KR20210026168A - Template for supporting mask, producing method of template for supporting mask and producing method of mask integrated frame - Google Patents

Abstract

The present invention relates to a mask support template, a manufacturing method of the mask support template, and a manufacturing method of a frame-integrated mask. According to the present invention, the mask support template which supports a mask for forming OLED pixels to correspond to a frame comprises: a template; a temporary adhesive unit formed on the template; and a mask adhered to the template through the temporary adhesive unit and having a mask pattern formed thereon.

Description

Mask supporting template, manufacturing method of mask supporting template, and manufacturing method of frame-integrated mask {TEMPLATE FOR SUPPORTING MASK, PRODUCING METHOD OF TEMPLATE FOR SUPPORTING MASK AND PRODUCING METHOD OF MASK INTEGRATED FRAME}

The present invention relates to a mask supporting template, a manufacturing method of the mask supporting template, and a manufacturing method of a frame-integrated mask. In more detail, the mask support template capable of stably supporting and moving without deformation of the mask, and clear alignment between each mask, the manufacturing method of the mask support template, and the manufacturing method of the frame-integrated mask About.

As a technology for forming pixels in the OLED manufacturing process, the FMM (Fine Metal Mask) method is mainly used in which an organic material is deposited at a desired location by attaching a thin metal mask to a substrate.

In the existing OLED manufacturing process, the mask is manufactured in the form of a stick or plate, and then the mask is welded and fixed to the OLED pixel deposition frame. One mask may include several cells corresponding to one display. In addition, in order to manufacture a large area OLED, several masks can be fixed to the OLED pixel deposition frame. In the process of fixing to the frame, each mask is stretched so that it is flat. It is a very difficult task to adjust the tensile force so that the entire part of the mask is flat. In particular, in order to align a mask pattern with a size of only a few to tens of μm while making all the cells flat, a high level of work is required to check the alignment status in real time while finely adjusting the tensile force applied to each side of the mask. do.

Nevertheless, in the process of fixing several masks to one frame, there is a problem in that the alignment between the masks and the mask cells is not good. In addition, in the process of welding and fixing the mask to the frame, the thickness of the mask film is too thin and large area, so the mask is struck or distorted by the load, and wrinkles and burrs occur in the welding part during the welding process. There were problems such as misalignment.

In the case of ultra-high-definition OLED, the current QHD quality is 500-600 PPI (pixel per inch), and the pixel size reaches about 30-50㎛, and 4K UHD, 8K UHD high-definition is higher than this, ~860 PPI, ~1600 PPI, Will have a resolution of. In this way, in consideration of the pixel size of the ultra-high-definition OLED, the alignment error between cells should be reduced to about several µm, and the error beyond this leads to product failure, so the yield may be very low. Therefore, there is a need to develop a technique for preventing deformation, such as being struck or distorted, and for clarifying alignment, a technique for fixing the mask to the frame, and the like.

Accordingly, the present invention was devised to solve the problems of the prior art as described above, and the mask can be stably supported and moved without deformation, and deformation such as the mask being struck or warped can be prevented, and alignment can be clarified. It is an object of the present invention to provide a possible mask supporting template, a manufacturing method of a mask supporting template, and a manufacturing method of a frame-integrated mask.

In addition, an object of the present invention is to provide a method for manufacturing a frame-integrated mask in which the manufacturing time is remarkably reduced and the yield is remarkably increased.

The above object of the present invention is to support a mask for forming an OLED pixel to correspond to a frame, comprising: a template; A temporary adhesive portion formed on the template; And a mask which is adhered on the template through the temporary bonding portion and on which the mask pattern is formed, and the template is achieved by a mask supporting template having a lower coefficient of thermal expansion than the mask.

The mask may have a coefficient of thermal expansion greater than at least 1.

The template may have a coefficient of thermal expansion less than 1 (greater than 0).

The temporary adhesive may be an adhesive that can be separated by applying heat or an adhesive that can be separated by UV irradiation.

The temporary adhesive may be liquid wax.

At room temperature, the mask may be adhered to the template while being subjected to a tensile force in the lateral direction.

In addition, the above object of the present invention is a method of manufacturing a mask supporting template corresponding to a frame by supporting a mask for forming an OLED pixel, comprising the steps of: (a) preparing a template in which a temporary adhesive portion is formed on one surface; (b) raising the process temperature to at least higher than room temperature and adhering the mask metal film onto the template; (c) lowering the process temperature; And (d) forming a mask pattern on the mask metal film to manufacture a mask, wherein the template has a lower coefficient of thermal expansion than the mask, and is achieved by a method of manufacturing a mask supporting template.

The mask may have a coefficient of thermal expansion greater than at least 1, and the template may have a coefficient of thermal expansion less than 1 (greater than 0).

The temporary adhesive may be an adhesive that can be separated by applying heat or an adhesive that can be separated by UV irradiation.

The temporary adhesive may be liquid wax.

If the process temperature is lowered in step (a), the template shrinks less than the mask, so that the mask may receive a tensile force in the lateral direction.

In addition, the above object of the present invention is a method of manufacturing a mask supporting template corresponding to a frame by supporting a mask for forming an OLED pixel, comprising the steps of: (a) preparing a template in which a temporary adhesive portion is formed on one surface; (b) raising the process temperature to at least higher than room temperature and adhering the mask with the mask pattern formed thereon to the template; And (c) lowering the process temperature, wherein the template has a lower coefficient of thermal expansion than the mask, and is achieved by a method of manufacturing a mask supporting template.

In addition, the above object of the present invention is a method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed, comprising the steps of: (a) preparing a template having a temporary adhesive portion formed on one surface; (b) raising the process temperature to at least higher than room temperature and adhering the mask metal film onto the template; (c) lowering the process temperature; (d) manufacturing a mask by forming a mask pattern on the mask metal film; (e) loading a template onto a frame having at least one mask cell area to correspond the mask to the mask cell area of the frame; And (f) attaching the mask to the frame, wherein the template is achieved by a method of manufacturing a frame-integrated mask having a lower coefficient of thermal expansion than the mask.

In addition, the above object of the present invention is a method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed. Loading on a frame having a mask to correspond to a mask cell area of the frame; And (b) attaching the mask to the frame, wherein the template is achieved by a method of manufacturing a frame-integrated mask having a lower coefficient of thermal expansion than the mask.

According to the present invention configured as described above, there is an effect of stably supporting and moving the mask without deformation, preventing deformation such as the mask being struck or twisted, and clarifying alignment.

In addition, according to the present invention, there is an effect of remarkably reducing the manufacturing time and increasing the yield remarkably.

1 is a schematic diagram showing a process of attaching a conventional mask to a frame.
2 is a front view and a side cross-sectional view showing a frame-integrated mask according to an embodiment of the present invention.
3 is a schematic diagram showing a mask according to an embodiment of the present invention.
4 to 5 are schematic diagrams illustrating a process of manufacturing a mask supporting template by attaching a mask metal film on a template according to an embodiment of the present invention and forming a mask.
6 is a schematic diagram showing a problem when the thermal expansion coefficient of the template according to the comparative example is higher than that of the mask.
7 is a schematic diagram showing an interface state between a mask and a tray and a state in which the mask is attached to the frame when the thermal expansion coefficient of the template is lower than that of the mask according to an embodiment of the present invention.
8 is a schematic diagram illustrating a state in which a template is loaded onto a frame according to an embodiment of the present invention and a mask is associated with a cell area of the frame.
9 is a schematic diagram illustrating a process of separating a mask and a template after attaching a mask to a frame according to an embodiment of the present invention.
10 is a schematic diagram showing a state in which a mask according to an embodiment of the present invention is attached to a cell area of a frame.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The detailed description of the present invention described below refers to the accompanying drawings, which illustrate specific embodiments in which the present invention may be practiced. These embodiments are described in detail sufficient to enable a person skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other, but need not be mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the present invention in relation to one embodiment. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description to be described below is not intended to be taken in a limiting sense, and the scope of the present invention, if appropriately described, is limited only by the appended claims, along with all ranges equivalent to those claimed by the claims. In the drawings, similar reference numerals refer to the same or similar functions over various aspects, and the length, area, thickness, and the like may be exaggerated and expressed for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those of ordinary skill in the art to easily implement the present invention.

1 is a schematic diagram showing a process of attaching a conventional mask 10 to a frame 20.

The conventional mask 10 is a stick-type or plate-type, and the stick-type mask 10 of FIG. 1 can be used by welding and fixing both sides of the stick to the OLED pixel deposition frame. A plurality of display cells C are provided on the body of the mask 10 (or the mask layer 11). One cell C corresponds to one display such as a smartphone. In the cell C, a pixel pattern P is formed to correspond to each pixel of the display.

Referring to FIG. 1A, the stick mask 10 is loaded onto the frame 20 in the form of a square frame in an unfolded state by applying a tensile force F1 to F2 in the long axis direction of the stick mask 10. The cells C1 to C6 of the stick mask 10 are located in a blank area inside the frame of the frame 20.

Referring to (b) of FIG. 1, after aligning while finely adjusting the tensile force (F1 to F2) applied to each side of the stick mask 10, a part of the side of the stick mask 10 is welded (W). Accordingly, the stick mask 10 and the frame 20 are interconnected. 1C shows a cross-sectional side view of a stick mask 10 and a frame connected to each other.

Although the tensile forces F1 to F2 applied to each side of the stick mask 10 are finely adjusted, there is a problem in that the mask cells C1 to C3 are not well aligned with each other. For example, the distances between the patterns of the cells C1 to C6 are different from each other, or the patterns P are skewed. Since the stick mask 10 is a large area including a plurality of cells C1 to C6 and has a very thin thickness of several tens of µm, it is easily struck or distorted by a load. In addition, it is very difficult to check the alignment between the cells (C1 to C6) in real time through a microscope while adjusting the tensile force (F1 to F2) to flatten all of the cells (C1 to C6). In order to prevent the mask pattern P having a size of several to several tens of µm from adversely affecting the pixel process of an ultra-high-definition OLED, it is preferable that the alignment error does not exceed 3 µm. This alignment error between adjacent cells is referred to as PPA (pixel position accuracy).

In addition, a plurality of stick masks 10 are connected to one frame 20 respectively, and an alignment state between a plurality of stick masks 10 and a plurality of cells C to C6 of the stick mask 10 It is also a very difficult task to clarify, and it is an important reason for reducing productivity as the process time according to alignment is inevitably increased.

On the other hand, after the stick mask 10 is connected and fixed to the frame 20, the tensile forces F1 to F2 applied to the stick mask 10 may reverse tension on the frame 20. Such tension may finely deform the frame 20, and there may be a problem in that the alignment state is misaligned between the plurality of cells C to C6.

Accordingly, the present invention proposes a frame 200 and a frame-integrated mask that enables the mask 100 to form an integral structure with the frame 200. The mask 100 integrally formed with the frame 200 is prevented from being struck or twisted, and may be clearly aligned with the frame 200.

2 is a front view [Fig. 2 (a)] and a side cross-sectional view [Fig. 2 (b)] showing a frame-integrated mask according to an embodiment of the present invention.

In this specification, the structure of the frame-integrated mask is briefly described below, but the structure and manufacturing process of the frame-integrated mask can be understood as including the contents of Korean Patent Application No. 2018-0016186 as a whole.

Referring to FIG. 2, the frame-integrated mask may include a plurality of masks 100 and one frame 200. In other words, a plurality of masks 100 are attached to the frame 200, one by one. Hereinafter, for convenience of explanation, a rectangular mask 100 is used as an example, but the mask 100 may be in the form of a stick mask having protrusions clamped on both sides before being attached to the frame 200, and the frame 200 ) After being attached to the protrusion can be removed.

A plurality of mask patterns P may be formed on each mask 100, and one cell C may be formed on one mask 100. One mask cell C may correspond to one display such as a smartphone.

The mask 100 may be made of invar, super invar, nickel (Ni), nickel-cobalt (Ni-Co), or the like. The mask 100 may use a metal sheet produced by a rolling process or electroforming. It will be described later in detail with reference to FIGS. 9 and 10.

The frame 200 is formed to attach a plurality of masks 100. The frame 200 is preferably made of a material such as Invar, Super Invar, nickel, or nickel-cobalt having the same coefficient of thermal expansion as the mask in consideration of thermal deformation. The frame 200 may include a frame portion 210 having a substantially square shape or a square frame shape. The inside of the frame frame 210 may have a hollow shape.

In addition, the frame 200 may include a plurality of mask cell regions CR, and may include a mask cell sheet part 220 connected to the frame frame part 210. The mask cell sheet part 220 may include an edge sheet part 221 and first and second grid sheet parts 223 and 225. The frame sheet portion 221 and the first and second grid sheet portions 223 and 225 refer to respective portions partitioned from the same sheet, and they are integrally formed with each other.

The thickness of the frame frame portion 210 may be formed to a thickness of several mm to several cm thicker than the thickness of the mask cell sheet portion 220. The mask cell sheet part 220 is thinner than the thickness of the frame part 210, but may be about 0.1mm to 1mm thicker than the mask 100. The first and second grid sheet portions 223 and 225 may have a width of about 1 to 5 mm.

A plurality of mask cell areas CR: CR11 to CR56 may be provided except for the area occupied by the edge sheet portion 221 and the first and second grid sheet portions 223 and 225 in the planar sheet.

The frame 200 includes a plurality of mask cell areas CR, and each mask 100 may be attached such that one mask cell C corresponds to the mask cell area CR. The mask cell C corresponds to the mask cell area CR of the frame 200, and a part or all of the dummy may be attached to the frame 200 (mask cell sheet part 220). Accordingly, the mask 100 and the frame 200 can form an integral structure.

3 is a schematic diagram showing a mask 100 according to an embodiment of the present invention.

The mask 100 may include a mask cell C in which a plurality of mask patterns P are formed and a dummy DM surrounding the mask cell C. The mask 100 may be manufactured from a metal sheet produced by a rolling process or electroplating, and one cell C may be formed in the mask 100. The dummy DM corresponds to a portion of the mask layer 110 (mask metal layer 110) excluding the cell C, and includes only the mask layer 110, or a predetermined dummy having a shape similar to the mask pattern P A patterned mask layer 110 may be included. In the dummy DM, part or all of the dummy DM may be attached to the frame 200 (mask cell sheet part 220) corresponding to the edge of the mask 100.

The width of the mask pattern P may be less than 40 μm, and the thickness of the mask 100 may be about 5 to 20 μm. Since the frame 200 includes a plurality of mask cell regions (CR: CR11 to CR56), the mask 100 having mask cells (C: C11 to C56) corresponding to each of the mask cell regions (CR: CR11 to CR56). ) May also be provided in plural.

Referring to FIG. 4A, a template 50 may be provided. The template 50 is a medium that can be moved while the mask 100 is attached and supported on one surface. It is preferable that one surface of the template 50 is flat to support and move the flat mask 100. The central portion 50a may correspond to the mask cell C of the mask metal layer 110, and the edge portion 50b may correspond to the dummy DM of the mask metal layer 110. The size of the template 50 may be a flat plate shape having a larger area than that of the mask metal layer 110 so that the mask metal layer 110 can be entirely supported.

The template 50 includes a laser through hole 51 in the template 50 so that the laser L irradiated from the top of the template 50 can reach the welding portion (area to be welded) of the mask 100. Can be formed. The laser through-hole 51 may be formed in the template 50 to correspond to the position and number of welding portions. Since a plurality of welding portions WP are disposed along a predetermined interval in the edge or the dummy DM portion of the mask 100, a plurality of laser through holes 51 may be formed along a predetermined interval to correspond thereto. As an example, since a plurality of welding portions WP are disposed along a predetermined distance on both sides (left/right) dummy DM portions of the mask 100, the laser through hole 51 also has a template 50 on both sides (left/right). The right side) may be formed in a plurality along a predetermined interval.

The laser through-hole 51 need not necessarily correspond to the position and number of welding parts. For example, it is also possible to perform welding by irradiating the laser (L) to only a part of the laser through hole (51). In addition, some of the laser through-holes 51 that do not correspond to the welding part may be used instead of the alignment mark when aligning the mask 100 and the template 50. If the material of the template 50 is transparent to the laser (L) light, the laser through hole 51 may not be formed.

A temporary adhesive portion 55 may be formed on one surface of the template 50. Temporary bonding portion 55 is temporarily adhered to one surface of the template 50 until the mask 100 (or the mask metal film 110) is attached to the frame 200 Can be supported.

The temporary bonding part 55 may use an adhesive that can be separated by applying heat or an adhesive that can be separated by UV irradiation.

For example, the temporary bonding part 55 may be formed of liquid wax. The liquid wax may be the same as the wax used in the polishing step of a semiconductor wafer, and the like, and the type is not particularly limited. The liquid wax is mainly a resin component for controlling adhesion, impact resistance, and the like with respect to holding power, and may include substances and solvents such as acrylic, vinyl acetate, nylon, and various polymers. As an example, the temporary adhesive part 55 may use SKYLIQUID ABR-4016 including acrylonitrile butadiene rubber (ABR) as a resin component and n-propyl alcohol as a solvent component. The liquid wax may be formed on the temporary bonding portion 55 using spin coating.

The temporary adhesive part 55, which is a liquid wax, has a lower viscosity at a temperature higher than 85°C to 100°C, and becomes more viscous at a temperature lower than 85°C, and may be partially hardened like a solid, so that the mask metal film 110' and the template 50 ) Can be fixed and bonded.

Next, referring to FIG. 4B, a mask metal layer 110 ′ may be adhered on the template 50. After heating the liquid wax to 85° C. or higher and contacting the mask metal film 110 ′ with the template 50, bonding may be performed by passing the mask metal film 110 ′ and the template 50 between rollers. .

According to an embodiment, baking is performed on the template 50 at about 120° C. for 60 seconds to vaporize the solvent of the temporary bonding portion 55, and immediately, a mask metal layer lamination process may be performed. . Lamination is performed by loading the mask metal film 110 ′ on the template 50 on which the temporary bonding part 55 is formed, and passing it between an upper roll of about 100°C and a lower roll of about 0°C. I can. As a result, the mask metal layer 110 ′ may be in contact with the template 50 through the temporary bonding portion 55.

Subsequently, referring to FIG. 4B further, one surface of the mask metal layer 110 ′ may be planarized (PS). The thickness of the mask metal layer 110 ′ manufactured by the rolling process may be reduced (110 ′ -> 110) through a planarization (PS) process. In addition, the mask metal layer 110 manufactured by the electroplating process may also be subjected to a planarization (PS) process in order to control surface characteristics and thickness.

Accordingly, as shown in FIG. 4C, as the thickness of the mask metal layer 110 ′ is reduced (110 ′ -> 110), the mask metal layer 110 has a thickness of about 5 μm to 20 μm. I can.

Next, referring to FIG. 5D, a patterned insulating portion 25 may be formed on the mask metal layer 110. The insulating part 25 may be formed of a photoresist material using a printing method or the like.

Subsequently, the mask metal layer 110 may be etched. A method such as dry etching or wet etching may be used without limitation, and as a result of the etching, a portion of the mask metal layer 110 exposed to the empty space 26 between the insulating portions 25 may be etched. The etched portion of the mask metal layer 110 constitutes the mask pattern P, and the mask 100 having a plurality of mask patterns P formed thereon may be manufactured.

Next, referring to (e) of FIG. 5, the manufacturing of the template 50 supporting the mask 100 may be completed by removing the insulating portion 25.

Meanwhile, in FIGS. 5D and 5E, a process of forming the mask pattern P after bonding the mask metal layer 110 to the template 50 is described, but is not limited thereto, and the mask pattern ( The manufacturing of the template 50 supporting the mask 100 may be completed by attaching the mask 100 (see FIG. 3) on which the P) is formed to the template 50.

Since the frame 200 includes a plurality of mask cell regions (CR: CR11 to CR56), the mask 100 having mask cells (C: C11 to C56) corresponding to each of the mask cell regions (CR: CR11 to CR56). ) May also be provided in plural. In addition, a plurality of templates 50 supporting each of the plurality of masks 100 may be provided.

6 is a schematic diagram showing a problem when the thermal expansion coefficient of the template according to the comparative example is higher than that of the mask.

Referring to FIG. 6A, the process temperature of the space in which the process in which the mask metal film 110 (or the mask 100) is adhered to the template 50' is performed is set to a temperature T1 higher than room temperature. Raises it. The process temperature T1 may be about 85° C. to 100° C. at which the viscosity of the temporary bonding portion 55 is lowered. Subsequently, the solvent of the temporary bonding portion 55 may be vaporized by baking, and the mask metal layer 110 may be adhered to the template 50 ′. Subsequently, the process temperature is lowered to a temperature (T2) at which the viscosity of the temporary bonding portion 55 is increased and partially hardened like a solid.

Conventionally, glass, borosilicate glass, or the like was used as the material of the template 50'. ^{In particular, BOROFLOAT ®} 33, a borosilicate glass, has a thermal expansion coefficient of about 3.3 X 10 ^-6 /℃, and an invar mask metal film 110 and a thermal expansion coefficient of about 1.5~3 X 10 ^{-6 /℃.} Due to the small difference, the mask metal layer 110 has been widely used due to the ease of control.

Since the template 50' has a higher coefficient of thermal expansion than the mask metal layer 110, when the temperature T2 is lowered as shown in FIG. 6A, the mask metal layer 110 is relatively While only a small degree (L2) is contracted, the template 50' is contracted to a relatively large degree (L1; L1>L2). At the same time, since the template 50 ′ and the mask metal film 110 are in a state that is well bonded and fixed through the temporary bonding portion 55, the mask metal film 110 has a force (CT) to be contracted more than the original contraction level (L2). ) Is applied. The force CT to be further contracted occurs because the degree of contraction L1 of the template 50 ′ is greater than the contraction degree L2 of the mask metal layer 110. Accordingly, the mask metal layer 110 is adhered to the template 50 ′ in a state in which the compressive force CT is applied in the lateral direction (the inner side of the mask metal layer 110 ).

When the thermal expansion coefficient of the template 50' is higher than the mask 100 (or the mask metal layer 110), the following problems may occur.

6(b), the template 50' of FIG. 6(a) is a frame 200 (or frame sheet part 221, first and second grid sheet parts 223, 225). The mask 100 may be attached to the frame 200 as it is loaded to correspond to the mask 100, and welding is performed to form a welding bead WB.

In addition, the template 50 ′ may be separated from the mask 100. However, as the template 50 ′ is separated from the mask 100 and the compressive force CT acting on the mask 100 is released, the alignment of the mask 100 may be disturbed. In other words, there may be a problem that both sides of the mask 100 cannot be attached to the frame 200 while being pulled taut in the outward direction, and a problem may occur in that the mask 100 is attached to the frame 200 in a wrinkled or sagged state. This leads to product failure due to an alignment error of the mask 100 and a PPA error between the cells C.

Accordingly, the template 50 of the present invention is characterized in that the coefficient of thermal expansion is lower than that of the mask 100 (or the mask metal layer 110).

7 is a schematic diagram illustrating an interface state between a mask and a tray and a state in which the mask is attached to the frame when the thermal expansion coefficient of the template is lower than that of the mask according to an embodiment of the present invention.

Referring to FIG. 7(a), as shown in FIG. 6(a), the process temperature of the space is raised to a temperature T1 higher than room temperature, and the mask metal layer 110 (or pattern P) is formed. The mask 100] may be adhered onto the template 50. Subsequently, the process temperature may be lowered to a temperature (T2) at which the viscosity of the temporary bonding portion 55 is increased and partially hardened like a solid.

The mask metal 110 (or the mask 100) may be made of a material such as Invar, Super Invar, nickel, or nickel-cobalt, rather than having a coefficient of thermal expansion of at least 1. On the other hand, the template 50 may have a coefficient of thermal expansion less than 1 (greater than 0). Preferably, a template 50 made of a quartz material having a coefficient of thermal expansion of 0.55 may be used, but the present invention is not limited thereto.

Since the thermal expansion coefficient of the template 50 is lower than that of the mask metal layer 110, when the temperature T2 is lowered as shown in FIG. 7(a), the template 50 hardly shrinks, or the mask metal layer is relatively It contracts to a lesser extent than (110). The mask metal film 110 can be relatively largely contracted (contracted by about L2 in FIG. 7(a)), but it cannot be contracted because it is well adhered and fixed on the template 50 through the temporary bonding part 55 The internal force (IT) to be contracted is applied. In other words, the mask metal layer 110 may be adhered to the template 50 in a taut state by applying a tensile force IT in the lateral direction.

Referring to Figure 7 (b), in the state of Figure 6 (a), the template 50 to the frame 200 (or, the frame sheet portion 221, the first and second grid sheet portions 223, 225) ], the mask 100 may be attached to the frame 200 as it corresponds to the mask 100 and performs welding to form a welding bead WB.

In addition, the template 50 may be separated from the mask 100. As the template 50 is separated, the tensile force IT acting on the mask 100 is released, and it may be converted into a tension TS that tightens both sides of the mask 100. In other words, the mask 100 is pulled to a length longer than the original falling temperature T2 and adhered to the template 50, and as it is welded to the frame 200, the pulled state (self A state in which the tension TS is applied to the mask cell sheet part 220] may be maintained. Therefore, since the mask 100 is attached on the frame 200 while being pulled tightly, wrinkles, deformations, and the like do not occur. Accordingly, it is effective to reduce an alignment error of the mask 100 and a PPA error between cells C.

8 is a schematic diagram showing a state in which the template 50 according to an embodiment of the present invention is loaded onto the frame 200 and the mask 100 corresponds to the cell area CR of the frame 200. In FIG. 8, one mask 100 is exemplified to correspond to/attach to the cell area CR. However, a plurality of masks 100 are simultaneously corresponded to all the cell areas CR so that the mask 100 is frame 200 You can also perform the process of attaching to ). In this case, a plurality of templates 50 supporting each of the plurality of masks 100 may be provided.

The template 50 may be transported by a vacuum chuck 90. The vacuum chuck 90 may adsorb and transport a surface opposite to the surface of the template 50 to which the mask 100 is adhered. After the vacuum chuck 90 adsorbs and flips the template 50, even in the process of transferring the template 50 onto the frame 200, the adhesion state and the alignment state of the mask 100 are not affected.

Next, referring to FIG. 8, the mask 100 may correspond to one mask cell area CR of the frame 200. By loading the template 50 onto the frame 200 (or the mask cell sheet part 220), the mask 100 may correspond to the mask cell area CR. While controlling the position of the template 50/vacuum chuck 90, it is possible to examine whether the mask 100 corresponds to the mask cell area CR through a microscope. Since the template 50 compresses the mask 100, the mask 100 and the frame 200 can be in close contact with each other.

Meanwhile, the lower support 70 may be further disposed under the frame 200. The lower support 70 may press the opposite surface of the mask cell area CR to which the mask 100 contacts. At the same time, since the lower support 70 and the template 50 are pressed against the edge and frame 200 (or mask cell sheet part 220) of the mask 100 in opposite directions, the mask 100 Alignment can be maintained without being disturbed.

Subsequently, the mask 100 may be attached to the frame 200 by irradiating the laser L to the mask 100 by laser welding. A welding bead WB is generated in the welding portion of the laser-welded mask, and the welding bead WB may be integrally connected with the mask 100 / frame 200 and having the same material.

9 is a schematic diagram illustrating a process of separating the mask 100 and the template 50 after attaching the mask 100 to the frame 200 according to an embodiment of the present invention.

Referring to FIG. 9, after attaching the mask 100 to the frame 200, the mask 100 and the template 50 may be debonded. Separation of the mask 100 and the template 50 can be performed through at least one of heat application (ET), chemical treatment (CM), ultrasonic application (US), and UV application (UV) to the temporary bonding part 55. have. Since the mask 100 remains attached to the frame 200, only the template 50 can be lifted. For example, when heat at a temperature higher than 85°C to 100°C is applied (ET), the viscosity of the temporary bonding portion 55 decreases, and the adhesive strength between the mask 100 and the template 50 is weakened, and thus the mask 100 ) And the template 50 may be separated. As another example, the mask 100 and the template 50 may be separated by dissolving or removing the temporary bonding portion 55 by immersing (CM) the temporary bonding portion 55 in a chemical substance such as IPA, acetone, and ethanol. have. As another example, when ultrasound is applied (US) or UV is applied (UV), the adhesion between the mask 100 and the template 50 is weakened, so that the mask 100 and the template 50 may be separated.

When the template 50 is separated from the mask 100, the tensile force IT applied to the mask 100 is released and may be converted into a tension TS that tightens both sides of the mask 100. Accordingly, by applying the tension TS to the frame 200 (mask cell sheet part 220), the mask 100 may be attached in a taut state.

10 is a schematic diagram showing a state in which the mask 100 is attached to the frame 200 according to an embodiment of the present invention. 10 shows a state in which all of the masks 100 are attached to the cell area CR of the frame 200. After attaching the masks 100 one by one, the template 50 may be separated, but after attaching all the masks 100, all the templates 50 may be separated.

The conventional mask 10 of FIG. 1 has a long length because it includes 6 cells (C1 to C6), whereas the mask 100 of the present invention has a short length including one cell (C). The degree of distortion of the pixel position accuracy (PPA) can be reduced. In addition, since the present invention only needs to match one cell (C) of the mask 100 and check the alignment state, a conventional method in which a plurality of cells (C: C1 to C6) must be simultaneously corresponded and all alignment states must be checked. The manufacturing time can be significantly reduced compared to the method [see Fig. 1].

When the template 50 and the mask 100 are separated after each of the masks 100 are attached to the corresponding mask cell area CR, the plurality of masks 100 are contracted in opposite directions (TS). ) Is applied, the force is canceled, so that deformation does not occur in the mask cell sheet portion 220. For example, the first grid sheet portion 223 between the mask 100 attached to the CR11 cell area and the mask 100 attached to the CR12 cell area is in the right direction of the mask 100 attached to the CR11 cell area. The applied tension TS and the tension TS acting in the left direction of the mask 100 attached to the CR12 cell area may be canceled out. Thus, the deformation of the frame 200 (or the mask cell sheet part 220) due to the tension TS is minimized, so that the alignment error of the mask 100 (or the mask pattern P) can be minimized. There is this.

Although the present invention has been illustrated and described with reference to a preferred embodiment as described above, it is not limited to the above embodiment, and within the scope not departing from the spirit of the present invention, various It can be transformed and changed. Such modifications and variations should be viewed as falling within the scope of the present invention and the appended claims.

50: template
51: laser through hole
55: temporary bonding part
100: mask
110: mask film, mask metal film
200: frame
210: frame frame portion
220: mask cell sheet portion
221: border sheet portion
223: first grid seat portion
225: second grid seat portion
C: cell, mask cell
CR: Mask cell area
DM: dummy, mask dummy
L: laser
P: mask pattern
WB: welding bead

Claims (14)

As a mask support template that supports an OLED pixel forming mask and corresponds to a frame,
template;
A temporary adhesive portion formed on the template; And
A mask that is adhered to the template through a temporary bonding part and has a mask pattern formed thereon
Including,
The template is a mask supporting template with a lower coefficient of thermal expansion than the mask. The method of claim 1,
A mask supporting template, wherein the mask has a coefficient of thermal expansion greater than at least 1. The method of claim 1,
The template has a coefficient of thermal expansion less than 1 (greater than 0), a mask supporting template. The method of claim 1,
The temporary adhesive part is an adhesive that can be separated by applying heat and an adhesive that can be separated by UV irradiation, a mask support template. The method of claim 4,
The temporary adhesive portion is a liquid wax, the mask support template. The method of claim 1,
At room temperature, the mask is adhered to the template while being subjected to a tensile force in the lateral direction. As a manufacturing method of a mask supporting template corresponding to a frame by supporting an OLED pixel forming mask,
(a) preparing a template in which a temporary adhesive portion is formed on one surface;
(b) raising the process temperature to at least higher than room temperature and adhering the mask metal film onto the template;
(c) lowering the process temperature; And
(d) manufacturing a mask by forming a mask pattern on the mask metal film
Including,
The template has a lower coefficient of thermal expansion than the mask, a method of manufacturing a mask supporting template. The method of claim 7,
The mask has a coefficient of thermal expansion greater than at least 1, and the template has a coefficient of thermal expansion less than 1 (more than 0), a method of manufacturing a mask supporting template. The method of claim 7,
The temporary bonding part is an adhesive that can be separated by applying heat and an adhesive that can be separated by UV irradiation, a method of manufacturing a mask supporting template. The method of claim 9,
The temporary adhesive portion is a liquid wax, a method of manufacturing a mask supporting template. The method of claim 7,
When the process temperature is lowered in step (a), the template shrinks less than the mask, so that the mask is subjected to a tensile force in the lateral direction. As a manufacturing method of a mask supporting template corresponding to a frame by supporting an OLED pixel forming mask,
(a) preparing a template in which a temporary adhesive portion is formed on one surface;
(b) raising the process temperature to at least higher than room temperature and adhering the mask with the mask pattern formed thereon to the template; And
(c) lowering the process temperature
Including,
The template has a lower coefficient of thermal expansion than the mask, a method of manufacturing a mask supporting template. A method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed,
(a) preparing a template in which a temporary adhesive portion is formed on one surface;
(b) raising the process temperature to at least higher than room temperature and adhering the mask metal film onto the template;
(c) lowering the process temperature;
(d) manufacturing a mask by forming a mask pattern on the mask metal film;
(e) loading a template onto a frame having at least one mask cell area to correspond the mask to the mask cell area of the frame; And
(f) attaching the mask to the frame
Including,
The template has a lower coefficient of thermal expansion than the mask, a method of manufacturing a frame-integrated mask. A method of manufacturing a frame-integrated mask in which at least one mask and a frame supporting the mask are integrally formed,
(a) loading a template to which a mask is adhered onto a frame having at least one mask cell area to correspond the mask to the mask cell area of the frame; And
(b) attaching the mask to the frame
Including,
The template has a lower coefficient of thermal expansion than the mask, a method of manufacturing a frame-integrated mask.

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