KR20210148844A - 저장기기 및 저장 시스템 - Google Patents

저장기기 및 저장 시스템 Download PDF

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Publication number
KR20210148844A
KR20210148844A KR1020210001449A KR20210001449A KR20210148844A KR 20210148844 A KR20210148844 A KR 20210148844A KR 1020210001449 A KR1020210001449 A KR 1020210001449A KR 20210001449 A KR20210001449 A KR 20210001449A KR 20210148844 A KR20210148844 A KR 20210148844A
Authority
KR
South Korea
Prior art keywords
chamber
bearing frame
processing device
storage device
temperature
Prior art date
Application number
KR1020210001449A
Other languages
English (en)
Korean (ko)
Inventor
훙핑 황
신지에 원
Original Assignee
미를 오토메이션 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW109132368A external-priority patent/TWI742861B/zh
Application filed by 미를 오토메이션 코포레이션 filed Critical 미를 오토메이션 코포레이션
Publication of KR20210148844A publication Critical patent/KR20210148844A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G60/00—Simultaneously or alternatively stacking and de-stacking of articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D13/00—Stationary devices, e.g. cold-rooms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020210001449A 2020-05-29 2021-01-06 저장기기 및 저장 시스템 KR20210148844A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202063031806P 2020-05-29 2020-05-29
US63/031,806 2020-05-29
TW109132368A TWI742861B (zh) 2020-05-29 2020-09-18 倉儲設備及倉儲系統
TW109132368 2020-09-18

Publications (1)

Publication Number Publication Date
KR20210148844A true KR20210148844A (ko) 2021-12-08

Family

ID=77069740

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210001449A KR20210148844A (ko) 2020-05-29 2021-01-06 저장기기 및 저장 시스템

Country Status (4)

Country Link
JP (1) JP7234271B2 (zh)
KR (1) KR20210148844A (zh)
CN (2) CN113734673B (zh)
SG (1) SG10202102893UA (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113734673B (zh) * 2020-05-29 2023-04-21 盟立自动化股份有限公司 仓储设备及仓储系统
CN114988097B (zh) * 2022-06-28 2024-09-17 魅杰光电科技(上海)有限公司 物料运输设备及加工系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5233844A (en) * 1991-08-15 1993-08-10 Cryo-Cell International, Inc. Storage apparatus, particularly with automatic insertion and retrieval
JP2001315906A (ja) * 2000-05-12 2001-11-13 Murata Mach Ltd 解凍システム
JP2004073763A (ja) * 2002-08-12 2004-03-11 Sendak Corp ショーケース用棚段照明装置
EP2050132B1 (de) * 2006-07-26 2021-03-10 Tec-Sem AG Vorrichtung zur lagerung von objekten aus dem bereich der fertigung von elektronischen bauteilen
JP6099394B2 (ja) * 2012-12-28 2017-03-22 三菱電機株式会社 除湿管理装置、除湿装置、除湿管理方法およびプログラム
CN113734673B (zh) * 2020-05-29 2023-04-21 盟立自动化股份有限公司 仓储设备及仓储系统

Also Published As

Publication number Publication date
CN113734673B (zh) 2023-04-21
SG10202102893UA (en) 2021-12-30
CN213863864U (zh) 2021-08-03
JP2021187677A (ja) 2021-12-13
CN113734673A (zh) 2021-12-03
JP7234271B2 (ja) 2023-03-07

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E701 Decision to grant or registration of patent right