KR20240030154A - Oled 화소 증착을 위한 증착용 마스크 - Google Patents

Oled 화소 증착을 위한 증착용 마스크 Download PDF

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Publication number
KR20240030154A
KR20240030154A KR1020220108821A KR20220108821A KR20240030154A KR 20240030154 A KR20240030154 A KR 20240030154A KR 1020220108821 A KR1020220108821 A KR 1020220108821A KR 20220108821 A KR20220108821 A KR 20220108821A KR 20240030154 A KR20240030154 A KR 20240030154A
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KR
South Korea
Prior art keywords
deposition
protrusion
mask
deposition mask
hole
Prior art date
Application number
KR1020220108821A
Other languages
English (en)
Korean (ko)
Inventor
권학노
Original Assignee
엘지이노텍 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지이노텍 주식회사 filed Critical 엘지이노텍 주식회사
Priority to KR1020220108821A priority Critical patent/KR20240030154A/ko
Priority to PCT/KR2023/012056 priority patent/WO2024049055A1/fr
Publication of KR20240030154A publication Critical patent/KR20240030154A/ko

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00—Subject matter not provided for in other groups of this subclass

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
KR1020220108821A 2022-08-30 2022-08-30 Oled 화소 증착을 위한 증착용 마스크 KR20240030154A (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020220108821A KR20240030154A (ko) 2022-08-30 2022-08-30 Oled 화소 증착을 위한 증착용 마스크
PCT/KR2023/012056 WO2024049055A1 (fr) 2022-08-30 2023-08-14 Masque de dépôt pour dépôt de pixels oled

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020220108821A KR20240030154A (ko) 2022-08-30 2022-08-30 Oled 화소 증착을 위한 증착용 마스크

Publications (1)

Publication Number Publication Date
KR20240030154A true KR20240030154A (ko) 2024-03-07

Family

ID=90098162

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020220108821A KR20240030154A (ko) 2022-08-30 2022-08-30 Oled 화소 증착을 위한 증착용 마스크

Country Status (2)

Country Link
KR (1) KR20240030154A (fr)
WO (1) WO2024049055A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3481232B2 (ja) * 2002-03-05 2003-12-22 三洋電機株式会社 有機エレクトロルミネッセンスパネルの製造方法
US8350468B2 (en) * 2008-06-30 2013-01-08 Samsung Display Co., Ltd. Organic electroluminescence display including a spacer and method for fabricating the same
CN110760793A (zh) * 2015-04-24 2020-02-07 Lg伊诺特有限公司 沉积掩膜
CN105655382B (zh) * 2016-04-08 2019-10-18 京东方科技集团股份有限公司 显示基板制作方法、显示基板和显示装置
JP7232882B2 (ja) * 2017-03-29 2023-03-03 天馬微電子有限公司 Ｏｌｅｄ表示装置の製造方法、マスク及びマスクの設計方法
KR102427524B1 (ko) * 2021-12-21 2022-08-01 주식회사 핌스 Oled 증착용 대면적 마스크 시트 및 마스크 조립체

Also Published As

Publication number Publication date
WO2024049055A1 (fr) 2024-03-07

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