KR20210148844A - Storage equipment and a storage system - Google Patents

Abstract

The present invention provides a storage device and a storage system. The storage system includes a storage device, a transport device, and a processing device. The processing device can control the transport device to take a bearing frame and articles loaded thereon out of a freezer and install them in the storage device. The storage device includes a processing device, a transport device, a first chamber and a second chamber. The processing device controls the transport device so that the bearing frame and the articles loaded thereon can be moved and stored in the first chamber. The processing device also controls the transport device to move the bearing frame stored in the first chamber to the second chamber. The temperature in the first chamber is between minus 5 to 15 degrees and the temperature in the second chamber is 20 to 25 degrees.

Description

STORAGE EQUIPMENT AND A STORAGE SYSTEM

The present invention relates to a storage device and a storage system, and more particularly, to a storage device capable of simultaneous storage, freezing and refrigeration.

Materials to be used in some semiconductor manufacturing processes must be stored in a refrigerated environment. If the manufacturing operation requires the use of this material, the personnel involved must first withdraw the material from the freezer, place it in a room temperature environment, and thaw it until the material is approximately room temperature before the manufacturing process begins. Again, this is put into the work of the related manufacturing process.

As described above, in actual application, the relevant personnel take out the material from the freezer, install it on a table in a room temperature environment, wait until the temperature of the material is generally the same as room temperature, and then put it back into the related manufacturing process. These work processes and methods consume manpower and are prone to errors.

The present invention discloses a storage device, mainly by improving the method using wet manpower, taking out the product installed in the freezer, placing it in a room temperature environment, and then putting it into the related production work when the temperature of the product reaches room temperature This is to solve the various inconveniences and problems brought about.

An embodiment of the present invention discloses a storage device, which is provided to store a plurality of bearing frames for loading articles, the storage device comprising: a body, a processing device, a transport device, at least one first chamber, at least one first chamber; It includes a two chamber, a temperature barrier plate and at least one environmental control device. The body includes an entrance. The conveying device includes a telescoping mechanism, a rotating mechanism and a fixing assembly, wherein the telescoping mechanism is connected to the rotating mechanism, the fixing assembly is connected to the telescopic mechanism, and the fixing assembly is fixed to the bearing frame; the conveying device is electrically connected to the processing device and the processing device controls the telescoping mechanism to cause the securing assembly to move forward or backward relative to the rotating mechanism; The processing device may control the rotation mechanism to cause the telescoping mechanism and the immobilization assembly to rotate. A first chamber is provided to enclose the transport device and the first chamber accommodates a plurality of bearing frames. The second chamber is installed to surround the transport device, the second chamber is located above the first chamber, and the second chamber can accommodate a plurality of bearing frames. The temperature barrier plate is installed between the first chamber and the second chamber to block heat energy inside the first chamber and heat energy inside the second chamber from being transmitted to each other. the environmental control device is electrically connected to the processing device, and the processing device controls the environmental control device so that the temperature of the first chamber is not higher than the first temperature and the temperature of the second chamber is not higher than the second temperature; Here, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature. Here, the processing device may control the transport device to cause the immobilization assembly to move and seat the bearing frame located at the entrance to the first chamber or the second chamber, and the processing device may control the transport device to cause the immobilization assembly to move to the first chamber. Alternatively, the bearing frame located in the second chamber may be transported to the entrance.

One embodiment of the present invention discloses a storage system comprising a storage device, a transport device and a processing device. A storage device provided to store a plurality of bearing frames for loading articles comprises a body, a processing device, a transport device, at least one first chamber, at least one second chamber, a temperature barrier plate and at least one environmental control device. include The body includes a carrier and a doorway for seating the bearing frame. The conveying device includes a telescoping mechanism, a rotating mechanism and a fixing assembly, wherein the telescoping mechanism is connected to the rotating mechanism, the fixing assembly is connected to the telescopic mechanism, and the fixing assembly is fixed to the bearing frame; the conveying device is electrically connected to the processing device and the processing device controls the telescoping mechanism to cause the securing assembly to move forward or backward relative to the rotating mechanism; The processing device may control the rotation mechanism to cause the telescoping mechanism and the immobilization assembly to rotate. A first chamber is provided to enclose the transport device and the first chamber accommodates a plurality of bearing frames. The second chamber is installed to surround the transport device, the second chamber is located above the first chamber, and the second chamber accommodates a plurality of bearing frames. The temperature barrier plate is installed between the first chamber and the second chamber to block heat energy inside the first chamber and heat energy inside the second chamber from being transmitted to each other. the environmental control device is electrically connected to the processing device, and the processing device controls the environmental control device so that the temperature of the first chamber is not higher than the first temperature and the temperature of the second chamber is not higher than the second temperature; Here, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature. Here, the processing device controls the transport device to cause the immobilization assembly to seat the bearing frame located on the carrier in the first chamber or the second chamber through the doorway, and the processing device controls the transport device to cause the immobilization assembly to move to the first chamber. Alternatively, the bearing frame located in the second chamber passes through the doorway to be seated on the carrier. The transport device transports the bearing frame and the articles loaded thereon from the freezer to the carrier of the storage device. the processing device may receive the demand information and control the transport device according to the demand information to take the at least one bearing frame and the articles loaded thereon from the freezer and transport it to the carrier; The processing device controls the transport device according to the demand information to move the bearing frame installed in the carrier and the articles loaded thereto to the first chamber, and the processing device moves the bearing frame and the articles loaded thereto to the first chamber for a certain time according to the demand information. After installation, the bearing frame and the articles loaded therein can be transported to the second chamber.

Summarizing the above contents, the storage device and storage system of the present invention enable the relevant personnel to more conveniently store the bearing frame and articles taken out of the freezer through the design of the processing device and the transport device.

In order to further understand the characteristics and technical content of the present invention, reference may be made to the following detailed description and drawings related to the present invention, but these descriptions and drawings are only for explaining the present invention and are not intended to limit the protection scope of the present invention no.

1 is a schematic diagram of a storage device of the present invention.
2 is a block schematic diagram of a storage device of the present invention.
Figure 3 is a local cross-sectional schematic view of the storage device of the present invention.
4 is a schematic view of the first chamber and the second chamber of the storage device of the present invention.
5 is a schematic view in which a plurality of bearing frames are installed in the storage device of the present invention.
6 is a schematic view of the first chamber and annular moving wall of the storage device of the present invention.
7 is a schematic diagram of the fixing assembly of the storage device of the present invention fixing the bearing frame located in the first chamber.
8 is a local cross-sectional schematic view of the first base of the storage device of the present invention.
9 and 10 are schematic views from different viewpoints of the bearing frame of the storage device of the present invention.
11 is a schematic view of the expansion and contraction mechanism and the fixing assembly of the storage device of the present invention.
12 is a schematic diagram of the fixing assembly of the storage device of the present invention fixing the bearing frame.
13 is a block schematic diagram of a storage system of the present invention.

In the following description, if reference is made to a specific drawing or content shown in a specific drawing, this is only for emphasis in the following description, and related content mostly appears in the specific drawing, but in this following description, the specific It is not limited to refer only to the drawings.

1 to 3, Figure 1 is a schematic diagram of the storage device of the present invention, Figure 2 is a block schematic diagram of the storage device of the present invention, Figure 3 is a local cross-sectional schematic diagram of the storage device of the present invention. A storage device 100 is provided to store a plurality of bearing frames 200 (as shown in FIG. 5 ), each bearing frame 200 loading an article 2 (as shown in FIG. 5 ). do. The storage device 100 includes a body (A), a processing device (B), a transport device (C), a first chamber (D), three second chambers (E), a temperature barrier plate (F) and at least one environment a control device (G).

The main body A may include a frame body A1 and a plurality of cover plates A2. The frame body A1 is the overall support structure of the storage device 100, and the cover plate A2 is the frame body A1. The frame body (A1) and the plurality of cover plates (A2) together constitute the first chamber (D) and the three second chambers (E). In practical application, a plurality of cover plates A2 for forming the first chamber D can be selected from a member having a good thermal insulation effect, and such a cover plate A2 is such that the temperature in the first chamber D is external. can be prevented from being affected.

The treatment device (B) is electrically connected to the transport device (C) and the environment control device (G) and controls the operation of the transport device (C) and also controls the operation of the environment control device (G). In practical applications, the processing unit B may be, for example, but not limited to, various computers, servers, and various processors. The processing device (B) may be installed in the main body (A) of the storage device 100 or may be installed independently of the main body (A). The processing device (B) may be connected to at least one input device (for example, various keyboards, mice, touch screens, touch panels, etc.) and at least one display device, and related personnel may use the input device to connect the processing device (B) can be controlled to execute a related program, and related personnel can know the current storage state of the storage device 100 by looking at the display device.

The conveying device (C) includes a telescopic mechanism (C1), a rotating mechanism (C2), a fixed assembly (C3) and a lifting mechanism (C4), wherein the telescopic mechanism (C1) is connected to the rotating mechanism (C2) and the telescopic mechanism ( A fixing assembly C3 is installed at one end of C1, and the fixing assembly C3 fixes the bearing frame 200 (as shown in FIG. 5). The telescopic mechanism (C1), the rotating mechanism (C2), and the fixing assembly (C3) are all connected to the lifting mechanism (C4), and the lifting mechanism (C4) causes the telescopic mechanism (C1) and the fixing assembly (C3) to move upward in the longitudinal direction. Or move it downwards. The telescoping mechanism C1 is electrically connected to the processing device B, and the processing device B controls the operation of the expansion and contraction mechanism C1 to cause the fixing assembly C3 to move forward (ie, the first) with respect to the rotating mechanism C2. It can be moved toward the first chamber (D) close to the direction) or backward (that is, the direction away from the first chamber (D)).

The rotating mechanism (C2) is electrically connected to the processing device (B), and the processing device (B) controls the operation of the rotation mechanism (C2) to cause the expansion and contraction mechanism (C1) and the fixing assembly (C3) connected thereto to the first chamber It can be rotated at a predetermined angle with respect to (D) (which can be any angle depending on demand). The fixing assembly C3 fixes the bearing frame 200 . The fixing assembly C3 may change according to the specific shape of the bearing frame 200, and any assembly capable of clamping the bearing frame 200 shall all fall within the scope specifically implemented by the fixing assembly C3 indicated herein. can

The expansion and contraction mechanism C1, the rotation mechanism C2, the fixing assembly C3 and the lifting mechanism C4 are combined with each other to cause the bearing frame 200 to be fixed by the fixing assembly C3 in the transverse direction (ie, as shown in FIG. 3 ). coordinates in the X-axis or Y-axis direction) to enter the first chamber (D) or the second chamber (E) or to leave the first chamber (D) or the second chamber (E).

The expansion and contraction mechanism C1, the rotation mechanism C2, the fixing assembly C3, and the lifting mechanism C4 are combined with each other to cause the bearing frame 200 to be fixed by the fixing assembly C3 in the longitudinal direction (ie, as shown in FIG. 3 ). coordinates in the Z-axis direction) to move from a position adjacent to the first chamber (D) to a position adjacent to the second chamber (E) or from a position adjacent to the second chamber (E) to the first chamber It can be moved to a position adjacent to (D).

The expansion and contraction mechanism (C1), the rotation mechanism (C2), the fixing assembly (C3) and the lifting mechanism (C4) are combined with each other to make the bearing frame 200 fixed by the fixing assembly (C3) to the first chamber (D). It can be rotated with respect to and rotated with respect to the second chamber (E).

The mechanisms, members, and electronic components included in the expansion and contraction mechanism (C1), the rotation mechanism (C2), the fixing assembly (C3), and the lifting mechanism (C4) are all loaded onto the actual bearing frame 200 and the bearing frame 200. It may depend on the design, such as the shape and size of the article (2) and the body (A), and is not limited thereto; In other words, any mechanism capable of fixing the bearing frame 200 and the article 2 loaded thereon and causing it to move along the Z-axis, X-axis and Y-axis directions and rotate about the Z-axis are all The conveying device (C) indicated here belongs to the applicable range.

4 to 8 together, Figure 4 is a schematic diagram of the first chamber and the second chamber of the storage device of the present invention, Figure 5 is a schematic diagram in which a plurality of bearing frames are installed in the storage device of the present invention, Figure 6 is this It is a schematic diagram of the first chamber and annular moving wall of the storage device of the present invention, Figure 7 is a schematic diagram of the fixing assembly of the storage device of the present invention fixing the bearing frame located in the first chamber, Figure 8 is the first storage device of the present invention It is a schematic diagram of a local cross-section of the base. The first chamber (D) is installed to surround the transport device (C), and the first chamber (D) can accommodate a plurality of bearing frames 200 , and the plurality of bearing frames 200 are formed to be arranged in an annular shape. 1 is installed in the chamber (D). Specifically, the storage device 100 has a first base (H), but the first base (H) forms an annular shape and is installed to surround the transport device (C), and the first base (H), the main body ( A plurality of cover plates A2 and temperature barrier plates F of A) together form the first chamber D.

The first base (H) is provided to install a plurality of bearing frames (200). When the plurality of bearing frames 200 are installed on the first base (H), the plurality of bearing frames 200 correspond to those installed to surround the transport device (C), and the processing device (B) is the transport device (C) ) so that the fixing assembly C3 can take out one of the bearing frames 200 installed on the first base H by controlling the operation. The processing device (B) may also control the transport device (C) to cause the fixing assembly (C3) to install one bearing frame (200) to the first base (H). The outer shape and size of the first base H are not limited to those shown in the drawings and may be changed according to demand. The number of bearing frames 200 that the first base H can accommodate may also be changed according to demand.

In a specific application, the first base H may further include a plurality of positioning structures H1 (as shown in FIG. 8 ), wherein the plurality of positioning structures H1 include a plurality of positioning structures H1 installed in the first chamber D. of the bearing frame 200 defines a movement range with respect to the first base (H); In a relatively preferred embodiment, the four positioning structures H1 may together define one bearing frame 200 installed on the first base H, and the four positioning structures H1 correspond to the bearing frame 200 . It can be four base angles that are very close together. Of course, the first base (H) is not limited to four, but one bearing frame 200 may be defined by several positioning structures H1 and a plurality of positioning structures defining one bearing frame 200 . The installation position of (H1) in the first base (H) is not limited to the contents shown in the drawings.

It is worth mentioning that the body A may further include a plurality of sensors A3 (as shown in FIG. 2 ), each sensor A3 being electrically connected with the processing device B to It can be detected whether each bearing frame 200 located in the first chamber D is correctly installed in the first base H. Accordingly, the processing device B can determine whether the bearing frame 200 is installed at each position of the first base H through each sensor A3 installed on the first base H, and each sensor ( It may be determined whether the bearing frame 200 installed on the first base H is correctly installed through A3).

In a different embodiment, the first base (H) may include a plurality of raceways, each of which is provided so that each bearing frame 200 is slidably installed on the first base (H). A related sensor and a stopping mechanism may be installed correspondingly around each track, and the sensor detects whether the bearing frame 200 is connected to the track. If the sensor detects that the movable rail is already connected to the bearing frame 200 If it is detected, the related processor controls the operation of the stopping mechanism to limit the range of motion of the bearing frame 200 on the track.

The plurality of second chambers (E) may be installed to be positioned above the first chamber (D) and arranged vertically to communicate with each other. In different embodiments, the plurality of second chambers E may not communicate with each other. Each second chamber (E) is installed to surround the transport device (C), each second chamber (E) can accommodate a plurality of bearing frames 200, the plurality of bearing frames 200 are 2 may be arranged in an annular shape in the chamber (E). Specifically, the storage device 100 includes three second bases (L), but the three second bases (L) are vertically spaced apart from each other in the longitudinal direction through a plurality of support structures (M), and a temperature barrier The second base (L) closest to the plate (F) is connected to the temperature barrier plate (F) through a plurality of support structures (M). Each second base (L) forms an annular shape, and each second base (L) is installed to surround the transport device (C), and some second bases (L) are made together with a plurality of cover plates (A2). Two chambers (E) are formed, and one second base (L) of them forms one second chamber (E) together with a temperature barrier plate (F) and a plurality of cover plates (A2).

In the drawings of this embodiment, the storage device 100 is exemplified to include one first chamber (D) and three second chambers (E), but the storage device 100 includes a first chamber (D) and The quantity of the second chamber E is not limited; In a different embodiment, the number of the first chamber (D) may be two or more than two, and the number of the second chamber (E) may also be one, two, or four or more. Relatively preferably, the quantity of the second chamber (E) is greater than the quantity of the first chamber (D).

The temperature barrier plate (F) is installed between the first chamber (D) and the second chamber (E) adjacent to the first chamber (D). The temperature barrier plate (F) blocks the first chamber (D) and the second chamber (E) so that the first chamber (D) does not communicate with the second chamber (E) and thereby the interior of the first chamber (D) The heat energy of the heat energy and the heat energy inside the second chamber (E) are blocked from being transmitted to each other. The external shape, size, etc. of the temperature barrier plate F can all be designed according to demand, but are not limited thereto.

The environmental control device (G) is electrically connected to the processing device (B), and the processing device (B) controls the environmental control device (G) so that the temperature of the first chamber (D) is not higher than the first temperature and at the same time the temperature of the second chamber (E) is not higher than the second temperature; the first temperature is higher than minus 10 degrees, the second temperature is lower than 30 degrees, and the first temperature is not higher than the second temperature; Relatively preferably, the difference between the first temperature and the second temperature is greater than 5 degrees. In a relatively preferred embodiment, the second temperature may be between 20-25 degrees and the first temperature may be between -5 degrees and 15 degrees below zero; In other words, the processing device (B) controls the environmental control device (G) so that the temperature of the second chamber (E) is close to the room temperature and the temperature of the first chamber (D) is close to the temperature of the refrigeration. do.

In order to better control the environmental condition of the first chamber (D) and the environmental condition of the second chamber (E), the storage device 100 may include two environmental control devices (G), each of which is a first environment It can be defined as a control device and a second environment control device, wherein the first environment control device solely controls the temperature and humidity of the first chamber D, and the second environment control device controls the temperature of the plurality of second chambers E and humidity alone.

Referring to FIGS. 2, 6 and 7 together, in actual application, the storage device 100 may further include an annular moving wall (N), a moving wall rotating mechanism (P) and a moving door (Q). The annular moving wall (N) is connected to the moving wall rotating mechanism (P) and the moving wall rotating mechanism (P) may cause the annular moving wall (N) to rotate with respect to the first chamber (D). The annular moving wall (N) has an opening (N1) and the moving door (Q) may be movably installed on one side of the annular moving wall (N). The movable door Q may be operated to shield or not shield the opening N1 . When the opening N1 is not shielded by the movable door Q, the bearing frame 200 fixed by the fixing assembly C3 may enter and exit the first chamber D through the opening N1 . In the drawings of this embodiment, the annular moving wall (N) surrounds the conveying device (C) and has been described as an example that the whole forms a generally circle, but the external shape of the annular moving wall (N) is not limited thereto, and in different embodiments, an annular moving wall (N) is not limited thereto The outer shape of the moving wall (N) surrounds the conveying device (C) and may form a generally rectangular shape as a whole.

According to the above description, the process of the processing device B controlling the fixing assembly C3 to seat the bearing frame 200 and the article 2 loaded thereon in the first chamber D may be, for example, as follows. There is: The processing device (B) first controls the operation of the transport device (C) to move the fixed assembly (C3) and the bearing frame (200) fixed thereto to the outside of the first chamber (D), and then the moving wall rotating mechanism ( By controlling the rotation of P), the movable door Q and the opening N1 rotate to the current position corresponding to the fixed assembly C3, and finally, the opening of the movable door Q is controlled and the transport device C ) to move the bearing frame 200 fixed thereto by the fixing assembly C3 to the first chamber D through the opening N1. Of course, in a different embodiment, the processing device (B) may simultaneously control the operation of the transport device (C) and the moving wall rotating mechanism (P), and the transport device (C) causes the bearing frame 200 to which it is fixed to be manufactured. 1 When moving to the outside of the chamber (D), the moving wall rotating mechanism (P) drives the rotation of the annular moving wall (N) at the same time to cause the opening (N1) to move correspondingly to a predetermined position.

The movable door Q can be connected to the annular movable wall N through an electronically controlled movable rail group, and the processing device B controls the electronically controlled movable rail group so that the movable door Q is moved to the annular movable wall N The opening N1 can be opened or turned off by controlling the movement of It is possible to control the door (Q) so that it cannot move with respect to the annular moving wall (N). In other words, the movable door Q may be an electric door or a non-electric door.

In an embodiment in which the annular moving wall (N) is arc-shaped, the moving door (Q) may be a correspondingly arc-shaped plate body, and the moving door (Q) may not be an electric door, and the storage device 100 is a door opening assembly (R) It may further include, the door opening assembly (R) is connected to the above-described rotation mechanism (C2) and can rotate with respect to the first chamber (D) together with the above-described rotation mechanism (C2), the movable door (Q) The opening (N1) may or may not be exposed by allowing it to move with respect to the annular moving wall (N). In a practical application, the movable door Q may have, for example, a handle, the door opening assembly R may have a member for securing the immobilizing handle, and the processing device B may control the operation of the door opening assembly R. By controlling it, the handle of the moving door Q can be fixed and the moving door Q can be moved with respect to the annular moving wall N.

2 and 8 together, in the embodiment in which the processing device B controls the temperature of the first chamber D through the environmental control device G to -5 to 15 degrees below zero, the first base (H) may further include a plurality of drainage grooves (H2). One end of the plurality of drainage grooves (H2) communicates with the drainage channel (H3), the liquid in each drainage groove (H2) is guided to the drainage channel (H3), and the liquid in the drainage channel (H3) is guided to the outside is emitted The quantity, appearance, and arrangement of the drainage grooves (H2) are not limited to those shown in the drawings, and any structure that guides the liquid to the drainage channel (H3) is within the applicable range of the drainage groove (H2). belong The number of drainage channels H3 and the connection method of the plurality of drainage grooves H2 are not limited to those shown in the drawings.

For example, the first chamber (D) may be for storing the bearing frame 200 just taken out of the freezer and the articles 2 loaded therein. When the bearing frame just pulled out from the freezer (the temperature is lower than minus 5 degrees) and the articles 2 loaded therein are seated on the first base (H), the temperature of the first chamber (D) is higher than the temperature of the freezer. Condensate may be formed on the surface of the bearing frame 200 and the article 2 loaded thereon, and this condensed water may be discharged to the outside through the drain groove (H2) and the drain channel (H3). In a relatively preferred embodiment, the surface H4 of the first base H can be inclined toward the drainage channel H3, whereby the condensate falling on the surface H4 of the first base H is guided to the drainage channel (H3) or the drainage groove (H2).

In a different embodiment, the storage device 100 may further include a blowing device (W), wherein the blow device (W) is electrically connected to the processing device (B) and the blow device (W) is operated by the processing device (B). Controlled gas can be blown into the first chamber (D) so that the bearing frame 200 just pulled out of the freezer and seated in the first chamber (D) quickly causes the first chamber (D) to have substantially the same temperature as the first chamber (D). It can be heated up to The blowing device (W) may be, for example, a cleaning gas providing device, and the blowing device (W) may continuously blow the cleaning gas into the first chamber (D).

In the embodiment in which the storage device 100 is installed in an environment of 20 to 25 degrees, the storage device 100 may further include a suction device (X), wherein the suction device (X) is connected to the blow device (W) and is connected to the storage device (100) extracting the external air and the blowing device (W) blows the air extracted by the suction device (X) into the first chamber (D). The installation of the blow device W allows the environmental control device G to better control the environmental conditions (eg, temperature and humidity) of the first chamber D. When the temperature of the environment in which the storage device 100 is installed is substantially the same as the temperature of each second chamber (E), the suction device (X) and the blow device (W) are mixed with each other and the air outside the storage device 100 can be simultaneously blown into each of the second chamber (E) and the first chamber (D). Of course, it is possible to filter the air sucked by the suction device (X) by installing a filtering member related to the demand in the gas outlet of the blowing device (W).

Referring back to FIGS. 1 and 2 , the main body A of the storage device 100 further includes an entrance A4 and a carrier A5 . The entrance (A4) may communicate with the second chamber (E). The main body (A) may further include an entrance door (A6), which may or may not shield the entrance (A4) by being controlled by the processing device (B). When the entrance door A6 does not shield the entrance A4, the second chamber E communicates with the outside through the entrance A4. The carrier A5 is installed adjacent to the entrance A4 to seat the bearing frame 200 (as shown in FIG. 5 ) and the articles 2 loaded thereon. When the entrance (A4) is not shielded, the fixing assembly (C3) fixes the bearing frame (200) installed on the carrier (A5) through the entrance (A4), and correspondingly, the fixing assembly (C3) is also in the first chamber (D) Alternatively, the bearing frame 200 installed in the second chamber (E) and the article (2) loaded thereon may be seated on the carrier (A5). The quantity and installation location of the carrier (A5) and the doorway (A4) are not limited to the contents shown in the drawings, and in a special application, the storage device 100 has two or more entrances (A4) and the carrier (A5). may have

In a different embodiment, the main body (A) of the storage device (100) further includes at least one carrier sensor (A7), the carrier sensor (A7) detects whether the bearing frame (200) is installed in the carrier (A5) and Accordingly, the detection information A71 is generated, and the processing device B controls the operation of the transport device C and the door A6 according to the detection information A71. For example, when a related person or a related device installs the bearing frame 200 on the carrier A5, the processing device B receives the detection information A71 transmitted by the carrier sensor A7 and By controlling the opening and controlling the operation of the transport device (C), the fixing assembly (C3) passes through the entrance (A4), and the bearing frame (200) located in the carrier (A5) is moved to the second chamber (E) or the first chamber (E). Move to chamber (D).

In actual application, the processing device B may receive the demand information 3 transmitted from an external electronic device (eg, various computers, servers, smart phones, tablet PCs, etc.) in a wired or wireless manner, and the demand information In accordance with (3), by controlling the operation of the transport device (C), one bearing frame 200 is drawn out from the second chamber (E) or the first chamber (D), and then the opening of the door (A6) is controlled and Let the bearing frame 200 that has just been drawn out to be seated on the carrier A5 through the doorway A4, and finally, the processing device B receives the detection information A71 transmitted by the carrier sensor A7 and then related By transmitting information to an external electronic device, the external electronic device transmits the information to a related device or personnel so that the carrier A5 takes the bearing frame 200 .

Referring back to FIGS. 1 and 2 , the storage device 100 of the present invention may further include a reading device Y for generating recognition information by reading a recognition unit when applied to an automated factory building. The recognition unit is installed on the article 2 or the bearing frame 200 . The recognition unit is, for example, various barcodes, various radio frequency (RFID) tags, and the like. The identification information may include, for example, basic data related to the product (eg, shipment date of the product, expiration date, etc.). In an embodiment in which the recognition unit is a removable member (eg, a radio frequency tag), the reading device Y can read data stored in the recognition unit as well as write data to the recognition unit.

The processing device (B) is electrically connected to the reading device (Y). The processing device (B) controls the transport device (C) according to the recognition information to move the bearing frame (200) located at the entrance (A4) to the first chamber (D) or the second chamber (E); Correspondingly, the processing device (B) controls the transport device (C) according to the recognition information, one of the bearing frames 200 located in the first chamber (D), or one of them located in the second chamber (E) The bearing frame 200 is transported to the entrance (A4).

The storage device 100 of the present invention may be applied, for example, to a factory building of a semiconductor device and the article 2 may be, for example, a film of a specified type used in a semiconductor production process, the specified type of film being It refers to the type that must be stored in the freezer when not in use. When the storage device 100 of the present invention is applied to a factory building of a semiconductor device, the storage device 100 may store the film.

In a conventional application, the process by which the person concerned wants to use the film installed in the freezer is generally as follows: The person concerned first decides when the film will be used according to the work process, and then decides whether to use the film 6 hours or even before using the film. Take the film out of the freezer one day before and install it on a table in a room temperature environment so that the temperature of the film gradually rises to room temperature. You will get the same film. In the process of using the film in the existing application, if the person concerned does not take the film out of the freezer at the correct time, when the film is needed in the relevant work process, the temperature of the film is too low and the film cannot be used in the related work process. Even if the relevant personnel do not take out the film from the freezer in advance, the problem that the related work process must be inevitably stopped occurs. In addition, when the film drawn from the freezer is directly seated on a table in a room temperature environment, water droplets condensed on the surface of the film flow to the table, causing water to pool on the table or the ground. In addition, when a related person takes the film out of the freezer and settles it on a table in a room temperature environment, if the related person does not correctly install a tag or related mark on the film, another person may take the film.

As described above, in the embodiment in which the storage device 100 of the present invention is applied to a semiconductor automated factory building, the bearing frame 200 drawn out from the freezer and the articles 2 loaded therein are stored in the first chamber (D). The process may be as follows: First, the relevant equipment or personnel installs the bearing frame 200 taken out of the freezer and the articles 2 loaded thereon onto the carrier A5; Subsequently, the processing device B receives the detection information A71 that is detected by the carrier sensor A7 and generated after the bearing frame 200 is installed in the carrier A5, and the processing device B first reads the reading device Y After controlling the operation of , it is possible to read the recognition information stored in the bearing frame 200 or the recognition unit of the article 2 . Next, the processing device (B) controls the operation of the transport device (C) and the door (A6) according to the recognition information and the current storage state of the first chamber (D) to cause the fixing assembly (C3) to be placed on the carrier (A5). to transport the installed bearing frame 200 and the articles 2 loaded thereto together to the outside of the first chamber (D); Finally, the processing device (B) causes the rotating mechanism (C2), the moving wall rotating mechanism (P) and the moving door (Q) to operate to cause the fixing assembly (C3) to annularly move the bearing frame 200 to which it is fixed. It can be moved to the first chamber (D) through the opening (N1) of the wall (N).

As described above, after the processing device B controls the fixing assembly C3 to seat the bearing frame 200 and the articles 2 loaded thereon in the first chamber D, the processing device B is related to the Recording (including, for example, the recognition information stored in the recognition unit entering the bearing frame 200, the time when the bearing frame 200 is installed in the first chamber D, etc.) proceeds, and then the processing device ( B) is a transport device according to a predetermined time (for example, 6 to 10 hours) after the bearing frame 200 and the articles 2 loaded therein are stored in the first chamber D according to recognition information or related demand information (C), the moving wall rotating mechanism (P) and the moving door (Q) by controlling the operation of the member, such as to control the fixed assembly (C3) to transport and store the bearing frame 200 in the second chamber (E). When the processing device (B) transports and stores the bearing frame 200 in the second chamber (E), the processing device (B) may notify the relevant device or personnel by sending related notification information to the related external electronic device. The temperature of the article 2 loaded by the bearing frame 200 is already substantially equal to room temperature. When a related device or person receives the notification information sent from the processing device (B), the related device or person sends the related pickup information to the processing device (B), which after receiving the pickup information, the transport device (C) and the access door (A6) to control the bearing frame 200 installed in the second chamber (E) can be installed in the carrier (A5).

In other words, as described above, when the storage device 100 of the present invention is applied to store a film to be stored frozen used in a semiconductor factory building, the processing device B may perform a thawing procedure, but the processing device B ) performs the thawing procedure, the processing device (B) controls the transport device (C) to transfer the bearing frame 200 installed in the carrier A5 and the articles 2 loaded thereto to the first chamber (D) first. After transporting, the processing device B places the bearing frame 200 and the articles 2 loaded thereon in the first chamber D for a predetermined time, and then controls the transport device C to control the bearing frame 200 and the The loaded goods (2) are transported from the first chamber (D) to the second chamber (E) and stored, and the processing device (B) is not processed until the relevant person or device sends the relevant withdrawal information to the processing device (B). 2 The bearing frame 200 installed in the chamber E and the articles 2 loaded thereon are transferred to the carrier A5.

9 to 12 , FIGS. 9 and 10 are schematic views from different perspectives of the bearing frame of the storage device of the present invention, and FIG. 11 is a schematic diagram of the expansion and contraction mechanism and the fixing assembly of the storage device of the present invention. is a schematic diagram in which the fixing assembly of the storage device of the present invention fixes the bearing frame. The storage device 100 may further include a plurality of bearing frames 200 . In actual application, the storage device 100 of the present invention is sold together with a plurality of bearing frames 200 when sold, or does not include a plurality of bearing frames 200 when the storage device 100 is sold. it may not be

Each bearing frame 200 may include a top plate 201 , a base plate 202 and three side plates, the top plate 201 , the base plate 202 and the three side plates being connected to each other and working together It forms a receiving chamber 204 , the receiving chamber 204 receiving an article 2 . Each of the three side plates is defined as two side plates 2031 and a rear plate 2032, the two side plates 2031 are installed to face each other, and each side plate 2031 has a plurality of perforations 20311 to provide When the bearing frame 200 is installed in the first chamber D through the design of a plurality of perforations 20311, the blow device W (as shown in FIG. 2) is transferred to the first chamber D. Air may be allowed to flow around the article 2 so that the temperature of the article 2 reaches substantially the same temperature as the first chamber D relatively quickly. The appearance, size, quantity, and installation position of the perforations 20311 provided in each side plate 2031 are not all limited by the drawings. The rear plate 2032 and the two side plates 2031 are connected and the rear plate 2032 may also have a plurality of perforations 20321, each perforation 20321 being installed through the rear plate 2032. Two auxiliary structures 205 and two riding structures 206 may be installed on one side of the rear plate 2032, and the two auxiliary structures 205 are installed to be spaced apart from each other and each riding structure 206 is installed at one end of each auxiliary structure (205).

11, in the design of the auxiliary structure 205 and the riding structure 206 corresponding to the bearing frame 200, the fixing assembly C3 includes a fixing body C31 and four movable clamping members C32. ), wherein the two movable clamping members C32 are installed to face each other, the other two movable clamping members C32 are installed to face each other, and the two movable clamping members C32 installed opposite to each other are the bearing frame One of the auxiliary structures 205 of 200 can be controlled to clamp. Each movable clamping member C32 may further include a locking portion C321, the locking portion C321 engages with the riding structure 206 of the bearing frame 200, and the bearing frame 200 includes the riding structure 206. It is hung on the fixing assembly C3 through the and the locking part C321.

Specifically, as shown in FIGS. 9 to 12 , each riding structure 206 may form a receiving groove 207 jointly with the rear plate 2032 , and each engaging portion C321 is the receiving It can be hooked up to correspond to the groove 207, and thus, when the fixing assembly C3 fixes the bearing frame 200, the fixing assembly C3 is connected to the two auxiliary structures (C3) through the four movable clamping members C32. 205) can be clamped, and the fixing assembly C3 stably fixes the bearing frame 200 by being connected to each receiving groove 207 and hooking the bearing frame 200 through each locking part C321. can be effectively guaranteed to do so.

1 to 3 and 13 together, FIG. 13 is a block schematic diagram of a storage system of the present invention. The storage system 1 of the present invention includes the storage device 100 , the transport device 400 , and the processing device 300 described above. A detailed description of the storage device 100 is not further described herein. The transport device 400 is for transporting the bearing frame 200 and the articles 2 installed in the bearing frame 200 from the freezer to the carrier A5 of the storage device 100 . The processing device 300 may receive the demand information 3 . The processing device 300 controls the transport device 400 according to the demand information 3 to withdraw the at least one bearing frame 200 and the articles 2 loaded thereon from the freezer and transport it to the carrier A5. have.

The processing device (B) of the storage device 100 may receive the demand information (3), and the processing device (B) controls the transport device (C) according to the demand information (3) and is installed in the carrier (A5). The bearing frame 200 and the articles 2 loaded thereon can be transported to the first chamber D, and the processing device B according to the demand information 3, the bearing frame 200 and the articles 2 loaded thereon. ) is installed in the first chamber (D) for a predetermined time and then transported to the second chamber (E), and the processing device (B) according to the demand information (3), the bearing frame 200 and the articles (2) loaded therein is installed in the second chamber (E) for another predetermined time, and then the transport device (C) is controlled to transport the bearing frame (200) and the articles (2) loaded thereon from the second chamber (E) to the carrier (A5) can do.

In addition, the processing device 300 may further receive the pickup information 4 , and the processing device 300 controls the storage device 100 according to the pickup information 4 to cause the processing device B to the transport device. By controlling the operation of (C), one of the bearing frames 200 installed in the second chamber E and the articles 2 loaded thereon can be transferred to the carrier A5, and the processing device 300 is picked up By controlling the transport device 400 according to the information 4, the bearing frame 200 installed on the carrier A5 and the article 2 loaded thereon may be moved to a specified workstation or work device.

In summary, the storage device of the present invention allows the relevant personnel to conveniently use the storage device through the design of the transport device, the first chamber and the second chamber, and the bearing frame just pulled out of the freezer and the articles loaded therein can be stored. The storage system of the present invention allows the relevant personnel to send demand information to the processing device through the design of storage devices, transport devices, and processing devices, so that the storage system automatically stores bearing frames and goods loaded therein according to the demand information. to be withdrawn and thawed by installing them in the first chamber and the second chamber in turn.

The content described above is merely a relatively preferred and feasible embodiment of the present invention, and the patent scope of the present invention is not limited thereto. belong within

1: storage system
100: storage device
A: body
A1: frame body
A2: Cover plate
A3: sensor
A4: Entrance
A5: Carrier
A6: Entrance door
A7: Carrier sensor
A71: Detection information
B: processing unit
C: carrier
C1: telescopic mechanism
C2: rotating mechanism
C3: immobilization assembly
C31: immobilized body
C32: movable clamping member
C321: catch
C4: Elevator
D: first chamber
E: second chamber
F: temperature barrier plate
G: environmental control device
H: first base
H1: positioning structure
H2: drain groove
H3: drainage channel
H4: surface
L: second base
M: support structure
N: annular moving wall
N1: opening
P: moving wall rotating mechanism
Q: Moving door
R: door opening assembly
W: blow device
X: suction device
Y: reading device
200: bearing frame
201: top plate
202: base plate
2031: side plate
20311: perforation
2032: back plate
20321: perforation
204: Reception Room
205: auxiliary structure
206: riding structure
207: receiving home
300: processing device
400: transport device
2: Goods
3: Demand information
4: Pickup information

Claims (13)

In the storage device provided to store a plurality of bearing frames for loading articles,
a body including a doorway;
processing unit;
a telescoping mechanism, a rotating mechanism and a fixing assembly, wherein the telescoping mechanism is connected to the rotating mechanism, the fixing assembly is connected to the stretching mechanism, and the fixing assembly is configured to fix the bearing frame; the conveying device is electrically connected to the processing device, the processing device being capable of controlling the telescoping mechanism to cause the securing assembly to move forward or backward relative to the rotating mechanism; The processing device may include: a transport device capable of controlling the rotation mechanism to cause the telescopic mechanism and the fixing assembly to rotate;
at least one first chamber installed to surround the transport device and accommodating a plurality of the bearing frames;
at least one second chamber installed to surround the transport device and installed above the first chamber to accommodate a plurality of the bearing frames;
a temperature barrier plate installed between the first chamber and the second chamber to block the transfer of thermal energy inside the first chamber and thermal energy inside the second chamber to each other;
Doedoe electrically connected to the processing device for controlling the environment control device so that the temperature of the first chamber is not higher than the first temperature, and at the same time, the temperature of the second bamboo is not higher than the second temperature; wherein the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature includes at least one environmental control device not higher than the second temperature,
wherein the processing device controls the transport device to cause the fixing assembly to move and seat the bearing frame located at the entrance to the first chamber or the second chamber, and the processing device controls the transport device controlled to cause the immobilization assembly to transport the bearing frame located in the first chamber or the second chamber to the doorway. According to claim 1,
The storage device further includes at least one first base, wherein the first base is located in the first chamber and has an annular shape for loading a plurality of the bearing frames; The first base has a plurality of drainage grooves and drainage channels, and one end of the plurality of drainage grooves communicates with the drainage channel, the liquid of each drainage groove is guided to the drainage channel, and the liquid located in the drainage channel is A storage device, characterized in that it is guided and discharged to the outside. According to claim 1,
The storage device further includes a moving wall rotating mechanism, an annular moving wall and a moving door, wherein the annular moving wall is connected to the moving wall rotating mechanism, the annular moving wall has an opening, and the moving door is attached to the annular moving wall is movably installed and the movable door can be operated to shield or not shield the opening; the moving wall rotating mechanism is capable of causing the annular moving wall to rotate with respect to the first chamber; The storage device of claim 1, wherein when the opening is not blocked by the movable door, the fixing assembly passes through the opening to fix the bearing frame located in the first chamber. 4. The method of claim 3,
The movable door is an arc-shaped plate body, and the storage device further includes a door opening assembly, wherein the door opening assembly is connected to the rotating mechanism, and the door opening assembly and the telescopic mechanism are together in the first chamber along the rotating mechanism. and wherein the door opening assembly is capable of opening or closing the movable door to expose or not expose the opening. 4. The method of claim 3,
the storage device further includes a blowing device, wherein the blowing device is electrically connected to the processing device and controlled by the processing device to blow gas into the first chamber; The storage device includes two of the environment control devices, which are respectively defined as a first environment control device and a second environment control device, wherein the first environment control device controls the temperature and humidity of the first chamber and 2 The storage device, characterized in that the environmental control device to control the temperature and humidity of the second chamber. 6. The method of claim 5,
The storage device further includes a suction device, wherein the suction device is connected to the blowing device, the suction device extracts air outside the storage device, and the blow device blows the air extracted by the suction device into the first chamber Storage device, characterized in that put. According to claim 1,
The storage device further includes at least one first base, wherein the first base is located in the first chamber and has an annular shape for loading a plurality of the bearing frames; the first base includes a plurality of positioning structures, wherein the plurality of positioning structures are for limiting a range of movement of a plurality of the bearing frames installed in the first chamber with respect to the first base; The storage device further includes a plurality of sensors, each of the sensors electrically connected to the processing device, a plurality of the sensors installed in the first base, and each of the sensors located in the first chamber. Storage device, characterized in that for detecting whether the bearing frame is correctly installed on the first base. According to claim 1,
the storage device further includes a reading device for reading the recognition unit to generate recognition information; the recognition unit is installed on the article or the bearing frame; the processing device is electrically connected to the reading device; the processing device may control the transport device according to the recognition information to move the bearing frame located at the entrance to the first chamber or the second chamber; The processing device may control the transport device according to the recognition information to transport one of the bearing frames located in the first chamber or one of the bearing frames located in the second chamber to the entrance and exit. storage device with 9. The method of claim 8,
The storage device may further include a door and a carrier, wherein the door is controlled to be opened or turned off so that the second chamber is not in communication with the outside or in communication with the outside; The carrier is located outside the second chamber, the carrier loads the bearing frame, and the reading device is installed adjacent to the carrier to read the recognition unit of the bearing frame installed in the carrier. storage device. According to claim 1,
the storage device further includes a door, a carrier, and at least one carrier sensor, wherein the door is opened or controlled to be opened so that the second chamber is in communication with the outside or not in communication with the outside; The carrier is located outside the second chamber to load the bearing frame, and the carrier sensor detects whether the bearing frame is installed on the carrier, thereby generating sensing information, and the processing device according to the sensing information. A storage device, characterized in that it can control the transport device and the door. According to claim 1,
The processing device may perform a thawing procedure. When the processing device performs the thawing procedure, the processing device controls the transport device to first remove the bearing frame located at the entrance and the articles loaded therein. After transporting the first chamber, the processing device places the bearing frame and the articles loaded thereon in the first chamber for a predetermined time, and then controls the transport device to remove the bearing frame and the articles loaded thereon from the first chamber. Storage device, characterized in that it can be carried and stored in the second chamber. According to claim 1,
The storage device includes a plurality of the bearing frames, each of the bearing frames having a top plate, a base plate and a plurality of side plates, the top plate, the base plate and the plurality of side plates together defining a receiving chamber forming, wherein the accommodating chamber is configured to load the articles, and at least one of the side plates has at least one perforation, the perforations pass through the side plate, and the accommodating chamber can communicate with the outside through the perforations; one side of the side plate includes at least one auxiliary structure and at least one riding structure; The securing assembly includes two movable clamping members, the two movable clamping members being controlled to clamp the auxiliary structure together, each of the movable clamping members having a locking portion, the two locking portions included in the securing assembly The storage device, characterized in that it is engaged with the riding structure to allow the bearing frame to be caught on the fixing assembly. In the storage device provided to store a plurality of bearing frames for loading articles,
a body including a carrier and an entrance for seating the bearing frame;
processing unit;
a telescoping mechanism, a rotating mechanism and a fixing assembly, wherein the telescoping mechanism is connected to the rotating mechanism, the fixing assembly is connected to the stretching mechanism, and the fixing assembly is configured to fix the bearing frame; the conveying device is electrically connected to the processing device, the processing device being capable of controlling the telescoping mechanism to cause the securing assembly to move forward or backward relative to the rotating mechanism; The processing device may include: a transport device capable of controlling the rotation mechanism to cause the telescopic mechanism and the fixing assembly to rotate;
at least one first chamber installed to surround the transport device and accommodating a plurality of the bearing frames;
at least one second chamber installed to surround the transport device and installed above the first chamber to accommodate a plurality of the bearing frames;
a temperature barrier plate installed between the first chamber and the second chamber to block the transfer of thermal energy inside the first chamber and thermal energy inside the second chamber to each other;
Doedoe electrically connected to the processing device for controlling the environment control device so that the temperature of the first chamber is not higher than the first temperature, and at the same time, the temperature of the second bamboo is not higher than the second temperature; wherein the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature at least one environmental control device;
Here, the processing device controls the transport device to cause the fixing assembly to move and seat the bearing frame installed on the carrier in the first chamber or the second chamber through the doorway, and the processing device includes the controlling a conveying device to cause the fixing assembly to allow the bearing frame located in the first chamber or the second chamber to pass through the doorway and to be seated on the carrier;
a transport device for transporting the bearing frame and the articles loaded thereon from the freezer to the carrier of the storage device; and
receive demand information and control the transport device according to the demand information to take out the at least one bearing frame and the articles loaded thereon from the freezer and transport it to the carrier; The processing device controls the transport device according to the demand information to move the bearing frame installed in the carrier and the articles loaded thereon to the first chamber, and the processing device controls the bearing frame and the articles loaded thereon to the first chamber according to the demand information. and a processing device capable of installing the loaded articles in the first chamber for a predetermined period of time and then transporting the bearing frame and the articles loaded thereto to the second chamber.

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