KR20230117569A - 광전 변환 소자, 광 검출 장치, 광 검출 시스템, 전자 기기 및 이동체 - Google Patents

광전 변환 소자, 광 검출 장치, 광 검출 시스템, 전자 기기 및 이동체 Download PDF

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KR20230117569A
KR20230117569A KR1020237018358A KR20237018358A KR20230117569A KR 20230117569 A KR20230117569 A KR 20230117569A KR 1020237018358 A KR1020237018358 A KR 1020237018358A KR 20237018358 A KR20237018358 A KR 20237018358A KR 20230117569 A KR20230117569 A KR 20230117569A
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South Korea
Prior art keywords
photoelectric conversion
light
optical filter
conversion element
layer
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Pending
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KR1020237018358A
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Korean (ko)
Inventor
겐이치 무라타
마사히로 조에이
신타로 히라타
신고 다카하시
요시유키 오바
다카시 고지마
도미유키 유카와
요시후미 자이젠
도모히로 스기야마
마사키 오카모토
다쿠야 마스나가
유키 가와하라
Original Assignee
소니 세미컨덕터 솔루션즈 가부시키가이샤
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Publication of KR20230117569A publication Critical patent/KR20230117569A/ko
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    • H10K30/60—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation in which radiation controls flow of current through the devices, e.g. photoresistors
    • H10K30/65—Light-sensitive field-effect devices, e.g. phototransistors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
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    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
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    • H10F39/80—Constructional details of image sensors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
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    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
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    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
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    • H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
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    • H10K39/15—Organic photovoltaic [PV] modules; Arrays of single organic PV cells comprising both organic PV cells and inorganic PV cells
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    • H10K39/32—Organic image sensors
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    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/40—Formation of materials, e.g. in the shape of layers or pillars of conductive or resistive materials
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    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
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    • H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
    • H10W20/023—Manufacture or treatment of interconnections within wafers or substrates the interconnections being through-semiconductor vias
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • G02B23/2407—Optical details
    • G—PHYSICS
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    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
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    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Solid State Image Pick-Up Elements (AREA)
KR1020237018358A 2020-12-16 2021-12-14 광전 변환 소자, 광 검출 장치, 광 검출 시스템, 전자 기기 및 이동체 Pending KR20230117569A (ko)

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JPJP-P-2020-208716 2020-12-16
JP2020208716 2020-12-16
PCT/JP2021/046110 WO2022131268A1 (ja) 2020-12-16 2021-12-14 光電変換素子、光検出装置、光検出システム、電子機器および移動体

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KR20230117569A true KR20230117569A (ko) 2023-08-08

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US (1) US12520607B2 (https=)
EP (1) EP4266377A4 (https=)
JP (1) JP7805956B2 (https=)
KR (1) KR20230117569A (https=)
CN (1) CN116686097A (https=)
WO (1) WO2022131268A1 (https=)

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US12604551B2 (en) * 2022-01-14 2026-04-14 Semiconductor Components Industries, Llc Image pixels having IR sensors with reduced exposure to visible light
WO2024048488A1 (ja) * 2022-08-31 2024-03-07 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置
JP2024060822A (ja) * 2022-10-20 2024-05-07 ソニーセミコンダクタソリューションズ株式会社 光検出装置、電子機器、および光学素子
WO2024100993A1 (ja) * 2022-11-10 2024-05-16 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置
WO2024162113A1 (ja) * 2023-02-03 2024-08-08 ソニーセミコンダクタソリューションズ株式会社 光検出装置、光学素子、および電子機器
JPWO2024224980A1 (https=) * 2023-04-28 2024-10-31
KR20260049625A (ko) * 2023-08-15 2026-04-14 소니 세미컨덕터 솔루션즈 가부시키가이샤 광 검출 장치
WO2025115405A1 (ja) * 2023-11-28 2025-06-05 ソニーセミコンダクタソリューションズ株式会社 光検出装置
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WO2025204245A1 (ja) * 2024-03-28 2025-10-02 ソニーセミコンダクタソリューションズ株式会社 光検出装置および電子機器

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EP4266377A1 (en) 2023-10-25
JPWO2022131268A1 (https=) 2022-06-23
WO2022131268A1 (ja) 2022-06-23
EP4266377A4 (en) 2024-05-08
US20240055465A1 (en) 2024-02-15
US12520607B2 (en) 2026-01-06
CN116686097A (zh) 2023-09-01

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