FR3105826A1 - Capteur de basse pression avec nervures de raidissement - Google Patents

Capteur de basse pression avec nervures de raidissement Download PDF

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Publication number
FR3105826A1
FR3105826A1 FR2014192A FR2014192A FR3105826A1 FR 3105826 A1 FR3105826 A1 FR 3105826A1 FR 2014192 A FR2014192 A FR 2014192A FR 2014192 A FR2014192 A FR 2014192A FR 3105826 A1 FR3105826 A1 FR 3105826A1
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FR
France
Prior art keywords
membrane
silicon
layer
etched
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR2014192A
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English (en)
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FR3105826B1 (fr
Inventor
Jose Alfaro Perez
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Measurement Specialties Inc Us
Original Assignee
Silicon Microstructures Inc
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Publication of FR3105826A1 publication Critical patent/FR3105826A1/fr
Application granted granted Critical
Publication of FR3105826B1 publication Critical patent/FR3105826B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Des capteurs de pression MEMS à semi-conducteur (100) peuvent produire un signal de sortie linéaire et important lorsqu'ils sont soumis à une petite pression, sans une augmentation de l'erreur d'échelle avant-arrière. Un exemple peut subir des déformations importantes sans provoquer une détérioration catastrophique de la membrane. Le capteur de pression (100) peut inclure une couche de silicium (600) ayant des surfaces opposées, un motif gravé dans l’une des surfaces de la couche de silicium (600), et une cavité gravée (720) sur la surface opposée de la couche de silicium (600) pour former une membrane (400). Le motif gravé peut inclure une série de nervures de raidissement concentriques (520, 530, 540), un bossage inversé (510), de grandes zones d'enfoncement (640) à proximité du bord de la membrane (400) et/ou du bossage (510), et des concentrateurs de contrainte piézorésistifs (650). Les nervures (520, 530, 540) et les enfoncements (610, 640) peuvent être formés sur la membrane de silicium (400) par des techniques de gravure anisotrope ou isotrope. Des dispositifs piézorésistifs (310) peuvent être diffusés dans la membrane (400), dans les régions à proximité des concentrateurs de contrainte (650) pour former un pont de Wheatstone ou une autre structure de mesure. Figure pour l’abrégé: Figure 1
FR2014192A 2019-12-29 2020-12-28 Capteur de basse pression avec nervures de raidissement Active FR3105826B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/729,442 US11473991B2 (en) 2019-12-29 2019-12-29 Low-pressure sensor with stiffening ribs
US16/729,442 2019-12-29

Publications (2)

Publication Number Publication Date
FR3105826A1 true FR3105826A1 (fr) 2021-07-02
FR3105826B1 FR3105826B1 (fr) 2023-07-21

Family

ID=76547333

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2014192A Active FR3105826B1 (fr) 2019-12-29 2020-12-28 Capteur de basse pression avec nervures de raidissement

Country Status (2)

Country Link
US (1) US11473991B2 (fr)
FR (1) FR3105826B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115265854A (zh) * 2022-07-27 2022-11-01 南京高华科技股份有限公司 一种压力传感器及其制备方法

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* Cited by examiner, † Cited by third party
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JPH09329516A (ja) 1996-06-06 1997-12-22 Hitachi Ltd 半導体圧力センサ及びこれを用いた複合伝送器
US6168906B1 (en) * 1998-05-26 2001-01-02 The Charles Stark Draper Laboratory, Inc. Micromachined membrane with locally compliant and stiff regions and method of making same
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US6988412B1 (en) 2004-11-30 2006-01-24 Endevco Corporation Piezoresistive strain concentrator
JP4617943B2 (ja) * 2005-03-18 2011-01-26 株式会社日立製作所 力学量測定装置
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FR2901264B1 (fr) * 2006-05-22 2008-10-10 Commissariat Energie Atomique Microcomposant muni d'une cavite delimitee par un capot a resistance mecanique amelioree
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Also Published As

Publication number Publication date
FR3105826B1 (fr) 2023-07-21
US11473991B2 (en) 2022-10-18
US20210199527A1 (en) 2021-07-01

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