KR20200096356A - Dummy removing unit - Google Patents

Abstract

According to an embodiment of the present invention, a dummy removal unit for removing a dummy partitioned by a scribing line formed at an end part of a second panel of a substrate formed by bonding a first panel and the second part can comprise: a braking member configured to press a corresponding surface of a first panel corresponding to a scribing line; a support member configured to support a dummy at a position opposite to the braking member while interposing a substrate therebetween; a driving mechanism for moving the braking member and the support member to be adjacent to each other so that the braking member presses the corresponding surface to divide the dummy from the substrate; and an imaging module that captures a state where the braking member or the support member presses the end part of the substrate.

Description

Dummy removal unit {DUMMY REMOVING UNIT}

The present invention relates to a dummy removing unit provided in a substrate cutting apparatus for cutting a substrate and removing a dummy from an end of a substrate to form a stepped portion at the end of the substrate.

In general, liquid crystal display panels, organic electroluminescent display panels, inorganic electroluminescent display panels, transmissive projector substrates and reflective projector substrates used in flat panel displays are brittle mother glass panels such as glass (hereinafter referred to as'substrates'). ), a unit glass panel cut into a predetermined size (hereinafter, referred to as'unit substrate') is used.

In the process of cutting the substrate into a unit substrate, scribing by moving the scribing wheel and/or the substrate while pressing the scribing wheel made of a material such as diamond against the substrate along the line to be cut. It includes a scribing process to form a line.

The substrate is formed by bonding the first panel and the second panel, and a process of forming a stepped portion at an end portion of the substrate may be required according to design conditions of the substrate. The stepped portion may serve as a terminal portion on which the terminal (electrode) is disposed.

According to the prior art, in order to form a step portion at the end of the substrate, a step of forming a scribing line in any one of the first panel and the second panel at the end of the substrate, and a dummy partitioned by the scribing line ( A process of removing a cullet, that is, an ineffective area that is not used in a product and is discarded, is removed from the end of the substrate.

To remove the dummy from the end of the substrate, after clamping the ends of the substrate including the dummy together (i.e., the end of the first panel and the end of the second panel together), the dummy is separated from the end of the substrate. After rotating the clamp in the direction, a process of returning the clamp to its original state was performed. Accordingly, the dummy is bent with respect to the end of the substrate, so that the crack advances along the scribing line, and accordingly, the dummy is divided from the end of the substrate. However, according to this process, in the process of returning to the original state after the end of the substrate is bent to remove the dummy, friction occurs between the end of the dummy and the substrate, and the end of the substrate is damaged due to this friction. there is a problem.

The present invention is to solve the problem of the prior art, the object of the present invention is a dummy removal unit capable of preventing damage to the end of the substrate in the process of removing the dummy from the end of the substrate to form a stepped portion at the end of the substrate Is to provide.

The dummy removal unit according to the embodiment of the present invention for achieving the above object removes the dummy partitioned by the scribing line formed at the end of the second panel of the substrate formed by bonding the first panel and the second panel. The dummy removal unit includes: a braking member configured to press the corresponding surface of the first panel corresponding to the scribing line; A support member configured to support the dummy at a position opposite to the braking member with a substrate therebetween; A driving mechanism for moving the braking member and the supporting member adjacent to each other so that the braking member presses the corresponding surface to divide the dummy from the substrate; And an imaging module for photographing a state in which the braking member or the support member presses the end of the substrate.

The support member may have an adsorption portion configured to adsorb the dummy.

The braking member may have a wedge shape whose width decreases toward the corresponding surface.

A dummy removal unit according to an embodiment of the present invention includes a horizontal movement module for horizontally moving a support member; And a vertical movement module for vertically moving the support member. When the dummy is divided from the substrate, the horizontal movement module and the vertical movement module move the support member in a diagonal direction to separate the dummy from the substrate.

The dummy removal unit according to an embodiment of the present invention may further include a braking member moving mechanism for moving the braking member so that the position of the braking member corresponds to the position of the corresponding surface.

In addition, the dummy removal unit according to the embodiment of the present invention for achieving the above object is a dummy partitioned by a scribing line formed at the end of the second panel of the substrate formed by bonding the first panel and the second panel. The dummy removing unit includes: a first pressing member configured to pressurize an end portion of the first panel and having a first adsorption portion configured to adsorb the end portion of the first panel; A second pressing member configured to press an end portion of the second panel at a position facing the first pressing member with a substrate therebetween, and having a second suction unit configured to suck the dummy; A driving mechanism configured to move the first pressing member and the second pressing member adjacent to each other so that the first pressing member and the second pressing member press the end of the first panel and the end of the second panel, respectively; Dividing the dummy from the substrate by bending the ends of the substrate by rotating the first pressing member and the second pressing member while the first pressing member and the second pressing member press the ends of the first panel and the second panel, respectively. A rotating mechanism to make; And an imaging module for capturing a state in which the first pressing member or the second pressing member presses the end of the substrate.

The dummy removal unit according to an embodiment of the present invention may further include a braking member configured to press the corresponding surface of the first panel corresponding to the scribing line.

The braking member may be coupled to the first pressing member.

The braking member may have a wedge shape whose width decreases toward the corresponding surface.

The dummy removal unit according to an embodiment of the present invention may further include a braking member moving mechanism for moving the braking member so that the position of the braking member corresponds to the position of the scribing line.

The first adsorption unit and the second adsorption unit are connected to a negative pressure source and may be configured to respectively adsorb the end and the dummy of the first panel by negative pressure acting by the negative pressure source, and the first adsorption unit and the second adsorption unit It is connected to and may be configured to eject the gas supplied from the gas supply to release the end and the dummy of the first panel.

According to the dummy removal unit according to an embodiment of the present invention, the clamp module includes a braking member configured to press the corresponding surface of the first panel corresponding to the scribing line formed on the second panel, and braking with the substrate interposed therebetween. And a support member configured to support the dummy at a position opposite the member. In addition, by pressing the corresponding surface in a direction perpendicular to the corresponding surface by the braking member so that the crack propagates in a direction perpendicular to the corresponding surface inside the second panel, the dummy can be divided from the end of the substrate. Accordingly, the dummy can be separated/removed from the end of the substrate without bending the dummy with respect to the end of the substrate. Accordingly, damage to the substrate due to friction between the dummy and the substrate, which occurs when the dummy is bent with respect to the end of the substrate, can be prevented.

In addition, according to the dummy removal unit according to an embodiment of the present invention, the clamp module is configured to adsorb a first pressure member having a first adsorption unit configured to adsorb an end portion of the first panel and a dummy that is a part of the second panel. A second pressing member having a configured second suction unit, and a first pressing member and a second pressing member in a state in which the first pressing member and the second pressing member press the ends of the first panel and the ends of the second panel, respectively. And a rotation mechanism for bending the end of the substrate by rotating the dummy to divide the dummy from the substrate. And, in a state where the bent state of the end of the substrate is maintained by the first adsorption unit, the dummy may be removed from the second panel by the movement of the second pressing member relative to the first pressing member. That is, while the end of the substrate is kept bent upward, the dummy may be separated from the end of the substrate in a diagonal direction. Therefore, in the process of removing the dummy from the end of the substrate to form a stepped portion at the end of the substrate, it is possible to prevent friction between the dummy and the end of the substrate, thereby preventing damage such as scratches on the substrate. .

1 is a plan view schematically illustrating a substrate cutting apparatus to which a dummy removal unit according to an embodiment of the present invention is applied.
2 is a side view schematically illustrating a substrate cutting apparatus to which a dummy removing unit according to an embodiment of the present invention is applied.
3 is a perspective view schematically illustrating a dummy removal unit according to a first embodiment of the present invention.
4 is a side view schematically illustrating a dummy removal unit according to a first embodiment of the present invention.
5 and 6 are side views schematically illustrating an operation process of the dummy removal unit according to the first embodiment of the present invention.
7 is a side view schematically illustrating a dummy removing unit according to a second embodiment of the present invention.
8 is a side view schematically illustrating an operation process of the dummy removal unit according to the second embodiment of the present invention.
9 is a side view schematically illustrating a dummy removing unit according to a third embodiment of the present invention.
10 to 12 are side views schematically illustrating an operation process of the dummy removal unit according to the third embodiment of the present invention.
13 is a side view schematically illustrating a dummy removing unit according to a fourth embodiment of the present invention.
14 to 16 are side views schematically illustrating an operation process of the dummy removal unit according to the fourth embodiment of the present invention.

Hereinafter, a dummy removal unit according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, a substrate cutting apparatus including a dummy removing unit according to an embodiment of the present invention will be described. The object to be cut by the substrate cutting apparatus may be a bonded substrate formed by bonding the first panel and the second panel. For example, a first panel may include a thin film transistor, and a second panel may include a color filter. Conversely, the first panel may include a color filter, and the second panel may include a thin film transistor. In the drawings, the first panel is positioned at the top and the second panel is positioned at the bottom, but the present invention is not limited to the directions of the first panel and the second panel.

Hereinafter, the bonding substrate is simply referred to as a substrate. In addition, the surface of the first panel exposed to the outside is referred to as a first surface, and the surface of the second panel exposed to the outside is referred to as a second surface.

1 and 2, the direction in which the substrate S on which the substrate cutting process is to be performed is transferred is defined as the Y-axis direction, and the direction perpendicular to the direction in which the substrate S is transferred (Y-axis direction) is X. It is defined as the axial direction. In addition, a direction perpendicular to the X-Y plane on which the substrate S is placed is defined as the Z-axis direction. For example, the Y-axis direction may be the length direction of the substrate S, and the X-axis direction may be the width direction of the substrate S. In addition, the term scribing line means a groove and/or crack formed to extend in a predetermined direction from the surface of the substrate S.

1 and 2, the substrate cutting apparatus includes a scribing unit 30 configured to form a scribing line on the substrate S in the X-axis direction and/or the Y-axis direction, and the substrate A first transfer unit 10 transferring (S) to the scribing unit 30, a second transfer unit 20 transferring the substrate S from the scribing unit 30 to a subsequent process, It may include a plurality of dummy removal units 40 configured to remove the dummy from the plurality of ends of the substrate S.

The scribing unit 30 includes a first frame 31 extending in the X-axis direction, a first scribing head 32 installed on the first frame 31 to be movable in the X-axis direction, and A second frame 33 extending in the X-axis direction parallel to the first frame 31 under the 1 frame 31, and a second frame 33 movably installed in the second frame 33 in the X-axis direction. Cribing head 34 may be included. Between the first scribing head 32 and the first frame 31, there is a linear movement mechanism connected to the first scribing head 32 to move the first scribing head 32 in the X-axis direction. It can be provided. Similarly, between the second scribing head 34 and the second frame 33, it is connected to the second scribing head 34 to move the second scribing head 34 in the X-axis direction. Appliances may be provided. For example, the linear movement mechanism may be composed of an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a ball screw mechanism.

A plurality of first scribing heads 32 may be mounted on the first frame 31 in the X-axis direction. A plurality of second scribing heads 34 may be mounted on the second frame 33 in the X-axis direction. The plurality of first scribing heads 32 may be driven simultaneously or may be driven sequentially. Likewise, the plurality of second scribing heads 34 may be driven simultaneously or may be driven sequentially.

A space through which the substrate S passes may be formed between the first frame 31 and the second frame 33. The first frame 31 and the second frame 33 may be manufactured and assembled as separate members, or may be integrally manufactured.

The first scribing head 32 and the second scribing head 34 may be disposed to face each other in the Z-axis direction. The first scribing head 32 is used to form a scribing line on the first surface of the substrate S, and the second scribing head 34 is used on the second surface of the substrate S. It is used to form the scribing line.

A wheel holder 35 for holding the scribing wheel 351 may be installed on the first and second scribing heads 32 and 34. The scribing wheel 351 mounted on the first scribing head 32 and the scribing wheel 351 mounted on the second scribing head 34 may be disposed to face each other in the Z-axis direction. have.

The pair of scribing wheels 351 may be pressed against the first and second surfaces of the substrate S, respectively. When the pair of scribing wheels 351 are pressed against the first and second surfaces of the substrate S, respectively, the first and second scribing heads 32 and 34 are relative to the substrate S. By moving in the X-axis direction, scribing lines may be formed on the first and second surfaces of the substrate S in the X-axis direction. In addition, when the pair of scribing wheels 351 are pressed against the first and second surfaces of the substrate S, respectively, the substrate S is moved in the Y-axis direction, so that the surface of the substrate S A scribing line may be formed in the Y-axis direction.

Meanwhile, the first and second scribing heads 32 and 34 may be configured to be movable in the Z-axis direction with respect to the first and second frames 31 and 33, respectively. To this end, a head that is connected to the first scribing head 32 between the first scribing head 32 and the first frame 31 to move the first scribing head 32 in the Z-axis direction A moving module 38 may be provided, and a second scribing head 34 is connected to the second scribing head 34 between the second scribing head 34 and the second frame 33 A head movement module 39 may be provided to move the in the Z-axis direction. For example, the head movement modules 38 and 39 may be provided with an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism.

As the first and second scribing heads 32 and 34 move in the Z-axis direction with respect to the first and second frames 31 and 33, respectively, the pair of scribing wheels 351 It can be pressed against S) or spaced apart from the substrate S. And, by adjusting the degree of movement of the first and second scribing heads 32 and 34 in the Z-axis direction, the pressing force applied by the pair of scribing wheels 351 to the substrate S is controlled. Can be. Therefore, by moving the first and second scribing heads 32 and 34 in the Z-axis direction, the cutting depth (penetration depth) of the pair of scribing wheels 351 into the substrate S is Can be adjusted.

The first transfer unit 10 includes a plurality of belts 11 for supporting the substrate S, a gripping member 12 for gripping the trailing end of the substrate S supported on the plurality of belts 11, The support bar 13 connected to the gripping member 12 and extending in the X-axis direction, the guide rail 14 connected to the support bar 13 and extending in the Y-axis direction, and the scribing unit 30 It may include a first plate 15 disposed adjacent to the substrate S to lift or adsorb and support the substrate S.

The plurality of belts 11 may be spaced apart from each other in the X-axis direction. Each belt 11 is supported by a plurality of pulleys 111. At least one of the plurality of pulleys 111 connected to one belt 11 may be a driving pulley that provides a driving force to rotate the belt 11.

Between the support bar 13 and the guide rail 14, an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism may be provided. Accordingly, as the support bar 13 is moved in the Y-axis direction by the linear movement mechanism while the holding member 12 holds the substrate S, the substrate S can be transferred in the Y-axis direction. At this time, the plurality of belts 11 can stably support the substrate S while rotating in synchronization with the movement of the gripping member 12.

The gripping member 12 may be a clamp that presses and holds the trailing end of the substrate S. As another example, the gripping member 12 may be configured to have a vacuum hole connected to a vacuum source to adsorb the trailing end of the substrate S.

The first plate 15 may be configured to lift or adsorb the substrate S. For example, a plurality of slots connected to a gas supply source and a vacuum source may be formed on the surface of the first plate 15. When gas is supplied from the gas supply source to the plurality of slots of the first plate 15, the substrate S may be lifted from the first plate 15. In addition, when gas is sucked through the plurality of slots of the first plate 15 by the negative pressure formed by the vacuum source, the substrate S may be adsorbed to the first plate 15.

When the substrate S is lifted from the first plate 15, the substrate S may be moved without friction with respect to the first plate 15. In addition, in the process of forming the scribing lines on the first and second surfaces of the substrate S, the substrate S may be adsorbed and fixed to the first plate 15.

The second transfer unit 20 is disposed adjacent to the scribing unit 30 to support the substrate S by lifting or adsorbing the second plate 25, and adjacent to the second plate 25. It may include a plurality of belts 21 are disposed.

In the process of forming scribing lines on the first and second surfaces of the substrate S by the scribing unit 30, respectively, the substrate S is formed of the first plate 15 and the second plate 25 May be supported on, and the first and second scribing heads 32 and 34 may be positioned between the first plate 15 and the second plate 25.

The plurality of belts 21 may be spaced apart from each other in the X-axis direction. Each belt 21 is supported by a plurality of pulleys 211. At least one of the plurality of pulleys 211 connected to one belt 21 may be a driving pulley that provides a driving force to rotate the transfer belt 21.

The second plate 25 may be configured to lift or adsorb the substrate S. For example, a plurality of slots connected to a gas supply source and a vacuum source may be formed on the surface of the second plate 25. When gas is supplied from the gas supply source to the plurality of slots of the second plate 25, the substrate S may be lifted from the second plate 25. In addition, when gas is sucked through the plurality of slots of the second plate 25 by the negative pressure formed by the vacuum source, the substrate S may be adsorbed to the second plate 25.

In the process of transferring the substrate S to the second plate 25, gas is supplied to the slot of the second plate 25, and accordingly, the substrate S moves with respect to the second plate 25 without friction. Can be. Further, in the process of forming the scribing lines on the first and second surfaces of the substrate S, the adsorption substrate S may be adsorbed and fixed to the second plate 25.

Meanwhile, in the process of moving the substrate S from the second plate 25 to a subsequent process by rotation of the plurality of belts 21, gas is supplied to the slot of the second plate 25, and accordingly, the substrate (S) can be moved without friction with respect to the second plate 25 while being lifted from the second plate 25.

1 and 2, a plurality of dummy removal units 40 are disposed adjacent to the scribing unit 30 and between the first transfer unit 10 and the second transfer unit 20 It may include a first dummy removal unit 410 positioned and a second dummy removal unit 420 positioned on both sides of the second transfer unit 20 in the X-axis direction.

The first dummy removal unit 410 may be disposed between the first plate 15 and the second plate 25. The first dummy removal unit 410 includes the edge of the leading end of the substrate S (the front end of the substrate S in the Y-axis direction) and the trailing end of the substrate S (the Y-axis direction of the substrate S). To remove the dummy D (cullet, that is, the ineffective area discarded after being cut without being used as a unit substrate), partitioned by the scribing line L at the edge of the rear end of the furnace. Plays a role.

The second dummy removal unit 420 may be provided in pairs on both sides of the plurality of belts 21 in the X-axis direction. The pair of second dummy removal units 420 may be disposed to face each other. The second dummy removal unit 420 is a dummy partitioned by a scribing line L at the edge of the transverse end (left end and right end based on FIG. 1) in the X-axis direction of the substrate S ( D) (cullets, that is, ineffective areas that are not used as a unit substrate and are discarded after being cut) are removed.

The first dummy removal unit 410 and the second dummy removal unit 420 differ in installation position and orientation, but have the same configuration. Hereinafter, the first dummy removal unit 410 and the second dummy removal unit 420 will be collectively referred to as the dummy removal unit 40.

Hereinafter, a dummy removal unit according to a first embodiment of the present invention will be described with reference to FIGS. 3 to 6.

3 to 6, the dummy removal unit 40 includes a support 41 extending in the longitudinal direction, a clamp module 50 disposed on the support 41, and the support 41 The rotation module 43 that rotates about the rotational central axis of (41) (an axis parallel to the longitudinal direction of the support 41) and the support 41 move in a direction orthogonal to the longitudinal direction of the support 41 It is installed adjacent to the horizontal movement module 44 to move, the vertical movement module 45 to move the support (41) in the vertical direction, and the clamp module 50, the clamp module 50 to the end of the substrate (S). It may include an imaging module 90 for capturing a gripping (pressurized) state.

Here, in the case of the first dummy removing unit 410, the longitudinal direction of the support base 41 is the X-axis direction. And, in the case of the second dummy removing unit 420, the length direction of the support base 41 is the Y-axis direction.

The rotation module 43 may be composed of a rotation motor connected to the rotation center axis of the support member 41 through a rotation axis. The rotation module 43 may include a power transmission mechanism such as a link and a belt provided between the rotation shaft of the rotation motor and the support 41. As the support 41 is rotated about a rotation center axis by the rotation module 43, the clamp module 50 may be disposed opposite to the end of the substrate S. Accordingly, the clamp module 50 is disposed to face the end of the substrate S, so that the dummy D can be removed from the end of the substrate S.

The horizontal movement module 44 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. As the support 41 is moved horizontally by the horizontal movement module 44, the clamp module 50 may be moved horizontally. The clamp module 50 may be moved horizontally by the horizontal movement module 44 and may be positioned opposite to the end of the substrate S. In addition, the clamp module 50 may be moved in a direction away from the substrate S by the horizontal movement module 44 while the dummy D is held, and accordingly, the dummy D is the substrate S Can be separated/removed from

The vertical movement module 45 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. As the support 41 is moved vertically by the vertical movement module 45, the clamp module 50 may be moved vertically. In the process of removing the dummy D, the clamp module 50 may be raised by the vertical movement module 45 and positioned to face the end of the substrate S. In the process of transferring the substrate S, the clamp module 50 may be lowered by the vertical movement module 45 so as not to interfere with the transfer of the substrate S.

3 shows a configuration in which a rotation module 43, a horizontal movement module 44, and a vertical movement module 45 are provided on both sides of the support member 41, respectively. However, the present invention is not limited thereto, and the rotation module 43, the horizontal movement module 44, and the vertical movement module 45 are provided on one side of the support 41 and the support 41 on the other side of the support 41 A configuration in which a guide means for guiding the rotation, horizontal movement, and vertical movement of the device may be applied.

For example, the clamp module 50 may be provided in plural. In this case, the plurality of clamp modules 50 may be disposed in the longitudinal direction of the support member 41. The clamp module 50 may be installed to be movable in the longitudinal direction of the support 41 along the guide 411 extending along the support 41. To this end, between the clamp module 50 and the guide 411, an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism may be provided. Accordingly, as the plurality of clamp modules 50 are moved by the linear movement mechanism, the spacing between the plurality of clamp modules 50 may be adjusted. Accordingly, the plurality of clamp modules 50 are disposed at intervals appropriately corresponding to the width (length) of the substrate S, so that the substrate S can be stably held.

On the other hand, the present invention is not limited to a configuration in which a plurality of clamp modules 50 are provided, and the present invention is also provided in a configuration in which one clamp module 50 having a length corresponding to the width (length) of the substrate S is provided. Can be applied.

As shown in FIG. 4, the clamp module 50 is a dummy that becomes a part of the second panel P2 divided by the scribing line L formed on the second panel P2 (second surface). D) is configured to remove.

Among the first panel P1 and the second panel P2 constituting the substrate S, the first panel P1 is positioned above and below the second panel P2. A method of forming a scribing line on the first panel P1, which is an upper panel, may be considered to form a stepped portion at the end of the substrate S. However, when a scribing line is formed on the first panel P1, which is an upper panel, and the dummy that is part of the first panel P1 is removed, particles that may be generated in the process of removing the dummy remain in the stepped portion. can do. Therefore, a process of cleaning the stepped portion may be further required to remove particles that may remain in the stepped portion.

Therefore, in order to prevent such a problem, it is desirable to form a scribing line (L) on the second panel (P2), which is a lower panel, and to remove the dummy (D) partitioned by the scribing line (L). . In this case, even if particles are generated in the process of removing the dummy D, the generated particles fall downward from the substrate S, so that the particles can be prevented from remaining in the stepped portion of the substrate S. A separate cleaning process to remove silver may not be required.

The clamp module 50 connects the base member 51 and the corresponding surface (first surface) of the first panel P1 to be movably installed on the base member 51 and corresponding to the scribing line L. The braking member 52 configured to pressurize and the second panel P2 are movably installed on the base member 51 and are supported at a position opposite to the braking member 52 with the end of the substrate S interposed therebetween. The braking member 52 and the supporting member 53 are moved adjacent to each other so that the supporting member 53 and the braking member 52 press the corresponding surface to divide the dummy D from the substrate S. It may include a drive mechanism 54 to let.

The base member 51 may be detachably fixed to the support 41. As the base member 51 is fixed to the support 41, the clamp module 50 may be supported on the support 41.

As shown in Fig. 5, the braking member 52 and the support member 53 are moved adjacent to each other by the driving mechanism 54 with the substrate S interposed therebetween, thereby partitioning the dummy D. The scribing line L may be pressurized.

The breaking member 52 may be formed in a bar shape extending in the longitudinal direction. The braking member 52 presses the first surface (corresponding surface) of the first panel P1 corresponding to the second surface of the second panel P2 on which the scribing line L is formed, thereby pressing the scribing line ( It plays a role in advancing the crack formed by L). In order to maximize the pressing force of the braking member 52 applied to the corresponding surface by minimizing the area in which the braking member 52 contacts the corresponding surface, the braking member 52 has a wedge shape whose width decreases toward the corresponding surface. It is preferably made. The front end of the braking member 52 contacting the first surface of the first panel P1 may be made of an elastic material such as urethane resin, and accordingly, the tip of the braking member 52 is attached to the first panel P1. Even in contact, it is possible to prevent damage to the first panel P1.

The braking member 52 may be connected to the drive mechanism 54 through a connection member 55. The braking member 52 may be installed on the connection member 55 to be horizontally movable along the connection member 55. Accordingly, even when the horizontal position of the scribing line L is changed, the horizontal position of the braking member 52 may be adjusted to correspond to the position of the corresponding surface corresponding to the scribing line L. Meanwhile, the horizontal position of the braking member 52 may be automatically adjusted. To this end, a braking member moving mechanism 56 configured to move the braking member 52 may be provided between the braking member 52 and the connecting member 55. For example, the braking member moving mechanism 56 may be composed of a pneumatic or hydraulic actuator, a linear motor operated by electromagnetic interaction, or a linear moving mechanism such as a ball screw mechanism.

When the braking member 52 presses the corresponding surface, the support member 53 comes into contact with the second panel P2, and is divided by the portion where the scribing line L is formed and the scribing line L. It plays a role of supporting the old dummy (D).

The drive mechanism 54 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. The driving mechanism 54 may be connected to the braking member 52 and the support member 53 to move the braking member 52 and the support member 53 to be adjacent to or spaced apart from each other.

The imaging module 90 may be configured as a CCD camera, for example. The imaging module 90 may be installed adjacent to the clamp module 50.

As shown in the drawing, the imaging module 90 may be installed to face the support member 53 under the clamp module 50. The imaging module 90 can capture an image of a state in which the support member 53 presses the end portion of the substrate S by the drive mechanism 54. Accordingly, the operator may analyze the image captured by the imaging module 90 and check whether the support member 53 is accurately positioned at a preset position and presses the end of the substrate S.

Although not shown in the drawings, the imaging module 90 may be installed above the clamp module 50 to face the braking member 52. In this case, the imaging module 90 can capture an image of a state in which the braking member 52 presses the end portion of the substrate S by the drive mechanism 54. Accordingly, the operator may analyze the image captured by the imaging module 90 to check whether the braking member 52 is accurately positioned at a preset position and presses the end of the substrate S.

Further, although not shown in the drawings, a pair of imaging modules 90 may be installed so as to face the braking member 52 and the support member 53 respectively above and below the clamp module 50. In this case, the operator analyzes the image captured by the pair of imaging modules 90, and whether the braking member 52 and the support member 53 are accurately positioned at a preset position to press the end of the substrate S. You can check whether or not.

In this way, the state in which the braking member 52 and/or the support member 53 presses the end of the substrate S can be imaged by the imaging module 90, so that the operator can take an image by the imaging module 90. By analyzing the resulting image, it can be checked whether the braking member 52 and/or the supporting member 53 are positioned at the correct position to press the end of the substrate S. Therefore, it is possible to prevent the braking member 52 and/or the support member 53 from pressing the end of the substrate S in an incorrect position, and the braking member 52 and/or the support member 53 is incorrect. Damage to the braking member 52, the support member 53, and/or the substrate S, which may be caused by pressing the end portion of the substrate S in one position, can be prevented.

On the other hand, the imaging module 90 is used to inspect whether the braking member 52 and/or the support member 53 presses the end of the substrate S at the correct position, in addition to the dummy D It can also be used to check whether it has been completely removed from the end of the substrate S. That is, after the process of separating the dummy D from the end of the substrate S is completed, the end of the substrate S is imaged with the imaging module 90, and then the substrate imaged by the imaging module 90 ( It is possible to check whether the dummy D has been completely removed by analyzing the image at the end of S).

Hereinafter, a process of removing the dummy D from the substrate S by using the dummy removal unit 40 according to the first embodiment of the present invention will be described with reference to FIGS. 4 to 6.

Before the dummy removal unit 40 removes the dummy D from the end of the substrate S, the scribing unit 30 forms a scribing line L at the end of the substrate S. The process is carried out. As described above, the scribing line L at the end of the substrate S may be formed on the second surface of the second panel P2.

At the leading and trailing ends of the substrate S, scribing lines L are formed in the X-axis direction. The dummy D partitioned by the scribing line L formed at the leading and trailing ends of the substrate S may be removed by the first dummy removing unit 410.

At the transverse ends (left and right ends) of the substrate S, a scribing line L is formed in the Y-axis direction. The dummy D partitioned by the scribing line L formed at the transverse end of the substrate S may be removed by the second dummy removing unit 420.

In this way, after the scribing line L is formed at the end of the substrate S, the substrate S is transferred by the first transfer unit 10 and/or the second transfer unit 20, and accordingly , The end of the substrate S is positioned adjacent to the dummy removal unit 40.

Then, as shown in FIG. 4, the clamp module 50 of the dummy removing unit 40 is moved to the dummy D partitioned by the scribing line L.

In this case, as shown in FIG. 5, the braking member 52 and the support member 53 are moved adjacent to each other, and accordingly, the second panel P2 corresponding to the scribing line L 1 The corresponding surface of the panel P1 is pressed by the braking member 52. At this time, the support member 53 contacts the second panel P2 and maintains a state in which the second surface of the second panel P2 is in contact.

As the braking member 52 presses the corresponding surface, a crack proceeds in a direction perpendicular to the second surface of the second panel P2 from the scribing line L in the second panel P2. As described above, since the crack proceeds in a direction perpendicular to the second surface of the second panel P2 by the braking member 52, the cut surface of the end of the second panel P2 may be uniform in the vertical direction. In addition, as the crack progresses inside the second panel P2, the dummy D partitioned by the scribing line L may be divided from the end of the substrate S. Accordingly, the dummy D is in a state in which it can be immediately separated from the end of the substrate S.

In this state, as shown in FIG. 6, the braking member 52 and the support member 53 are moved to be spaced apart from each other by the drive mechanism 54. Accordingly, as the pressing force applied to the dummy D is released, the dummy D may be separated from the end of the substrate S by its own weight. As the dummy D is separated from the end of the substrate S, a step portion may be formed at the end of the substrate S.

At this time, the clamp module 50 (support member 53) is moved in a diagonal direction in a direction away from the end of the substrate S by the horizontal movement module 44 and the vertical movement module 45. Accordingly, friction between the cut surface of the end of the second panel P2 and the cut surface of the dummy D is prevented. Accordingly, damage such as scratches on the substrate S (that is, the end of the second panel P2) can be prevented.

According to the dummy removal unit 40 according to the first embodiment of the present invention, the clamp module 50 is formed of the first panel P1 corresponding to the scribing line L formed on the second panel P2. And a braking member 52 configured to press the corresponding surface, and a support member 53 configured to support the dummy D at a position opposite to the braking member 52 with the substrate S interposed therebetween. In addition, the braking member 52 presses the corresponding surface in a direction perpendicular to the corresponding surface so that the crack advances in a direction perpendicular to the corresponding surface inside the second panel P2, thereby replacing the dummy D with the substrate S It can be divided from the end of ). Accordingly, the dummy D can be separated/removed from the end of the substrate S without bending the dummy D with respect to the end of the substrate S. Therefore, damage to the substrate (S) due to friction between the dummy (D) and the substrate (S) occurs in the process of returning to the original state after the end of the substrate (S) is bent to remove the dummy (D). Can be prevented.

Hereinafter, a dummy removal unit 40 according to a second embodiment of the present invention will be described with reference to FIGS. 7 and 8. The same reference numerals are assigned to the same components as those described in the first embodiment, and detailed descriptions thereof will be omitted.

7 and 8, the dummy removal unit 40 according to the second embodiment of the present invention includes a clamp module 60.

The clamp module 60 connects the base member 61 and the corresponding surface (first surface) of the first panel P1 to be movably installed on the base member 61 and corresponding to the scribing line L. A braking member 62 configured to pressurize and movably installed on the base member 61 and support the second panel P2 at a position opposite to the braking member 62 with the end of the substrate S interposed therebetween The braking member 62 and the supporting member 63 are moved adjacent to each other so that the supporting member 63 and the braking member 62 press the corresponding surface to divide the dummy D from the substrate S. It may include a drive mechanism 64 to let.

The base member 61 may be detachably fixed to the support 41. As the base member 61 is fixed to the support 41, the clamp module 60 may be supported on the support 41.

As shown in Fig. 7, the braking member 62 and the support member 63 are moved adjacent to each other by the driving mechanism 64 with the substrate S interposed therebetween, thereby partitioning the dummy D. The scribing line L may be pressurized.

The breaking member 62 may be formed in a bar shape extending in the longitudinal direction. The braking member 62 presses the first surface (corresponding surface) of the first panel P1 corresponding to the second surface of the second panel P2 on which the scribing line L is formed, thereby pressing the scribing line ( It plays a role in advancing the crack formed by L). In order to maximize the pressing force of the braking member 62 applied to the corresponding surface by minimizing the area in which the braking member 62 contacts the corresponding surface, the braking member 62 has a wedge shape whose width decreases toward the corresponding surface. It is preferably made. The front end of the braking member 62 in contact with the first surface of the first panel P1 may be made of an elastic material such as urethane resin, and accordingly, the tip of the braking member 62 is attached to the first panel P1. Even in contact, it is possible to prevent damage to the first panel P1.

The braking member 62 may be connected to the drive mechanism 64 through a connection member 65. The braking member 62 may be installed on the connection member 65 to be horizontally movable along the connection member 65. Accordingly, even when the horizontal position of the scribing line L is changed, the horizontal position of the braking member 62 may be adjusted to correspond to the position of the corresponding surface corresponding to the scribing line L. Meanwhile, the horizontal position of the braking member 62 may be automatically adjusted. To this end, a braking member moving mechanism 66 configured to move the braking member 62 may be provided between the braking member 62 and the connecting member 65. For example, the braking member moving mechanism 66 may be composed of a pneumatic or hydraulic actuator, a linear motor operated by electromagnetic interaction, or a linear moving mechanism such as a ball screw mechanism.

When the braking member 62 presses the corresponding surface, the support member 63 comes into contact with the second panel P2 and is divided by the portion where the scribing line L is formed and the scribing line L. It plays a role of supporting the old dummy (D).

The drive mechanism 64 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. The driving mechanism 64 may be connected to the braking member 62 and the support member 63 to move the braking member 62 and the support member 63 to be adjacent to or spaced apart from each other.

The support member 63 may include an adsorption part 631 configured to adsorb the dummy D.

The adsorption unit 631 may have a size (area) corresponding to the size (area) of the dummy D. As an example, the adsorption unit 631 may be configured as an adsorption pad having at least one or more holes connected to the negative pressure source 68. As another example, the adsorption unit 631 may be configured as an adsorption pad made of a porous material connected to the negative pressure source 68.

On the other hand, the dummy removal unit 40 according to the second embodiment of the present invention is also an imaging module 90 configured to capture a state in which the braking member 62 and the support member 63 press the end of the substrate S. It can be provided.

Hereinafter, a process of removing the dummy D from the substrate S by using the dummy removal unit 40 according to the second embodiment of the present invention will be described with reference to FIGS. 7 and 8. The same contents as those described in the first embodiment will be omitted.

As shown in FIG. 7, in a state in which the clamp module 60 of the dummy removing unit 40 is moved to the dummy D partitioned by the scribing line L, as shown in FIG. 7, The braking member 62 and the support member 63 are moved adjacent to each other. Accordingly, the corresponding surface of the first panel P1 corresponding to the scribing line L formed on the second panel P2 is pressed by the braking member 62. At this time, the support member 63 contacts the second panel P2 and maintains a state in contact with the second surface of the second panel P2.

As the braking member 62 presses the corresponding surface, a crack proceeds in a direction perpendicular to the second surface of the second panel P2 from the scribing line L in the second panel P2. As described above, since the crack proceeds in a direction perpendicular to the second surface of the second panel P2 by the braking member 62, the cut surface of the end of the second panel P2 may be uniform in the vertical direction. In addition, as the crack progresses inside the second panel P2, the dummy D partitioned by the scribing line L may be divided from the end of the substrate S. Accordingly, the dummy D is in a state in which it can be immediately separated from the end of the substrate S.

In this state, the negative pressure acts on the adsorption unit 631 by the negative pressure source 68, and accordingly, the dummy D is adsorbed to the adsorption unit 631.

And, as shown in FIG. 8, the braking member 62 and the support member 63 are moved so as to be spaced apart from each other by the drive mechanism 64.

Therefore, as shown in FIG. 8, the dummy D can be separated from the end of the substrate S while being adsorbed to the adsorption unit 631, so that the dummy D is further removed from the end of the substrate S. It can be clearly separated. In addition, even after the dummy D is separated from the end of the substrate S, the dummy D remains adsorbed to the adsorption unit 631, so that the dummy D separated from the end of the substrate S is It is prevented from falling into unintended places.

After the dummy D is separated from the end of the substrate S, the clamp module 60 may be moved to a predetermined place in the horizontal moving module 44 and/or the vertical moving module 45, and at that place. As the negative pressure applied to the adsorption part 631 is released, the dummy D may be separated from the clamp module 60 and discarded into the corresponding place.

In this case, the clamp module 60 may be inclined at a predetermined angle by the rotation module 43 so that the dummy D can be easily separated from the adsorption unit 631.

Meanwhile, as shown in FIG. 7, a gas supply unit 69 for supplying gas to the adsorption unit 631 may be connected to the adsorption unit 631. In the process of separating the dummy D from the adsorption unit 631, the gas supply 69 supplies gas to the adsorption unit 631 so that the dummy D can be more easily separated from the adsorption unit 631. I can. The adsorption unit 631 may be configured to release the dummy D by ejecting the gas supplied from the gas supplier 69. The dummy D adsorbed to the adsorption part 631 by the gas ejected from the adsorption part 631 can be easily separated from the adsorption part 631.

On the other hand, the present invention is not limited to a configuration in which the adsorption unit 631 adsorbs the dummy D using negative pressure. As another example, the adsorption unit 631 may be configured to adsorb the dummy D made of an adhesive member.

According to the dummy removal unit 40 according to the second embodiment of the present invention, the clamp module 60 is formed of the first panel P1 corresponding to the scribing line L formed on the second panel P2. And a braking member 62 configured to press the corresponding surface, and a support member 63 configured to support the dummy D at a position opposite to the braking member 62 with the substrate S interposed therebetween. In addition, the braking member 62 presses the corresponding surface in a direction perpendicular to the corresponding surface so that the crack advances in a direction perpendicular to the corresponding surface inside the second panel P2, so that the dummy D is transferred to the substrate S It can be divided from the end of ). Accordingly, the dummy D can be separated/removed from the end of the substrate S without bending the dummy D with respect to the end of the substrate S. Therefore, damage to the substrate (S) due to friction between the dummy (D) and the substrate (S) occurs in the process of returning to the original state after the end of the substrate (S) is bent to remove the dummy (D). Can be prevented.

Hereinafter, a dummy removal unit 40 according to a third embodiment of the present invention will be described with reference to FIGS. 9 to 12. The same reference numerals are assigned to the same components as those described in the first and second embodiments, and detailed descriptions thereof will be omitted.

9 to 12, the dummy removal unit 40 according to the third embodiment of the present invention includes a clamp module 70.

The clamp module 70 is movably installed on the base member 71 and the base member 71, is configured to press the end of the first panel P1, and adsorbs the end of the first panel P1. 1 A first pressing member 72 having an adsorption unit 721 and a base member 71 are movably installed and configured to press the end of the second panel P2, and the end of the second panel P2 A second pressing member 73 having a second adsorption unit 731 for adsorbing and installed on the base member 71, the first pressing member 72 and the second pressing member 73 are adjacent to or spaced apart from each other It may include a drive mechanism 74 that moves to be moved, and a rotation mechanism 77 installed on the base member 71 and rotating the first pressing member 72 and the second pressing member 73.

The base member 71 may be detachably fixed to the support 41. As the base member 71 is fixed to the support 41, the clamp module 70 may be supported on the support 41.

As shown in Fig. 10, the first pressing member 72 and the second pressing member 73 are moved adjacent to each other by the driving mechanism 74 with the end of the substrate S interposed therebetween, so that the substrate The end of (S) may be pressed by the first pressing member 72 and the second pressing member 73. The first pressing member 72 serves to support the end of the first panel P1 by contacting the end of the first panel P1. Likewise, the second pressing member 73 serves to support the end of the second panel P2 by contacting the end of the second panel P2.

The first adsorption part 721 of the first pressing member 72 serves to adsorb the first surface of the end of the first panel P1. The first adsorption part 721 may be configured as a part of the first pressing member 72. The first adsorption unit 721 may be configured to press the end of the first panel P1. As an example, the first adsorption unit 721 may be configured as an adsorption pad having at least one hole connected to the negative pressure source 78. As another example, the first adsorption unit 721 may be configured as an adsorption pad made of a porous material connected to the negative pressure source 78.

The second adsorption part 731 of the second pressing member 73 serves to adsorb the dummy D at the end of the second panel P2. The second adsorption unit 731 may have a size (area) corresponding to the size (area) of the dummy D. The second adsorption unit 731 may be configured as a part of the second pressing member 73. The second adsorption unit 731 may be configured to pressurize the dummy D. As an example, the second adsorption unit 731 may be configured as an adsorption pad having at least one hole connected to the negative pressure source 78. As another example, the second adsorption unit 731 may be configured as an adsorption pad made of a porous material connected to the negative pressure source 78.

According to this configuration, when the first pressing member 72 and the second pressing member 73 press the end of the substrate S (see Fig. 10) and then rotate to bend the end of the substrate S ( 11), the first adsorption unit 721 may adsorb the end of the first panel P1, and the second adsorption unit 731 may adsorb the dummy D.

Meanwhile, the first adsorption unit 721 and the second adsorption unit 731 may be connected to a gas supplier 79 that supplies gas. The first adsorption unit 721 may be configured to release the end of the first panel P1 adsorbed on the first adsorption unit 721 by ejecting gas supplied from the gas supply unit 79. The end of the first panel P1 adsorbed to the first adsorption part 721 by the gas ejected from the first adsorption part 721 may be easily separated from the first adsorption part 721. Likewise, the second adsorption unit 731 may be configured to eject the gas supplied from the gas supply unit 79 to release the dummy D adsorbed on the second adsorption unit 731. The dummy D adsorbed on the second adsorption unit 731 by the gas ejected from the second adsorption unit 731 may be easily separated from the second adsorption unit 731.

Meanwhile, the present invention is not limited to a configuration in which the first adsorption unit 721 and the second adsorption unit 731 respectively use negative pressure to adsorb the end of the first panel P1 and the dummy D. As another example, the first adsorption unit 721 and the second adsorption unit 731 may be configured to adsorb the end of the first panel P1 and the dummy D, each made of a member having adhesiveness.

The drive mechanism 74 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. The driving mechanism 74 may be connected to the first pressing member 72 and the second pressing member 73 to move the first pressing member 72 and the second pressing member 73 to be adjacent to or spaced apart from each other.

The rotation mechanism 77 serves to rotate the first pressing member 72 and the second pressing member 73 in a direction in which the end of the substrate S is bent. The rotation mechanism 77 may be configured with a rotation motor installed on the base member 71. As shown in Fig. 11, the first pressing member 72 and the second pressing member 73 in a state in which the first pressing member 72 and the second pressing member 73 grip the ends of the substrate S. By being rotated by the rotation mechanism 77, the end of the substrate S can be bent. Here, the rotation mechanism 77 can rotate the first pressing member 72 and the second pressing member 73 so that the end of the substrate S is bent upward. Accordingly, as cracks advance between the dummy D and the second panel P2, the dummy D may be divided from the second panel P2, and the dummy D and the second panel divided into cracks The occurrence of friction between P2) can be prevented.

On the other hand, the dummy removal unit 40 according to the third embodiment of the present invention is also configured to capture a state in which the first pressing member 72 and the second pressing member 73 grip the ends of the substrate S. A module 90 may be provided.

The imaging module 90 may be configured as a CCD camera, for example. The imaging module 90 may be installed adjacent to the clamp module 70.

As shown in the drawing, the imaging module 90 may be installed to face the second pressing member 73 under the clamp module 70. The imaging module 90 can capture an image of a state in which the second pressing member 73 presses the end portion of the substrate S by the driving mechanism 74. Accordingly, the operator may analyze the image captured by the imaging module 90 and inspect whether the second pressing member 73 is accurately positioned at a preset position to press the end of the substrate S.

Although not shown in the drawings, the imaging module 90 may be installed above the clamp module 70 to face the first pressing member 72. In this case, the imaging module 90 can capture an image of a state in which the first pressing member 72 presses the end portion of the substrate S by the drive mechanism 74. Accordingly, the operator may analyze the image captured by the imaging module 90 and check whether the first pressing member 72 is accurately positioned at a preset position to press the end of the substrate S.

In addition, although not shown in the drawings, a pair of imaging modules 90 may be installed so as to face each of the first pressing member 72 and the second pressing member 73 above and below the clamp module 70. have. In this case, the operator analyzes the image captured by the pair of imaging modules 90, so that the first pressing member 72 and the second pressing member 73 are accurately positioned at a preset position, It can be checked whether the end is pressed.

In this way, a state in which the first pressing member 72 and/or the second pressing member 73 presses the end of the substrate S can be imaged by the imaging module 90, so that the operator ) By analyzing the image captured by the first pressing member 72 and/or the second pressing member 73 is positioned at an accurate position to check whether the end of the substrate S is pressed. Accordingly, it is possible to prevent the first pressing member 72 and/or the second pressing member 73 from pressing the end of the substrate S in an incorrect position, and the first pressing member 72 and/or 2 Damage to the first pressing member 72, the second pressing member 73 and/or the substrate S, which may be caused by pressing the end of the substrate S in the incorrect position of the pressing member 73 Can be prevented.

On the other hand, the imaging module 90 is used to inspect whether the first pressing member 72 and the second pressing member 73 press the end of the substrate S at the correct position, as well as the dummy D It can also be used to check whether) has been completely removed from the end of the substrate S. That is, after the process of separating the dummy D from the end of the substrate S is completed, the end of the substrate S is imaged with the imaging module 90, and then the substrate imaged by the imaging module 90 ( It is possible to check whether the dummy D has been completely removed by analyzing the image at the end of S).

Hereinafter, a process of removing the dummy D from the substrate S by using the dummy removing unit 40 according to the third embodiment of the present invention will be described with reference to FIGS. 9 to 12.

First, as shown in FIG. 9, the clamp module 70 of the dummy removal unit 40 is moved to the dummy D partitioned by the scribing line L.

At this time, as shown in FIG. 10, the first pressing member 72 and the second pressing member 73 are moved adjacent to each other, and accordingly, the end of the substrate S is the first pressing member 72 and It is pressed by the second pressing member 73. Simultaneously or sequentially, the end of the substrate S is adsorbed to the first adsorption unit 721 and the second adsorption unit 731 by the negative pressure applied by the negative pressure source 78.

In this state, as shown in FIG. 11, the first pressing member 72 and the second pressing member 73 are rotated by the rotation mechanism 77 so that the end of the substrate S is bent upward. Accordingly, cracks may proceed from the scribing line L to the inside of the second panel P2. In addition, as the crack progresses inside the second panel P2, the dummy D partitioned by the scribing line L may be divided from the end of the substrate S. Accordingly, the dummy D is in a state in which it can be immediately separated from the end of the substrate S.

Meanwhile, in the process of rotating the first pressing member 72 and the second pressing member 73 so that the end of the substrate S is bent upward, the clamp module 70 may slightly rise by the vertical movement module 45. Accordingly, the end of the substrate S may be smoothly bent upward without being bent downward.

In this state, as shown in FIG. 12, the first pressing member 72 and the second pressing member 73 are moved to be spaced apart from each other. In this case, the second pressing member 73 may be moved downward relative to the first pressing member 72. At this time, since the end of the first panel P1 is adsorbed by the first adsorption unit 721, the state in which the end of the substrate S is bent upward is maintained as it is. In addition, since the dummy D is in a state adsorbed by the second adsorption unit 731, the dummy D is moved downwards with respect to the first pressing member 72 to the second panel ( Can be separated from P2).

In this way, in a state in which the end of the substrate S is bent upwardly, the dummy D in the state divided by the growth of the crack is in a diagonal direction in a direction away from the end of the substrate S. Is moved. Accordingly, friction between the cut surface of the end of the second panel P2 and the cut surface of the dummy D is prevented. Damage, such as scratches, of the substrate S (that is, the end of the second panel P2) can be prevented.

In addition, since the dummy D can be separated from the end of the substrate S while being adsorbed by the second adsorption unit 731, the dummy D can be more reliably separated from the end of the substrate S. . In addition, even after the dummy D is separated from the end of the substrate S, the dummy D remains adsorbed to the second adsorption unit 731, so that the dummy D separated from the end of the substrate S ) Is prevented from falling into unintended places.

On the other hand, after the dummy D is separated from the second panel P2, as the negative pressure applied to the first adsorption unit 721 is released (and in some cases, the gas supplied from the gas supplier 79 is removed. 1 As it is ejected to the outside through the adsorption unit 721), the end of the first panel P1 is separated from the first adsorption unit 721, so that the substrate S may return to a horizontal state.

And, after the dummy D is separated from the end of the substrate S, the clamp module 70 may be moved to a predetermined place in the horizontal movement module 44 and/or the vertical movement module 45, As the negative pressure applied to the second adsorption unit 731 at the place is released (and, in some cases, as the gas supplied from the gas supply unit 79 is ejected to the outside through the second adsorption unit 731), the dummy (D) may be separated from the clamp module 70 and discarded to the corresponding place.

At this time, the clamp module 70 may be inclined at a predetermined angle by the rotation module 43 so that the dummy D can be easily separated from the second adsorption unit 731.

According to the dummy removal unit 40 according to the third embodiment of the present invention, the clamp module 70 includes a first suction unit 721 configured to suck an end portion of the first panel P1. A second pressing member 73 including a pressing member 72 and a second suction unit 731 configured to suck the dummy D that is a part of the second panel P2, and the first pressing member 72 And rotating the first pressing member 72 and the second pressing member 73 in a state in which the second pressing member 73 presses the ends of the first panel P1 and the ends of the second panel P2, respectively. It includes a rotation mechanism 77 that divides the dummy D from the substrate S by bending the end of the substrate S. Then, the dummy D by the movement of the second pressing member 73 relative to the first pressing member 72 while the bent state of the end of the substrate S is maintained by the first suction unit 721. ) May be removed from the second panel P2. That is, in a state in which the end of the substrate S is bent upwardly, the dummy D may be separated from the end of the substrate S in a diagonal direction. Therefore, in the process of removing the dummy D from the end of the substrate S to form a stepped portion at the end of the substrate S, friction between the dummy D and the end of the substrate S can be prevented. , It is possible to prevent damage such as scratches on the substrate (S).

Hereinafter, a dummy removing unit 40 according to a fourth embodiment of the present invention will be described with reference to FIGS. 13 to 16. The same reference numerals are assigned to the same components as those described in the first to third embodiments, and detailed descriptions thereof will be omitted.

As shown in FIG. 13, the dummy removing unit 40 according to the fourth embodiment of the present invention includes a clamp module 80.

The clamp module 80 is movably installed on the base member 81 and the base member 81, is configured to press the end of the first panel P1, and adsorbs the end of the first panel P1. 1 A first pressing member 82 having an adsorption part 821 and a base member 81 installed to be movable and configured to press the end of the second panel P2, and the end of the second panel P2 The second pressure member 83 having a second adsorption portion 831 for adsorbing the and is installed on the base member 81 and the first pressure member 82 and the second pressure member 83 are adjacent to or spaced apart from each other. It may include a drive mechanism 84 that moves to be moved, and a rotation mechanism 87 installed on the base member 81 and rotating the first pressing member 82 and the second pressing member 83.

The base member 81 may be detachably fixed to the support 41. As the base member 81 is fixed to the support 41, the clamp module 80 may be supported on the support 41.

As shown in Fig. 14, the first pressing member 82 and the second pressing member 83 are moved adjacent to each other by the driving mechanism 84 with the end of the substrate S interposed therebetween, so that the substrate The end of (S) may be pressed by the first pressing member 82 and the second pressing member 83. The first pressing member 82 serves to support the end of the first panel P1 by contacting the end of the first panel P1. Likewise, the second pressing member 83 serves to support the end of the second panel P2 by contacting the end of the second panel P2.

The first adsorption part 821 of the first pressing member 82 serves to adsorb the first surface of the end of the first panel P1. The first adsorption part 821 may be configured as a part of the first pressing member 82. The first adsorption part 821 may be configured to press the end of the first panel P1. As an example, the first adsorption unit 821 may be configured as an adsorption pad having at least one hole connected to the negative pressure source 88. As another example, the first adsorption unit 821 may be configured as an adsorption pad made of a porous material connected to the negative pressure source 88.

The second adsorption part 831 of the second pressing member 83 serves to adsorb the dummy D at the end of the second panel P2. The second adsorption unit 831 may have a size (area) corresponding to the size (area) of the dummy D. The second adsorption unit 831 may be configured as a part of the second pressing member 83. The second adsorption unit 831 may be configured to pressurize the dummy D. As an example, the second adsorption unit 831 may be configured as an adsorption pad having at least one hole connected to the negative pressure source 88. As another example, the second adsorption unit 831 may be configured as an adsorption pad made of a porous material connected to the negative pressure source 88.

According to this configuration, when the first pressing member 82 and the second pressing member 83 press the ends of the substrate S (see FIG. 14) and then rotate and bend the ends of the substrate S ( 15), the first adsorption unit 821 may adsorb the end of the first panel P1, and the second adsorption unit 831 may adsorb the dummy D.

Meanwhile, the first adsorption unit 821 and the second adsorption unit 831 may be connected to a gas supply unit 89 that supplies gas. The first adsorption unit 821 may be configured to release the end of the first panel P1 adsorbed by the first adsorption unit 821 by ejecting gas supplied from the gas supply unit 89. The end of the first panel P1 adsorbed to the first adsorption part 821 by the gas ejected from the first adsorption part 821 may be easily separated from the first adsorption part 821. Similarly, the second adsorption unit 831 may be configured to eject the gas supplied from the gas supply unit 89 to release the dummy D adsorbed on the second adsorption unit 831. The dummy D adsorbed on the second adsorption unit 831 by the gas ejected from the second adsorption unit 831 may be easily separated from the second adsorption unit 831.

On the other hand, the present invention is not limited to a configuration in which the first adsorption unit 821 and the second adsorption unit 831 respectively use negative pressure to adsorb the end of the first panel P1 and the dummy D. As another example, the first adsorption unit 821 and the second adsorption unit 831 may each be formed of a member having adhesiveness, and may be configured to adsorb the end of the first panel P1 and the dummy D.

The drive mechanism 84 may be configured as an actuator using pneumatic or hydraulic pressure, a linear motor operated by electromagnetic interaction, or a linear movement mechanism such as a ball screw mechanism. The driving mechanism 84 may be connected to the first pressing member 82 and the second pressing member 83 to move the first pressing member 82 and the second pressing member 83 to be adjacent to or spaced apart from each other.

The rotation mechanism 87 serves to rotate the first pressing member 82 and the second pressing member 83 in a direction in which the end of the substrate S is bent. The rotation mechanism 87 may be constituted by a rotation motor installed on the base member 81. As shown in FIG. 15, the first pressing member 82 and the second pressing member 83 are in a state in which the first pressing member 82 and the second pressing member 83 hold the ends of the substrate S. By being rotated by the rotation mechanism 87, the end of the substrate S can be bent. Here, the rotation mechanism 87 can rotate the first pressing member 82 and the second pressing member 83 so that the end of the substrate S is bent upward. Accordingly, as cracks advance between the dummy D and the second panel P2, the dummy D may be divided from the second panel P2, and the dummy D and the second panel divided into cracks The occurrence of friction between P2) can be prevented.

Meanwhile, the clamp module 80 further includes a braking member 85 configured to press the corresponding surface of the first panel P1 corresponding to the scribing line L formed on the second panel P2. I can.

The braking member 85 is integrally connected with the first pressing member 82 and may be moved together with the first pressing member 82. For example, the braking member 85 may be installed on the first pressing member 82.

For example, the braking member 85 may be installed to be horizontally movable with respect to the first pressing member 82. Accordingly, even when the horizontal position of the scribing line L is changed, the horizontal position of the braking member 85 may be adjusted to correspond to the position of the corresponding surface corresponding to the scribing line L. Meanwhile, the horizontal position of the braking member 85 may be automatically adjusted. To this end, the first pressing member 82 may be provided with a braking member moving mechanism 86 configured to move the braking member 85. For example, the braking member moving mechanism 86 may be composed of a pneumatic or hydraulic actuator, a linear motor operated by electromagnetic interaction, or a linear moving mechanism such as a ball screw mechanism.

The braking member 85 may be moved toward the substrate S together with the first pressing member 82 by the driving mechanism 84. As shown in Fig. 14, by moving the braking member 85 and the second pressing member 83 adjacent to each other by the driving mechanism 84 with the substrate S interposed therebetween, the dummy D is removed. The partitioning scribing line L may be pressed.

The breaking member 85 may be formed in a bar shape extending in the longitudinal direction. The braking member 85 presses the first surface (corresponding surface) of the first panel P1 corresponding to the second surface of the second panel P2 on which the scribing line L is formed, and the scribing line ( It plays a role in advancing the crack formed by L). In order to minimize the area in which the braking member 85 contacts the corresponding surface to maximize the pressing force of the braking member 85 applied to the corresponding surface, the braking member 85 has a wedge shape whose width decreases toward the corresponding surface. It is preferably made. The front end of the braking member 85 contacting the first surface of the first panel P1 may be made of an elastic material such as urethane resin, and accordingly, the tip of the braking member 85 is attached to the first panel P1. Even in contact, it is possible to prevent damage to the first panel P1.

When the braking member 85 presses the corresponding surface, the second pressing member 83 comes into contact with the second panel P2, so that the portion where the scribing line L is formed and the scribing line L It serves to support the dummy D divided by the.

As shown in Fig. 14, when the first pressing member 82 and the second pressing member 83 are moved adjacent to each other by the driving mechanism 84, the end of the substrate S is the first pressing member 82 ) And the second pressurizing member 83 and adsorbed to the first adsorption unit 821 and the second adsorption unit 831, and at the same time, the braking member 85 corresponds to the scribing line L The corresponding surface of the first panel P1 is pressed. Accordingly, a crack may proceed in a direction perpendicular to the second surface of the second panel P2 from the scribing line L in the second panel P2. In this way, since the crack proceeds in a direction perpendicular to the second surface of the second panel P2, the cut surface of the substrate S may be uniform in the vertical direction.

On the other hand, the dummy removing unit 40 according to the fourth embodiment of the present invention is also configured to capture a state in which the first pressing member 82 and the second pressing member 83 press the end of the substrate S. A module 90 may be provided.

Hereinafter, a process of removing the dummy D from the substrate S using the dummy removing unit 40 according to the fourth embodiment of the present invention will be described with reference to FIGS. 13 to 16. The same contents as those described in the first to third embodiments will be omitted.

As shown in FIG. 13, when the clamp module 80 of the dummy removal unit 40 is moved to the dummy D partitioned by the scribing line L, the first pressing member 82 and the second The pressing members 83 are moved adjacent to each other. Accordingly, as shown in FIG. 14, the end of the substrate S is pressed by the first pressing member 82 and the second pressing member 83. Simultaneously or sequentially, the ends of the substrate S are adsorbed to the first adsorption unit 821 and the second adsorption unit 831 by the negative pressure applied by the negative pressure source 88. Further, the corresponding surface of the first panel P1 corresponding to the scribing line L formed on the second panel P2 is pressed by the braking member 85.

As the braking member 85 presses the corresponding surface, a crack proceeds in a direction perpendicular to the second surface of the second panel P2 from the scribing line L in the second panel P2. As described above, since the crack proceeds in the direction perpendicular to the second surface of the second panel P2 by the braking member 85, the cut surface of the end of the second panel P2 may be uniform in the vertical direction. In addition, as the crack progresses inside the second panel P2, the dummy D partitioned by the scribing line L may be divided from the end of the substrate S. Accordingly, the dummy D is in a state in which it can be immediately separated from the end of the substrate S.

In this state, as shown in FIG. 15, the first pressing member 82 and the second pressing member 83 are rotated by the rotation mechanism 87 so that the end of the substrate S is bent upward.

Then, as shown in FIG. 16, the first pressing member 82 and the second pressing member 83 are moved to be spaced apart from each other. In this case, the second pressing member 83 may be moved downward relative to the first pressing member 82. At this time, since the end of the first panel P1 is adsorbed by the first adsorption unit 821, the state in which the end of the substrate S is bent upward is maintained as it is. In addition, since the dummy D is in a state adsorbed by the second adsorption unit 831, the dummy D is moved downwards with respect to the first pressing member 82 to the second panel ( Can be separated from P2).

According to the dummy removal unit 40 according to the fourth exemplary embodiment of the present invention, the clamp module 80 includes the first panel P1 corresponding to the scribing line L formed on the second panel P2. It is configured to further include a braking member 85 configured to press the mating surface. In addition, the braking member 85 presses the corresponding surface in a direction perpendicular to the corresponding surface so that the cracks propagate in a direction perpendicular to the corresponding surface inside the second panel P2, so that the dummy D is transferred to the substrate S It can be divided from the end of ). In this way, since the crack proceeds in a direction perpendicular to the second surface of the second panel P2, the cut surface of the substrate S may be uniform in the vertical direction.

Although a preferred embodiment of the present invention has been exemplarily described, the scope of the present invention is not limited to such a specific embodiment, and may be appropriately changed within the scope described in the claims.

10: first transfer unit
20: second transfer unit
30: scribing unit
40: dummy removal unit
50, 60, 70, 80: clamp module
90: imaging module

Claims (11)

A dummy removal unit for removing a dummy partitioned by a scribing line formed at an end of the second panel of a substrate formed by bonding a first panel and a second panel,
A braking member configured to press the corresponding surface of the first panel corresponding to the scribing line;
A support member configured to support the dummy at a position opposite to the breaking member with the substrate therebetween;
A driving mechanism for moving the braking member and the support member adjacent to each other so that the braking member presses the corresponding surface to divide the dummy from the substrate; And
A dummy removal unit including an imaging module for photographing a state in which the braking member or the support member presses an end portion of the substrate. The method according to claim 1,
The support member is a dummy removal unit, characterized in that having an adsorption portion configured to adsorb the dummy. The method according to claim 1,
The braking member is a dummy removal unit, characterized in that it has a wedge shape whose width decreases toward the corresponding surface. The method according to claim 1,
A horizontal movement module for horizontally moving the support member; And
Further comprising a vertical movement module for vertically moving the support member,
When the dummy is divided from the substrate, the horizontal movement module and the vertical movement module move the support member in a diagonal direction to separate the dummy from the substrate. The method according to claim 1,
A dummy removal unit further comprising a braking member moving mechanism for moving the braking member so that the position of the braking member corresponds to the position of the corresponding surface. A dummy removal unit for removing a dummy partitioned by a scribing line formed at an end of the second panel of a substrate formed by bonding a first panel and a second panel,
A first pressurizing member configured to pressurize an end portion of the first panel and having a first adsorption portion adsorbing an end portion of the first panel;
A second pressing member configured to press an end portion of the second panel at a position opposite to the first pressing member with the substrate therebetween, and having a second suction unit configured to suck the dummy;
A drive configured to move the first pressing member and the second pressing member adjacent to each other so that the first pressing member and the second pressing member press each end of the first panel and the end of the second panel Instrument;
In a state in which the first pressing member and the second pressing member press each end of the first panel and the end of the second panel, the first pressing member and the second pressing member are rotated to reduce the end of the substrate. A rotating mechanism that is bent to divide the dummy from the substrate; And
A dummy removal unit including an imaging module for photographing a state in which the first pressing member or the second pressing member presses an end portion of the substrate. The method of claim 6,
A dummy removal unit further comprising a braking member configured to press the corresponding surface of the first panel corresponding to the scribing line. The method of claim 7,
The braking member is a dummy removal unit, characterized in that coupled to the first pressing member. The method of claim 7,
The braking member is a dummy removal unit, characterized in that it has a wedge shape whose width decreases toward the corresponding surface. The method of claim 7,
A dummy removal unit further comprising a braking member moving mechanism for moving the braking member so that the position of the braking member corresponds to the position of the scribing line. The method of claim 6,
The first adsorption unit and the second adsorption unit are connected to a negative pressure source and configured to respectively adsorb the end of the first panel and the dummy by negative pressure acting by the negative pressure source,
And the first adsorption unit and the second adsorption unit are connected to a gas supply and are configured to eject gas supplied from the gas supply to release the end of the first panel and the dummy.

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