KR20220111661A - 처리 용기와 플라즈마 처리 장치 및 처리 용기의 제조 방법 - Google Patents

처리 용기와 플라즈마 처리 장치 및 처리 용기의 제조 방법 Download PDF

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Publication number
KR20220111661A
KR20220111661A KR1020220010038A KR20220010038A KR20220111661A KR 20220111661 A KR20220111661 A KR 20220111661A KR 1020220010038 A KR1020220010038 A KR 1020220010038A KR 20220010038 A KR20220010038 A KR 20220010038A KR 20220111661 A KR20220111661 A KR 20220111661A
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KR
South Korea
Prior art keywords
insulating film
plasma
processing
film
protective face
Prior art date
Application number
KR1020220010038A
Other languages
English (en)
Korean (ko)
Inventor
료 사토
즈토무 사토요시
도시히로 가사하라
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20220111661A publication Critical patent/KR20220111661A/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32495—Means for protecting the vessel against plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32467—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3321—CVD [Chemical Vapor Deposition]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
KR1020220010038A 2021-02-02 2022-01-24 처리 용기와 플라즈마 처리 장치 및 처리 용기의 제조 방법 KR20220111661A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2021-015287 2021-02-02
JP2021015287A JP2022118626A (ja) 2021-02-02 2021-02-02 処理容器とプラズマ処理装置、及び処理容器の製造方法

Publications (1)

Publication Number Publication Date
KR20220111661A true KR20220111661A (ko) 2022-08-09

Family

ID=82562151

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020220010038A KR20220111661A (ko) 2021-02-02 2022-01-24 처리 용기와 플라즈마 처리 장치 및 처리 용기의 제조 방법

Country Status (4)

Country Link
JP (1) JP2022118626A (ja)
KR (1) KR20220111661A (ja)
CN (1) CN114843166A (ja)
TW (1) TW202242999A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009140939A (ja) 2007-12-03 2009-06-25 Tokyo Electron Ltd 処理容器およびプラズマ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009140939A (ja) 2007-12-03 2009-06-25 Tokyo Electron Ltd 処理容器およびプラズマ処理装置

Also Published As

Publication number Publication date
TW202242999A (zh) 2022-11-01
CN114843166A (zh) 2022-08-02
JP2022118626A (ja) 2022-08-15

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