-23 Leybold Anlagen Holding A G A device for drawing off gaseous components from a gas-vapour mixture
SU122241A1 (ru) * 1958-07-02 1958-11-30 К.Н. Аверцева Способ защиты вакуумных насосов от паров воды и сол ной кислоты
CH523851A (de) * 1967-12-22 1972-06-15 Buss Ag Verfahren und Einrichtung zur kontinuierlichen Rückgewinnung von Flusssäure aus einer Absorberlösung
US3498025A (en) * 1968-06-25 1970-03-03 Alco Standard Corp Adsorption process and apparatus
IT1006761B (it) * 1974-01-07 1976-10-20 Getters Spa Impianto e procedimento per l otte nimento di alti vuoti
JPS51105997A (en) * 1975-03-14 1976-09-20 Central Glass Co Ltd Rinsanekinogenatsujohatsu niokeru futsukabutsuganjujoki no shorihoho
US4247519A (en) * 1978-12-04 1981-01-27 Kobe Steel, Ltd. Exhaust gas treatment device for injection molding machines

Also Published As

Publication number Publication date
GB8507314D0 (en) 1985-05-01
KR850006229A (ko) 1985-10-02
GB2156236A (en) 1985-10-09
GB2156236B (en) 1987-10-28
JPH0339198B2 (ko) 1991-06-13
JPS60198394A (ja) 1985-10-07
US4655800A (en) 1987-04-07

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Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee