KR900005566A - 기판의 회전 건조장치 - Google Patents

기판의 회전 건조장치 Download PDF

Info

Publication number
KR900005566A
KR900005566A KR1019890013807A KR890013807A KR900005566A KR 900005566 A KR900005566 A KR 900005566A KR 1019890013807 A KR1019890013807 A KR 1019890013807A KR 890013807 A KR890013807 A KR 890013807A KR 900005566 A KR900005566 A KR 900005566A
Authority
KR
South Korea
Prior art keywords
support means
substrate
container
substrates
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019890013807A
Other languages
English (en)
Korean (ko)
Inventor
겐지 스기모또
Original Assignee
이시다 아끼라
다이니뽄 스크린 세이조 가부시끼 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이시다 아끼라, 다이니뽄 스크린 세이조 가부시끼 가이샤 filed Critical 이시다 아끼라
Publication of KR900005566A publication Critical patent/KR900005566A/ko
Priority to KR2019980008990U priority Critical patent/KR0138342Y1/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0408—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7626—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1019890013807A 1988-09-27 1989-09-26 기판의 회전 건조장치 Withdrawn KR900005566A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019980008990U KR0138342Y1 (ko) 1988-09-27 1998-05-28 기판의 회전 건조 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1988126606U JPH069501Y2 (ja) 1988-09-27 1988-09-27 基板の回転乾燥装置
JP126606 1988-09-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR2019980008990U Division KR0138342Y1 (ko) 1988-09-27 1998-05-28 기판의 회전 건조 장치

Publications (1)

Publication Number Publication Date
KR900005566A true KR900005566A (ko) 1990-04-14

Family

ID=14939359

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890013807A Withdrawn KR900005566A (ko) 1988-09-27 1989-09-26 기판의 회전 건조장치

Country Status (3)

Country Link
US (1) US4987687A (enExample)
JP (1) JPH069501Y2 (enExample)
KR (1) KR900005566A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3190929B2 (ja) * 1992-10-26 2001-07-23 保 目崎 半導体材料の水切乾燥装置
JP2709568B2 (ja) * 1994-06-30 1998-02-04 日本プレシジョン・サーキッツ株式会社 ダウンフロー型スピンドライヤ
US5849104A (en) * 1996-09-19 1998-12-15 Yieldup International Method and apparatus for cleaning wafers using multiple tanks
US5958146A (en) * 1994-11-14 1999-09-28 Yieldup International Ultra-low particle semiconductor cleaner using heated fluids
US5634978A (en) * 1994-11-14 1997-06-03 Yieldup International Ultra-low particle semiconductor method
US5772784A (en) * 1994-11-14 1998-06-30 Yieldup International Ultra-low particle semiconductor cleaner
US5571337A (en) * 1994-11-14 1996-11-05 Yieldup International Method for cleaning and drying a semiconductor wafer
JP2604561B2 (ja) * 1994-12-26 1997-04-30 山形日本電気株式会社 ウェーハ乾燥装置
US6047717A (en) * 1998-04-29 2000-04-11 Scd Mountain View, Inc. Mandrel device and method for hard disks
US7798764B2 (en) * 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
US7651306B2 (en) * 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
US7699021B2 (en) * 2004-12-22 2010-04-20 Sokudo Co., Ltd. Cluster tool substrate throughput optimization
US20060182535A1 (en) * 2004-12-22 2006-08-17 Mike Rice Cartesian robot design
US7819079B2 (en) * 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7371022B2 (en) * 2004-12-22 2008-05-13 Sokudo Co., Ltd. Developer endpoint detection in a track lithography system
US20060241813A1 (en) * 2005-04-22 2006-10-26 Applied Materials, Inc. Optimized cluster tool transfer process and collision avoidance design
DK201370239A1 (en) 2013-04-30 2014-10-31 Semi Stål As Container drying device
CN119594680B (zh) * 2025-02-10 2025-10-03 江苏亚电科技股份有限公司 一种适用多尺寸晶圆处理的提升式干燥设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629635A (ja) * 1985-07-08 1987-01-17 Oki Electric Ind Co Ltd 半導体ウエハの回転乾燥装置
US4777732A (en) * 1986-06-12 1988-10-18 Oki Electric Industry Co., Ltd. Wafer centrifugal drying apparatus
JPH0745958Y2 (ja) * 1987-05-11 1995-10-18 黒谷 信子 半導体材料の水切乾燥装置

Also Published As

Publication number Publication date
US4987687A (en) 1991-01-29
JPH0247033U (enExample) 1990-03-30
JPH069501Y2 (ja) 1994-03-09

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PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

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St.27 status event code: A-3-3-R10-R17-oth-X000

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E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

PC1205 Withdrawal of application forming a basis of a converted application

St.27 status event code: N-1-6-B10-B12-nap-PC1205

WICV Withdrawal of application forming a basis of a converted application
R18-X000 Changes to party contact information recorded

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R18-X000 Changes to party contact information recorded

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R18-X000 Changes to party contact information recorded

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R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

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