KR20240027705A - 땜납 범프 형성 방법 - Google Patents

땜납 범프 형성 방법 Download PDF

Info

Publication number
KR20240027705A
KR20240027705A KR1020247002224A KR20247002224A KR20240027705A KR 20240027705 A KR20240027705 A KR 20240027705A KR 1020247002224 A KR1020247002224 A KR 1020247002224A KR 20247002224 A KR20247002224 A KR 20247002224A KR 20240027705 A KR20240027705 A KR 20240027705A
Authority
KR
South Korea
Prior art keywords
solder
electrode
solder particles
solder bump
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247002224A
Other languages
English (en)
Korean (ko)
Inventor
도시미츠 모리야
구니히코 아카이
마사유키 미야지
준이치 가케하타
Original Assignee
가부시끼가이샤 레조낙
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 레조낙 filed Critical 가부시끼가이샤 레조낙
Publication of KR20240027705A publication Critical patent/KR20240027705A/ko
Pending legal-status Critical Current

Links

Classifications

    • H01L24/81
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H01L24/11
    • H01L24/742
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/14Structural association of two or more printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/011Apparatus therefor
    • H10W72/0112Apparatus for manufacturing bump connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/012Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/016Manufacture or treatment of strap connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07231Techniques
    • H10W72/07232Compression bonding, e.g. thermocompression bonding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • H01L2224/742
    • H01L2224/81097
    • H01L2224/8119
    • H01L2224/81203

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
KR1020247002224A 2021-06-30 2022-06-29 땜납 범프 형성 방법 Pending KR20240027705A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-108623 2021-06-30
JP2021108623 2021-06-30
PCT/JP2022/026029 WO2023277083A1 (ja) 2021-06-30 2022-06-29 はんだバンプ形成方法

Publications (1)

Publication Number Publication Date
KR20240027705A true KR20240027705A (ko) 2024-03-04

Family

ID=84691847

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247002224A Pending KR20240027705A (ko) 2021-06-30 2022-06-29 땜납 범프 형성 방법

Country Status (5)

Country Link
JP (1) JP7831484B2 (https=)
KR (1) KR20240027705A (https=)
CN (1) CN117581343A (https=)
TW (1) TW202320599A (https=)
WO (1) WO2023277083A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157626A (ja) 2016-02-29 2017-09-07 三菱マテリアル株式会社 はんだバンプの形成方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08139427A (ja) * 1994-11-04 1996-05-31 Mitsubishi Electric Corp 球状電極の形成方法
JPH09246324A (ja) * 1996-03-08 1997-09-19 Hitachi Ltd 電子部品及びそのバンプ形成方法
JP2006216702A (ja) * 2005-02-02 2006-08-17 Tdk Corp 半田ボールの転写方法及び転写装置
JP5889160B2 (ja) * 2012-10-17 2016-03-22 三菱電機株式会社 電子機器の製造方法
JP6428407B2 (ja) * 2015-03-18 2018-11-28 三菱マテリアル株式会社 ハンダ粉末の製造方法及びこの粉末を用いたハンダ用ペーストの製造方法
JP2018206953A (ja) * 2017-06-05 2018-12-27 三菱マテリアル株式会社 はんだバンプ形成方法及びはんだペースト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017157626A (ja) 2016-02-29 2017-09-07 三菱マテリアル株式会社 はんだバンプの形成方法

Also Published As

Publication number Publication date
JPWO2023277083A1 (https=) 2023-01-05
WO2023277083A1 (ja) 2023-01-05
JP7831484B2 (ja) 2026-03-17
CN117581343A (zh) 2024-02-20
TW202320599A (zh) 2023-05-16

Similar Documents

Publication Publication Date Title
US6221691B1 (en) Method and system for attaching semiconductor dice to substrates
US7091619B2 (en) Semiconductor device, semiconductor package, electronic device, electronic apparatus, and manufacturing methods of semiconductor device and electronic device
US6629553B2 (en) Method and system for mounting semiconductor device, semiconductor device separating system, and method for fabricating IC card
US7300865B2 (en) Method for bonding IC chips to substrates incorporating dummy bumps and non-conductive adhesive
KR100203603B1 (ko) 칩 크기의 패키지형 반도체 장치의 제조 방법
US20210066243A1 (en) Micro led display and method for manufacturing the same
US6614111B2 (en) Semiconductor device using bumps, method for fabricating same, and method for forming bumps
KR101087344B1 (ko) 도전성 범프와 그 제조 방법 및 전자 부품 실장 구조체
KR20200019133A (ko) 표시 장치의 제조 방법, 칩 부품의 전사 방법, 및 전사 부재
JP7697292B2 (ja) はんだバンプ形成装置
JPH11510649A (ja) 接着剤接合した電子デバイス用の変形可能な基板アセンブリ
US20090301771A1 (en) Conductive bump, method for forming the same, and electronic component mounting structure using the same
US10679931B2 (en) Ball grid array and land grid array assemblies fabricated using temporary resist
US20100032831A1 (en) Bump structure foe semiconductor device
KR20240027705A (ko) 땜납 범프 형성 방법
KR20240027706A (ko) 땜납 범프 형성용 부재
JP2009188260A (ja) 半導体装置および実装基板
JP4696110B2 (ja) 電子部品の実装方法及び電子部品実装装置
KR20240145903A (ko) 기둥형 접속체의 기판 본딩 방법
US20110115099A1 (en) Flip-chip underfill
Chen et al. High-Speed Precision Handling Technology of Micro-Chip for Fan-Out Wafer Level Packaging (FOWLP) Application
KR20110045163A (ko) 칩 온 필름 패키지 및 그 제조 방법
TW202431448A (zh) 連接結構體
JP2024049259A (ja) 接続構造体
CN119852201A (zh) 封装设备、封装制程及压平装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

D21 Rejection of application intended

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D21-EXM-PE0902 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11 Amendment of application requested

Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-NAP-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000