KR20230103573A - 적층형 전자 부품 - Google Patents
적층형 전자 부품 Download PDFInfo
- Publication number
- KR20230103573A KR20230103573A KR1020210194533A KR20210194533A KR20230103573A KR 20230103573 A KR20230103573 A KR 20230103573A KR 1020210194533 A KR1020210194533 A KR 1020210194533A KR 20210194533 A KR20210194533 A KR 20210194533A KR 20230103573 A KR20230103573 A KR 20230103573A
- Authority
- KR
- South Korea
- Prior art keywords
- disposed
- electronic components
- stacked electronic
- electrode
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims abstract description 228
- 238000000034 method Methods 0.000 claims description 117
- 229910052751 metal Inorganic materials 0.000 claims description 51
- 239000002184 metal Substances 0.000 claims description 51
- 239000011521 glass Substances 0.000 claims description 38
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 37
- 239000011810 insulating material Substances 0.000 claims description 23
- 229910052759 nickel Inorganic materials 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 13
- 239000004925 Acrylic resin Substances 0.000 claims description 11
- 229920000178 Acrylic resin Polymers 0.000 claims description 11
- 239000001856 Ethyl cellulose Substances 0.000 claims description 11
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 11
- 239000003822 epoxy resin Substances 0.000 claims description 11
- 229920001249 ethyl cellulose Polymers 0.000 claims description 11
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 11
- 229920000647 polyepoxide Polymers 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 238000013459 approach Methods 0.000 claims 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 238000009413 insulation Methods 0.000 abstract 3
- 239000000463 material Substances 0.000 description 41
- 230000035515 penetration Effects 0.000 description 28
- 230000000694 effects Effects 0.000 description 19
- 239000011135 tin Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- 229910000679 solder Inorganic materials 0.000 description 13
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 230000032798 delamination Effects 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 8
- 229910052763 palladium Inorganic materials 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 238000005728 strengthening Methods 0.000 description 8
- 229910052718 tin Inorganic materials 0.000 description 8
- 239000003985 ceramic capacitor Substances 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 239000010936 titanium Substances 0.000 description 7
- 239000010931 gold Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 239000011575 calcium Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000007598 dipping method Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000010944 silver (metal) Substances 0.000 description 5
- 229910002113 barium titanate Inorganic materials 0.000 description 4
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
- H01G2/02—Mountings
- H01G2/06—Mountings specially adapted for mounting on a printed-circuit support
- H01G2/065—Mountings specially adapted for mounting on a printed-circuit support for surface mounting, e.g. chip capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
- H01G4/2325—Terminals electrically connecting two or more layers of a stacked or rolled capacitor characterised by the material of the terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/224—Housing; Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/228—Terminals
- H01G4/232—Terminals electrically connecting two or more layers of a stacked or rolled capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/13—Energy storage using capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Ceramic Capacitors (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210194533A KR20230103573A (ko) | 2021-12-31 | 2021-12-31 | 적층형 전자 부품 |
| US17/894,273 US12230449B2 (en) | 2021-12-31 | 2022-08-24 | Multilayer electronic component |
| JP2022140336A JP2023099428A (ja) | 2021-12-31 | 2022-09-02 | 積層型電子部品 |
| CN202211422467.6A CN116387030A (zh) | 2021-12-31 | 2022-11-14 | 多层电子组件 |
| KR1020250002610A KR20250009006A (ko) | 2021-12-31 | 2025-01-08 | 적층형 전자 부품 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210194533A KR20230103573A (ko) | 2021-12-31 | 2021-12-31 | 적층형 전자 부품 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020250002610A Division KR20250009006A (ko) | 2021-12-31 | 2025-01-08 | 적층형 전자 부품 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20230103573A true KR20230103573A (ko) | 2023-07-07 |
Family
ID=86971806
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020210194533A Pending KR20230103573A (ko) | 2021-12-31 | 2021-12-31 | 적층형 전자 부품 |
| KR1020250002610A Pending KR20250009006A (ko) | 2021-12-31 | 2025-01-08 | 적층형 전자 부품 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020250002610A Pending KR20250009006A (ko) | 2021-12-31 | 2025-01-08 | 적층형 전자 부품 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12230449B2 (https=) |
| JP (1) | JP2023099428A (https=) |
| KR (2) | KR20230103573A (https=) |
| CN (1) | CN116387030A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20240030194A (ko) * | 2022-08-30 | 2024-03-07 | 삼성전기주식회사 | 적층형 전자 부품 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4073416B2 (ja) * | 2004-03-31 | 2008-04-09 | Ｔｄｋ株式会社 | 積層セラミックコンデンサ |
| JP4428187B2 (ja) * | 2004-10-12 | 2010-03-10 | Ｔｄｋ株式会社 | 誘電体磁器組成物及び電子部品 |
| JP2013026392A (ja) * | 2011-07-20 | 2013-02-04 | Tdk Corp | 電子部品及び電子部品の製造方法 |
| JP2013058558A (ja) * | 2011-09-07 | 2013-03-28 | Tdk Corp | 電子部品 |
| JP5920303B2 (ja) * | 2013-09-25 | 2016-05-18 | 株式会社村田製作所 | 電子部品およびその製造方法 |
| JP5920304B2 (ja) * | 2013-09-25 | 2016-05-18 | 株式会社村田製作所 | 電子部品およびその製造方法 |
| KR101641574B1 (ko) * | 2014-02-03 | 2016-07-22 | 삼성전기주식회사 | 기판 내장용 적층 세라믹 전자부품, 그 제조방법 및 적층 세라믹 전자부품 내장형 인쇄회로기판 |
| KR101703195B1 (ko) | 2014-11-27 | 2017-02-17 | 홍익대학교 산학협력단 | 나노 박막층을 구비하는 적층 세라믹 칩 부품 및 이의 제조 방법 |
| JP6592923B2 (ja) * | 2015-03-20 | 2019-10-23 | 株式会社村田製作所 | 電子部品およびその製造方法 |
| JP6395322B2 (ja) * | 2015-12-01 | 2018-09-26 | 太陽誘電株式会社 | 電子部品及びその製造方法、並びに回路基板 |
| JP6405329B2 (ja) * | 2016-02-26 | 2018-10-17 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
| JP6512139B2 (ja) * | 2016-03-04 | 2019-05-15 | 株式会社村田製作所 | 電子部品の実装構造及びその電子部品の製造方法 |
| JP6421137B2 (ja) | 2016-03-25 | 2018-11-07 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
| JP6976053B2 (ja) | 2016-12-14 | 2021-12-01 | Tdk株式会社 | 積層電子部品 |
| KR102789018B1 (ko) * | 2016-12-22 | 2025-04-01 | 삼성전기주식회사 | 적층형 커패시터 및 그 실장 기판 |
| JP7017893B2 (ja) * | 2017-09-25 | 2022-02-09 | 太陽誘電株式会社 | 積層セラミックコンデンサ |
| US10770232B2 (en) * | 2017-09-29 | 2020-09-08 | Samsung Electro-Mechanics Co., Ltd. | Multilayer electronic component and method of manufacturing the same |
| JP6806035B2 (ja) * | 2017-10-31 | 2021-01-06 | 株式会社村田製作所 | 積層セラミックコンデンサ |
| JP7025695B2 (ja) * | 2018-01-31 | 2022-02-25 | Tdk株式会社 | 誘電体磁器組成物、電子部品および積層セラミックコンデンサ |
| JP7241472B2 (ja) * | 2018-06-01 | 2023-03-17 | 太陽誘電株式会社 | 積層セラミックコンデンサおよびその製造方法 |
| KR102101932B1 (ko) * | 2018-10-02 | 2020-04-20 | 삼성전기주식회사 | 적층 세라믹 전자부품 |
| JP7247740B2 (ja) * | 2019-05-15 | 2023-03-29 | 株式会社村田製作所 | 電子部品の実装構造体及びその製造方法 |
| KR102724901B1 (ko) * | 2019-06-24 | 2024-11-01 | 삼성전기주식회사 | 전자 부품 |
-
2021
- 2021-12-31 KR KR1020210194533A patent/KR20230103573A/ko active Pending
-
2022
- 2022-08-24 US US17/894,273 patent/US12230449B2/en active Active
- 2022-09-02 JP JP2022140336A patent/JP2023099428A/ja active Pending
- 2022-11-14 CN CN202211422467.6A patent/CN116387030A/zh active Pending
-
2025
- 2025-01-08 KR KR1020250002610A patent/KR20250009006A/ko active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20230215654A1 (en) | 2023-07-06 |
| US12230449B2 (en) | 2025-02-18 |
| KR20250009006A (ko) | 2025-01-16 |
| JP2023099428A (ja) | 2023-07-13 |
| CN116387030A (zh) | 2023-07-04 |
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