CN210862999U - 一种薄膜微压力传感器 - Google Patents

一种薄膜微压力传感器 Download PDF

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Publication number
CN210862999U
CN210862999U CN201922244791.3U CN201922244791U CN210862999U CN 210862999 U CN210862999 U CN 210862999U CN 201922244791 U CN201922244791 U CN 201922244791U CN 210862999 U CN210862999 U CN 210862999U
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CN
China
Prior art keywords
deformable
cavity
diaphragm
thin
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201922244791.3U
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English (en)
Chinese (zh)
Inventor
孙坤
徐锋
李泽峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peratek Intellectual Property Co ltd
Original Assignee
Pairui Electronic Technology Suzhou Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Pairui Electronic Technology Suzhou Co ltd filed Critical Pairui Electronic Technology Suzhou Co ltd
Priority to CN201922244791.3U priority Critical patent/CN210862999U/zh
Application granted granted Critical
Publication of CN210862999U publication Critical patent/CN210862999U/zh
Priority to KR1020227023112A priority patent/KR20220110281A/ko
Priority to US17/784,699 priority patent/US20230012518A1/en
Priority to JP2022535916A priority patent/JP7753210B2/ja
Priority to EP20828056.0A priority patent/EP4073482A1/en
Priority to PCT/GB2020/000098 priority patent/WO2021116641A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0028—Force sensors associated with force applying means
    • G01L5/0038—Force sensors associated with force applying means applying a pushing force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
CN201922244791.3U 2019-12-13 2019-12-13 一种薄膜微压力传感器 Active CN210862999U (zh)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201922244791.3U CN210862999U (zh) 2019-12-13 2019-12-13 一种薄膜微压力传感器
KR1020227023112A KR20220110281A (ko) 2019-12-13 2020-12-11 압력 감지 장치
US17/784,699 US20230012518A1 (en) 2019-12-13 2020-12-11 Pressure Sensing Device
JP2022535916A JP7753210B2 (ja) 2019-12-13 2020-12-11 感圧装置
EP20828056.0A EP4073482A1 (en) 2019-12-13 2020-12-11 Pressure sensing device
PCT/GB2020/000098 WO2021116641A1 (en) 2019-12-13 2020-12-11 Pressure sensing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201922244791.3U CN210862999U (zh) 2019-12-13 2019-12-13 一种薄膜微压力传感器

Publications (1)

Publication Number Publication Date
CN210862999U true CN210862999U (zh) 2020-06-26

Family

ID=71291335

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201922244791.3U Active CN210862999U (zh) 2019-12-13 2019-12-13 一种薄膜微压力传感器

Country Status (6)

Country Link
US (1) US20230012518A1 (https=)
EP (1) EP4073482A1 (https=)
JP (1) JP7753210B2 (https=)
KR (1) KR20220110281A (https=)
CN (1) CN210862999U (https=)
WO (1) WO2021116641A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110887588A (zh) * 2019-12-13 2020-03-17 湃瑞电子科技(苏州)有限公司 一种薄膜微压力传感器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732042A (en) * 1986-04-22 1988-03-22 Motorola Inc. Cast membrane protected pressure sensor
EP1128172B1 (de) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Drucksensor
JP2004028883A (ja) * 2002-06-27 2004-01-29 Denso Corp 感圧センサ
JP2007502416A (ja) * 2003-08-11 2007-02-08 アナログ デバイシーズ インク 容量型センサ
DE102006039422A1 (de) * 2005-08-23 2007-03-15 Continental Teves Ag & Co. Ohg Drucksensor für hydraulische Medien in Kraftfahrzeugbremssystemen und dessen Verwendung
DE102007026243A1 (de) * 2007-06-04 2008-12-11 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
JP5834735B2 (ja) * 2011-10-03 2015-12-24 ミツミ電機株式会社 入力装置及びゲーム装置
JP2014020953A (ja) * 2012-07-19 2014-02-03 Azbil Corp 差圧・圧力発信器
EP2746743A1 (en) * 2012-12-20 2014-06-25 China Medical University Pressure measurement member
US20140203953A1 (en) * 2013-01-21 2014-07-24 George Moser Tablet computer with integrated tactile keyboard
DE102014118616A1 (de) * 2014-12-15 2016-06-16 Endress + Hauser Gmbh + Co. Kg Druckmessaufnehmer
JP6087394B2 (ja) * 2015-06-17 2017-03-01 日本写真印刷株式会社 表示一体型入力装置
US10549982B2 (en) * 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
JP2018159593A (ja) * 2017-03-22 2018-10-11 アズビル株式会社 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
JP6762896B2 (ja) * 2017-03-22 2020-09-30 アズビル株式会社 圧力センサチップ、圧力発信器、および圧力センサチップの製造方法
JP2019125129A (ja) * 2018-01-16 2019-07-25 株式会社東海理化電機製作所 静電検出装置
WO2019167688A1 (ja) * 2018-02-28 2019-09-06 パナソニックＩｐマネジメント株式会社 感圧装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110887588A (zh) * 2019-12-13 2020-03-17 湃瑞电子科技(苏州)有限公司 一种薄膜微压力传感器
CN110887588B (zh) * 2019-12-13 2025-05-27 佩拉泰克知识产权有限公司 一种薄膜微压力传感器

Also Published As

Publication number Publication date
KR20220110281A (ko) 2022-08-05
EP4073482A1 (en) 2022-10-19
WO2021116641A1 (en) 2021-06-17
US20230012518A1 (en) 2023-01-19
JP7753210B2 (ja) 2025-10-14
JP2023506804A (ja) 2023-02-20

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GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20250226

Address after: British North Yorkshire

Patentee after: Peratek Intellectual Property Co.,Ltd.

Country or region after: Britain

Address before: Room 1503, 15 / F, N1 building, 88 Dongchang Road, Suzhou Industrial Park, Jiangsu Province 215000

Patentee before: Pairui Electronic Technology (Suzhou) Co.,Ltd.

Country or region before: China

TR01 Transfer of patent right