KR20220110281A - 압력 감지 장치 - Google Patents

압력 감지 장치 Download PDF

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Publication number
KR20220110281A
KR20220110281A KR1020227023112A KR20227023112A KR20220110281A KR 20220110281 A KR20220110281 A KR 20220110281A KR 1020227023112 A KR1020227023112 A KR 1020227023112A KR 20227023112 A KR20227023112 A KR 20227023112A KR 20220110281 A KR20220110281 A KR 20220110281A
Authority
KR
South Korea
Prior art keywords
sensing device
pressure sensing
diaphragm
pressure
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020227023112A
Other languages
English (en)
Korean (ko)
Inventor
쉬 펑
선 쿤
리 즈펑
Original Assignee
페라테크 홀드코 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 페라테크 홀드코 리미티드 filed Critical 페라테크 홀드코 리미티드
Publication of KR20220110281A publication Critical patent/KR20220110281A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020227023112A 2019-12-13 2020-12-11 압력 감지 장치 Pending KR20220110281A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CNZL201922244791.3 2019-12-13
CN201922244791.3U CN210862999U (zh) 2019-12-13 2019-12-13 一种薄膜微压力传感器
PCT/GB2020/000098 WO2021116641A1 (en) 2019-12-13 2020-12-11 Pressure sensing device

Publications (1)

Publication Number Publication Date
KR20220110281A true KR20220110281A (ko) 2022-08-05

Family

ID=71291335

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227023112A Pending KR20220110281A (ko) 2019-12-13 2020-12-11 압력 감지 장치

Country Status (6)

Country Link
US (1) US20230012518A1 (https=)
EP (1) EP4073482A1 (https=)
JP (1) JP7753210B2 (https=)
KR (1) KR20220110281A (https=)
CN (1) CN210862999U (https=)
WO (1) WO2021116641A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110887588B (zh) * 2019-12-13 2025-05-27 佩拉泰克知识产权有限公司 一种薄膜微压力传感器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
EP1128172B1 (de) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Drucksensor
JP2004028883A (ja) * 2002-06-27 2004-01-29 Denso Corp 感圧センサ
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
DE102006039422A1 (de) * 2005-08-23 2007-03-15 Continental Teves Ag & Co. Ohg Drucksensor für hydraulische Medien in Kraftfahrzeugbremssystemen und dessen Verwendung
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
JP5834735B2 (ja) * 2011-10-03 2015-12-24 ミツミ電機株式会社 入力装置及びゲーム装置
JP2014020953A (ja) * 2012-07-19 2014-02-03 Azbil Corp 差圧・圧力発信器
EP2746743A1 (en) * 2012-12-20 2014-06-25 China Medical University Pressure measurement member
US20140203953A1 (en) * 2013-01-21 2014-07-24 George Moser Tablet computer with integrated tactile keyboard
DE102014118616A1 (de) * 2014-12-15 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckmessaufnehmer
JP6087394B2 (ja) * 2015-06-17 2017-03-01 日本写真印刷株式会社 表示一体型入力装置
US10549982B2 (en) * 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
JP2018159593A (ja) * 2017-03-22 2018-10-11 アズビル株式会社 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
JP6762896B2 (ja) * 2017-03-22 2020-09-30 アズビル株式会社 圧力センサチップ、圧力発信器、および圧力センサチップの製造方法
JP2019125129A (ja) * 2018-01-16 2019-07-25 株式会社東海理化電機製作所 静電検出装置
WO2019167688A1 (ja) * 2018-02-28 2019-09-06 パナソニックＩｐマネジメント株式会社 感圧装置

Also Published As

Publication number Publication date
EP4073482A1 (en) 2022-10-19
WO2021116641A1 (en) 2021-06-17
US20230012518A1 (en) 2023-01-19
CN210862999U (zh) 2020-06-26
JP7753210B2 (ja) 2025-10-14
JP2023506804A (ja) 2023-02-20

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