KR890020028U - 웨이퍼 자동 감지장치 - Google Patents
웨이퍼 자동 감지장치Info
- Publication number
- KR890020028U KR890020028U KR2019880004082U KR880004082U KR890020028U KR 890020028 U KR890020028 U KR 890020028U KR 2019880004082 U KR2019880004082 U KR 2019880004082U KR 880004082 U KR880004082 U KR 880004082U KR 890020028 U KR890020028 U KR 890020028U
- Authority
- KR
- South Korea
- Prior art keywords
- sensing device
- automatic sensing
- wafer automatic
- wafer
- sensing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019880004082U KR910006945Y1 (ko) | 1988-03-28 | 1988-03-28 | 웨이퍼 자동 감지장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019880004082U KR910006945Y1 (ko) | 1988-03-28 | 1988-03-28 | 웨이퍼 자동 감지장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR890020028U true KR890020028U (ko) | 1989-10-05 |
| KR910006945Y1 KR910006945Y1 (ko) | 1991-09-17 |
Family
ID=19273556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019880004082U KR910006945Y1 (ko) | 1988-03-28 | 1988-03-28 | 웨이퍼 자동 감지장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR910006945Y1 (ko) |
-
1988
- 1988-03-28 KR KR2019880004082U patent/KR910006945Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR910006945Y1 (ko) | 1991-09-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20010807 Year of fee payment: 11 |
|
| LAPS | Lapse due to unpaid annual fee |