KR890007435A - 쇼트키이(Schottky)게이트 전계효과트랜지스터 - Google Patents

쇼트키이(Schottky)게이트 전계효과트랜지스터

Info

Publication number
KR890007435A
KR890007435A KR1019880013178A KR880013178A KR890007435A KR 890007435 A KR890007435 A KR 890007435A KR 1019880013178 A KR1019880013178 A KR 1019880013178A KR 880013178 A KR880013178 A KR 880013178A KR 890007435 A KR890007435 A KR 890007435A
Authority
KR
South Korea
Prior art keywords
field effect
effect transistor
gate field
schottky gate
schottky
Prior art date
Application number
KR1019880013178A
Other languages
English (en)
Other versions
KR910009037B1 (ko
Inventor
가쯔히꼬 오오무로
히로시 나까무라
Original Assignee
오끼덴끼고오교 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오끼덴끼고오교 가부시끼가이샤 filed Critical 오끼덴끼고오교 가부시끼가이샤
Publication of KR890007435A publication Critical patent/KR890007435A/ko
Application granted granted Critical
Publication of KR910009037B1 publication Critical patent/KR910009037B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H01L29/1029—Channel region of field-effect devices of field-effect transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Junction Field-Effect Transistors (AREA)
KR1019880013178A 1987-10-09 1988-10-08 쇼트키이(Schottky)게이트 전계효과트랜지스터 KR910009037B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-253542 1987-10-09
JP62253542A JPH07118484B2 (ja) 1987-10-09 1987-10-09 ショットキーゲート電界効果トランジスタの製造方法

Publications (2)

Publication Number Publication Date
KR890007435A true KR890007435A (ko) 1989-06-19
KR910009037B1 KR910009037B1 (ko) 1991-10-28

Family

ID=17252817

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880013178A KR910009037B1 (ko) 1987-10-09 1988-10-08 쇼트키이(Schottky)게이트 전계효과트랜지스터

Country Status (5)

Country Link
US (1) US4905061A (ko)
JP (1) JPH07118484B2 (ko)
KR (1) KR910009037B1 (ko)
DE (1) DE3834063A1 (ko)
FR (1) FR2621739B1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229637A (en) * 1988-03-14 1993-07-20 Kabushiki Kaisha Toshiba Semiconductor device
US5153703A (en) * 1988-03-14 1992-10-06 Kabushiki Kaisha Toshiba Semiconductor device
US5084743A (en) * 1990-03-15 1992-01-28 North Carolina State University At Raleigh High current, high voltage breakdown field effect transistor
US5180681A (en) * 1990-03-15 1993-01-19 North Carolina State University Method of making high current, high voltage breakdown field effect transistor
JPH04326608A (ja) * 1991-04-26 1992-11-16 Sumitomo Electric Ind Ltd 発振回路
US6083781A (en) * 1995-12-20 2000-07-04 The United States Of America As Represented By The United States Department Of Energy Method for manufacturing compound semiconductor field-effect transistors with improved DC and high frequency performance
US6258675B1 (en) * 1997-12-18 2001-07-10 Advanced Micro Devices, Inc. High K gate electrode
KR100385856B1 (ko) * 2000-12-27 2003-06-02 한국전자통신연구원 자기정렬형 게이트 트랜지스터의 제조방법
KR100604870B1 (ko) 2004-06-16 2006-07-31 삼성전자주식회사 접합 영역의 어브럽트니스를 개선시킬 수 있는 전계 효과트랜지스터 및 그 제조방법
JP4895890B2 (ja) * 2007-03-29 2012-03-14 三菱電機株式会社 横型高耐圧素子を有する半導体装置の製造方法
JP6311480B2 (ja) 2014-06-24 2018-04-18 富士通株式会社 化合物半導体装置及びその製造方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3700978A (en) * 1971-03-18 1972-10-24 Bell Telephone Labor Inc Field effect transistors and methods for making field effect transistors
US3852120A (en) * 1973-05-29 1974-12-03 Ibm Method for manufacturing ion implanted insulated gate field effect semiconductor transistor devices
SE405526B (sv) * 1973-07-16 1978-12-11 Western Electric Co Transistor och sett for dess tillverkning
JPS528231B2 (ko) * 1973-11-12 1977-03-08
DE2543654C3 (de) * 1975-09-30 1978-06-01 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung dünner leitender Schichten zur Realisierung von im Normalzustand ausgeschalteten Feldeffekttransistoren
US4193079A (en) * 1978-01-30 1980-03-11 Xerox Corporation MESFET with non-uniform doping
FR2445617A1 (fr) * 1978-12-28 1980-07-25 Ibm France Resistance a tension de claquage amelioree obtenue par une double implantation ionique dans un substrat semi-conducteur et son procede de fabrication
US4244097A (en) * 1979-03-15 1981-01-13 Hughes Aircraft Company Schottky-gate field-effect transistor and fabrication process therefor
DE2912535C2 (de) * 1979-03-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung eines MIS-Feldeffekt-Transistors mit einstellbarer, extrem kurzer Kanallänge
US4306916A (en) * 1979-09-20 1981-12-22 American Microsystems, Inc. CMOS P-Well selective implant method
DE3273695D1 (en) * 1981-01-29 1986-11-13 Sumitomo Electric Industries A schottky-barrier gate field effect transistor and a process for the production of the same
FR2513439B1 (fr) * 1981-09-18 1985-09-13 Labo Electronique Physique Procede de traitement de substrat de gaas, par implantation ionique, et substrats ainsi obtenus
US4391651A (en) * 1981-10-15 1983-07-05 The United States Of America As Represented By The Secretary Of The Navy Method of forming a hyperabrupt interface in a GaAs substrate
US4601095A (en) * 1981-10-27 1986-07-22 Sumitomo Electric Industries, Ltd. Process for fabricating a Schottky-barrier gate field effect transistor
FR2525028A1 (fr) * 1982-04-09 1983-10-14 Chauffage Nouvelles Tech Procede de fabrication de transistors a effet de champ, en gaas, par implantations ioniques et transistors ainsi obtenus
EP0112657B1 (en) * 1982-11-29 1990-06-20 Fujitsu Limited Field effect transistor and process for fabricating it
JPS59227165A (ja) * 1983-06-08 1984-12-20 Hitachi Ltd シヨツトキ−・ゲ−ト型電界効果トランジスタ
JPS6034073A (ja) * 1983-08-04 1985-02-21 Matsushita Electric Ind Co Ltd ショットキ−ゲ−ト型電界効果トランジスタの製造方法
JPH0654479A (ja) * 1992-07-31 1994-02-25 Matsushita Electric Ind Co Ltd ステッピングモータ

Also Published As

Publication number Publication date
JPH0196964A (ja) 1989-04-14
FR2621739B1 (fr) 1994-03-04
DE3834063A1 (de) 1989-04-27
FR2621739A1 (fr) 1989-04-14
JPH07118484B2 (ja) 1995-12-18
US4905061A (en) 1990-02-27
KR910009037B1 (ko) 1991-10-28

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