KR20220135440A - Glass chemical strengthening apparatus using flow of strengthening solution and method for strengthening glass - Google Patents

Abstract

Provided are; a chemical strengthening method of ultra-thin glass using the flow or movement of a strengthening solution; a glass chemical strengthening facility therefor; and a glass chemical strengthening facility system. The glass chemical strengthening facility comprises: a process chamber in which glass is strengthened; a strengthening solution chamber configured to allow a strengthening solution for strengthening glass to be accommodated therein; a passage unit that allows the process chamber and the strengthening solution chamber to be in fluid communication with each other and provides a moving path allowing the strengthening solution to move between the process chamber and the strengthening solution chamber.

Description

Chemical strengthening equipment and method of strengthening glass using a flow of a strengthening solution

The present invention relates to a chemical strengthening equipment for glass and a chemical strengthening method for glass. In detail, the present invention relates to a method of chemically strengthening ultra-thin glass using the flow or movement of a strengthening solution, and a chemical strengthening equipment for glass and a chemical strengthening equipment for glass system for the same.

Thanks to technological advances, electronic devices such as smartphones and tablet PCs are gradually becoming thinner. In addition, consumers demand a high screen-to-body ratio in terms of a wide screen and aesthetics of an electronic device, and accordingly, the entire surface of the electronic device is formed of glass.

Glass material has been applied as a front cover window material of a display for a long time due to its high light transmittance. However, since general glass is vulnerable to external impact and can be easily broken or scratched, it is essential to apply tempered glass with improved mechanical strength to form the front surface of an electronic device such as a smartphone with glass.

Meanwhile, research on a foldable display and/or a rollable display has been recently conducted, and electronic devices to which such a special display is applied are also being released.

In order to implement a foldable display, etc., a flexible material, for example, a plastic material such as a polyimide film, is sometimes applied as a cover window of the display instead of glass. However, the polyimide film and the like have a lower light transmittance than glass, and thus light loss may occur. In addition, since a specific position of the cover window is repeatedly folded in the foldable display, there is a problem in that a crack occurs or a permanent fold mark is left in a portion where the folding line is formed.

Republic of Korea Patent No. 10-1995323, 2019.06.26., Chemically strengthened glass manufacturing apparatus having a circular arrangement structure

In this respect, the development of ultra-thin glass (UTG) that has high mechanical strength and can be applied to a special display such as a foldable display or a rollable display is urgently required. Ultra-thin glass generally refers to a glass material having a thickness of 100 μm or less. Since the ultra-thin glass has a high light transmittance and a thin thickness compared to a plastic material, the folding of the folding line may not be easily recognized, and even bending, rolling or folding may be possible.

Patent Document 1 discloses a process for strengthening glass and a chemical strengthening facility for glass. Conventional glass chemical strengthening process is performed by immersing the glass in a strengthening solution such as potassium nitrate solution to replace sodium ions of the glass and potassium ions of potassium nitrate. A preheating process and a slow cooling process are generally performed before and after this chemical strengthening process. To this end, the glass to be strengthened is repeatedly drawn in and out of the plurality of chambers, and detailed process steps are performed.

However, since the ultra-thin glass is very thin, it has a difference in mechanism from the conventional glass strengthening process in which ions are replaced only at the surface of the glass. For example, it may be preferable that ion substitution is uniformly performed in the thickness direction of the ultra-thin glass, and the uniformity of reinforcement in the thickness direction may be a major factor determining the quality of the ultra-thin glass. In addition, unlike conventional glass, ultra-thin glass has extremely weak durability before strengthening, and many of them may be damaged during processing. Due to this, the yield of the tempered glass is not very high, which causes an increase in the price of the ultra-thin glass.

One of the factors affecting the non-uniformity of strengthening of the ultra-thin glass and the decrease in yield is the frequent movement of the glass during the glass strengthening process and the exposure of the glass to the external environment. In particular, although the chemical strengthening process must be performed in a precisely controlled atmosphere (atmosphere), rapid temperature changes, changes in atmospheric components, and adhesion of foreign substances due to glass movement between multiple chambers are major factors that reduce glass yield and reinforcement quality. this can be

In addition, as the reinforcement equipment is enlarged to strengthen a larger amount of glass at once, the above problem is further aggravated, and the conventional glass manufacturing method and equipment used for manufacturing do not recognize the above factors, or at least There are problems that are not sufficiently reflected.

On the other hand, since the ultra-thin glass has a very thin thickness, the time required for the substitution of sodium ions and potassium ions is very short. Each time required for the preheating step, strengthening step, and slow cooling step can be controlled in consideration of other process conditions and required properties of the glass. It can also be done while

For example, the time taken for the preheating step is at least about 7 times, or at least about 8 times, or at least about 9 times, or at least about 10 times, or at least about 11 times, or about 12 times the time taken for the preheating step. It can be more than double. However, if the time of the preheating step located before the strengthening step in the process sequence is significantly longer, the process flow is accumulated and the process efficiency is extremely low with the conventional chemical strengthening equipment, which may cause an increase in the tact time.

In addition, while waiting for the preheating of the glass, it is necessary to maintain a large volume of the strengthening solution for chemical strengthening of the glass at a constant temperature, which may cause unnecessary waste of energy and an increase in the overall process cost.

Accordingly, the problem to be solved by the present invention is to provide a glass strengthening facility capable of responding to a chemical strengthening process of ultra thin glass. In particular, it is to provide a glass chemical strengthening facility capable of minimizing the movement of glass during the process and exposure to the external environment.

Another object to be solved by the present invention is to provide a glass chemical strengthening facility system capable of improving the glass strengthening quality and yield by minimizing the movement of the glass and exposure to the external environment. In addition, it is to provide a glass chemical strengthening facility system that can reduce the accumulation of process flow and logistical interference in the process consisting of the pre-treatment, the main process and the post-treatment.

Another problem to be solved by the present invention is to provide a method of chemically strengthening glass that minimizes movement of the glass and exposure to the external environment.

The problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

A glass strengthening facility according to an embodiment for solving any of the above problems includes a process chamber in which glass is strengthened, a strengthening solution chamber configured to receive a strengthening solution for strengthening glass, and connecting the process chamber and the strengthening solution chamber and a flow path unit providing a movement path of the enhancement solution between the process chamber and the enhancement solution chamber.

The process chamber may be fluidly connected to the enhancement solution chamber so that the enhancement solution flows from the enhancement solution chamber or the enhancement solution flows out into the enhancement solution chamber.

The process chamber may be configured to introduce the strengthening solution before starting the strengthening process, and to drain the strengthening solution when the strengthening process is completed.

In addition, the process chamber may have a plurality of fluid ports connected to the flow path unit, and the strengthening solution may be simultaneously introduced or discharged from the plurality of fluid ports.

The process chamber may include a chamber body having an upper opening and a process chamber door closing the upper opening.

The process chamber may further include a sub-door positioned in the chamber body in a state in which the process chamber door closes the chamber body and preventing corrosion of the process chamber door due to fume gas.

In addition, the process chamber may include a cleaning nozzle disposed inside at least one of the chamber body and the process chamber door and cleaning the inner wall by spraying at least one of a liquid and a gas.

The process chamber may include at least one of a temperature sensor sensing an internal temperature, a level sensor sensing a level of the internal strengthening solution, and a bubble generating unit disposed adjacent to the bottom.

In some embodiments, the glass strengthening equipment may further include a lifting unit for controlling the level between the process chamber and the strengthening solution chamber by lifting the process chamber in the direction of gravity.

The fortification solution chamber includes at least one of a temperature sensor for sensing an internal temperature, a level sensor for sensing the level of the internal fortification solution, an ion sensor for sensing the ion concentration of the internal fortification solution, and a bubble generator disposed adjacent to the bottom portion may include

The fortification solution chamber may include a refill tank configured to replenish potassium ions therein.

An internal space of the enhancement solution chamber may be larger than an internal space of the process chamber.

The one enhancement solution chamber may be fluidly connected to a plurality of process chambers through one or more flow passage units.

Also, the plurality of process chambers may be disposed to overlap each other in a direction of gravity.

In addition, the flow path unit may include one or more valves and one or more pumps. In the flow path between the fortification solution chamber and the plurality of process chambers, the plurality of process chambers may each share the valve or may share the pump. .

In some embodiments, the glass strengthening facility may further include a cleaning chamber configured to receive a cleaning liquid therein.

In this case, the cleaning chamber and the process chamber may be disposed to overlap in a direction of gravity.

A glass strengthening facility system according to an embodiment of the present invention for solving any of the above other problems includes at least one strengthening solution chamber, a first process chamber and a second process chamber, and is fluidly connected to the strengthening solution chamber A glass strengthening facility system comprising a plurality of process chambers, at least one loading/unloading unit and at least one cleaning chamber, wherein the strengthening solution chamber and the first process chamber, and the strengthening solution chamber and the second process chamber The fortification solution is configured to move between the liver.

In addition, the single loading/unloading unit may perform the inlet/outlet into and out of the plurality of process chambers.

In addition, the cleaning chamber includes a first cleaning chamber and a second cleaning chamber spaced apart from each other with the enhancement solution chamber therebetween, and the loading/unloading unit is a first robot spaced apart from the enhancement solution chamber therebetween. an arm and a second robotic arm.

The plurality of process chambers may include a third process chamber and a fourth process chamber spaced apart from the first process chamber and the second process chamber with the enhancement solution chamber interposed therebetween, and have a fluid volume with the one enhancement solution chamber. It may further include a third process chamber and a fourth process chamber connected to each other.

In addition, as one enhancement solution chamber and a plurality of n process chambers, the plurality of process chambers fluidly connected to the enhancement solution chamber may form one equipment unit.

In this case, the amount of the strengthening solution accommodated in the strengthening solution chamber may be smaller than n times the amount of the strengthening solution required for chemical strengthening of glass in any one process chamber.

The method for strengthening glass according to an embodiment of the present invention for solving the another problem includes the steps of introducing the glass into a process chamber, preheating the glass in the process chamber, and after the preheating step, the process chamber Including the step of immersing the heat-treated glass in the strengthening solution and chemically strengthening by introducing a strengthening solution into the strengthening solution, and after the strengthening step, the step of flowing out the strengthening solution from the process chamber.

In some embodiments, the method may further include, after discharging the tempering solution, slowly cooling the tempered glass in the process chamber, and withdrawing the tempered glass from the process chamber.

In some embodiments, the method may further include cleaning the inner wall of the process chamber to remove residual fortification solution.

The method may further include the step of introducing the fortification solution from any of the fortification solution chambers and flowing out into the fortification solution chamber, and sensing a potassium ion concentration of the fortification solution in the fortification solution chamber.

The introducing of the fortification solution may include lowering the process chamber to position the process chamber at a level lower than that of the fortification solution chamber in which the fortification solution is accommodated.

Also, the step of discharging the fortification solution may include raising the process chamber to a higher level than the fortification solution chamber.

The step of introducing the glass into the process chamber may include introducing the first glass into the first process chamber and introducing the second glass into the second process chamber.

Also, the first process chamber and the second process chamber may be fluidly connected to the same strengthening solution chamber, and the preheating of the first glass and the preheating of the second glass may be performed at least partially simultaneously.

Also, while the strengthening step of the first glass is performed, the preheating step of the second glass may even be performed.

The step of introducing the glass into the process chamber may include introducing the first glass into the first process chamber and introducing the second glass into the second process chamber.

The step of introducing the enhancement solution into the second process chamber may be performed after the step of flowing out the enhancement solution from the first process chamber, or may be performed at least simultaneously.

In addition, while the strengthening step of the second glass is performed, the slow cooling step of the first glass may be performed.

In the step of introducing the glass, the length direction of the glass may be in the horizontal direction, and the width direction or the thickness direction of the glass may be in the direction of gravity.

The process chamber according to an embodiment of the present invention for solving the another problem is a chamber body including an internal space for sequentially performing preheating, strengthening, and slow cooling by introducing glass therein, a process of sealing the chamber body A chamber door, and at least one fluid port for injecting the strengthening solution before the strengthening or discharging the strengthening solution after the strengthening on one side of the chamber body.

At least one of the chamber body and the process chamber door may include a heater for heating the glass or the strengthening solution.

The process chamber door may be coupled to the chamber body in a direction perpendicular to gravity, and an opening may be formed in an upper surface of the process chamber to be coupled to the process chamber door.

The process chamber door may be coupled to the chamber body in a direction horizontal to gravity, and an opening may be formed in a side surface of the process chamber to be coupled to the process chamber door.

The method may further include a cleaning nozzle attached to the inside of at least one of the chamber body or the process chamber door and spraying at least one of a liquid and a gas for cleaning an inner wall of the process chamber.

In addition, the at least one fluid port may further include a pump for introducing or discharging the strengthening solution.

In some embodiments, the process chamber is coupled to a part of the chamber body to lower the chamber body toward the ground so that the strengthening solution is introduced using the at least one fluid port, or the chamber body to discharge the strengthening solution. It may further include a lift that raises the surface in the opposite direction.

A temperature sensor and a level sensor coupled to at least one of the chamber body and the process chamber door, at least one of a temperature sensor sensing an internal temperature of the process chamber, and a level sensor sensing a level of the internal enhancement solution of the process chamber may contain one.

Details of other embodiments are included in the detailed description.

According to embodiments of the present invention, the pre-treatment, the main process, and the post-treatment can be performed in one chamber without withdrawing the glass by injecting or discharging the strengthening solution after the glass to be strengthened is introduced into the process chamber. Through this, the glass reinforcement quality and production yield can be increased.

In addition, the amount of the strengthening solution can be reduced and the tact time of the process can be reduced, so that it is possible to chemically strengthen the glass efficiently.

Effects according to the embodiments of the present invention are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is a schematic diagram showing a chemical strengthening facility for glass according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of the process chamber of FIG. 1 .
FIG. 3 is a schematic view of the strengthening solution chamber of FIG. 1 .
4 is a flowchart illustrating a method for chemically strengthening glass according to an embodiment of the present invention.
5 to 9 are views sequentially illustrating a method of chemically strengthening glass using the chemical strengthening facility of FIG. 1 .
10 is a schematic view showing a chemical strengthening facility for glass according to another embodiment of the present invention.
11 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.
12 to 19 are schematic views showing chemical strengthening equipment for glass according to still other embodiments of the present invention, respectively.
20 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.
21 is a flowchart illustrating a method for chemically strengthening glass according to another embodiment of the present invention.
22 and 23 are views sequentially illustrating a method of chemically strengthening glass using the chemical strengthening facility of FIG. 20 .
24 is a schematic diagram showing a chemical strengthening facility system for glass according to an embodiment of the present invention.
25 and 26 are views showing the process flow of the chemical strengthening facility system of the glass of FIG.
27 is a view showing a process flow of a chemical strengthening facility system for glass according to another embodiment of the present invention.
28 is a schematic diagram showing a chemical strengthening facility system for glass according to another embodiment of the present invention.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various different forms, and only the embodiments allow the disclosure of the present invention to be complete, and those of ordinary skill in the art to which the present invention pertains. It is provided to fully inform the person of the scope of the invention, and the present invention is only defined by the scope of the claims. That is, various changes may be made to the embodiments presented by the present invention. It should be understood that the embodiments described below are not intended to limit the embodiments, and include all modifications, equivalents, and substitutions thereto.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.

In this specification, 'and/or' includes each and every combination of one or more of the mentioned items. The singular also includes the plural, unless the phrase specifically states otherwise. As used herein, 'comprises' and/or 'comprising' does not exclude the presence or addition of one or more other components in addition to the stated components. Numerical ranges indicated using 'to' indicate numerical ranges including the values stated before and after them as the lower and upper limits, respectively. 'About' or 'approximately' means a value or numerical range within 20% of the value or numerical range recited thereafter.

The size, thickness, width, length, etc. of the components shown in the drawings may be exaggerated or reduced for convenience and clarity of description, so that the present invention is not limited to the illustrated form.

Spatially relative terms 'above', 'upper', 'on', 'below', 'beneath', 'lower', etc. As shown, it can be used to easily describe the correlation between one element or elements and another element or elements. Spatially relative terms should be understood as terms including different orientations of the device when used in addition to the orientations shown in the drawings. For example, when an element shown in the drawing is turned over, an element described as 'below or beneath' of another element may be placed 'above' of the other element. Accordingly, the exemplary term 'below' may include both the downward and upward directions.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram showing a chemical strengthening facility for glass according to an embodiment of the present invention. FIG. 2 is a schematic diagram of the process chamber of FIG. 1 . FIG. 3 is a schematic view of the strengthening solution chamber of FIG. 1 .

1 to 3 , the glass chemical strengthening facility 1 according to this embodiment includes a process chamber 101 , a strengthening solution chamber 201 , and a flow path unit 300 , and a cleaning chamber 400 , It may further include a loading/unloading unit 500 and a controller 600 .

The process chamber 101 (eg, the first chamber) may provide a process space in which chemical strengthening of glass is performed. In addition, the process chamber 101 according to the present embodiment may provide a process space in which a heat treatment is performed as well as a chemical strengthening process. In an exemplary embodiment, the process chamber 101 may lie on the ground.

The process chamber 101 may include a chamber body 120 having an upper opening and a process chamber door 130 closing the upper opening. The chamber body 120 may provide an internal space in which a process is performed. The shape of the inner space may be approximately rectangular, but may also be implemented in a cylindrical shape. However, the present invention is not limited thereto, and the inner space of the process chamber 101 may have a shape capable of evenly transferring heat to the glass G, which is a strengthening object. For example, the inner space of the process chamber 101 may have a polygonal shape such as a triangular cylinder, a pentagonal cylinder, a hexagonal cylinder, or an octagonal cylinder.

A cassette holder 150 may be disposed on the bottom of the chamber body 120 . During the strengthening process, the cassette 800 on which the glass G is loaded or mounted may be disposed on the cassette holder 150 . A method of inserting the cassette 800 into the cassette holder 150 is not particularly limited, but a robot arm or the like may be used.

The bottom and sidewalls of the chamber body 120 may be empty. That is, the sidewall of the chamber body 120 may include an outer wall and an inner wall, and the outer wall and the inner wall may be spaced apart from each other. A process chamber heater 155 (eg, a first heater) may be embedded in the bottom and sidewalls of the chamber body 120 . The process chamber heater 155 may perform heat treatment of the glass G, or may heat or keep the incoming strengthening solution SS. In another embodiment, the process chamber heater 155 is not built into the bottom and/or sidewalls of the chamber body 120 , but may be installed on the bottom or inner walls of the chamber body 120 .

A process chamber door 130 may be disposed on the process chamber 101 . The process chamber door 130 may be a door of the process chamber 101 . The process chamber door 130 according to the present embodiment, that is, the door is configured to move in the direction of gravity, but the present invention is not limited thereto. The process chamber door 130 may be opened and closed by being connected to a lifting means (not shown).

The lower portion of the process chamber door 130 and the upper end of the side wall of the process chamber 101 may be closed with a sealing member for complete sealing. In an exemplary embodiment, a sealing member 125 such as an O-ring may be disposed on the upper end of the sidewall of the process chamber 101 . A process chamber door heater 131 (eg, a first sub-heater) may also be embedded in the process chamber door 130 .

Accordingly, the first heater may be positioned in the form of a plurality of heater units separated from each other in the process chamber 101 and the process chamber door 130 (eg, a space between the outer wall and the inner wall). For example, in the process chamber heater 155 , a plurality of heater units may be dispersed and spaced apart from each other in the process chamber 101 , and a plurality of heater units may be dispersed and spaced apart from each other in the process chamber door 130 . may be located.

In some embodiments, the process chamber 101 may further include a sub door 135 . The sub door 135 may be disposed or fixed under the process chamber door 130 . In a state in which the process chamber door 130 seals the chamber body 120 , the sub-door 135 may be inserted into the chamber body 120 . As will be described later, the strengthening solution SS may be introduced or injected into the inner space of the chamber body 120 . At this time, the sub-door 135 is corroded by the fume gas generated from the strengthening solution SS by the process chamber door heater 131 located below the process chamber door 130 or inside the process chamber door 130 . function to prevent it from happening. In addition, when the sub-door 135 is implemented in the form of extending the length in the direction of the ground from the end, the quality of the glass may be improved by sealing the glass from outside air.

The sub-door 135 may be disposed on a lower surface of the process chamber door 130 with a lifting means. In this case, the sub-door 135 may be rotatable in a planar direction or the separation distance between the process chamber door 130 and the gravitational direction may be adjusted.

The chamber body 120 may include a process chamber fluid port 180 (eg, a first fluid port). 2 illustrates a case in which the process chamber fluid port 180 is disposed under the sidewall of the chamber body 120, of course, the present invention is not limited thereto. A plurality of process chamber fluid ports 180 may be provided. In this case, the plurality of process chamber fluid spheres 180 may be disposed to overlap each other in the direction of gravity, or may be disposed along the sidewall in a plan view and disposed to overlap in the horizontal direction. Alternatively, the process chamber fluid port 180 may be disposed at the bottom of the chamber body 120 . The process chamber fluid port 180 introduces the enrichment solution SS into the process chamber 101 from the enhancement solution chamber 201 to be described later, or the enhancement solution (SS) from the process chamber 101 to the enhancement solution chamber 201 . SS) can be leaked. That is, the process chamber fluid port 180 may be connected to a flow path unit 300 to be described later to provide a flow path for the strengthening solution SS.

It may be preferable that the rate at which the fortification solution SS flowing in or out through the process chamber fluid port 180 is filled or discharged by a predetermined standard is as fast as possible. As described above, in the reinforcing process of ultra-thin glass, the reinforcing uniformity of the glass may be a very important factor affecting the reinforcing quality. If the rate of outflow (drainage) or inflow (filling) is too slow, the reinforcement uniformity at the upper and lower portions of the inner glass (G) may be different.

In addition, the process chamber fluid port 180 has a predetermined cross-sectional area (eg, a size substantially similar to the cross-sectional area of one side of the process chamber 101 or a cross-sectional area of one side) so that the strengthening solution can be injected within the shortest time. It may be set to any of the following sizes (about 90%, 80%, 70%, 60%, 50%, 40%, 30%, 20%, etc.) The process chamber fluid port 180 is reinforced into the chamber body. In consideration of the time required for the completion of the inflow of the solution SS or the time required for the completion of the outflow, the size may be determined so as not to cause non-uniformity in the quality of the glass. It may be set to a size similar to the size of the sphere 180 .

In some embodiments, the process chamber 101 may further include a cleaning unit 140 , a first bubble generating unit 143 , a fume gas recovery unit 145 , and/or a process sensor 190 .

The cleaning unit 140 may be disposed on the inner wall of the chamber body 120 . The cleaning unit 140 may spray liquid or gas for cleaning at an inclined angle to clean or wash the inner wall of the chamber body 120 . The strengthening solution SS may flow into or out of the chamber body 120 . At this time, after the strengthening solution SS flows out from the chamber body 120 , the strengthening solution may remain on the inner wall of the chamber body 120 . The remaining strengthening solution SS may deteriorate the quality and reliability of the heat treatment process performed before and after the chemical strengthening process, or may generate fume gas.

The liquid or gas sprayed by the washing unit 140 for washing may be water such as distilled water, an inert gas, or air. The liquid or gas sprayed by the washing unit 140 may be heated to a predetermined temperature. In this case, the liquid or gas may be heated to about 40 °C or higher, or about 50 °C or higher, or about 60 °C or higher. Although not shown in the drawings, when the washing unit 140 sprays the liquid, a drain unit 141 for recovering the liquid after washing the inner wall of the chamber body 120 may be additionally provided.

The cleaning unit 140 may be implemented in the form of a nozzle. The washing unit 140 may adjust the injection direction, the injection speed, the injection amount, etc. of the liquid or gas to be injected under the control of the controller 600 .

When the reinforcing solution SS is filled in the chamber body 120 , the first bubble generating unit 143 may be a means for mixing or stirring the reinforcing solution SS. Although not shown in the drawings, an end of the first bubble generating unit 143 may be connected to an external gas tank. The first bubble generating unit 143 may be disposed at least partially adjacent to the bottom of the process chamber 101 and may have a plurality of injection holes. An inert gas such as nitrogen (N ₂ ) or argon (Ar), or air may be injected through the injection hole. The injection hole may be formed in a downward direction or may be formed in an upward direction. When the gas is injected through the injection hole of the first bubble generating unit 143 in a state in which the reinforcement solution SS is filled in the chamber body 120, bubbles are formed, the bubbles rise, and the reinforcement solution SS is mixed. can In another embodiment, a stirrer or the like may be provided instead of or in addition to the first bubble generating unit 143 .

The fume gas recovery unit 145 may be a means for recovering the fume gas existing in the inner space of the process chamber 101 . As described above, a large amount of fume gas is discharged from the strengthening solution SS, and when the fume gas inside the process chamber 101 increases to a predetermined concentration or more, the strengthening quality of the glass G may be affected. In addition, in this embodiment in which the process chamber door 130 is opened and closed in the direction of gravity, when the process chamber door 130 is opened, the fume gas therein may be discharged to the outside of the process chamber 101 and is very harmful to the operator. can do. Therefore, it may be preferable to provide the fume gas recovery unit 145 to recover the fume gas, and it may be provided in the form of a tube passing through the chamber body 120 . Although not shown in the drawings, a pump or a fume gas tank for exhausting the fume gas may be provided at the other end of the fume gas recovery unit 145 .

The process sensor 190 may include a first temperature sensor 193 and/or a first level sensor 191 .

The first temperature sensor 193 may sense a temperature inside the process chamber 101 . In some embodiments, the first temperature sensor 193 may be configured to control the temperature of the process chamber heater 155 in conjunction with the process chamber heater 155 . The first temperature sensor 193 may directly measure the temperature of the enhancement solution SS inside the process chamber 101 or measure the temperature of a space in which the enhancement solution SS does not exist.

The first level sensor 191 may measure an amount, particularly a water level, of the fortification solution SS flowing into or out of the process chamber 101 . The first level sensor 191 may include an ultrasonic level sensor, a capacitive level sensor, a vibrating level sensor, and/or a floating level sensor. The first level sensor 191 may be located at a level higher than the water level of the fortification solution SS, but the present invention is not limited thereto.

Meanwhile, the cleaning unit 140 may be attached to the process chamber door 130 to clean the inner wall of the chamber body 120 . In addition, the process sensor 190 (the first level sensor 191 and the temperature sensor 193 ) is attached to the process chamber door 130 , so that the level of the fortification solution, the temperature of the fortification solution, and the fortification solution inside the process chamber 101 . It is possible to measure the temperature of this nonexistent space.

As described above, the enhancement solution SS may move between the process chamber 101 and the enhancement solution chamber 201 along the flow path unit 300 . Accordingly, the amount of the strengthening solution SS in the process chamber 101 may be changed at any time. Accordingly, a first level sensor 191 may be provided to measure the inflow and/or outflow of the fortification solution SS. In some embodiments, the first level sensor 191 may be linked with the flow path unit 300 to control the amount of the enhancement solution flowing into or flowing out of the process chamber 101 . In another embodiment, the inflow and/or outflow of the fortification solution may be measured using a weight sensor or the like instead of the first level sensor 191 .

Next, the strengthening solution chamber 201 will be described.

The strengthening solution chamber 201 (eg, the second chamber) may provide a space in which the strengthening solution SS for chemical strengthening of glass is accommodated. In an exemplary embodiment, the enrichment solution chamber 201 may lie on the ground. For example, the fortification solution chamber 201 may be placed on a level similar to that of the process chamber 101 . In a more specific example, the inner space of the enhancement solution chamber 201 and the inner space of the process chamber 101 may at least partially overlap in the horizontal direction. The strengthening solution chamber 201 may or may not include a door for closing the inner space thereof.

The strengthening solution SS may be a solution for chemically strengthening the glass by immersing the ultra-thin glass. The strengthening solution SS may impart bending strength, impact resistance, heat resistance, and the like to the glass through ion replacement or ion exchange of the silicate-containing glass. Examples of the strengthening solution (SS) include potassium nitrate (KNO ₃ ) solution, but the present invention is not limited thereto.

The enhancement solution chamber 201 may include an enhancement solution chamber body 220 and an enhancement solution chamber door 230 . An enhancement solution chamber door 230 may be disposed on the enhancement solution chamber body 220 . The enhancement solution chamber door 230 may be a door of the enhancement solution chamber 201 . The strengthening solution chamber door 230 may be opened and closed by moving in the direction of gravity, opened and closed by moving in a horizontal direction, or may be opened and closed through a hinge structure. In some embodiments, an enhancement solution chamber door heater 235 (eg, a second sub-heater) may be embedded within the enhancement solution chamber door 230 .

The bottom and sidewalls of the enrichment solution chamber body 220 may be empty. That is, the sidewall of the strengthening solution chamber body 220 may include an outer wall and an inner wall, and the outer wall and the inner wall may be spaced apart from each other. An enhancement solution chamber heater 255 (eg, a second heater) may be embedded in the bottom and sidewalls of the enhancement solution chamber body 220 . The reinforcement solution chamber heater 255 may heat the reinforcement solution SS accommodated in the chamber to a predetermined temperature or perform thermal insulation. In another embodiment, the fortification solution chamber heater 255 is not built into the bottom and/or side walls of the fortification solution chamber body 220 , but may be installed on the bottom or inner wall of the fortification solution chamber body 220 . have. For example, in the enhancement solution chamber heater 255 in the enhancement solution chamber 201 , a plurality of heater units may be dispersed and disposed to be spaced apart from each other. A plurality of heater units may be dispersedly located inside the strengthening solution chamber 201 (eg, between an outer wall and an inner wall).

The enrichment solution chamber body 220 may include an enrichment solution chamber fluid port 280 (eg, a second fluid port). 3 and the like illustrate a case in which the enhancement solution chamber fluid port 280 is disposed below the side wall of the enhancement solution chamber body 220, of course, the present invention is not limited thereto. The enhancement solution chamber fluid port 280 may be provided in plurality. In this case, the plurality of reinforcement solution chamber fluid spheres 280 may be disposed to overlap each other in the direction of gravity, or may be disposed along the sidewall and disposed to overlap in the horizontal direction. Alternatively, the enhancement solution chamber fluid port 280 may be disposed at the bottom of the enhancement solution chamber 201 .

The enhancement solution chamber fluid port 280 introduces the enhancement solution SS from the process chamber 101 to the enhancement solution chamber 201 , or the enhancement solution SS from the enhancement solution chamber 201 to the process chamber 101 . ) can be released. That is, the reinforcement solution chamber fluid port 280 may be connected to a flow path unit 300 to be described later to provide a flow path of the reinforcement solution SS.

The enhancement solution chamber 201 may further include a refill tank 270 . The refill tank 270 may be configured to introduce a predetermined substance into the enhancement solution chamber 201 . Although not shown in the drawings, the refill tank 270 and the enhancement solution chamber 201 may be selectively fluidly connected by including a valve (not shown).

In the glass chemical strengthening facility 1 according to the present embodiment, the strengthening solution SS is introduced into the process chamber 101 to immerse the glass G and chemically strengthen the glass G. In the chemical strengthening process of the glass G, sodium ions of the glass G are eluted into the strengthening solution SS, and the potassium ions in the strengthening solution SS are consumed, so that the concentration of potassium ions may decrease. In addition, the strengthening solution SS, which has been chemically strengthened on the glass G, may move to the strengthening solution chamber 201 , and may move back to the process chamber 101 to perform an additional strengthening process. That is, as the process continues, the concentration of sodium ions in the fortification solution SS increases and the concentration of potassium ions decreases, so that the composition of the fortification solution SS may change. Therefore, the glass chemical strengthening facility 1 according to the present embodiment may include a refill tank 270 capable of replenishing potassium ions in the strengthening solution SS.

In the refill tank 270, potassium nitrate (KNO ₃ ), potassium carbonate (K ₂ CO ₃ ), tripotassium phosphate (K ₃ PO ₄ ), dipotassium hydrogen phosphate (K ₂ HPO ₄ ) or potassium dihydrogen phosphate (KH ₂ PO) ₄ ), etc. may be accepted. Potassium nitrate and the like may be provided in the form of a powder or an aqueous solution. The material in the refill tank 270 may be mixed with the strengthening solution SS to increase the concentration of potassium ions, and the chemical strengthening quality of the glass may be maintained.

In another embodiment, the refill tank 270 may contain a material that reacts with sodium ions accumulated in the fortification solution SS to generate precipitates. That is, in this case, the material inside the refill tank 270 may reduce sodium ions rather than the strengthening solution SS increasing the concentration of potassium ions. Examples of the material include chlorine salt or acetate salt, but the present invention is not limited thereto.

In some embodiments, the enhancement solution chamber 201 may further include a second bubble generator 243 and/or an enhancement solution chamber sensor 290 .

The second bubble generator 243 may be a means for mixing or stirring the strengthening solution SS accommodated in the strengthening solution chamber 201 . When the fortification solution SS is accommodated in the fortification solution chamber 201 for a long time, a partial compositional non-uniformity may occur, such as relatively heavy potassium ions sink and relatively light sodium ions rise. Therefore, the strengthening solution SS may be mixed using the second bubble generator 243 connected to an external gas tank (not shown). The second bubble generating unit 243 is at least partially disposed adjacent to the bottom of the strengthening solution chamber 201 and may have a plurality of injection holes. An inert gas such as nitrogen (N ₂ ) or argon (Ar), or air may be injected through the injection hole. The injection hole may be formed in a downward direction or may be formed in an upward direction. When the gas is injected through the injection hole of the second bubble generating unit 243 in a state in which the reinforcement solution SS is filled in the reinforcement solution chamber 201, bubbles are formed, the bubbles rise, and the reinforcement solution SS is mixed. can do it In another embodiment, a stirrer or the like may be provided instead of or in addition to the second bubble generating unit 243 .

The enrichment solution chamber sensor 290 may include a second temperature sensor 293 , a second level sensor 291 , and/or an ion sensor 295 .

The second temperature sensor 293 may sense a temperature inside the enhancement solution chamber 201 . In some embodiments, the second temperature sensor 293 may be configured to control the temperature of the fortification solution chamber heater 255 in conjunction with the fortification solution chamber heater 255 . The second temperature sensor 293 may measure the temperature of the enhancement solution SS inside the enhancement solution chamber 201 .

The second level sensor 291 may measure an amount, particularly a water level, of the fortification solution SS flowing into or out of the fortification solution chamber 201 . The second level sensor 291 may be configured to be the same as or different from the first level sensor 191 . As described above, the enhancement solution SS may move between the process chamber 101 and the enhancement solution chamber 201 along the flow path unit 300 . Accordingly, the amount of the strengthening solution SS in the strengthening solution chamber 201 may be changed at any time. Accordingly, a second level sensor 291 may be provided to measure the inflow and/or outflow of the fortification solution SS. In some embodiments, the second level sensor 291 may be linked with the flow path unit 300 to control the amount of the fortification solution flowing into or out of the fortification solution chamber 201 . have. In another embodiment, the inflow and/or outflow of the fortification solution may be measured using a weight sensor or the like instead of the second level sensor 291 .

The ion sensor 295 may measure an ion concentration of the fortification solution SS accommodated in the fortification solution chamber 201 , specifically, a concentration of potassium ions and/or a concentration of sodium ions. As described above, as the strengthening solution SS is repeatedly used, the concentration of ions in the strengthening solution SS may be a factor affecting the strengthening quality of the glass. Although the present invention is not limited thereto, the ion sensor 295 is interlocked with the refill tank 270 to increase the concentration of potassium ions from the refill tank 270 into the fortification solution chamber 201, or A substance that lowers the concentration may be controlled to be introduced.

Meanwhile, the flow path unit 300 includes a valve 330 and a pump 310 , and may further include a flow rate sensor 350 . The flow path unit 300 fluidly connects the above-described process chamber 101 and the enhancement solution chamber 201 , and the enhancement solution SS flows along the process chamber 101 and the enhancement solution chamber 201 , can make it move. The valve 330 may be implemented as a ball valve or the like, but the present invention is not limited thereto. The valve 330 may control the amount or speed of the strengthening solution SS flowing along the flow path unit 300 . In addition, the pump 310 may provide a force for the movement of the fortification solution SS, and the flow sensor 350 may measure the amount and speed at which the fortification solution SS flows.

The cleaning chamber 400 may be provided separately from the process chamber 101 and the enhancement solution chamber 201 described above. The cleaning chamber 400 may be a chamber in which a cleaning process for removing the strengthening solution SS or foreign substances remaining on the surface of the glass G is performed after the chemical strengthening process is finished. A cleaning liquid, such as water, may be accommodated in the cleaning chamber 400 .

The loading/unloading unit 500 includes each of the above-described chambers, that is, the process chamber 101 and the cleaning chamber 400 , and a loading zone and unloading zone for introducing or withdrawing the glass G into the process chamber 101 . It may be a means for transferring the glass (G) and the cassette 800 between the zones. The loading/unloading unit 500 may be a robot arm or the like, but the present invention is not limited thereto. In another embodiment, the loading/unloading unit may be implemented as an overhead transport or hoist or the like.

The controller 600 may include a processor and/or memory. The processor may include a central processing unit (CPU), a micro processor unit (MPU), a micro controller unit (MCU), or any type of processor known in the art. The memory may include random access memory (RAM), read only memory (ROM), erasable programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), flash memory, or any type of memory known in the art. It may be composed of

The controller 600 may perform process automation by controlling the above-described process chamber 101 , the fortification solution chamber 201 , the flow path unit 300 , the cleaning chamber 400 , the loading/unloading unit 500 , and the like. have.

For example, the controller 600 receives a sensing result of the amount of the fortification solution SS in the process chamber 101 and/or the fortification solution chamber 201 , for example, a sensing result of the measured water level of the fortification solution SS. Based on this, the flow path unit 300 may be controlled. The controlled flow path unit 300 may be a pump 310 and/or a valve 330 . In addition, the controller 600 may include a process chamber heater 155 , a process chamber door heater 131 , and an enhancement solution chamber heater ( 255 ) and/or the fortification solution chamber door heater 235 .

In addition, the controller 600 measures the concentration of sodium ions and/or potassium ions in the fortification solution SS inside the fortification solution chamber 201 , and compares the measurement results with a predetermined standard to obtain a predetermined value from the refill chamber 270 . A substance may be added into the fortification solution chamber 201 .

Alternatively, the controller 600 may open and close each chamber according to the elapsed time of the process or transfer the glass G using the loading/unloading unit 500 . Also, the controller 600 may perform time difference control for the above process.

Hereinafter, a method for chemically strengthening glass according to the present invention will be described.

4 is a flowchart illustrating a method for chemically strengthening glass according to an embodiment of the present invention. 5 to 9 are views sequentially illustrating a method of chemically strengthening glass using the chemical strengthening facility of FIG. 1 . In order not to obscure the essence of the present invention, descriptions of some reference numerals have been omitted, which will be understood by those skilled in the art from the accompanying drawings and the description of the foregoing embodiments.

First, referring to FIG. 4 further, the chemical strengthening method of glass according to the present embodiment includes the step of introducing the glass into the process chamber (S110), the step of preheating the glass in the process chamber (S210), and the process by controlling the flow path unit. It may include the step of introducing the strengthening solution into the chamber (S310) and the step of immersing the glass in the strengthening solution in the process chamber (S410). In some embodiments, the chemical strengthening method of glass includes controlling the flow path unit to flow the strengthening solution from the process chamber (S510), slowly cooling the glass in the process chamber (S610), and withdrawing the glass from the process chamber (S710) and cleaning the glass in the cleaning chamber (S810) may be further included.

5 is a view showing the step (S110) of introducing the glass (G) into the process chamber (101). 5 , the process chamber door 130 of the process chamber 101 is raised in the gravity direction to open the inner space of the chamber body 120 , and the glass G is mounted on the mounting part 150 . The cassette 800 is retracted. For example, a loading/unloading unit (not shown) such as a robot arm may place the cassette 800 on which the glass G is mounted on the mounting unit 150 of the process chamber 101 .

Although not shown in the drawings, the elevated process chamber door 130 may further move in the horizontal direction to secure a space for the loading/unloading unit (not shown) to introduce the glass G. In this step ( S110 ), the chamber body 120 of the process chamber 101 may be in an empty state without being filled with the strengthening solution. On the other hand, the strengthening solution SS accommodated in the strengthening solution chamber 201 is continuously mixed or stirred by the bubbles generated in the second bubble generating unit 243 , and is predetermined by the strengthening solution chamber heater 255 . It may be in a state heated to a temperature of

The mounting portion 150 may rise or fall in the direction of gravity so that the cassette 800 on which the glass G is mounted can be easily drawn in or drawn out. The mounting unit 150 may be configured to receive or arrange a plurality of cassettes 800 . The mounting unit 150 may be configured such that the cassette 800 is spaced apart from the bottom surface of the chamber body 120 by a predetermined distance or more during preheating, strengthening, and slow cooling. 5 illustrates a case in which only one cassette 800 is inserted into the chamber body 120 of one process chamber, but the present invention is not limited thereto. More than one, or four or more may be introduced. Although the present invention is not limited thereto, when a plurality of cassettes 800 are introduced into one process chamber 101 , the plurality of cassettes 800 are arranged to overlap each other in a horizontal direction, that is, at substantially the same level. It may be desirable to place The reinforcing uniformity of the glass may be a very important factor affecting the reinforcing quality. As will be described later, when the heights in the gravity direction of the glasses G are different while the strengthening solution SS is introduced into the process chamber 101, the strengthening solution SS gradually fills up from the bottom, or the strengthening solution Since (SS) flows out slowly, the reinforcement uniformity may be different between the glasses (G) having a height difference in the direction of gravity from each other.

On the other hand, the glass G may be a glass cell state in which the led glass is cut to a predetermined size and the edges are processed. The glass (G) may be a glass that does not substantially contain potassium ions, or contains an abundance of sodium ions compared to potassium ions, that is, a glass before chemical strengthening. The glass G may be an ultra-thin glass having a thickness of about 100 μm or less, or about 90 μm or less, or about 80 μm or less, or about 70 μm or less, or about 60 μm or less, or about 50 μm or less. The plurality of glasses G may form a glass laminate or a glass stack by interposing an adhesive to each other, and the glass laminate may be mounted on the cassette 800 . FIG. 5 illustrates a case in which two glass laminates are disposed in one cassette 800 and a total of two glass laminates are introduced into the process chamber 101 .

FIG. 6 is a view illustrating a step ( S210 ) of heat-treating the glass G, for example, a first heat treatment in the process chamber 101 . 6 , the process chamber door 130 of the process chamber 101 may be lowered in the gravity direction to seal the internal space of the chamber body 120 and heat treatment may be performed. In this step ( S210 ), the inside of the chamber body 120 of the process chamber 101 may still be in an empty state without being filled with the strengthening solution.

In the present specification, the term 'heat treatment' refers to a pre-heating treatment (warm-up treatment) as a pre-treatment in the chemical strengthening process of glass, heat treatment as the main process and slow cool-down treatment as a post-treatment may mean including In another aspect, the heat treatment may mean performing a temperature rising, a constant temperature, a temperature drop, and a combination thereof of the heat treatment target. The above temperature increase, constant temperature and/or temperature decrease increases the heating temperature of the heater or maintains the heating temperature of the heater at a constant temperature to artificially increase the temperature of the heat treatment target than the ambient temperature, as well as increase the heating temperature of the heater It is used in a sense including controlling the temperature of the heat treatment target by lowering or stopping the operation of the heater.

In the step of preheating the glass ( S210 ), the preheating temperature may be about 300° C. or more, or about 350° C. or more, or about 400° C. or more, or about 450° C. or more, or about 500° C. or more. The temperature increase in the preheating step may be performed continuously, or may be performed discontinuously while repeating the constant temperature and the temperature increase. The duration of the preheating step may be about 100 minutes or more, or about 110 minutes or more, or about 120 minutes or more, or about 130 minutes or more. Preheating may be performed by controlling the temperature of the process chamber heater 155 of the process chamber 101 .

On the other hand, the strengthening solution SS accommodated in the strengthening solution chamber 201 is continuously mixed or stirred by the bubbles generated in the second bubble generating unit 243 , and is predetermined by the strengthening solution chamber heater 255 . It may be in a state heated to a temperature of

7 is a diagram illustrating a step S310 of introducing the enhancement solution SS into the process chamber 101 from the enhancement solution chamber 201 through the flow path unit 300 . Referring further to FIG. 7 , the flow path unit 300 , ie, the pump 310 and the valve 330 are controlled to remove at least a portion of the fortification solution SS accommodated in the fortification solution chamber 201 into the chamber of the process chamber 101 . It is filled into the body 120 . As a non-limiting example, at least a portion of the strengthening solution SS may still remain in the strengthening solution chamber 201 .

As described above, the enhancement solution SS flows out through the enhancement solution chamber fluid port 280 of the enhancement solution chamber 201 , flows along the flow path unit 300 , and the process chamber fluid port ( 180) can be introduced.

The glass G is immersed in the strengthening solution SS filled in the process chamber 101 to perform chemical strengthening, specifically, ion exchange between the strengthening solution SS and the glass G (S410). The heating temperature of the strengthening solution SS in the chemical strengthening step S410 may be about 300° C. or more, or about 350° C. or more, or about 400° C. or more, or about 450° C. or more, or about 500° C. or more. The execution time of the chemical strengthening step may be shorter than the execution time of the preheating step. For example, the chemical strengthening process may be performed for a time of about 30 minutes or less, or about 25 minutes or less, or about 20 minutes or less, or about 15 minutes or less, or about 10 minutes or less.

In some embodiments, while the strengthening solution SS is filled in the process chamber 101 to chemically strengthen the glass G, the strengthening solution SS in the process chamber 101 is formed in the first bubble generator 143 . Mixing or stirring may be performed by the generated bubbles.

As described above, in the glass chemical strengthening method using the glass chemical strengthening facility 1 according to the present embodiment, the glass G is introduced into the process chamber 101 and then heat treatment and the chemistry of the glass without movement of the glass G Reinforcement can be performed sequentially. In the conventional case, there was a problem in that the glass must be transferred to perform the heat treatment step and the chemical strengthening step. In this case, in the process of transferring the glass to move the glass between chambers, the glass is exposed to external air with different chemical compositions, a sudden temperature change occurs, or at least foreign substances in the external air are attached to the glass. There was a problem in that the reinforcement quality of the In addition, in particular, the ultra-thin glass before strengthening had a remarkably low durability, and some of it was damaged even by a slight impact generated during transport.

However, according to the glass chemical strengthening method according to the present embodiment, the glass G, which has been introduced into the process chamber 101 once by the loading/unloading unit, is located in a single space that is not divided within the process chamber 101. Without departing from, for example, the glass chemical strengthening process can be performed through the movement of the strengthening solution in a fixed position, so there is no room for the above problems to occur, and the external exposure and loading and unloading of the glass (G) can be minimized. can

8 is a diagram illustrating a process in which the strengthening solution SS flows from the process chamber 101 to the strengthening solution chamber 201 through the flow path unit 300 and the glass G is heat-treated in the process chamber 101, for example, a second heat treatment process. It is a diagram showing the step (S610). Referring further to FIG. 8 , the flow path unit 300 , that is, the pump 310 and the valve 330 are controlled to flow at least a portion of the fortification solution SS in the process chamber 101 into the fortification solution chamber 201 . (S510). As a non-limiting example, substantially no reinforcement solution SS remains in the process chamber 101 , and substantially the entire amount may be discharged. A small amount of the enhancement solution SS remaining in the process chamber 101 may be discharged by a drain unit (not shown) provided separately from the process chamber fluid port 180 .

As described above, the enrichment solution SS flows out through the process chamber fluid port 180 of the process chamber 101 , flows along the flow path unit 300 , and the enrichment solution chamber fluid port ( 280) can be introduced.

After the step (S510) of flowing out the strengthening solution (SS), or at the same time as the step of flowing out, the slow cooling of the glass (G) may be performed (S610). In the step (S610) of slowly cooling the glass, the slow cooling temperature, that is, the final cooling temperature may be about 50° C. or less, or about 100° C. or less, or about 150° C. or less. Although the present invention is not limited thereto, the temperature decrease of the heat treatment chamber may be performed continuously, or may be performed discontinuously while repeating the constant temperature and temperature decrease. In addition, the execution time of the slow cooling step may be shorter than the execution time of the preheating step. For example, the slow cooling process may be performed for a time of about 30 minutes or less, or about 25 minutes or less, or about 20 minutes or less, or about 15 minutes or less, or about 10 minutes or less. The slow cooling may be performed by controlling the temperature of the process chamber heater 155 of the process chamber 101 .

On the other hand, the strengthening solution SS accommodated in the strengthening solution chamber 201 is continuously mixed or stirred by the bubbles generated in the second bubble generating unit 243 , and is predetermined by the strengthening solution chamber heater 255 . It may be in a state heated to a temperature of

In some embodiments, the step of sensing the ion concentration of the enrichment solution SS in the enrichment solution chamber 201 by the ion sensor 295 of the enrichment solution chamber 201 may further include. As described above, the sensing of the ion concentration may be performed by the ion sensor 295 . The ion sensor 295 may sense a concentration of sodium ions and/or potassium ions in the fortification solution SS.

For example, when the concentration of potassium ions is lower than the reference concentration, the potassium ion-containing compound contained in the refill tank 270 may be added to the fortification solution SS to increase the potassium ion concentration in the fortification solution SS.

For another example, when the concentration of sodium ions is higher than the reference concentration, a material that reacts with sodium ions accommodated in the refill tank 270 to generate precipitates is added to the fortification solution SS and sodium ions in the fortification solution SS concentration can be reduced.

The step of sensing the ion concentration in the strengthening solution SS and correcting the ion concentration using the refill tank 270 starts before the slow cooling step of the glass G, or is performed at least partially simultaneously with the slow cooling step. Or, it may be performed after slow cooling, or after the glass G is withdrawn from the process chamber 101 .

9 is a view showing the step (S710) of taking out the glass (G) from the process chamber (101). Referring further to FIG. 9 , the process chamber door 130 of the process chamber 101 is raised in the gravity direction to open the inner space of the chamber body 120 , and the cassette 800 on which the glass G is mounted is mounted. withdraw from wealth The withdrawal may use a loading/unloading unit (not shown) such as a robot arm. In this step S710 , the enhancement solution may not be filled in the chamber body 120 of the process chamber 101 and may be in an empty state.

On the other hand, the strengthening solution SS accommodated in the strengthening solution chamber 201 is continuously mixed or stirred by the bubbles generated in the second bubble generating unit 243 , and is predetermined by the strengthening solution chamber heater 255 . It may be in a state heated to a temperature of

In some embodiments, the cleaning unit 140 of the process chamber 101 may clean the inner wall of the chamber body 120 of the process chamber 101 . The cleaning unit 140 may spray a liquid, an inert gas, or a gas such as air. The liquid or gas sprayed by the cleaning unit 140 may wash the strengthening solution remaining on the inner wall of the chamber body 120 . Unlike the drawings, in the cleaning of the process chamber 101 by the cleaning unit 140 , before the process chamber 101 is opened, for example, the strengthening solution SS is discharged from the process chamber 101 , and the process chamber 101 is cleaned. It may be performed before 101 is opened, or at least before the introduction of the glass G or before the preheating of the glass G may be started. In addition, the cleaning unit 140 may be implemented as a plurality of nozzles spaced apart from each other at predetermined intervals or having different spraying directions to clean the inner wall of the chamber body 120 .

Although not shown in the drawings, the glass G may be transferred to the cleaning chamber 400 after being strengthened to perform cleaning ( S810 ). That is, a process for cleaning the reinforcing solution and the like remaining on the surface of the glass G may be performed.

The above-described drawing step (S110), preheating step (S210), strengthening step (S410), slow cooling step (S610) and withdrawing step (S710) of the glass constitute one process unit, and the process unit is one glass chemical. It can be repeated in the strengthening installation 1 . That is, after the step of withdrawing the strengthened glass (S710), a new pre-strengthened glass may then be introduced.

As described above, in the glass chemical strengthening method using the glass chemical strengthening facility 1 according to this embodiment, after the glass is introduced into the process chamber 101, chemical strengthening and slow cooling are performed integrally without moving the glass (G). can do. That is, it is possible to minimize the external exposure and loading and unloading of the glass (G) during the strengthening process of the glass (G).

Hereinafter, other embodiments of the present invention will be described. However, the description of the same or extremely similar configuration to the chemical strengthening facility for glass and the chemical strengthening method of glass using the same according to the above embodiment will be omitted, which can be easily understood by those skilled in the art from the accompanying drawings. There will be.

10 is a schematic view showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 10, the point at which a plurality of cassettes 800 are introduced into the process chamber 101' of the glass chemical strengthening facility 1' according to the present embodiment is the glass chemical strengthening facility according to the embodiment of FIG. It is different from 1).

In this case, the plurality of cassettes 800 may be spaced apart from each other in a horizontal direction. As described above, when the fortification solution SS flows into or out of the process chamber 101 ′, the water level of the fortification solution SS may gradually move in the direction of gravity. It may be desirable to perform the inflow and outflow of the strengthening solution (SS) at a high speed as much as possible, but even in this case, a level difference in the direction of gravity between the glasses (G) mounted on the cassettes 800 does not occur. This may be preferable in view of the uniformity of strengthening of the glass.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

11 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 11 , the process chamber 102 of the glass chemical strengthening facility 2 according to the present embodiment does not include the mounting part ( 150 in FIG. 2 ), the glass chemical strengthening facility according to the embodiment of FIG. 1 and the like ( It is different from 1).

In this embodiment, the cassette 800 on which the glass G is mounted is mounted on the jig J, and the jig J may be fixed to a mounting portion such as a ring protruding from the lower portion of the process chamber door 130 . . The jig J may have a substantially circular shape or a polygonal shape such as a triangle, a quadrangle, a pentagon, a hexagon, or an octagon in a plan view. The lower portion of the jig J may have an open shape. The side of the jig (J) may be in a state in which a hole through which the cassette 800 can be mounted or hung is formed. The jig J may be raised and lowered together according to the raising and lowering of the process chamber door 130 .

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

12 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 12 , in the process chamber 103 of the glass chemical strengthening facility 3 according to the present embodiment, the cassette holder 137 is fixed to the process chamber door 130 rather than to the chamber body 120 . The point made is different from the chemical glass strengthening facility 1 according to the embodiment of FIG. 1 and the like.

The cassette holder 137 may protrude from the lower surface of the process chamber door 130 . The cassette holder 137 may or may not be fixed to the sub door 135 . For example, the separation distance of the cassette holder 137 from the lower surface of the process chamber door 130 and/or the lower surface of the sub door 135 may be adjusted. To this end, the cassette holder 137 may be configured to be movable in the direction of gravity. For example, when the cassette 800 on which the glass G is mounted is introduced into the process chamber 103 , the cassette holder 137 rises to facilitate the insertion. On the other hand, after the cassette 800 on which the glass G is mounted is introduced into the process chamber 103 , the cassette holder 137 may descend and be positioned adjacent to the bottom of the chamber body 120 .

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

13 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 13 , the process chamber 104 of the glass chemical strengthening facility 4 according to the present embodiment includes a first process chamber fluid port 181 , a second process chamber fluid port 182 , and a third process chamber fluid port. It is different from the glass chemical strengthening facility 1 according to the embodiment of FIG. 1 in that it includes a plurality of process chamber fluid spheres including the sphere 183 .

The first process chamber fluid port 181 may be disposed at the bottom of the chamber body 120 . In addition, the second process chamber fluid port 182 may be disposed on the sidewall of the chamber body 120 , and the third process chamber fluid port 183 may be disposed below the sidewall of the chamber body 120 . The second process chamber fluid port 182 may be located above the third process chamber fluid port 183 . The plurality of process chamber fluid spheres may be disposed to overlap each other in the direction of gravity, or may be disposed along the sidewall in a plan view and disposed to overlap in the horizontal direction.

The first process chamber fluid port 181 to the third process chamber fluid port 183 may be fluidly connected to one flow path unit 310 and 330 . That is, the first process chamber fluid port 181 to the third process chamber fluid port 183 share the pump 310 and the valve 330 with each other, and are fluidly connected to any of the enhancement solution chamber fluid ports 280 . can Accordingly, the strengthening solution SS may be simultaneously introduced or discharged from the first process chamber fluid port 181 to the third process chamber fluid port 183 .

Like the above-described process chamber 104 , the enhancement solution chamber 201 may include a plurality of enhancement solution chamber oilseed spheres 280 , and may be one-to-one ( 1:1), one-to-many (1:n), and many-to-one (n:1) correspondence.

Contrary to that shown in the drawings, a plurality of enhancement solution chamber fluid ports 280 may also be provided. In this case, the plurality of process chamber fluid spheres and the plurality of enhancement solution chamber fluid spheres may share the flow path units 310 and 330 .

As described above, in the chemical strengthening process of the glass (G), in particular, in the case of ultra-thin glass, the uniformity of reinforcement is a very important factor. According to the present embodiment, when the fortification solution SS flows into or out of the process chamber 104, it may be desirable to fill the process chamber 104 with the fortification solution SS as quickly as possible. have. That is, when the level of the strengthening solution SS in the chamber body 120 of the process chamber 104 rises or the rate of falling is too slow, the upper and lower portions of the glass G are in the strengthening solution SS, respectively. A difference in the immersion time occurs, and thus the degree of chemical strengthening in the upper and lower portions of the glass G may be different.

Therefore, as in the present embodiment, the enhancement solution ( SS) can increase the inflow and/or outflow rate.

In other embodiments, unlike those shown in the drawings, in this embodiment and the above or later embodiments, the glass (G) may be mounted long in the horizontal direction. For example, the glass G introduced into the process chamber 104 has a long length in the horizontal direction (that is, the longitudinal direction of the glass is in the horizontal direction), and has a small length in the gravity direction (ie, the length of the glass) It may be arranged such that the width direction or the thickness direction faces the direction of gravity). In this case, the glass reinforcement quality between the upper and lower portions of the glass G, that is, one end and the other end in the width direction or thickness direction, may be made more uniform.

Although FIG. 13 shows only three process chamber fluid ports, the present invention is not limited thereto, and the process chamber 104 may include two process chamber fluid ports, or may include four or more process chamber fluid ports. is of course In addition, the enhancement solution chamber 201 may also include at least two or more enhancement solution chamber oil holes 280 like the process chamber 104 .

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

14 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 14 , the glass chemical strengthening facility 5 according to this embodiment includes a process chamber 101 , a strengthening solution chamber 201 , and a cleaning chamber 400 , but the process chamber 101 and the cleaning chamber ( 400) is different from the glass chemical strengthening facility 1 according to the embodiment of FIG. The cleaning chamber 400 may horizontally overlap the enhancement solution chamber 201 .

The cleaning chamber 400 may be disposed on the ground. The cleaning liquid W may be accommodated in the cleaning chamber 400 . The washing liquid W may be a liquid such as water or distilled water, but the present invention is not limited thereto. The cleaning chamber 400 may heat the received cleaning liquid W to a preset temperature, for example, 50 degrees, 60 degrees, 70 degrees, or the like, or accommodate the cleaning liquid heated to a preset temperature.

The process chamber 101 may be placed on the frame 900 and may be disposed to be spaced apart from the ground by a predetermined distance. In addition, the process chamber 101 overlaps the cleaning chamber 400 in the gravitational direction, but may be spaced apart from each other by a predetermined distance in the gravitational direction.

As described above, in the glass chemical strengthening method according to the present invention, the glass (G) is subjected to heat treatment, chemical strengthening, and slow cooling in the process chamber 101, and the glass (G) is drawn out from the process chamber 101 after the annealed strengthening. It may be drawn into the cleaning chamber 400 and cleaned. In this case, the process chamber 101 and the cleaning chamber 400 overlap in order to minimize the movement path of the glass G moving from the process chamber 101 to the cleaning chamber 400 and efficiently use the space occupied by the equipment. can be placed In addition, although the present invention is not limited thereto, when the glass G is transferred using a loading/unloading unit (not shown), the cassette on which the glass G is mounted is cleaned to be introduced into the cleaning chamber 400 . The chamber 400 and the process chamber 101 , specifically, the frame 900 and the cleaning chamber 400 may be spaced apart from each other by a predetermined distance.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

15 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 15 , the glass chemical strengthening facility 6 according to the present embodiment has a plurality of process chambers fluidly connected to one strengthening solution chamber 206 , for example, a first process chamber 106a and a second process chamber. The point including 106b is different from the glass chemical strengthening facility 1 according to the embodiment of FIG. 1 and the like.

To this end, the flow path unit may also include a first flow path unit 300a and a second flow path unit 300b. The first flow passage unit 300a fluidly connects the enhancement solution chamber 206 and the first process chamber 106a, and the second flow passage unit 300b includes the enhancement solution chamber 206 and the second process chamber 106b. ) can be fluidly connected. The first flow path unit 300a and the second flow path unit 300b may include pumps 310a and 310b and valves 330a and 330b, respectively, and may further include a flow rate sensor (not shown). The first flow path unit 300a and the second flow path unit 300b may operate independently or selectively with each other, and may not affect the fluid flow between them.

Also, the enhancement solution chamber 206 may include a first enhancement solution chamber fluid port 280a and a second enhancement solution chamber fluid port 280b. The first enrichment solution chamber fluid port 280a may be fluidly connected to the first flow path unit 300a , and the second enrichment solution chamber fluid port 280b may be fluidly connected to the second flow path unit 300b . .

The first process chamber 106a and the second process chamber 106b may have substantially the same configuration. Both the first process chamber 106a and the second process chamber 106b may be placed on the ground and may be horizontally overlapped with each other. However, the present invention is not limited thereto, and as in the embodiment of FIG. 14 , the first process chamber 106a overlaps the cleaning chamber (not shown) in the gravitational direction, and the first process chamber 106a and the second process chamber 106a Chambers 106b may be non-overlapping in the horizontal direction.

In an exemplary embodiment, an internal space of any process chamber, for example, the first process chamber 106a may be smaller than an internal space of the fortification solution chamber 206 . Also, since the first process chamber 106a and the second process chamber 106b share one enhancement solution chamber 206 , the enhancement solution SS inside the enhancement solution chamber 206 may be shared with each other. That is, only one enhancement solution chamber 206 is provided for easy management of the temperature, ion concentration, residual amount, etc. of the enhancement solution SS, but one enhancement solution chamber 206 is fluidly connected to a plurality of process chambers Thus, process convenience can be improved.

In particular, in the strengthening process of ultra-thin glass, when the preheating process takes significantly more time than the strengthening process and/or the slow cooling process, for example, the time required for the preheating process is about 7 times that of the strengthening process or more, or about 8 times or more, or about 9 times or more, or about 10 times or more, or about 11 times or more, or about 12 times or more, the glass chemical strengthening facility 6 according to this embodiment provides great utility can do. This will be described later in detail together with FIG. 24 and the like.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

16 is a schematic view showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 16 , the glass chemical strengthening facility 7 according to this embodiment includes a first process chamber 107a and a second process chamber 107b that are fluidly connected to a certain strengthening solution chamber 207, The first process chamber 107a and the second process chamber 107b are different from the glass chemical strengthening facility 6 according to the embodiment of FIG. 15 in that they are overlapped in the gravitational direction, that is, in the vertical direction.

The second process chamber 107b may be disposed on the ground, and the first process chamber 107a may be disposed above the second process chamber 107b. The first process chamber 107a may be placed on the frame 900 and spaced apart from the ground by a predetermined distance. The first process chamber 107a and the second process chamber 107b may include substantially the same components.

In addition, although the present invention is not limited thereto, when the glass G is transferred using a loading/unloading unit (not shown), the cassette on which the glass G is mounted is introduced into the second process chamber 107b. To this end, the second process chamber 107b and the first process chamber 107a, specifically, the frame 900 and the second process chamber 107b may be spaced apart from each other by a predetermined distance.

In the present embodiment, the first process chamber 107a is connected to the first enhancement solution chamber fluid port 280a through the first flow path unit 300a, and the second process chamber 107b is connected to the second flow path unit 300b. ) is connected to the second reinforcement solution chamber fluid port 280b through the same as described above.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

17 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 17 , the glass chemical strengthening facility 8 according to the present embodiment includes a first process chamber 108a and a second process chamber 108b, and includes a first process chamber 108a and a second process chamber. The point 108b is different from the glass chemical strengthening facility 7 according to the embodiment of FIG. 16 in that it includes a side door 123 rather than a process chamber door that is opened and closed in the direction of gravity, respectively.

In a non-limiting example, the first process chamber 108a may lie directly on the second process chamber 108b, or may be disposed with other components interposed therebetween. That is, the load of the first process chamber 108a may be supported by the second process chamber 108b. The glass chemical strengthening facility 8 according to this embodiment can reduce the facility height in the vertical direction and promote process space efficiency.

The side door 123 may be sealed to prevent leakage of the chamber body 120 and the liquid strengthening solution SS. To this end, the side door 123 may use a plurality of sealing means (such as an O-ring) for sealing, or may have a fastening structure (rotational thread structure, etc.) for improving sealing force. 17 illustrates a case where the side door 123 occupies most of the side size of the first process chamber 108a or the second process chamber 108b, in another embodiment, the side door 123 is It may be disposed close to the upper side of the side with respect to the center line of the side of the chamber 108a and disposed close to the upper end of the side with respect to the center line of the side of the second process chamber 108b. In this case, it is possible to further prevent leakage of the strengthening solution SS.

In addition, at least one side of the side door 123 may be implemented as a hinge type, so that it may be opened and closed in the process chamber based on the hinge.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

18 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 18 , the glass chemical strengthening facility 9 according to the present embodiment includes a first process chamber 109a and a second process chamber 109b, and includes a first process chamber 109a and a second process chamber. Each of 109b is different from the glass chemical strengthening facility 8 according to the embodiment of FIG. 17 in that it is fluidly connected to one of the strengthening solution chamber fluid ports 280 . That is, the enhancement solution chamber 209 may be fluidly connected to the plurality of process chambers through one flow path unit.

The flow path unit may include one or more valves 330 and one or more pumps 310 and 311 . For example, the flow path unit may include a valve 330 and a first pump 311 and a second pump 310 . The first pump 311 may be positioned on a fluid path between the first process chamber 109a and the enhancement solution chamber 209 . Also, the second pump 310 may be located on the fluid path of the second process chamber 109b and the enhancement solution chamber 209 . On the other hand, the first process chamber 109a and the second process chamber 109b may share one valve 330 .

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

19 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 19 , the chemical glass strengthening facility 10 according to this embodiment is different from the glass chemical strengthening facility 9 according to the embodiment of FIG. 18 in that it shares one pump 310 .

The enhancement solution chamber 209 may be fluidly connected to the plurality of process chambers through one flow path unit. The flow path unit may include one or more valves 330 , 331 and one or more pumps 310 . For example, the flow path unit may include a pump 310 and a first valve 331 and a second valve 330 . The first valve 331 may be positioned on a fluid path between the first process chamber 110a and the enhancement solution chamber 209 . Also, the second valve 330 may be positioned on the fluid path between the second process chamber 110b and the enhancement solution chamber 209 . On the other hand, the first process chamber 110a and the second process chamber 110b may share one pump 310 .

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

20 is a schematic diagram showing a chemical strengthening facility for glass according to another embodiment of the present invention.

Referring to FIG. 20 , the glass chemical strengthening facility 11 according to the present embodiment includes a process chamber 111 and a strengthening solution chamber 211 , but a lifting unit 910 for elevating the process chamber 111 and reinforcement The point that the solution chamber 211 further includes a frame 920 spaced apart from the ground by a predetermined distance is different from the chemical glass strengthening facility 1 according to the embodiment of FIG. 1 .

The process chamber 111 may rest on the lifting unit 910 . The lifting unit 910 may lift the process chamber 111 in a gravity direction. On the other hand, the enhancement solution chamber 211 may maintain a state spaced apart from the ground by a predetermined level. That is, the frame 920 may fix the height of the reinforcement solution chamber 211 from the ground.

As the process chamber 111 is moved up and down, a level (ie, a height level) difference between the process chamber 111 and the enhancement solution chamber 211 may occur. For example, when the lifting unit 910 raises the process chamber 111 to a predetermined height or more, the level of the process chamber 111 , for example, the level of the process chamber fluid port 180 of the process chamber 111 is strengthened. The level of the solution chamber 211, for example, may be higher than the level of the enrichment solution chamber fluid port 280 . As another example, when the lifting unit 910 lowers the process chamber 111 to a predetermined height or less, the level of the process chamber 111 , for example, the level of the process chamber fluid port 180 of the process chamber 111 is The level of the enhancement solution chamber 211 may be lower than the level of the enhancement solution chamber fluid port 280 . In a non-limiting embodiment, the flow path unit 300 may not include a pump.

The glass chemical strengthening facility 11 according to the present embodiment may control the flow of the strengthening solution (SS) between the process chamber 111 and the strengthening solution chamber 211 by using gravity without a fluid control means such as a pump. However, the present invention is not limited thereto, and it is of course that a pump may be used as an auxiliary with the lifting unit 910 , or a lifting unit may be auxiliaryly used with fluid control through the pump.

Unlike the drawings, a plurality of process chambers are connected to one enhancement solution chamber 211 , and a lifting unit for individually raising and lowering each of the process chambers may be provided. In this case, as described above, the fortification solution chamber 211 has a relatively large internal space and a large amount of the fortification solution SS is always accommodated, and the process chamber 111 has a relatively small internal space and the process is performed. The reinforcing solution (SS) is accommodated only in the middle and may be relatively light in weight.

Accordingly, by controlling the flow of the strengthening solution SS by elevating the process chambers 111 instead of the strengthening solution chamber 211 , the power required for driving the lifting unit 910 is reduced, and each process chamber 111 is strengthened. The inflow and outflow of the solution SS can be controlled independently of each other.

Meanwhile, unlike shown in the drawings, in another embodiment, the process chamber 111 is placed on a frame having a fixed height, and the height of the strengthening solution chamber 211 is adjusted by a lifting unit, or the process chamber 111 ) and the strengthening solution chamber 211 may be configured to be placed on the lifting unit and adjusted in height.

Descriptions of other components have been omitted, and it may be understood from the accompanying drawings and the description of the foregoing embodiments.

Hereinafter, a chemical strengthening method of glass using the chemical glass strengthening facility 11 according to the present embodiment will be described. 21 is a flowchart illustrating a method for chemically strengthening glass according to another embodiment of the present invention. 22 and 23 are views sequentially illustrating a method of chemically strengthening glass using the chemical strengthening facility of FIG. 20 .

21 to 23 , the chemical strengthening method of glass according to this embodiment includes the steps of introducing the glass into the process chamber (S110), preheating the glass in the process chamber (S210), and controlling the lifting unit to introduce the strengthening solution into the process chamber (S320) and immersing the glass in the strengthening solution in the process chamber (S410). In some embodiments, the chemical strengthening method of glass includes controlling the lifting unit to flow out the strengthening solution from the process chamber (S520), slowly cooling the glass in the process chamber (S610), and withdrawing the glass from the process chamber (S710) and cleaning the glass in the cleaning chamber (S810) may be further included.

Since each of the steps has been described above, the overlapping description will be omitted and the step of introducing the strengthening solution (S320) and the step of flowing out (S520) will be described.

First, further referring to FIG. 22 , the process chamber 111 is moved downward using the lifting unit 910 . In this case, the level of the process chamber 111 is lower than the level of the enhancement solution chamber 211 , and specifically, the level of the process chamber fluid port 180 or the bottom of the process chamber 111 is lowered than the level of the enhancement solution chamber fluid port 280 or the It may be lower than the level of the bottom portion of the strengthening solution chamber 211 .

Accordingly, the enhancement solution SS may be introduced into the process chamber 111 from the enhancement solution chamber 211 . In some embodiments, the flow rate and amount of the strengthening solution SS may be controlled using the flow path unit 300 including a valve.

And the chemical strengthening is performed in a state in which the glass (G) is immersed in the strengthening solution (SS) as described above.

Then, further referring to FIG. 23 , the process chamber 111 is moved upwardly using the lifting unit 910 . In this case, the level of the process chamber 111 is higher than the level of the enhancement solution chamber 211 , and specifically, the level of the process chamber fluid port 180 or the bottom of the process chamber 111 is the enhancement solution chamber fluid port 280 or the strengthening solution chamber. It may be higher than the level of the bottom of the solution chamber 211 .

Accordingly, the enhancement solution SS may flow out from the process chamber 111 to the enhancement solution chamber 211 . In some embodiments, the flow rate and amount of the strengthening solution SS may be controlled using the flow path unit 300 including a valve.

In addition, the slow cooling is performed in a state in which the strengthening solution SS is not substantially present in the process chamber 111 as described above.

24 is a schematic diagram showing a chemical strengthening facility system for glass according to an embodiment of the present invention, and is a schematic diagram showing a layout in which chambers are arranged in a plan view.

Referring to FIG. 24 , the glass strengthening facility system 12 according to the present embodiment includes at least one strengthening solution chamber 201 , at least one process chamber 101a , 101b , 101c , 101d , and one or more loading/unloading It may include a unit 500a, 500b and one or more cleaning chambers 400a, 400b. In this specification, the terms 'equipment' and 'facility system' may be used interchangeably.

The process chambers 101a , 101b , 101c , and 101d are a first process chamber 101a , a second process chamber 101b , a third process chamber 101c , and a fourth process chamber 101d whose inner spaces are separated from each other. may include Each of the process chambers may be fluidly connected to one enhancement solution chamber 201 through the flow path unit 300 . However, the present invention is not limited thereto, and the process chambers 101a, 101b, 101c, 101d, the enhancement solution chamber 201, and the cleaning chambers 400a and 400b to be described later are in any one of the above-described embodiments. It may have an arrangement structure and a fluid connection structure according to the present invention.

In a plan view, the first process chamber 101a and the second process chamber 101b are positioned on one side with respect to the enhancement solution chamber 201 , and the third process chamber 101c and the fourth process chamber 101d are positioned on the other side. may be located on the side. That is, the first process chamber 101a , the second process chamber 101b , and the third process chamber 101c and the fourth process chamber 101d may be spaced apart from each other with the enhancement solution chamber 201 interposed therebetween. As described above, all of the first process chamber 101a and the fourth process chamber 101d are fluidly connected to one enhancement solution chamber 201 .

The cleaning chambers 400a and 400b may include a first cleaning chamber 400a and a second cleaning chamber 400b. The first cleaning chamber 400a and the second cleaning chamber 400b may be spaced apart from each other with the enhancement solution chamber 201 interposed therebetween. The first cleaning chamber 400a is provided to clean the chemically strengthened glass in the first process chamber 101a and the second process chamber 101b, and the second cleaning chamber 400b includes the third process chamber 101c. and the fourth process chamber 101d may be provided to clean the chemically strengthened glass.

Specifically, the first cleaning chamber 400a and the enhancement solution chamber 201 are spaced apart from each other with a certain process chamber, for example, the second process chamber 101b therebetween, and the second cleaning chamber 400b and the enhancement solution chamber ( The 201 may be spaced apart from any process chamber, for example, the fourth process chamber 101d interposed therebetween.

The loading/unloading units 500a and 500b may include a first loading/unloading unit 500a and a second loading/unloading unit 500b. Each of the first loading/unloading unit 500a and the second loading/unloading unit 500b may be a robot arm, but the present invention is not limited thereto.

The first loading/unloading unit 500a and the second loading/unloading unit 500b may be spaced apart from each other with the strengthening solution chamber 201 interposed therebetween. The first loading/unloading unit 500a includes glass or between the first process chamber 101a , the second process chamber 101b , the first cleaning chamber 400a , and the first loading/unloading zone 980 to be described later. Glass may be provided to transport the mounted cassette. Also, the second loading/unloading unit 500b is disposed between the third process chamber 101c, the fourth process chamber 101d, the second cleaning chamber 400b, and the second loading/unloading zone 990 to be described later. Glass or glass may be provided to transport the mounted cassette. That is, one loading/unloading unit 500a and 500b may perform entry and exit into and out of the plurality of reinforcement chambers.

The first loading/unloading zone 980 is the glass before strengthening within the movable range of the first loading/unloading unit 500a to introduce the glass into the first process chamber 101a and the second process chamber 101b. may be temporarily located or may be a space in which the glass is temporarily located after being strengthened by withdrawing the glass from the first process chamber 101a and the second process chamber 101b. In addition, the second loading/unloading zone 990 is strengthened within the movable range of the second loading/unloading unit 500b to introduce the glass into the third process chamber 101c and the fourth process chamber 101d. It may be a space in which the previous glass is temporarily located, or the glass after strengthening by withdrawing the glass from the third process chamber 101c and the fourth process chamber 101d is temporarily located.

The above-described one fortification solution chamber 201 and four process chambers 101a, 101b, 101c, 101d, a plurality of loading/unloading units 500a and 500b, and a plurality of cleaning chambers 400a and 400b. may form one process plant unit. The glass chemical strengthening facility system 12 arranged as above exhibits high process efficiency and can minimize the occupied process space.

Hereinafter, a process flow using the glass chemical strengthening facility system 12 according to the embodiment of FIG. 24 will be described. 25 and 26 are views showing the process flow of the chemical strengthening facility system of the glass of FIG.

25 and 26 , glass is introduced into the first process chamber 101a to the fourth process chamber 101d, respectively, and may be sequentially introduced with a predetermined time difference.

For example, the first glass or a cassette on which the first glass is mounted is introduced into the first process chamber 101a ( S111 ), and the first glass is preheated in the first process chamber 101a ( S211 ). Then, the strengthening solution is introduced into the first process chamber 101a and the first glass is chemically strengthened, and then the strengthening solution is discharged from the first process chamber 101a ( S411 ). Then, the first glass is slowly cooled in the first process chamber 101a ( S611 ).

Similarly, the second glass or a cassette on which the second glass is mounted is introduced into the second process chamber 101b ( S112 ), and the second glass is preheated in the second process chamber 101b ( S212 ). Then, the strengthening solution is introduced into the second process chamber 101b and the second glass is chemically strengthened, and then the strengthening solution is discharged from the second process chamber 101b ( S412 ). Then, the second glass is slowly cooled in the second process chamber 101b (S612).

At this time, the step of introducing the second glass into the second process chamber 101b ( S112 ) is performed later than the step of introducing the first glass into the first process chamber 101a ( S111 ), for example, the second process The step of introducing the second glass into the chamber 101b ( S112 ) may be performed while the first glass is preheated ( S211 ).

In addition, the preheating in the second process chamber 101b ( S212 ) may be performed later than the preheating in the first process chamber 101a ( S211 ) or may be performed at least partially simultaneously. In addition, while the chemical strengthening step S411 is performed in the first process chamber 101a or the moment the chemical strengthening step S411 is started in the first process chamber 101a, the second process chamber 101b is still preheating may be performed.

In addition, the chemical strengthening in the second process chamber 101b ( S412 ) may be performed later or at least later than the chemical strengthening in the first process chamber 101a ( S411 ). In this case, the chemical strengthening in the first process chamber 101a ( S411 ) may be performed at least partially simultaneously with the chemical strengthening in the second process chamber 101b ( S412 ).

For example, the step S611 in which the slow cooling is performed in the first process chamber 101a and the step S412 in which the chemical strengthening is performed in the second process chamber 101b may be performed at least partially simultaneously.

For another example, the starting point of introducing the fortification solution into the second process chamber 101b or the step of introducing the fortification solution may be performed after or after the step of flowing out the fortification solution from the first process chamber 101a, or 1 It may be performed after the time point at which the outflow of the fortification solution from the process chamber 101a starts. Alternatively, the step of introducing the enhancement solution into the second process chamber 101b may be performed at least partially simultaneously with the step of flowing out the enhancement solution from the first process chamber 101a.

Similarly, the third glass and the fourth glass or the cassette on which the third glass is mounted and the cassette on which the fourth glass is mounted are introduced into the third process chamber 101c and the fourth process chamber 101d, respectively (S113 and S114). Thereafter, the preheating steps (S213 and S214), the chemical strengthening steps (S413, S414) and the slow cooling steps (S613, S614) of the third glass and the fourth glass may be sequentially performed.

At this time, by the time difference between the first process chamber 101a and the second process chamber 101b described above, between the second process chamber 101b and the third process chamber 101c and between the third process chamber 101c and the third process chamber 101c There may be a time difference between the 4 process chambers 101d.

The glass chemical strengthening facility system 12 according to the present embodiment is proposed to efficiently use the process space, minimize the equipment, and minimize the amount of the strengthening solution. In the case of the strengthening solution, the price is very high, and it takes a lot of energy to maintain it at a constant temperature. Accordingly, by connecting one enhancement solution chamber 201 with a plurality of process chambers to share the enhancement solution, consumption of the enhancement solution may be minimized.

In addition, the present invention can achieve more efficient use of the strengthening solution by taking advantage of the fact that the time required for the preceding preheating step is longer than the time taken for the subsequent strengthening step.

That is, while the strengthening step S411 is performed in the first process chamber 101a, the strengthening step ( A time difference may be provided so that S412, S413, and S414) are not performed. Similarly, while the strengthening step S412 is performed in the second process chamber 101b, as a non-limiting example, the slow cooling step S611 is performed in the first process chamber 101a, and in the third process chamber 101c The preheating step ( S213 ) may be configured to be performed.

In this case, since the process chamber that actually performs the strengthening process is only one unit of the entire facility system 12, theoretically, only the amount of the strengthening solution required for glass chemical strengthening in one process chamber is four process chambers. In all, glass chemical strengthening can be performed sequentially.

In addition, since the strengthening solution moves between the plurality of process chambers 101a, 101b, 101c, and 101d and continuously performs the strengthening process, it is possible to reduce the time that the strengthening solution stays in any one chamber or tank, and the staying chamber It is possible to reduce the energy required to heat the strengthening solution to a constant temperature.

As described above, it may be preferable that the volume of the internal space of the fortification solution chamber 201 is greater than the volume of the internal space of any one of the process chambers in terms of securing a surplus of the fortification solution. However, as in the present embodiment, any one of the enhancement solution chamber 201 and the plurality of process chambers 101a, 101b, 101c, and 101d, for example, the four process chambers 101a, 101b, 101c, and 101d are one facility. When forming a unit, the volume of the internal space of the strengthening solution chamber 201, more specifically, the volume of the strengthening solution accommodated in the strengthening solution chamber 201, or the amount or volume of the strengthening solution required in one equipment unit is, The volume of the internal space of any one process chamber, or the amount of the strengthening solution required for chemical strengthening of the glass in any one process chamber may be less than four times. In particular, theoretically, even the amount or volume of strengthening solution required in one equipment unit may be substantially equal to the amount of strengthening solution required for chemical strengthening of glass in either process chamber.

Through the glass chemical strengthening facility system 12 having the above-described structure, there is an effect of efficiently managing the strengthening solution and reducing the manufacturing cost and the like.

27 is a view showing a process flow of a chemical strengthening facility system for glass according to another embodiment of the present invention.

Referring to FIG. 27 , in the process flow of the method for chemical strengthening of glass using the chemical strengthening facility system for glass according to the present embodiment, the first to fourth process chambers are fluidly connected to one strengthening solution chamber. It is different from the embodiment of FIG. 25 in that a process equipment unit is formed, but the process flow proceeds simultaneously in the first process chamber and the third process chamber, and the process flow proceeds simultaneously in the second process chamber and the fourth process chamber .

In the first process chamber and the second process chamber, one loading/unloading unit performs loading/unloading of glass, and the third process chamber and the fourth process chamber are loaded/unloading units of the glass by the other loading/unloading unit. In/out is performed as described above.

Also, as described above, a predetermined time difference exists between the first process chamber and the second process chamber and between the third process chamber and the fourth process chamber.

28 is a schematic diagram showing a chemical strengthening facility system for glass according to another embodiment of the present invention.

Referring to FIG. 28 , the glass chemical strengthening facility system 13 according to this embodiment is characterized in that the glass chemical strengthening facility system 12 to the facility unit according to FIG. 24 are repeatedly arranged. 28 illustrates a case in which the glass chemical strengthening facility system 12 according to FIG. 24 is repeated three times. However, the enhancement solution chamber may or may not be shared by each equipment unit.

In addition, the glass chemical strengthening facility system 13 may further include a plurality of conveyors. At least some of the conveyors may transport the glass to be strengthened, that is, the glass before strengthening, so that the loading/unloading units may introduce it into the process chamber. In addition, after strengthening and cleaning is finished, the glass may be placed on another conveyor by the loading/unloading unit and transferred.

In some embodiments, the cleaning chamber is not included in each process equipment unit, but may be configured such that cleaning is performed on a subsequent process after being withdrawn from the process chamber. To this end, a cleaning chamber may be disposed at the rear end of the equipment unit for the glass strengthening process. As described above, a robot arm can be used to enter and withdraw the glass into and out of the cleaning chamber.

By building such a glass chemical strengthening facility system 13, process automation can be achieved and a turn-key system can be implemented.

In the above, the embodiment of the present invention has been mainly described, but this is only an example and does not limit the present invention. It will be appreciated that various modifications and applications not exemplified above are possible.

Therefore, it should be understood that the scope of the present invention includes changes, equivalents or substitutes of the technical ideas exemplified above. For example, each component specifically shown in the embodiment of the present invention may be implemented by modification. And differences related to such modifications and applications should be construed as being included in the scope of the present invention defined in the appended claims.

1: Glass strengthening equipment
101: process chamber
201: fortified solution chamber
300: Euro unit
400: cleaning chamber
500: loading/unloading unit
600: controller

Claims (38)

a process chamber in which the glass is strengthened;
a strengthening solution chamber configured to receive a strengthening solution for strengthening the glass; and
and a flow path unit connecting the process chamber and the strengthening solution chamber and providing a movement path of the strengthening solution between the process chamber and the strengthening solution chamber. According to claim 1,
The process chamber is fluidly connected to the strengthening solution chamber so that the strengthening solution is introduced from the strengthening solution chamber or the strengthening solution is flowed out into the strengthening solution chamber. 3. The method of claim 2,
The process chamber is configured to introduce the strengthening solution before the start of the strengthening process, and to drain the strengthening solution when the strengthening process is completed. 3. The method of claim 2,
The process chamber has a plurality of fluid ports connected to the flow path unit, and a glass strengthening facility through which a strengthening solution is simultaneously introduced or discharged from the plurality of fluid ports. According to claim 1,
The process chamber includes a chamber body having an upper opening and a process chamber door closing the upper opening. 6. The method of claim 5,
The process chamber is located in the chamber body in a state in which the process chamber door closes the chamber body, and further comprises a sub-door configured to prevent corrosion of the process chamber door due to fume gas. According to claim 1,
The process chamber includes a cleaning nozzle disposed inside at least one of the chamber body and the process chamber door and cleaning the inner wall by spraying at least one of a liquid and a gas. According to claim 1,
The process chamber,
a temperature sensor that senses the internal temperature;
a level sensor for sensing the level of the internal strengthening solution, and
Glass strengthening equipment including at least one of the bubble generating portion disposed adjacent to the bottom portion. According to claim 1,
Glass strengthening equipment further comprising a lifting unit for controlling the level between the process chamber and the strengthening solution chamber by elevating the process chamber in the direction of gravity. According to claim 1,
The strengthening solution chamber is
a temperature sensor that senses the internal temperature;
a level sensor for sensing the level of the internal strengthening solution;
an ion sensor for sensing an ion concentration of the internal enhancement solution, and
Glass strengthening equipment including at least one of the bubble generating portion disposed adjacent to the bottom portion. According to claim 1,
The strengthening solution chamber includes a refill tank configured to replenish potassium ions therein. According to claim 1,
The inner space of the strengthening solution chamber is larger than the inner space of the process chamber glass strengthening equipment. According to claim 1,
The one strengthening solution chamber is fluidly connected to a plurality of process chambers through one or more flow passage units. 14. The method of claim 13,
The plurality of process chambers are disposed overlapping each other in the direction of gravity. 14. The method of claim 13,
The flow path unit comprises one or more valves and one or more pumps,
In the flow path between the strengthening solution chamber and the plurality of process chambers, the plurality of process chambers each share the valve or share a pump. According to claim 1,
Further comprising a cleaning chamber configured to receive a cleaning liquid therein,
The cleaning chamber and the process chamber are disposed to overlap in the direction of gravity. at least one enrichment solution chamber, a plurality of process chambers including a first process chamber and a second process chamber and fluidly connected to the enrichment solution chamber, at least one loading/unloading unit, and at least one cleaning chamber A glass strengthening facility system comprising:
A glass strengthening facility system configured to move a strengthening solution between the strengthening solution chamber and the first process chamber, and between the strengthening solution chamber and the second process chamber. 18. The method of claim 17,
The one loading/unloading unit is a glass strengthening equipment system for performing inlet and outlet into and out of a plurality of process chambers. 18. The method of claim 17,
The cleaning chamber includes a first cleaning chamber and a second cleaning chamber spaced apart from each other with the enhancement solution chamber therebetween,
The loading/unloading unit is a glass strengthening facility system including a first robot arm and a second robot arm spaced apart with the strengthening solution chamber interposed therebetween. 20. The method of claim 19,
The plurality of process chambers may include a third process chamber and a fourth process chamber spaced apart from the first process chamber and the second process chamber with the enhancement solution chamber interposed therebetween, and have a fluid volume with the one enhancement solution chamber. A glass strengthening facility system further comprising a third process chamber and a fourth process chamber connected to each other. 18. The method of claim 17,
One said fortification solution chamber and a plurality of n process chambers, wherein the plurality of process chambers fluidly connected to the fortification solution chamber constitute one equipment unit,
The amount of the strengthening solution accommodated in the strengthening solution chamber is,
A glass strengthening facility system, which is less than n times the amount of strengthening solution required for chemical strengthening of glass in either process chamber. introducing the glass into the process chamber;
preheating the glass in the process chamber;
after the preheating step, introducing a strengthening solution into the process chamber to immerse the heat-treated glass in the strengthening solution and chemically strengthening; and
After the strengthening step, the method of strengthening the glass comprising the step of flowing out the strengthening solution from the process chamber. 23. The method of claim 22,
after discharging the strengthening solution, slowly cooling the strengthened glass in the process chamber; and
The method of strengthening glass further comprising the step of withdrawing the strengthened glass from the process chamber. 23. The method of claim 22,
The method of strengthening glass further comprising the step of removing the remaining strengthening solution by washing the inner wall of the process chamber. 23. The method of claim 22,
The fortification solution is introduced from a certain fortification solution chamber and flows out into the fortification solution chamber,
The method of strengthening glass further comprising the step of sensing a potassium ion concentration of the strengthening solution in the strengthening solution chamber. 23. The method of claim 22,
The step of introducing the fortification solution includes lowering the process chamber to position the fortification solution at a lower level than that of the fortification solution chamber in which the fortification solution is accommodated,
The step of discharging the strengthening solution includes raising the process chamber to a higher level than the strengthening solution chamber. 23. The method of claim 22,
The step of introducing the glass into the process chamber includes introducing the first glass into the first process chamber and introducing the second glass into the second process chamber,
The first process chamber and the second process chamber are fluidly connected to the same enhancement solution chamber,
The preheating of the first glass and the preheating of the second glass are performed at least partially simultaneously,
While the strengthening step of the first glass is performed, the preheating step of the second glass is even performed. 23. The method of claim 22,
The step of introducing the glass into the process chamber includes introducing the first glass into the first process chamber and introducing the second glass into the second process chamber,
The step of introducing the strengthening solution into the second process chamber is performed after the step of flowing out the strengthening solution from the first process chamber, or at least simultaneously with the strengthening method of glass. 29. The method of claim 28,
While the strengthening step of the second glass is performed, the glass strengthening method in which the slow cooling step of the first glass is performed. 23. The method of claim 22,
In the step of introducing the glass, the longitudinal direction of the glass is directed in the horizontal direction, and the width direction or the thickness direction of the glass is drawn in such that the direction of gravity is the chemical strengthening method of the glass. a chamber body including an internal space for sequentially performing preheating, strengthening, and slow cooling by introducing glass therein;
a process chamber door sealing the chamber body; and
The process chamber including at least one fluid port for injecting the strengthening solution before the strengthening or discharging the strengthening solution after the strengthening to one side of the chamber body. 32. The method of claim 31,
At least one of the chamber body and the process chamber door,
and a heater for heating the glass or the strengthening solution. 32. The method of claim 31,
The process chamber door,
coupled to the chamber body in a direction perpendicular to gravity;
The process chamber,
A process chamber in which an opening is formed in an upper surface to which the process chamber door is coupled. 32. The method of claim 31,
The process chamber door is
coupled to the chamber body in a direction parallel to gravity;
The process chamber,
A process chamber in which an opening is formed in a side surface to which the process chamber door is coupled. 32. The method of claim 31,
and a cleaning nozzle attached to an inner side of at least one of the chamber body or the process chamber door and spraying at least one of a liquid and a gas for cleaning an inner wall of the process chamber. 32. The method of claim 31,
The process chamber further comprising a pump for introducing or discharging the strengthening solution using the at least one fluid port. 32. The method of claim 31,
A lift coupled to a portion of the chamber body to lower the chamber body toward the ground so that the reinforcing solution is introduced using the at least one fluid port or to raise the chamber body in the opposite direction to the ground so that the reinforcing solution is discharged Process chamber further comprising a. 32. The method of claim 31,
A temperature sensor and a level sensor coupled to at least one of the chamber body and the process chamber door,
a temperature sensor for sensing an internal temperature of the process chamber; and
and at least one of a level sensor sensing a level of the enhancement solution inside the process chamber.

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