KR900005568B1 - 공업용 로봇의 선회 승강기구 - Google Patents

공업용 로봇의 선회 승강기구 Download PDF

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Publication number
KR900005568B1
KR900005568B1 KR1019830000838A KR830000838A KR900005568B1 KR 900005568 B1 KR900005568 B1 KR 900005568B1 KR 1019830000838 A KR1019830000838 A KR 1019830000838A KR 830000838 A KR830000838 A KR 830000838A KR 900005568 B1 KR900005568 B1 KR 900005568B1
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KR
South Korea
Prior art keywords
shaft
reference numeral
frame
base
rotation
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Expired
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KR1019830000838A
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English (en)
Korean (ko)
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KR840003977A (ko
Inventor
타까시 마에다
마사유끼 사또오
Original Assignee
가부시기가이샤 다이니 세이코오샤
핫도리 이찌로오
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Application filed by 가부시기가이샤 다이니 세이코오샤, 핫도리 이찌로오 filed Critical 가부시기가이샤 다이니 세이코오샤
Publication of KR840003977A publication Critical patent/KR840003977A/ko
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Publication of KR900005568B1 publication Critical patent/KR900005568B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J3/00—Manipulators of leader-follower type, i.e. both controlling unit and controlled unit perform corresponding spatial movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0241—One-dimensional joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/025—Arms extensible telescopic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
KR1019830000838A 1982-03-01 1983-03-02 공업용 로봇의 선회 승강기구 Expired KR900005568B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP57032156A JPS58149189A (ja) 1982-03-01 1982-03-01 工業用ロボツトの旋回昇降機構
JP57-32156 1982-03-01
JP???57-32156 1982-03-01

Publications (2)

Publication Number Publication Date
KR840003977A KR840003977A (ko) 1984-10-06
KR900005568B1 true KR900005568B1 (ko) 1990-07-31

Family

ID=12351054

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019830000838A Expired KR900005568B1 (ko) 1982-03-01 1983-03-02 공업용 로봇의 선회 승강기구

Country Status (6)

Country Link
US (1) US4566847A (enExample)
JP (1) JPS58149189A (enExample)
KR (1) KR900005568B1 (enExample)
AU (1) AU561261B2 (enExample)
CA (1) CA1211774A (enExample)
GB (1) GB2115781B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104226885A (zh) * 2014-08-29 2014-12-24 铜梁县精亿电脑配件有限公司 用于提取带通孔零件的机械手

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186581A (ja) * 1982-04-21 1983-10-31 ファナック株式会社 旋回装置
JPS6234786A (ja) * 1985-08-02 1987-02-14 日本電気ホームエレクトロニクス株式会社 物品把持移送装置
JPS6263078A (ja) * 1985-09-11 1987-03-19 フアナツク株式会社 工業用ロボツトにおけるモジユ−ル方式
JPS6361140U (enExample) * 1986-10-11 1988-04-22
US4735548A (en) * 1987-04-20 1988-04-05 Mecs Corporation Carrier system for clean room
IT1220733B (it) * 1988-03-09 1990-06-21 Jobs Spa Testa operatrice per macchine utensili automatiche atta ad aumentare il numero degli assi di lavoro della macchina
JPH01316184A (ja) * 1988-06-14 1989-12-21 Mitsubishi Electric Corp 産業用ロボット
CH675762A5 (enExample) * 1988-10-03 1990-10-31 Peter Huerlimann
JPH0319781A (ja) * 1989-06-14 1991-01-28 Mitsubishi Electric Corp 産業用ロボット装置
US5178512A (en) * 1991-04-01 1993-01-12 Equipe Technologies Precision robot apparatus
US5733096A (en) * 1995-09-13 1998-03-31 Silicon Valley Group, Inc. Multi-stage telescoping structure
US5789890A (en) * 1996-03-22 1998-08-04 Genmark Automation Robot having multiple degrees of freedom
US6121743A (en) * 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
US6749390B2 (en) 1997-12-15 2004-06-15 Semitool, Inc. Integrated tools with transfer devices for handling microelectronic workpieces
US6749391B2 (en) 1996-07-15 2004-06-15 Semitool, Inc. Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces
US6921467B2 (en) * 1996-07-15 2005-07-26 Semitool, Inc. Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces
US6752584B2 (en) * 1996-07-15 2004-06-22 Semitool, Inc. Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces
TWI223678B (en) * 1998-03-20 2004-11-11 Semitool Inc Process for applying a metal structure to a workpiece, the treated workpiece and a solution for electroplating copper
US6565729B2 (en) * 1998-03-20 2003-05-20 Semitool, Inc. Method for electrochemically depositing metal on a semiconductor workpiece
US6497801B1 (en) * 1998-07-10 2002-12-24 Semitool Inc Electroplating apparatus with segmented anode array
US6489741B1 (en) 1998-08-25 2002-12-03 Genmark Automation, Inc. Robot motion compensation system
FR2788016B1 (fr) * 1999-01-05 2001-03-02 Jean Pierre Solignac Robot manipulateur et installation le comportant
US20030038035A1 (en) * 2001-05-30 2003-02-27 Wilson Gregory J. Methods and systems for controlling current in electrochemical processing of microelectronic workpieces
US7351314B2 (en) 2003-12-05 2008-04-01 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
US7020537B2 (en) * 1999-04-13 2006-03-28 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7438788B2 (en) * 1999-04-13 2008-10-21 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US6916412B2 (en) 1999-04-13 2005-07-12 Semitool, Inc. Adaptable electrochemical processing chamber
US6368475B1 (en) * 2000-03-21 2002-04-09 Semitool, Inc. Apparatus for electrochemically processing a microelectronic workpiece
US7189318B2 (en) * 1999-04-13 2007-03-13 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7585398B2 (en) * 1999-04-13 2009-09-08 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
CN1296524C (zh) * 1999-04-13 2007-01-24 塞米用具公司 对工件进行电化学处理的处理容器、反应器和方法
US7160421B2 (en) * 1999-04-13 2007-01-09 Semitool, Inc. Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
US7351315B2 (en) 2003-12-05 2008-04-01 Semitool, Inc. Chambers, systems, and methods for electrochemically processing microfeature workpieces
US7264698B2 (en) * 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US6623609B2 (en) 1999-07-12 2003-09-23 Semitool, Inc. Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
US20050183959A1 (en) * 2000-04-13 2005-08-25 Wilson Gregory J. Tuning electrodes used in a reactor for electrochemically processing a microelectric workpiece
WO2001090434A2 (en) * 2000-05-24 2001-11-29 Semitool, Inc. Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
WO2002004887A1 (en) * 2000-07-08 2002-01-17 Semitool, Inc. Methods and apparatus for processing microelectronic workpieces using metrology
US7090751B2 (en) 2001-08-31 2006-08-15 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
US6991710B2 (en) * 2002-02-22 2006-01-31 Semitool, Inc. Apparatus for manually and automatically processing microelectronic workpieces
US20030159921A1 (en) * 2002-02-22 2003-08-28 Randy Harris Apparatus with processing stations for manually and automatically processing microelectronic workpieces
US7114903B2 (en) * 2002-07-16 2006-10-03 Semitool, Inc. Apparatuses and method for transferring and/or pre-processing microelectronic workpieces
TWI546170B (zh) 2012-12-24 2016-08-21 台達電子工業股份有限公司 平面關節型機器人驅動機構及其驅動方法
DE102019202898A1 (de) 2019-03-04 2020-09-10 Festo Se & Co. Kg Antriebssystem
DE102019202897A1 (de) * 2019-03-04 2020-09-10 Festo Se & Co. Kg Antriebssystem
CN114905494B (zh) * 2022-07-15 2022-12-30 广东隆崎机器人有限公司 一种末端轴、末端运动组件及scara机械手

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805629A (en) * 1972-06-01 1974-04-23 Usm Corp Devices for linear and rotational movements
US4027767A (en) * 1974-04-01 1977-06-07 William Gluck Indexing machine transfer mechanism
US4139104A (en) * 1975-07-25 1979-02-13 George Mink Material handling apparatus
US4036374A (en) * 1975-11-04 1977-07-19 Amc Industries, Inc. Multi-motion parts handler
JPS5858682B2 (ja) * 1978-04-26 1983-12-27 ファナック株式会社 産業用ロボツトの制御方式
US4187051A (en) * 1978-05-26 1980-02-05 Jerry Kirsch Rotary video article centering, orienting and transfer device for computerized electronic operating systems
US4264266A (en) * 1979-04-20 1981-04-28 Tl Systems Corporation Manipulator apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104226885A (zh) * 2014-08-29 2014-12-24 铜梁县精亿电脑配件有限公司 用于提取带通孔零件的机械手
CN104226885B (zh) * 2014-08-29 2016-03-02 铜梁县精亿电脑配件有限公司 用于提取带通孔零件的机械手

Also Published As

Publication number Publication date
KR840003977A (ko) 1984-10-06
JPS6116595B2 (enExample) 1986-05-01
AU1191583A (en) 1983-09-08
GB2115781A (en) 1983-09-14
US4566847A (en) 1986-01-28
CA1211774A (en) 1986-09-23
AU561261B2 (en) 1987-05-07
GB2115781B (en) 1985-10-16
GB8305524D0 (en) 1983-03-30
JPS58149189A (ja) 1983-09-05

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