JP7753210B2 - 感圧装置 - Google Patents

感圧装置

Info

Publication number
JP7753210B2
JP7753210B2 JP2022535916A JP2022535916A JP7753210B2 JP 7753210 B2 JP7753210 B2 JP 7753210B2 JP 2022535916 A JP2022535916 A JP 2022535916A JP 2022535916 A JP2022535916 A JP 2022535916A JP 7753210 B2 JP7753210 B2 JP 7753210B2
Authority
JP
Japan
Prior art keywords
pressure
sensing device
diaphragm
force
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022535916A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023506804A (ja
JP2023506804A5 (https=
Inventor
シュー フォン，
サン クン，
リー ゼファン，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peratech Ltd
Original Assignee
Peratech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Peratech Ltd filed Critical Peratech Ltd
Publication of JP2023506804A publication Critical patent/JP2023506804A/ja
Publication of JP2023506804A5 publication Critical patent/JP2023506804A5/ja
Application granted granted Critical
Publication of JP7753210B2 publication Critical patent/JP7753210B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP2022535916A 2019-12-13 2020-12-11 感圧装置 Active JP7753210B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201922244791.3 2019-12-13
CN201922244791.3U CN210862999U (zh) 2019-12-13 2019-12-13 一种薄膜微压力传感器
PCT/GB2020/000098 WO2021116641A1 (en) 2019-12-13 2020-12-11 Pressure sensing device

Publications (3)

Publication Number Publication Date
JP2023506804A JP2023506804A (ja) 2023-02-20
JP2023506804A5 JP2023506804A5 (https=) 2023-12-19
JP7753210B2 true JP7753210B2 (ja) 2025-10-14

Family

ID=71291335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022535916A Active JP7753210B2 (ja) 2019-12-13 2020-12-11 感圧装置

Country Status (6)

Country Link
US (1) US20230012518A1 (https=)
EP (1) EP4073482A1 (https=)
JP (1) JP7753210B2 (https=)
KR (1) KR20220110281A (https=)
CN (1) CN210862999U (https=)
WO (1) WO2021116641A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110887588B (zh) * 2019-12-13 2025-05-27 佩拉泰克知识产权有限公司 一种薄膜微压力传感器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013080325A (ja) 2011-10-03 2013-05-02 Mitsumi Electric Co Ltd 入力装置及びゲーム装置
JP2017010106A (ja) 2015-06-17 2017-01-12 日本写真印刷株式会社 表示一体型入力装置
JP2019125129A (ja) 2018-01-16 2019-07-25 株式会社東海理化電機製作所 静電検出装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
EP1128172B1 (de) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Drucksensor
JP2004028883A (ja) * 2002-06-27 2004-01-29 Denso Corp 感圧センサ
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
DE102006039422A1 (de) * 2005-08-23 2007-03-15 Continental Teves Ag & Co. Ohg Drucksensor für hydraulische Medien in Kraftfahrzeugbremssystemen und dessen Verwendung
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
JP2014020953A (ja) * 2012-07-19 2014-02-03 Azbil Corp 差圧・圧力発信器
EP2746743A1 (en) * 2012-12-20 2014-06-25 China Medical University Pressure measurement member
US20140203953A1 (en) * 2013-01-21 2014-07-24 George Moser Tablet computer with integrated tactile keyboard
DE102014118616A1 (de) * 2014-12-15 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckmessaufnehmer
US10549982B2 (en) * 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
JP2018159593A (ja) * 2017-03-22 2018-10-11 アズビル株式会社 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
JP6762896B2 (ja) * 2017-03-22 2020-09-30 アズビル株式会社 圧力センサチップ、圧力発信器、および圧力センサチップの製造方法
WO2019167688A1 (ja) * 2018-02-28 2019-09-06 パナソニックＩｐマネジメント株式会社 感圧装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013080325A (ja) 2011-10-03 2013-05-02 Mitsumi Electric Co Ltd 入力装置及びゲーム装置
JP2017010106A (ja) 2015-06-17 2017-01-12 日本写真印刷株式会社 表示一体型入力装置
JP2019125129A (ja) 2018-01-16 2019-07-25 株式会社東海理化電機製作所 静電検出装置

Also Published As

Publication number Publication date
KR20220110281A (ko) 2022-08-05
EP4073482A1 (en) 2022-10-19
WO2021116641A1 (en) 2021-06-17
US20230012518A1 (en) 2023-01-19
CN210862999U (zh) 2020-06-26
JP2023506804A (ja) 2023-02-20

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