KR20230028498A - Mask for mounting a ball and its manufacturing method - Google Patents

Abstract

In order to isolate and separate the convex portions with a thin film thickness on the back of the mask, grooves with a thin film thickness are formed between adjacent aperture pattern portions to control strain deformation and sagging of the aperture pattern portions, while improving durability as a mask and positioning accuracy of the aperture pattern portions. Obtain a mask for mounting a ball that realizes A plurality of opening pattern portions through which conductive balls pass are disposed in the longitudinal and lateral directions, and any one of the upper and lower left and right or oblique up and down left and right adjacent to the opening pattern portion, or a part of up and down, left and right, and oblique up and down and left and right is connected between the opening patterns A mask body connected by grooves and a plurality of convex portions that protrude partially and are independent of each other other than the opening pattern portion on the back side of the mask body facing the electrode of the mounted object, and the plurality of separate and independent convex portions are the opening pattern portion And the durability of the mask body thicker than the plate thickness of the connecting groove is increased, and the plurality of independent convex portions are formed in an R shape with a rounded peripheral edge.

Description

Mask for mounting a ball and its manufacturing method

This invention relates to a ball mounting mask for mounting conductive balls and a manufacturing method thereof.

In the ball mounting mask, for the purpose of preventing flux or the like for fixing conductive balls provided on electrodes of an object to be mounted such as a substrate from adhering to the back surface of the mask, the conductive balls pass through the back side of the mask body. A mask for mounting a ball is used in which a concave portion is formed around an opening pattern in which a plurality of openings are formed. As a method of forming this concave portion, a mask is known, for example, in which plating protrusion of the edge portion of the concave portion surrounding the opening pattern is suppressed on the back side of a mask body having a thick plate thickness (see, for example, Patent Document 1). . In addition, as another mask for mounting a ball, a method of forming a plurality of independent cylindrical or elliptical projections on the back side of the mask body is also used instead of a method of forming a concave portion on the back side of a mask body with a thick film thickness ( For example, refer to Patent Document 2).

Patent Document 1: Japanese Unexamined Patent Publication No. 2010-247500 Patent Document 2: Japanese Unexamined Patent Publication No. 2017-5023

In the conventional mask for mounting a ball described in Patent Literature 1, since the concave portion is formed such that the periphery of the aperture pattern is completely surrounded by a thick plated film, tension in the horizontal direction is not applied to the concave portion around the aperture pattern, which is an important aperture pattern portion. There is a problem that warpage or strain deformation occurs, and mounting defects tend to occur. In addition, in this manufacturing method, a step of removing the primary plating electrodeposition layer of the opening pattern portion, which becomes unnecessary for forming the concave portion before performing the secondary plating during the process (a stripping plating removal step), is required. Since an unnecessary primary plating layer must be removed for each of a plurality of aperture patterns, adaptation in mass production may take too much man-hours, and adoption in mass production has been difficult. In addition, in the ball mounting mask described in Patent Document 2, when the mask body is subjected to tension caused by the mesh during attachment to the plate frame, the protrusions independent of separation can displace in the direction in which the force is applied, so that the opening Tension also acts on the pattern portion, so strain deformation is less likely to occur in the opening pattern portion, and there is an advantage that it is maintained in the horizontal direction, but on the other hand, since most of the mask body has a thin structure, durability as a mask and There has been a problem that deformation of the opening pattern portion over time and shift in positional accuracy tend to occur due to tension.

This invention was made in order to solve the above problems, and separates the thick convex portions on the back of the mask so that the tension in the horizontal direction acts on the opening pattern portion without completely surrounding the opening pattern portion with a thick plating film. A mask for mounting a ball which achieves improved durability as a mask and positional accuracy of the aperture pattern portion while controlling strain deformation and sagging of the aperture pattern portion by forming grooves having a thin film thickness between adjacent aperture pattern portions for independence, and the same It is to provide a manufacturing method.

In the mask for mounting a ball mask according to the present invention, a plurality of opening pattern portions formed by plating and having a large number of openings through which shaken conductive balls pass are arranged in the longitudinal and lateral directions, and adjacent to the opening pattern portion are upper and lower It is formed by plating with a mask body connected by a connection groove between the left and right or oblique top and bottom left and right or part of the top and bottom, left and right, and oblique top and bottom and left and right parts, and the conductive ball is not the side into which the conductive ball is inserted. In addition to the opening pattern portion on the back surface of the mask body on the side facing the electrode of the mounted object on which the ball is mounted, a plurality of convex portions that partially protrude and are independent of each other are provided, It is thicker than the plate thickness of the connecting groove to enhance the durability of the mask body, and the plurality of separate and independent convex portions are formed in an R shape with a rounded edge at the periphery.

A plurality of separate and independent convex portions include an inner convex portion formed in a protruding shape formed on the side not in contact with the mounted object by the first plating layer, and a second plating layer different from the first plating layer on the surface of the inner convex portion. is integrally formed so as to cover the circumferential surface of the inner convex portion and the lower surface of the mounted object side, and consists of an external convex portion facing the electrode of the mounted object, and a plurality of separate and independent convex portions, an opening pattern portion and It is thicker than the plate thickness of the connection groove, and the durability of the mask body is improved.

Further, in the manufacturing method of the ball mounting mask according to the present invention, a plurality of opening pattern portions formed by plating and having a plurality of openings through which the shaken conductive balls pass are arranged in the longitudinal and lateral directions, and the opening pattern portion A mask body connected by a connecting groove between the opening pattern parts of any one of the upper and lower left and right adjacent to the upper and lower left and right or the oblique upper and lower left and right, or the upper and lower parts, the left and right, and the oblique upper and lower left and right parts, and a mask body formed by plating, into which a conductive ball is shaken In addition to the opening pattern portion on the back side of the mask body, which is the side opposite to the electrode of the mounted object on which the conductive ball is mounted, a plurality of convex portions that partially protrude and are independent of each other, and are separate and independent, Internal convex portions formed on the side not in contact with the mounted object by the first plating layer and composed of residual plating portions remaining without being peeled off, and a second plating layer different from the first plating layer on the surface of the internal convex portions to form an inner portion of the inner convex portion. It is integrally formed so as to cover the circumferential surface of the convex portion and the lower surface of the mounted object side, and consists of an external convex portion facing the electrode of the mounted object, and the mask body is integral with the external convex portion by the second plating layer. The plurality of independent convex portions formed by overlapping the residual plating portion of the first plating layer and the second plating layer are thicker than the plate thickness of the opening pattern portion and the connecting groove to increase durability of the mask body, and to increase the durability of the mask body. The plurality of convex portions are formed in an R shape with a rounded peripheral edge portion, and a step of forming a resist layer for forming convex portions on the SUS base material; Thereby, the step of forming the primary plating layer, the step of removing the resist layer for forming the convex portion after the formation of the primary plating layer is finished, and the primary residual plating formed by the primary plating layer and remaining without being peeled off The primary plating layer of the opening pattern portion other than the inner convex portion forming portion and the connecting groove forming portion connecting all between the opening pattern portions is removed, A step of leaving an inner convex portion by the primary residual plating layer on the base material, a step of forming a resist layer for forming a plurality of openings between the inner convex portions on the SUS base material, and a mask body on the SUS base material and inside so that the mask body has a specified thickness After the step of integrally forming the opening pattern portion, the connecting groove, and the external convex portion by the secondary plating layer by plating on the convex portion and the formation of the secondary plating layer, a resist layer for forming a plurality of openings A step of removing, and a step of peeling the inner convex portion composed of the residual plating portion of the primary plating layer to be the mask body, the external convex portion composed of the secondary plating layer, the opening pattern portion, and the connection portion from the SUS base material.

In addition, a plurality of opening pattern portions formed by plating and having a plurality of openings through which the shaken-in conductive balls pass are disposed in the longitudinal and lateral directions, and either up and down or left and right adjacent to the opening pattern portion or oblique up and down and left and right A portion of one opening pattern portion is connected by a connecting groove, and between the opening pattern portion and the opening pattern portion other than the inner convex portion forming portion consisting of the primary residual plating portion that is formed by the primary plating layer and remains unpeeled. It is provided with a step of removing the primary plating layer of the forming portion of the connection groove connecting a part of the SUS base material and leaving an internal convex portion by the primary residual plating layer on the SUS base material.

According to this invention, instead of completely surrounding the aperture pattern portion with a thick plated film, convex portions having a thick film thickness on the back side of the mask are applied so that the tension in the horizontal direction from the mesh acts when the aperture pattern portion is attached to the plate frame. By forming grooves with a thin film thickness for separation and independence, it is possible to realize improved durability as a mask and positional accuracy of the aperture pattern portion while controlling strain deformation and sagging of the aperture pattern portion.

1 is a plan view showing a ball mounting mask in Example 1 of the present invention.
Fig. 2 is a cross-sectional view taken along line AA of Fig. 1 showing a ball mounting mask in Example 1 of the present invention.
Fig. 3 is a cross-sectional view taken along line BB in Fig. 1 showing the ball mounting mask in the first embodiment of the present invention.
Fig. 4 is a cross-sectional view taken along line CC in Fig. 1 showing the ball mounting mask in the first embodiment of the present invention.
Fig. 5 is a cross-sectional view showing a manufacturing method of the ball mounting mask in Example 1 of the present invention in the order of steps.
Fig. 6 is a plan view showing a ball mounting mask in Example 2 of the present invention.
Fig. 7 is a cross-sectional view taken along the line DD in Fig. 6 showing the ball mounting mask in the second embodiment of the present invention.
Fig. 8 is a cross-sectional view taken along the line EE of Fig. 6 showing the ball mounting mask in the second embodiment of the present invention.
Fig. 9 is a cross-sectional view taken along the line FF in Fig. 6 showing the ball mounting mask in the second embodiment of the present invention.
Fig. 10 is a plan view showing a ball mounting mask in Example 3 of the present invention.
Fig. 11 is a plan view showing a ball mounting mask in Example 4 of the present invention.
Fig. 12 is a plan view showing a ball mounting mask in Example 5 of the present invention.

Example 1.

The structure of the ball mounting mask in Example 1 of this invention is demonstrated with reference to FIGS. 1-4.

The mask 1 for mounting a ball of this invention, when viewed in plan view, has a rectangular opening pattern portion 3 formed with a large number of openings 2 through which conductive balls (not shown) pass through. It is a mask for mounting balls regularly arranged in the horizontal and vertical directions. In this embodiment, the case where 4 rows of square-shaped opening pattern parts 3 are arranged in the vertical direction and 7 rows in the left and right horizontal direction, a total of 28 is shown. In addition, the adjacent square-shaped opening pattern parts 3 are connected between the opening pattern parts by connecting grooves 4 extending in the vertical direction of the top and bottom and in the horizontal direction of the left and right at the center of each of the four sides of the upper, lower, left and right sides. are losing In the manufacturing method described later, the fact that the rectangular opening pattern portion 3 and the connecting groove 4 are connected in series has an important meaning during the peeling operation of the primary plating layer to be peeled off and removed. . The square-shaped opening pattern portion 3 and the connecting groove 4 are connected and formed by a second plating layer formed by a thin secondary plating layer. Portions other than the rectangular opening pattern portion 3 and connecting grooves 4 of the ball mounting mask 1 are formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and connecting grooves 4. It is a plurality of convex portions 5 that are separate and independent from each other. The plurality of separate and independent convex portions 5 are formed by an inner convex portion composed of a residual plating layer remaining without being peeled off by the first plating layer, and an outer convex portion formed by a second plating layer covering the entire outer periphery of the inner convex portion. It is made of a portion and is formed to protrude toward the surface of the mounted object of the mask body, which is the side facing the electrode of the mounted object. And the strength as the mask 1 for ball mounting is increased by the existence of these separate and independent some convex part 5. In this embodiment, a case is shown in which a plurality of separate and independent convex portions 5 are arranged in 5 rows in the vertical direction and 8 rows in the horizontal direction, for a total of 40. Among the plurality of separate and independent convex portions 5, a total of 18 convex portions 5a, 3 rows in the vertical direction and 6 rows in the horizontal direction, disposed in the central portion have a cross shape when viewed in plan view. In this cross-shaped convex portion 5a, one corner of the quadrangular shape of the four upper, lower, left, and right opening pattern portions 3 is dug into the four upper, lower, left, and right corners. Further, among the plurality of separate and independent convex portions 5, the 18 convex portions 5b arranged on the periphery of the upper, lower, left, and right sides excluding the four corner portions show a "convex" shape when viewed in a plan view. Among these 18 "convex"-shaped convex portions 5b, the six convex portions 5b arranged in the horizontal direction on the upper side are the two opening pattern portions on the upper left and right at the two corners on the left and right sides of the lower part ( A corner of one of the square shapes in 3) is dug in. Among these 18 "convex" shaped convex portions 5b, the six convex portions 5b arranged in the horizontal direction on the lower side are the two opening pattern portions on the lower right and left sides at the two corners on the upper left and right sides ( A corner of one of the square shapes in 3) is dug in. Among these 18 "convex"-shaped convex portions 5b, the three convex portions 5b arranged in the vertical direction on the right side are the two opening pattern portions on the upper and lower sides of the right portion at the two corners on the upper and lower sides of the left portion ( A corner of one of the square shapes in 3) is dug in. Among these 18 "convex"-shaped convex portions 5b, the three convex portions 5b disposed in the vertical direction on the left side are two opening pattern portions on the upper and lower sides of the seat at the two corners on both sides of the upper and lower portions of the seat ( A corner of one of the square shapes in 3) is dug in. Among the plurality of separate and independent convex portions 5, four convex portions 5c disposed at four corner portions exhibit an L-shape when viewed in plan view. Among these L-shaped convex portions 5c, the two convex portions 5c disposed at the two left and right corner portions of the upper portion have the rectangular shape of the upper opening pattern portion 3 at the lower left or lower right corner portions. One of the corners is dug in. Among these L-shaped convex portions 5c, the two convex portions 5c arranged in the two left and right corner portions of the lower portion have the rectangular shape of the lower opening pattern portion 3 at the upper left or upper right corner portions. One of the corners is dug in. Further, as shown in FIGS. 2 and 3 , the front ends of the 40 separate and independent convex portions 5 are formed in an R shape with a rounded peripheral edge. In the cross-sectional view shown in FIG. 2 , for simplification, the number of openings 2 formed in the rectangular opening pattern portion 3 is omitted.

A method of manufacturing a mask for mounting a ball in Example 1 of the present invention is explained with reference to FIG. 5 .

First, a resist is laminated on the SUS base material 6, and necessary exposure and development are performed to partially form a resist layer 7 for forming convex portions on the SUS base material 6 (Fig. 5(a) ) reference). In addition, although a film resist is used in the specification of this invention, the resist used may be a liquid resist. The resist layer 7 for forming the convex portion is, for example, protruding or linear, but may also be a polygonal shape, and is not limited to a protruding or linear shape. Next, by plating the entire surface of the SUS base material 6, the primary plating layer 8 is formed, for example, to a thickness of about 20 to 30 μm (see Fig. 5(b)). At this time, the formed primary plating layer 8 includes the primary residual plating portion 8a serving as a base (base) of the plurality of separate convex portions 5, and 1 peeled off in a later step. It is divided into a kick-off plating part 8b. After the formation of the primary plating layer 8 is completed, the resist layer 7 for forming the projections is removed (see Fig. 5(c)). And, when viewed in plan view in this state, the square-shaped opening pattern portions 3 adjacent to each other are formed by connecting grooves 4 extending in the vertical direction and the horizontal direction from the center of each of the four sides of the upper, lower, left and right sides. Since the rectangular opening pattern portion 3 and the connecting groove 4 are connected in series, the primary plating layer 8 is formed as a base of a plurality of separate convex portions 5. It becomes possible to peel off only the primary discarded plating part 8b to be peeled off other than the primary residual plating part 8a used as (underground) at once (refer FIG.5(d)). Next, all of the primary discarded plating portions 8b other than the primary residual plating portion 8a serving as the base (base) of the plurality of separate convex portions 5 are removed and separated onto the SUS base material 6. Only the primary residual plating portion 8a, which is the base (base) of the plurality of independent convex portions 5, is left to form internal convex portions with a thickness of about 20 to 30 μm made of the first plating layer (Fig. 5(e)). reference). And, although illustration and detailed description are omitted, a well-known resist for forming an opening is laminated at the formation position of the rectangular opening pattern portion 3 on the SUS base material 6, and processing such as pattern exposure and development is performed. , to form a resist for the opening 2 through which the conductive balls pass. Next, on the SUS base material 6 so that the mask body has a specified thickness, for example, about 30 μm, and on the primary residual plating portion 8a serving as the base (base) of the plurality of separate convex portions 5 independent of separation. By plating, the secondary plating layer 9 is formed (see Fig. 5(f)). In this way, the outer convex portion formed of the second plating layer covering the entire outer periphery of the inner convex portion is formed. Finally, the square-shaped opening pattern portion ( 3) and a mask body provided with a plurality of separate and independent convex portions 5 formed so as to have a thicker plate thickness (eg, 50 to 60 μm in thickness) than the connection groove 4 (FIG. 5(g) ) reference). As a result of the above, a mask for mounting a ball equipped with a plurality of mutually separated and independent convex portions 5 formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and the connecting groove 4 of this invention is completed. . A ball loading area is a rectangular opening pattern portion 3 having a plurality of openings 2a through which conductive balls are inserted. Further, the edge portions of the plurality of separate convex portions 5 of the completed mask 1 for ball mounting are not angular, but have an R shape with a round shape.

The connecting groove 4 made of the thickness of the secondary plating layer 9 (for example, about 30 μm) does not have to connect all of the opening pattern portions 3, but the opening pattern portion 3 is formed from a mesh. Considering the effect of maximizing the tension and the number of man-hours for removing the plating that becomes unnecessary after the first plating, at least the vertical (longitudinal) or left and right (lateral) or oblique vertical and horizontal directions are all adjacent. It is preferable to connect the opening pattern parts by grooving.

By coating the non-pattern area on the outer periphery of the pattern area of the mask body with a thin plate thickness portion formed only by the thickness of the plating layer, the effect of applying more tension in the horizontal direction within the pattern area where the opening is formed is recognized. , It is also possible to intentionally form a thin film thickness portion formed only of the non-pattern area secondary plating layer on the mask body.

In order to prevent the adhesion of flux, there are masks for mounting conductive balls in which a plurality of cylindrical or elliptical projections are formed on the surface side (rear side) of the mounted object of the mask body. Data processing work to be placed in is required. Since patterns of the conductive ball mounting mask exist in a variety of sizes, each of which is different, the work of arranging a plurality of separate and independent protrusions on the mask data, as in Patent Literature 2, is quite complicated. On the other hand, the mask for mounting conductive balls of this invention has the advantage that the work time required for data processing can be greatly reduced because the data for forming the convex portions is extremely simple and simplified, and also in terms of data creation. The effect of aiming at the improvement of work efficiency can be expected.

Example 2.

The structure of the ball mounting mask in Example 2 of this invention is demonstrated with reference to FIGS. 6-9.

The ball mounting mask 1 of the present invention, when viewed in a plan view, has a rectangular opening pattern portion 3 formed with a plurality of openings 2 through which conductive balls (not shown) pass in the longitudinal and lateral directions. , and in this embodiment, a case where a total of 48 square-shaped opening pattern portions 3 are arranged in 8 rows in the vertical direction and 6 rows in the horizontal direction on the left and right are arranged. indicates The rectangular opening pattern portions 3 adjacent to each other in the left and right horizontal directions are connected by connecting grooves 4 extending in the left and right horizontal directions from the central portions of the two left and right sides. In the same manufacturing method as in Example 1 in which the rectangular opening pattern portions 3 and the connecting grooves 4 adjacent to each other in the left and right horizontal directions are connected in series to each other, the primary plating to be peeled off (abandon plating) ), it has an important meaning during the peeling operation. The square-shaped opening pattern portion 3 and the connecting groove 4 are connected and formed by a secondary plating layer made of a thin plate. Portions other than the rectangular opening pattern portion 3 and connecting grooves 4 of the ball mounting mask 1 are formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and connecting grooves 4. It is a plurality (nine) of convex portions 5 that are separated and independent from each other. Due to the presence of the plurality of separate and independent convex portions 5, the strength of the mask 1 for mounting the ball is increased. In this embodiment, the case where the convex part 5 extending in the horizontal direction independently of separation is arranged in 9 rows at predetermined intervals in the vertical direction is shown. Among the plurality of separate and independent convex portions 5, the seven convex portions 5d extending in the horizontal direction disposed at the central portion are wider than the two convex portions 5e disposed in the horizontal direction disposed at the upper end and the lower end. This is a narrow structure. Among the plurality of separate and independent convex portions 5, the seven convex portions 5d extending in the horizontal direction disposed in the central portion are, when viewed in a plan view, the upper and lower sides of the rectangular opening pattern portion 3 and the connection groove ( 4), respectively, and the upper and lower sides of the central portion are saw-toothed. In addition, among the plurality of separate and independent convex portions 5, the two wide convex portions 5e extending in the horizontal direction disposed at the upper end and the lower end are, when viewed in a plan view, the wide convex portion at the upper end ( 5e), the central lower side and the lower central upper side of the wide convex portion 5e at the lower end are in contact with the square-shaped opening pattern portion 3 and the connecting groove 4, respectively, and the lower or upper central portion has a sawtooth shape. . Further, as shown in FIGS. 7 and 8 , the distal end of the nine separate convex portions 5 is formed in an R shape with a rounded peripheral edge.

In the manufacturing method of the mask for mounting a ball in the above embodiment 1, the rectangular opening pattern portions 3 adjacent to each other and the connecting grooves extending in the vertical direction and the horizontal direction from the center of each of the oblique sides of the upper, lower, left and right sides ( 4) are connected to each other, and only the primary discard plating portion 8b to be peeled off other than the primary residual plating portion 8a, which is the base (base) of the plurality of separate convex portions 5, is stripped at once. explained. In the manufacturing method of the ball mounting mask in the second embodiment of the present invention, the rectangular opening pattern portions 3 adjacent to each other in the left and right horizontal directions extend in the left and right horizontal directions from the center of each of the two left and right sides. Aperture pattern portions 3 that are connected only by the connecting grooves 4 and are adjacent to each other in the vertical direction, etc., are not connected by the connecting grooves 4, but are made of a secondary plating layer having a thin plate thickness equal to that of the connecting grooves. An area formed only by the mask body is provided on the outer periphery of the pattern area of the mask body, and by connecting the outer periphery of the pattern area and the opening pattern portion with a connecting groove, as in Example 1, a plurality of separate and independent convex ridges even when connected in only one direction. It becomes possible to strip all of the primary discard plating portions 8b to be peeled off and removed at once, other than the primary residual plating portion 8a serving as the base (base) of the portion 5. Also, as in Example 2, even when the opening pattern portions adjacent to each other are connected only in one vertical direction, for example, a thin area of only the secondary plating layer is formed on the outer periphery of the pattern area of the mask body. If provided and the outer periphery of the pattern area and the opening pattern portion are connected by a connecting groove, the stripped plating portion 8b can be gathered and peeled off at once.

Example 3.

The structure of the ball mounting mask in the third embodiment of the present invention will be described with reference to FIG. 10 .

The ball mounting mask 1 of this invention has a structure substantially the same as that of the second embodiment, and when viewed in a plan view, a rectangular opening pattern in which a large number of openings 2 through which conductive balls (not shown) pass are formed. This is a ball mounting mask in which portions 3 are arranged regularly in the longitudinal and lateral directions. In this embodiment, the square-shaped opening pattern portions 3 are formed in four rows in the vertical direction and seven in the horizontal direction. It shows the case where a total of 28 columns are arranged. The rectangular opening pattern portions 3 adjacent to each other in the left and right horizontal directions are connected by connecting grooves 4 extending in the left and right horizontal directions from the central portions of the two left and right sides. The square-shaped opening pattern portion 3 and the connecting groove 4 are connected and formed by a secondary plating layer made of a thin plate. Portions other than the rectangular opening pattern portion 3 and connecting grooves 4 of the ball mounting mask 1 are formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and connecting grooves 4. It is a plurality (five) of convex portions 5 that are separate and independent from each other. Due to the presence of the plurality of separate and independent convex portions 5, the strength of the mask 1 for mounting the ball is increased. In this embodiment, a case is shown in which the convex portions 5 extending in the horizontal direction independently of each other are arranged in five rows at predetermined intervals in the vertical direction. Among the plurality of separate and independent convex portions 5, the three convex portions 5d extending in the horizontal direction disposed at the central portion are slightly larger than the two convex portions 5e disposed in the horizontal direction disposed at the upper end and the lower end. It is a wide structure. Among the plurality of separate and independent convex portions 5, the three convex portions 5d extending in the horizontal direction disposed in the central portion are, when viewed in a plan view, the upper and lower sides of the rectangular opening pattern portion 3 and the connecting groove ( 4), respectively, and the upper and lower sides of the center are saw-toothed. In addition, among the plurality of separate and independent convex portions 5, the two slightly narrow convex portions 5e extending in the horizontal direction disposed at the upper end and the lower end are, when viewed in a plan view, the convex part 5e at the upper end. The lower side of the central portion and the upper side of the central portion of the convex portion 5e at the lower end are in contact with the rectangular opening pattern portion 3 and the connecting groove 4, respectively, and the lower side or upper side of the central portion is serrated. Further, the tips of the five separate convex portions 5 are formed in an R shape with a rounded peripheral edge.

In this Example 3, the film thickness formed only by the secondary plating layer in the portion (non-patterned area around the outer periphery of the pattern area of the mask body) located on the outer periphery of the plurality (five) of the convex portions 5 that are separated from each other and independent of each other. is intentionally formed as a thin part.

Example 4.

The structure of the ball mounting mask in the fourth embodiment of the present invention will be described with reference to FIG. 11 .

The ball mounting mask 1 of the present invention, when viewed in a plan view, has a rectangular opening pattern portion 3 formed with a plurality of openings 2 through which conductive balls (not shown) pass in the longitudinal and lateral directions. This is a mask for mounting balls arranged regularly, and in this embodiment, a case where a total of 24 square-shaped opening pattern portions 3 are arranged in 4 rows in the vertical direction and 6 rows in the horizontal direction on the left and right. indicates Square-shaped opening pattern portions 3 adjacent to each other in the vertical direction are connected at two locations on both left and right ends of the opening pattern portion 3 by connecting grooves 4 extending in the vertical direction. The square-shaped opening pattern portion 3 and the connecting groove 4 are connected and formed by a secondary plating layer made of a thin plate. Portions other than the rectangular opening pattern portion 3 and connecting grooves 4 of the ball mounting mask 1 are formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and connecting grooves 4. It is a plurality (37 pieces) of convex portions 5 that are separate and independent from each other. Due to the presence of the plurality of separate and independent convex portions 5, the strength of the mask 1 for mounting the ball is increased. In this embodiment, among the plurality of separate and independent convex portions 5, seven vertically long convex portions 5f continuously extending in the vertical direction are provided at predetermined intervals in the left and right horizontal directions (seven rows). Among the plurality of convex portions 5 that are separated and independent of each other, between the vertically long convex portions 5f, and with the opening pattern portion 3 disposed in the middle portion, five intermittently arranged in the vertical direction up and down. The case where 6 rows of rectangular convex portions 5g are arranged is shown. Among the plurality of separate and independent convex portions 5, the seven vertically long convex portions 5f extending in the vertical direction are, when viewed in a plan view, the inner four left and right ends of the rectangular opening pattern portion ( 3) and the connection groove 4, respectively, among the vertically long convex portions 5f, two disposed at both left and right ends are connected to the rectangular opening pattern portion 3 at the right or left end They are in contact with the grooves 4, respectively. In addition, among the five rectangular convex portions 5g intermittently disposed in the vertical direction between the vertically long convex portions 5f and with the opening pattern portion 3 disposed in the middle portion, the central portion 3 When viewed in a plan view, the right and left ends and both upper and lower ends are in contact with the rectangular opening pattern portion 3 and the connecting groove 4, respectively. In addition, among the five rectangular convex portions 5g intermittently disposed in the vertical direction between the vertically long convex portions 5f and with the opening pattern portion 3 disposed in the middle portion, the upper and lower ends When viewed in a plan view, the two end portions and the lower end or upper end are in contact with the rectangular opening pattern part 3 and the connecting groove 4, respectively. Further, the tips of the 37 separate and independent convex portions 5 are formed in an R shape with a rounded peripheral edge.

Example 5.

The structure of the ball mounting mask in the fifth embodiment of the present invention will be described with reference to FIG. 12 .

The ball mounting mask 1 of the present invention, when viewed in a plan view, has a rectangular opening pattern portion 3 formed with a plurality of openings 2 through which conductive balls (not shown) pass in the longitudinal and lateral directions. This is a mask for mounting balls arranged regularly, and in this embodiment, a case where a total of 28 square-shaped opening pattern portions 3 are arranged in 4 rows in the vertical direction and 7 rows in the left and right horizontal direction. indicates And, among the square-shaped opening pattern parts 3 adjacent to each other, each of the four square-shaped opening pattern parts 3 disposed at the left end or the right end extends in the vertical direction from the center of each of the two sides of the upper and lower sides All between the vertically adjacent opening pattern portions 3 are connected by the connecting groove 4 . In addition, among the square-shaped opening pattern parts 3 adjacent to each other, the 20 square-shaped opening pattern parts 3 arranged in 5 vertical rows of the central part are perpendicular to each other at the center of each of the two sides of the upper and lower sides and the center of the lower side or the center of the upper side. All between the vertically adjacent opening pattern portions 3 are connected by connecting grooves 4 extending in the direction. Among the square-shaped opening pattern parts 3 adjacent to each other, the seven opening pattern parts 3 disposed at the uppermost end and the seven opening pattern parts 3 disposed at the lowermost end are horizontally on the left and right. Connection is made to the central side of the opening pattern part 3 by the extending connecting groove 4 . In the manufacturing method described later, the fact that the rectangular opening pattern portion 3 and the connecting groove 4 are connected in series has an important meaning in the peeling operation of the primary plating layer (surface plating) to be peeled off and removed. . The square-shaped opening pattern portion 3 and the connecting groove 4 are connected and formed by a second plating layer formed by a thin secondary plating layer. Portions other than the rectangular opening pattern portion 3 and connecting grooves 4 of the ball mounting mask 1 are formed to have a thicker plate thickness than the rectangular opening pattern portion 3 and connecting grooves 4. It is a plurality of convex portions 5 that are separate and independent from each other. The plurality of separate and independent convex portions 5 are formed by an inner convex portion composed of a residual plating layer remaining without being peeled off by the first plating layer, and an outer convex portion formed by a second plating layer covering the entire outer periphery of the inner convex portion. It is made of a portion and is formed to protrude from the surface side of the mounted object of the mask body, which is the side facing the electrode of the mounted object. And the strength as the mask 1 for ball mounting is increased by the existence of these separate and independent some convex part 5. In this embodiment, a case is shown in which a plurality of separate and independent convex portions 5 are arranged at both upper and lower ends, two at both left and right ends, and six at the center, for a total of ten. Among the plurality of separate and independent convex portions 5, the two convex portions 5h in the vertical direction disposed at both left and right ends show a sawtooth shape on the opposite sides when viewed in a plan view. Among the plurality of separate and independent convex portions 5, the two convex portions 5h in the horizontal direction arranged at both upper and lower ends show a sawtooth shape on the opposite side when viewed in a plan view. In addition, among the plurality of separate and independent convex portions 5, six rows of six convex portions 5i arranged in the central portion have a three-layer structure when viewed in plan view. In addition, the front end of the 10 separate and independent convex portions 5 is formed in an R shape with a rounded peripheral edge.

In addition, in the above-described embodiment, as a method of forming the inner convex portion that becomes the basis (base) of the plurality of separate convex portions, the remaining plating portion that protrudes and remains on the SUS base material other than the discard plating portion removed after the first plating is formed. Although it is applied to the internal convex portion, the method for forming the internal convex portion is not only a method of eliminating stripping plating. For example, there is a method in which portions other than the internal convex portions are covered with a resist film or the like, and only the internal convex portions are plated and deposited as primary plating. In addition, after forming a plating layer with a predetermined thickness by primary plating, the portion to be left as the inner convex portion is coated with a resist film or the like, and the other portion to be removed is etched with ferric chloride or the like to etch the inner convex portion. It is also possible to build wealth. However, considering the accuracy of the plate thickness of the mask body, the inner convex portion is formed by removing the discard plating by primary plating as in the embodiment, and the outer circumference of the inner convex portion is covered with a second plating layer by secondary plating. A method of integrally forming a plurality of separable and independent convex portions is preferable in view of the accuracy of the sheet thickness.

1: Mask for ball mounting
2: opening
3: Aperture pattern part (cell)
4: connection groove
5: a plurality of separate and independent convex portions
5a: cross-shaped convex portion
5b: convex portion
5c: L-shaped convex portion
5d: narrow or wide convexity
5e: wide or narrow convex portion
5f: Vertically long convex portion
5g: rectangular convex portion
5h: convex part
5i: L-shaped convex portion
6: SUS base material
7: Resist layer for forming convex portions
8: 1st plating layer
8a: 1st residual plating part
8b: primary stripping plating portion
9: 2nd plating layer

Claims (5)

A plurality of opening pattern portions formed by plating and having a plurality of openings through which shaken conductive balls pass are disposed in the longitudinal and lateral directions, and adjacent to the opening pattern portion, up and down or oblique up and down, left and right, or up and down, left and right , a mask body connected by a connection groove between any one of the oblique top, bottom, left and right opening pattern portions, and formed by plating, facing the electrode of the mounted object on which the conductive ball is mounted, not the side into which the conductive ball is swung In addition to the opening pattern portion on the back side of the mask body, a plurality of convex portions that partially protrude and are independent of each other are provided;
The plurality of separate and independent convex portions are thicker than the plate thickness of the opening pattern portion and the connection groove to increase durability of the mask body, and the plurality of separate and independent convex portions have a rounded edge at their periphery. A mask for mounting a ball, characterized in that it is formed in an R shape with A plurality of opening pattern portions formed by plating and having a plurality of openings through which shaken conductive balls pass are disposed in the longitudinal and lateral directions, and adjacent to the opening pattern portion, up and down or oblique up and down, left and right, or up and down, left and right , a mask body connected by a connection groove between any one of the oblique top, bottom, left and right opening pattern portions, and formed by plating, facing the electrode of the mounted object on which the conductive ball is mounted, not the side into which the conductive ball is swung In addition to the opening pattern portion on the back side of the mask body, a plurality of convex portions that partially protrude and are independent of each other are provided;
The plurality of separate and independent convex portions are formed on the side not in contact with the mounted object by the first plating layer and have a protruding shape, and the first plating layer on the surface of the inner convex portion. It is integrally formed so as to cover the circumferential surface of the inner convex portion and the lower surface of the mounted object side by another second plating layer, and consists of an external convex portion facing the electrode of the mounted object,
The mask body is integrally formed with the outer convex portion by the second plating layer, and the plurality of separate and independent convex portions formed by overlapping the residual plating portion of the first plating layer and the second plating layer are formed by the opening pattern. The mask for mounting a ball is thicker than the plate thickness of the portion and the connection groove to increase the durability of the mask body, and the plurality of separated and independent convex portions are formed in an R shape with a rounded peripheral edge. . A mask formed by plating and having a plurality of opening pattern portions formed with a plurality of openings through which shaken conductive balls pass, arranged in the longitudinal and lateral directions, and portions of the opening pattern portions adjacent to the opening pattern portions connected by connecting grooves. The main body and the mask body formed by plating, which is not the side into which the conductive balls are pushed in, but the side facing the electrode of the mounted object on which the conductive balls are mounted, partially protrudes other than the opening pattern portion on the back side of the mask body, and is separated from each other Equipped with a plurality of independent convex portions,
The plurality of separate and independent convex portions are formed on the side not in contact with the mounted object by the first plating layer and are formed as protruding portions, and the first plating layer is formed on the surface of the inner convex portion. It is integrally formed so as to cover the circumferential surface of the inner convex portion and the lower surface of the mounted object side by another second plating layer, and consists of an external convex portion facing the electrode of the mounted object,
The mask body is integrally formed with the outer convex portion by the second plating layer, and the plurality of separate and independent convex portions formed by overlapping the residual plating portion of the first plating layer and the second plating layer are formed by the opening pattern. The mask for mounting a ball is thicker than the plate thickness of the portion and the connection groove to increase the durability of the mask body, and the plurality of separated and independent convex portions are formed in an R shape with a rounded peripheral edge. . A plurality of opening pattern portions formed by plating and having a plurality of openings through which shaken conductive balls pass are disposed in the longitudinal and lateral directions, and adjacent to the opening pattern portion, up and down or oblique up and down, left and right, or up and down, left and right , a mask body connected by a connection groove between any one of the oblique top, bottom, left and right opening pattern portions, and formed by plating, facing the electrode of the mounted object on which the conductive ball is mounted, not the side into which the conductive ball is swung In addition to the opening pattern portion on the back side of the mask body, a plurality of convex portions that partially protrude and are independent of each other are provided;
The plurality of separate and independent convex portions include an inner convex portion formed on a side not in contact with the mounted object by the first plating layer and composed of a residual plating portion remaining without being peeled off, and a surface of the inner convex portion formed as described above. An outer convex portion formed integrally with a second plating layer different from the first plating layer to cover the circumferential surface of the inner convex portion and the lower surface of the mounted object side, and facing the electrode of the mounted object,
The mask body is integrally formed with the outer convex portion by the second plating layer, and the plurality of separate and independent convex portions formed by overlapping the residual plating portion of the first plating layer and the second plating layer are formed by the opening pattern. A method of manufacturing a mask for mounting a ball in which the plurality of convex portions that are separated and independent are formed in an R shape with a rounded peripheral edge,
A step of forming a resist layer for forming the convex portion on the SUS base material;
A step of forming a primary plating layer by plating on the SUS base material so that the convex portion has a predetermined height;
After the formation of the primary plating layer is completed, a step of removing the resist layer for forming convex portions;
The primary plating layer of the portion where the connection groove is formed that connects the entirety between the opening pattern portion and the opening pattern portion other than the portion where the inner convex portion is formed, which is formed by the primary plating layer and consists of the primary residual plating portion that remains unpeeled. A step of removing and leaving an internal convex portion by the primary residual plating layer on the SUS base material;
forming a resist layer for forming a plurality of openings between the internal convex portions on the SUS base material;
A step of integrally forming an opening pattern portion, a connecting groove, and an external convex portion by a secondary plating layer by plating on the SUS base material and the inner convex portion so that the mask body has a specified thickness;
After the formation of the secondary plating layer is completed, a step of removing the resist layer for forming the plurality of openings;
and a step of peeling the inner convex portion made of the remaining plating portion of the primary plating layer, the external convex portion composed of the secondary plating layer, the opening pattern portion, and the connecting portion from the SUS base material. A method for manufacturing a dragon mask. A mask formed by plating and having a plurality of opening pattern portions formed with a plurality of openings through which shaken conductive balls pass, arranged in the longitudinal and lateral directions, and portions of the opening pattern portions adjacent to the opening pattern portions connected by connecting grooves. The main body and the mask body formed by plating, which is not the side into which the conductive balls are pushed in, but the side facing the electrode of the mounted object on which the conductive balls are mounted, partially protrudes other than the opening pattern portion on the back side of the mask body, and is separated from each other Equipped with a plurality of independent convex portions,
The plurality of separate and independent convex portions include an inner convex portion formed on a side not in contact with the mounted object by the first plating layer and composed of a residual plating portion remaining without being peeled off, and a surface of the inner convex portion formed as described above. An outer convex portion formed integrally with a second plating layer different from the first plating layer to cover the circumferential surface of the inner convex portion and the lower surface of the mounted object side, and facing the electrode of the mounted object,
The mask body is integrally formed with the outer convex portion by the second plating layer, and the plurality of separate and independent convex portions formed by overlapping the residual plating portion of the first plating layer and the second plating layer are formed by the opening pattern. A method of manufacturing a mask for mounting a ball in which the plurality of convex portions that are separated and independent are formed in an R shape with a rounded peripheral edge,
A step of forming a resist layer for forming the convex portion on the SUS base material;
A step of forming a primary plating layer by plating on the SUS base material so that the convex portion has a predetermined height;
After the formation of the primary plating layer is completed, a step of removing the resist layer for forming convex portions;
The primary plating layer of the portion where the opening pattern portion and the connection groove connecting a part between the opening pattern portion are formed other than the inner convex portion formation portion formed by the primary plating layer and consisting of the primary residual plating portion that remains unpeeled. A step of removing and leaving an internal convex portion by the primary residual plating layer on the SUS base material;
forming a resist layer for forming a plurality of openings between the internal convex portions on the SUS base material;
A step of integrally forming an opening pattern portion, a connecting groove, and an external convex portion by a secondary plating layer by plating on the SUS base material and the inner convex portion so that the mask body has a specified thickness;
After the formation of the secondary plating layer is completed, a step of removing the resist layer for forming the plurality of openings;
and a step of peeling the inner convex portion made of the remaining plating portion of the primary plating layer, the external convex portion composed of the secondary plating layer, the opening pattern portion, and the connecting portion from the SUS base material. A method for manufacturing a dragon mask.

Images