KR20200083351A - Self-Aligned Contact Block Of Vertical Probe Card And Manufacturing Method Of The Same - Google Patents

Abstract

According to the present invention, provided is a contactor block of a self-aligned vertical probe card, which comprises: at least one vertical contactor array in which a plurality of vertical contactors manufactured by the MEMS process and extending in a longitudinal direction are arranged side by side in a horizontal direction; and a molding layer exposing upper and lower ends of the plurality of vertical contactors constituting the vertical contact array, and surrounding and supporting the plurality of vertical contactors. The contactor block of a self-aligned vertical probe card can improve the work efficiency for assembling the contactor block to a probe head module of a probe card and reduce manufacturing costs.

Description

Self-aligned contact block of vertical probe card and manufacturing method of the same}

The present invention relates to a contact block of a self-aligning vertical probe card and a method of manufacturing the same, which can improve the working efficiency for assembling the contactor block on the probe head module of the probe card and reduce manufacturing cost.

The semiconductor fabrication process includes fabrication process to form a pattern on the wafer, electrical die sorting (EDS) process to inspect the electrical properties of each chip constituting the wafer, and assembly process to assemble the wafer on which the pattern is formed with each chip. Is manufactured through.

The EDS process is performed to determine a defective chip among chips constituting a wafer. An inspection device called a probe card that determines an defect by applying an electrical signal to chips constituting the wafer and checking the defect from the applied electrical signal It is mainly used.

The probe card is provided with a plurality of contactors that apply an electrical signal and a pattern of each chip constituting the wafer. Typically, a contact card of a probe card is brought into contact with an electrode pad of each device of a wafer, and a specific contact is made through this contactor. The current is energized to measure the electrical characteristics output at that time.

In general, the probe card includes a probe head module that supports a vertical contactor. As shown in FIG. 1, the probe head module is provided with a jig plate 3 for forming a gap between the upper guide plate 1 and the lower guide plate 2, and both ends of the plurality of vertical probes 4 are upper It is inserted into the insertion hole of the guide plate 1 and the insertion hole of the lower guide plate 2, respectively. For example, US Pat. No. 6,515,496 discloses a microstructured testing head. In this patent, a contact probe is mounted between the upper guide plate and the lower guide plate. In particular, one side of the contact probe is inserted into the guide hole formed in the upper guide plate, and the other side of the contact probe is inserted into the guide hole formed in the lower guide plate.

As another conventional technique, a vertical probe card is disclosed in Korean Patent Registration No. 10-1869044. As shown in FIG. 2, this patent document is a jig plate J for maintaining a gap between the first guide plate 10 installed close to the space converter K and the second guide plate 20 installed close to the object to be inspected. ) Is interposed, and both sides of the needle unit 30 are respectively inserted into the plurality of insertion holes 21 formed in the first guide plate and the plurality of insertion holes 21 formed in the second guide plate.

On the other hand, in recent semiconductor devices, as the design rules become more refined and highly integrated and miniaturized at the same time, the contactors of the probe card are also miniaturized to an appropriate size in order to be connected with the pattern of the semiconductor device becoming finer, and also between the contactor and the contactor. Narrow pitches arranged at narrower intervals are required.

[Patent Document 1] US Registered Patent No. 6,515,496 (MICROSTRUCTURE TESTING HEAD) [Patent Document 2] Korean Registered Patent No. 10-1869044 (needle unit for vertical probe card with reduced scrub phenomenon and probe card using the same)

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In the vertical probe card according to the prior art including the patent document, micronized vertical contactors are inserted into the insertion hole of the guide plate, and the probe card is assembled using the guide plate. In the prior art, as the number of vertical contactors increases, manufacturing time increases significantly because a large number of insertion holes must be processed in a plurality of guide plates, and when assembling a vertical contactor to a probe card, a plurality of guide plates separated by a predetermined interval Since the vertical probe must be inserted into the formed insertion hole one by one, the time and manpower required for assembly work increase, and the corresponding insertion hole and insertion hole between the plurality of guide plates do not exactly match, so that the vertical contact is repeatedly contacted with the vertical contactor. There is a problem in that a defect in inspection occurs due to damage to the contactor.

An object of the present invention is to provide a contactor block of a self-aligning vertical probe card and a method of manufacturing the same, which can improve the working efficiency for assembling the contactor block on the probe head module of the probe card and reduce manufacturing cost.

The contactor block of the self-aligning vertical probe card according to the present invention for achieving the above object is at least one vertical contactor which is arranged in a horizontal direction and a plurality of vertical contactors made in the MEMS process and extended in the longitudinal direction. Array; And exposing the upper and lower ends of the plurality of vertical contactors constituting the vertical contactor array and surrounding and supporting the plurality of vertical contactors.

In addition, it includes a basic guide plate in which the vertical contactor array and the molding layer are integrally formed, and a plurality of basic guide plates are layered on the seating layer to form a contactor block. It is characterized by separating the contactor block.

In addition, the seating plate is characterized in that a plurality of support rods protruding to a certain height are formed on a flat body, and the plurality of vertical contactor arrays are aligned while a plurality of fitting holes penetrating the basic guide plate are fitted to the support rods of the seating table. Is done.

In addition, when a molding limiting member for limiting a molding portion is formed on the basic guide plate, the molding limiting member is removed by a selective etching process after the molding process is finished.

In addition, the laser cutting process is characterized by irradiating the laser to cut the connection tip formed at the end of the vertical contactor array.

In addition, the first and second guide plates are formed integrally with the vertical contactor array and divided according to the arrangement structure of the connection elements for mutual coupling, and the second guide plates are stacked on the first guide plates. A molding layer is formed by repeatedly stacking a new set of guide plates on a second guide plate, stacking a set of guide plates to a certain height, and simultaneously molding a plurality of vertical contactor arrays arranged in the first and second guide plates at the same time. It is characterized by forming.

In addition, when the molding limiting member for limiting the molding portion is formed on the first and second guide plates, the molding limiting member is removed by a selective etching process after the molding process.

In addition, the first and second guide plates are provided with a base plate and a connecting plate, respectively, of a flat plate shape, and the connecting elements formed on the base plate and the connecting plate are provided with fitting holes and edge holes that can be combined with each other.

In addition, the connection plate is formed with a cut-out groove formed to face vertical contact arrays disposed at upper and lower sides, and the first and second guides are aligned when the first and second guide plates are aligned by the connecting element. The plurality of vertical contactor arrays stacked in the plate is characterized by being aligned with respect to the central axis.

In addition, the base plate has a vertical contact array formed integrally by a connection tip at the center, and an edge hole is formed at the edge, and a fitting protrusion protruding from the connection plate is formed, and the connection plate of the first guide plate is formed. It characterized in that the fitting protrusion formed in the protrusion is fitted to the edge hole formed in the base plate of the second guide plate.

In addition, the molding layer is composed of an elastic material of an insulating material, and the elastic material of the insulating material is any one of PDMS (Polydimethylsiloxane), polyurethane (PU), polyurethane acrylate (PUA), and silicone rubber (silicon rubber). It is characterized by.

A method of manufacturing a contactor block of a self-aligning vertical probe card according to the present invention for achieving the above object comprises: forming a seed layer on the substrate; Forming a probe hole at a predetermined interval by applying a photoresist on the seed layer and removing the photoresist with an etching solution using a mask; Forming a vertical contactor array by applying a nickel-copper alloy as a conductive material to the probe hole; Forming the vertical contactor array and performing it through a planarization process; Removing the remaining photoresist through an additional photo process after performing the planarization process, and forming a molding layer surrounding and supporting the vertical contactor array using a molding limiting member; Removing the substrate and the seed layer to produce a single basic guide plate; Stacking the single basic guide plates to a predetermined height; It characterized in that it comprises a; manufacturing a contactor block consisting of a vertical contact plate supported by a molding layer by irradiating a laser on the basic guide plate stacked to a certain height to separate the basic guide plate.

A method of manufacturing a contactor block of a self-aligning vertical probe card according to the present invention for achieving the above object is provided with a vertical contactor array, respectively, and the first and the first divided according to the arrangement structure of the connecting elements for mutual coupling 2 manufacturing a guide plate using a MEMS process; Assembling a set of guide plates in which a plurality of vertical contactor arrays are aligned in a vertical direction and a horizontal direction with respect to the central axis by stacking the first guide plate and the second guide plate alternately along the central axis and stacking them at a constant height. ; Forming a molding layer supporting the aligned plurality of vertical contactor arrays by injecting and curing a molding member into the set of guide plates; And separating the contactor blocks buried in the molding layer by the plurality of vertical contactor arrays through a rater cutting process for separating the plurality of vertical contactor arrays from the set of guide plates.

In addition, the first and second guide plates are provided with a base plate and a connecting plate, respectively, of a flat plate shape, and the connecting elements formed on the base plate and the connecting plate are provided with fitting protrusions and edge holes that can be combined with each other. When the first and second guide plates are aligned by the connecting element, a plurality of vertical contact arrays formed on the set of guide plates are formed when the upper and lower vertical contact arrays are face-to-face. Is characterized by being aligned with respect to the central axis.

In addition, it is characterized in that the base plate of the second guide plate is connected to the connecting plate of the first guide plate, and a new base plate of the first guide plate is connected to the connecting plate of the second guide plate.

In addition, the base plate is formed with a vertical contactor array integrally at a central position, an edge hole is formed at the edge, and the connecting plate is formed with a protruding protrusion protruding upward, protruding from the connecting plate of the first guide plate. It is characterized in that the formed projection is fitted to the edge hole formed in the base plate of the second guide plate.

In addition, the molding layer is characterized in that a plurality of vertical contactor arrays are formed in the shape of a buried cube.

In addition, the laser cutting process is characterized by cutting the ends of the vertical contactor array connected to the first and second guide plates.

In addition, the molding layer is composed of an elastic material of an insulating material, and the elastic material of the insulating material is any one of PDMS (Polydimethylsiloxane), polyurethane (PU), polyurethane acrylate (PUA), and silicone rubber (silicon rubber). It is characterized by.

According to the present invention, it is possible to easily manufacture the bundle of contactor blocks by stacking each guide plate layer by layer using a seating table, and then easily mount the probe head module, thereby improving the working efficiency for assembling the probe card. .

According to the present invention, a plurality of types of guide plates are alternately connected by alternately connecting a plurality of types of guide plates in which vertical contactors are integrally provided, and then the contactor blocks made by the molding process are easily separated, and the probe card is Since the separated contactor blocks can be easily and easily assembled, the work time and manpower required for assembly work can be drastically shortened compared to the method of inserting the vertical contactor into the numerous insertion holes formed in the guide plate one by one as in the prior art. have.

According to the present invention, a contact pitch block having a fine pitch can be manufactured using the MEMS process, thereby efficiently responding to the demand for miniaturization of a probe card for inspecting an object.

1 is a perspective view schematically showing a probe head module of a probe card according to the prior art,
Figure 2 is a cross-sectional view schematically showing a needle unit for a probe card according to another prior art,
3 is a perspective view schematically showing a contactor block of a self-aligning vertical probe card according to a first embodiment of the present invention,
Figure 4 is a perspective view schematically showing the operation of stacking a single basic guide plate on the seat to form the contactor block of the self-aligning vertical probe card according to the first embodiment of the present invention,
Figure 5 is a plan view of the basic guide plate of Figure 4,
Figure 6 is a cross-sectional view taken along line AA of the basic guide plate of Figure 5,
7 is a perspective view partially cut away from the basic guide plate of FIG. 4 in which a molding limiting member is formed;
8 is a plan view of the basic guide plate of FIG. 7,
9 is a plan view of the basic guide plate of FIG. 7 in which a molding layer is formed;
10 is a flowchart for explaining a method of manufacturing a contactor block of a self-aligning vertical probe card according to a first embodiment of the present invention,
11A to 11I are manufacturing process diagrams of a single guide plate constituting the contactor block of the self-aligning vertical probe card according to the first embodiment of the present invention;
12 is a perspective view for explaining the structures of the first guide plate and the second guide plate constituting the contactor block of the self-aligning vertical probe card according to the second embodiment of the present invention;
13 is a perspective view of the first guide plate and the second guide plate of FIG. 12 in which a molding limiting member is formed, stacked once and combined;
14 is a perspective view of the first guide plate and the second guide plate of FIG. 12 in which a molding limiting member is formed, stacked three times;
15 is a perspective view of the molding layer formed on the first and second guide plates of FIG. 14,
16 is a perspective view showing a laser cutting process for separating the contactor block by irradiating a laser beam to the first and second guide plates of FIG. 15;
17 is a perspective view showing a contactor block separated through the laser cutting process of FIG. 16.

Hereinafter, the present invention will be described by describing embodiments of the present invention with reference to the accompanying drawings. The same reference numerals in each drawing denote the same members. In addition, in describing the present invention, when it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. Also, when a part “includes” a certain component, this means that other components may be further included instead of excluding other components, unless otherwise specified.

(First Example)

Referring to FIG. 3, the contactor block 450 of the self-aligning vertical probe card according to the first embodiment of the present invention is buried inside the molding layer 440 and a plurality of vertical contactors partially exposed at the top and bottom It includes an array 400. The vertical contactor array 400 has a plurality of vertical contactors which are individually arranged in a horizontal direction and formed in the same length. The plurality of vertical contactor arrays 400 are aligned in one direction, and the upper and lower ends of the vertical contactors are aligned at a fine interval in all directions.

Since the contactor block 450 adopts a structure installed in a probe head module (not shown) using a jig plate, it is possible to omit the assembly work to be inserted into the insertion holes of the upper plate and the lower plate as in the prior art. Efficiency can be improved.

FIG. 4 shows a state in which a molding limiting member 401 is not formed on each of the basic guide plates 200 for convenience of description, but in reality, a piece produced by using the MEMS process described later according to FIGS. 11A to 11I In the basic guide plate 200, a molding limiting member 401 for limiting a portion to be molded is used. When the molding process is over, the molding limiting member 401 is removed by selective etching, and the molding layer 440 remains on the basic guide plate 200, and then a contactor block 450 is made through a laser cutting process.

4, the contactor block 450 may be constructed by stacking a single basic guide plate 200 on the seating table 100. That is, the single basic guide plate 200 manufactured using the MEMS process is sandwiched between the support rods 110 of the seating table 100 and layered layer by layer.

A plurality of support rods 110 are protruded at a predetermined height on the upper edge of the flat plate body corresponding to the size and shape of the base guide plate 200 in the seating table 100.

The basic guide plate 200 is formed in a rectangular shape, and a plurality of fitting holes 210 penetrated up and down at peripheral edges is formed. The basic guide plate 200 is stacked on the seating table 100 as the plurality of fitting holes 210 are respectively fitted in correspondence with the plurality of support rods 110. That is, the plurality of basic guide plates 200 may be aligned as they are layered from bottom to top of the seating table 100.

Referring to FIG. 5, a vertical contactor array 400 is formed in an inner groove formed in a central portion of the basic guide plate 200, and a vertical contact is formed by a connection tip 300 formed on an inner edge of the basic guide plate 200. The terminator array 400 is connected. The connection tip 300 has a predetermined distance between the upper and lower portions of the vertical contactor array 400 extending in the longitudinal direction as shown in FIG. A couple of empty spaces are formed. The molding layer is filled in this empty space.

Since the one end and the other end of the vertical contactor array 400 need to be exposed so as to make contact with the space converter and the object to be inspected, a molding limiting member 401 is used to restrict the exposed portion from being molded. Referring to FIG. 7, the molding limiting member 401 is formed with an approximately rectangular rim and the lower end is formed with an uneven shape to be sandwiched between vertical contactors.

As illustrated in FIG. 8, a molding process is performed in which a molding member is injected into an empty space isolated by the molding limiting member 401. After the curing process for curing the molding member, a molding layer 440 is formed in the center of the basic guide plate 200. The molding layer 440 may surround and support the intermediate body except for the exposed portions of the top and bottom of the vertical contactor array 400. Thereafter, when the molding limiting member 401 is removed by a selective etching process, only the molding layer 440 remains on the basic guide plate 200 from which the molding limiting member 401 is removed, as shown in FIG. 9. The basic guide plate 200 on which the molding layer 440 is formed may be stacked layer by layer using the seating table 100.

As described with reference to FIG. 4, in the basic guide plate 200, the fitting hole 210 is sandwiched between the support rods 110 and layered on the seating table 100. As described above, when the plurality of basic guide plates 200 are stacked and the connection tip 300 is cut by a laser cutting process, the basic guide plates 200 can be separated and stacked vertically as shown in FIG. 3. A contactor block 450 made of a plurality of vertical contactor arrays 400 may be made. In this contactor block 450, a plurality of vertical contactor arrays 400 are arranged at various intervals.

10 is a flowchart illustrating a method of manufacturing a contactor block of a self-aligning vertical probe card according to the first embodiment of the present invention, and FIGS. 11A to 11I are self-aligning according to the first embodiment of the present invention It is a manufacturing process diagram of each guide plate constituting the contactor block of the vertical probe card.

First, as shown in FIG. 11A, a seed layer 420 is formed on the substrate 410 using sputtering, deposition, or the like on the substrate 410. The seed layer 420 may be formed to a thickness of 1 to 2 μm (S10). Here, the substrate 410 may be a substrate made of an insulator such as ceramic or glass, and copper, titanium, and chromium may be used as the material of the seed layer 420. Specifically, the seed layer 420 may use Ti/Cu or Cr/Cu.

Subsequently, a photoresist 430 is coated on the seed layer 420 as shown in FIG. 11B (S11). Subsequently, the photoresist 430 is removed with an etching solution using a mask as shown in FIG. 11C to form a probe hole at a predetermined interval (S12).

Subsequently, as shown in FIG. 11D, a nickel-copper alloy is applied to the probe hole as a conductive material to form a vertical contactor array 400 (S13).

Subsequently, a planarization process is performed as shown in FIG. 11E (S14).

Subsequently, the remaining photoresist is removed through an additional photo process as shown in FIG. 11F (S15).

Subsequently, a molding limiting member 401 for limiting the molding portion as shown in FIG. 11G is formed. Then, the molding member is injected into the inner rim of the molding limiting member 401 and cured. After the curing process of the molding member is finished, the molding limiting member 401 is removed through selective etching. When the molding limiting member 401 is removed as shown in FIG. 11H, a molding layer 440 supporting the vertical contactor array 400 is formed. At this time, the molding layer 440 is composed of an elastic material of an insulating material, for example, various synthetic rubbers and water, such as PDMS (Polydimethylsiloxane), polyurethane (PU), polyurethane acrylate (PUA), silicone rubber (silicon rubber), etc. Feeders can be used (S16). The vertical contactor array 400 buried in the molding layer 440 is in electrical contact with each other between the space converter and the inspected object, and when a constant contact pressure is applied, the vertical contactor array (in the elastic material molding layer 440) 400), a slight bending deformation occurs in which the middle part is bent as the upper and lower ends are pressed at the same time, and when the contact pressure is released, the bent part is unfolded and restored to its original shape. This temporary bending deformation may be repeatedly performed whenever testing of the test object is performed.

Subsequently, as shown in FIG. 11I, the substrate 410 and the seed layer 420 are removed to complete the basic guide plate 200 on which the molding layer 440 and the vertical contactor array 400 are formed (S17 ). In this way, each of the basic guide plates 200 may be stacked layer by layer using the seat 100 of FIG. 4 to make the contactor block 450.

(Second example)

12 is a perspective view for explaining the structures of the first guide plate and the second guide plate constituting the contactor block of the self-aligning vertical probe card according to the second embodiment of the present invention.

The first guide plate 510A and the second guide plate 510B are manufactured by a micro-electro mechanical system (MEMS) process.

Here, in the MEMS process, a seed layer may be formed on the substrate by sputtering or vapor deposition on the substrate. The seed layer may be formed to a thickness of 1 to 2 μm. Here, a substrate made of an insulating material such as ceramic or glass may be used, and copper, titanium, and chromium may be used as the material of the seed layer. Characteristically, the seed layer may be Ti/Cu or Cr/Cu. A process of forming a probe hole by applying a photoresist on the seed layer and removing it with an etch solution using a mask may be included. In addition, the MEMS process is a process of forming a vertical contactor array by applying a nickel-copper alloy as a conductive material to the probe hole, a planarization process, a process of removing the remaining photoresist, a process of forming a molding limiting member, and injecting a molding member And a curing process, a process of removing a molding restriction member through selective etching, and the like.

The first and second guide plates 510A and 510B each include a base plate 520 and a connecting plate 530 that form a pair. The first and second guide plates 510A and 510B have a structure in which the connecting plate 530 is disposed on the base plate 520. The base plate 520 and the connecting plate 530 are provided with connecting elements for mutual coupling.

The first and second guide plates 510A and 510B are provided with fitting protrusions and edge holes as functionally identical connecting elements having different arrangement structures.

When the base plate 520 is manufactured by the MEMS process, a bar-shaped vertical contactor array 521 extending in a longitudinal direction at a central position of a flat plate-shaped body is integrally formed, formed on an inner edge of the base plate 520 The vertical contactor array 400 is connected by a connection tip.

The material of the vertical contactor array 521 may be the same as the material of the base plate 520 body. In an embodiment, the vertical contactor array 521 may use a nickel-copper alloy as a conductive material.

The connecting plate 530 is integrally formed with a fitting protrusion 533 around the incision groove 531 at the center position of the flat plate-shaped body during manufacturing by the MEMS process. In the embodiment, the incision groove 531 is formed in a square shape, but any shape can be allowed if the vertical contactor array 521 can be exposed. The incision groove 531 is intended to expose the vertical contactor arrays 521 located on the upper and lower sides face to face.

The base plate 520 of the first guide plate 510A is formed with a plurality of edge holes 522 around the vertical contactor array 521, which edge holes 522 are disposed at the corners of the body. In contrast, the base plate 520 of the second guide plate 510B has the same arrangement structure in which the vertical contactor array 521 is positioned at a central position, and a plurality of edge holes formed around the vertical contactor array 521 522 is formed along the edge, there is a difference in the arrangement structure.

The connecting plate 530 of the first guide plate 510A is formed with a plurality of fitting protrusions 533 facing each other along the edge around the incision groove 531, and a plurality of edge holes 532 facing each other. It is placed in the corner of the body. On the other hand, the connecting plate 530 of the second guide plate 510B has the same arrangement structure in which the incision groove 531 is formed at the center position of the flat plate-shaped body, and a plurality of fittings formed around the incision groove 531 The projections 533 are disposed at the corners of the body, and the edge holes 532 are disposed along the edges.

In the first guide plate 510A, the edge hole 522 of the base plate 520 and the edge hole 532 of the connecting plate 530 are formed at corresponding positions in the vertical direction. The first hole and the first hole by inserting (533) of the connecting plate 530 of the second guide plate (510B) in the edge hole (522) (532) of the first guide plate (510B) aligned in the vertical direction. 2 Guide plates 510A and 510B are interconnected.

The first guide plate 510A and the second guide plate 510B have a coupling structure capable of stacking in the vertical direction through functionally the same connecting elements as the arrangement structure of the connecting elements for mutual coupling is different.

For convenience of explanation in FIG. 12, although the molding limiting member 511 is not formed in the first and second guide plates 510A and 510B, the first and second guide plates are actually used using the MEMS process. In (510A) (510B), a molding limiting member 511 for limiting the part to be molded is used. When the molding process is over, the molding limiting member 511 is removed by selective etching, so that the molding layer 540 remains, and then a contactor block 550 is made through a laser cutting process, which will be described in detail according to the drawings. .

Referring to FIG. 13, the second guide plate 510B is stacked while the first guide plate 510A is positioned at the bottom. Here, the molding restriction member 511 is formed on the first and second guide plates 510A and 510B.

The base plate 520 of the second guide plate 510B is connected to the connecting plate 530 of the first guide plate 510A, and a plurality of fittings protruding from the connecting plate 530 of the first guide plate 510A are formed. The protrusion 533 is fitted by passing through the plurality of edge holes 522 and 532 aligned in the vertical direction to the base plate 520 and the connecting plate 530 of the second guide plate 510B. At this time, the connecting plate 530 of the second guide plate 510B located at the uppermost portion is exposed because the protruding fitting protrusion 33 is exposed, a new pair of the first guide plate 510A and the second guide plate 510B ) Can be stacked and connected.

As illustrated in FIG. 14, a plurality of first and second guide plates 510A and 510B may be additionally stacked to assemble a set of guide plates stacked at a predetermined height. The first and second guide plates 510A and 510B stacked in the vertical direction are aligned along the central axis, and vertical contactors facing each other through the incision grooves 531 formed in each guide plate 510A and 510B. The array 521 is also aligned in the vertical direction and the horizontal direction.

As shown in FIG. 15, a liquid elastic body is injected as a molding member through the incision groove 531 exposed on the upper portion of the second guide plate 510B located at the uppermost end, and into the incision groove 531 penetrated in the vertical direction. As the liquid elastic bodies are filled, a plurality of vertical contactor arrays 521 facing each other through the incision groove 531 are enclosed. Thereafter, through a curing process, a molding layer 540 supporting the vertical contactor array 521 is formed.

The molding layer 540 is composed of an insulating elastic material, for example, various synthetic rubbers and resins such as polydimethylsiloxane (PDMS), polyurethane (PU), polyurethane acrylate (PUA), and silicone rubber. Can be used.

As illustrated in FIG. 16, a laser cutting process is performed in which a connection tip is cut by irradiating a laser using a laser cutting device 600 in the direction of a dotted arrow. The vertical contactor array 521 stacked on the plurality of sets of guide plates 510A and 510B may be separated using a laser cutting process.

When cutting the ends of the vertical contactor array 521 and the connection tip by a laser cutting method, the plurality of guide plates 510A and 510B are removed and removed, as shown in FIG. 17, and the plurality of vertical contactor arrays 521 ) Is formed in the contactor block 550 embedded in the molding layer 540. The contactor block 550 is provided with a plurality of vertical contactor arrays 521 supported by the molding layer 540 and aligned at fine pitch intervals. Accordingly, the contactor block 550 can be easily and conveniently installed using the jig plate of the probe head module.

The number and length of the vertical contactor arrays applied to the contactor blocks described in the above embodiments can be changed according to the inspection environment such as the object to be tested, and the size of the contactor blocks can be adjusted in a manner extending in all directions.

The above description of the present invention is for illustration only, and a person having ordinary knowledge in the technical field to which the present invention pertains can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be.

That is, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form. It should be construed that all changes or modified forms derived from the meaning and scope of the claims and equivalent concepts thereof are included in the scope of the present invention.

100: seating table 110: support rod
200: basic guide plate 210: fitting hole
300: Connection tip 400: Vertical contactor array
401: Molding limiting member 410: Substrate
420: seed layer 430: photoresist
440: molding layer 450: contactor block
510A, 510B: first and second guide plates
511: limiting member for molding 520: base plate
521: vertical contactor array 522: edge hole
530: connecting plate 531: incision groove
532: edge hole 533: fitting projection
540: molding layer 550: contactor block
600: laser cutting equipment

Claims (19)

At least one vertical contactor array in which a plurality of vertical contactors manufactured in the MEMS process and extended in the longitudinal direction are arranged side by side in a horizontal direction;
And a molding layer exposing the upper and lower ends of the plurality of vertical contactors constituting the vertical contactor array and surrounding the plurality of vertical contactors to support the contactor block of the self-alignment vertical probe card. . According to claim 1,
It includes a basic guide plate formed integrally with the vertical contactor array and the molding layer,
A contactor block of a self-aligning vertical probe card, characterized in that a plurality of basic guide plates are stacked in a layer on a base to form a contactor block, and a contactor block is separated from the basic guide plate using a laser cutting process. . According to claim 2,
The seating plate is formed with a plurality of support rods protruding to a certain height on the flat body,
A contact block of a self-aligning vertical probe card, wherein the plurality of vertical contactor arrays are aligned while a plurality of fitting holes penetrating the basic guide plate are fitted to the support bar of the seating table. According to claim 2,
When a molding limiting member for limiting a molding portion is formed on the basic guide plate, the contacting block of the self-aligning vertical probe card is characterized in that the molding limiting member is removed by a selective etching process after the molding process is finished. According to claim 2,
The laser cutting process is a contactor block of a self-aligning vertical probe card, characterized by irradiating a laser to cut the connection tip formed at the end of the vertical contactor array. According to claim 1,
The first and second guide plates are formed integrally with the vertical contactor array and are divided according to the arrangement structure of the connection elements for mutual coupling.
The second guide plate is stacked on the first guide plate, and the first and second guide plates are stacked at a predetermined height by repeating the connection method of stacking a new first guide plate on the second guide plate. A contact block of a self-aligning vertical probe card, characterized by forming a molding layer by simultaneously molding a plurality of vertical contactor arrays arranged in a plate. The method of claim 6,
When the molding limiting member for limiting the molding portion is formed on the first and second guide plates, the molding limiting member is removed by a selective etching process after the molding process is finished, and the contactor of the self-alignment vertical probe card is removed. block. The method of claim 6,
The first and second guide plates are provided with a base plate and a connecting plate, respectively, in a flat shape,
The contact element formed on the base plate and the connection plate is a contact block of a self-aligning vertical probe card, characterized in that it has a fitting protrusion and an edge hole that can be combined with male and female. The method of claim 8,
The connection plate is formed with a cut-out groove penetrated to face the vertical contactor arrays disposed on the upper and lower sides,
When the first and second guide plates are aligned by the connecting element, a plurality of vertical contactor arrays stacked in the first and second guide plates are aligned with respect to a central axis. Contactor block. The method of claim 8,
In the base plate, a vertical contact array is formed integrally by a connection tip at the center, and an edge hole is formed at the edge,
A fitting protrusion protruding from the connecting plate is formed,
The contact block of the self-aligning vertical probe card, characterized in that the fitting protrusion formed protruding from the connecting plate of the first guide plate is fitted into the edge hole formed in the base plate of the second guide plate. According to claim 1,
The molding layer is made of an insulating material elastic body,
The insulating material of the elastic material is a contactor of a self-aligning vertical probe card, characterized by using any one of PDMS (Polydimethylsiloxane), polyurethane (PU), polyurethane acrylate (PUA), silicone rubber (silicon rubber) block. Forming a seed layer on the substrate;
Forming a probe hole at a predetermined interval by applying a photoresist on the seed layer and removing the photoresist with an etching solution using a mask;
Forming a vertical contactor array by applying a nickel-copper alloy as a conductive material to the probe hole;
Forming the vertical contactor array and performing it through a planarization process;
Removing the remaining photoresist through an additional photo process after performing the planarization process, and forming a molding layer surrounding and supporting the vertical contactor array using a molding limiting member;
Removing the substrate and the seed layer to produce a single basic guide plate;
Stacking the single basic guide plates to a predetermined height;
Self-aligning, characterized in that it comprises; a step of manufacturing a contactor block consisting of a vertical contact plate supported by a molding layer by separating the basic guide plate by irradiating a laser to the basic guide plate stacked to the predetermined height; Method of manufacturing a contactor block of an inverted probe card. Manufacturing first and second guide plates, each of which has a vertical contactor array and is divided according to an arrangement of connection elements for mutual coupling, using a MEMS process;
Assembling a set of guide plates in which a plurality of vertical contactor arrays are aligned in a vertical direction and a horizontal direction with respect to the central axis by stacking the first guide plate and the second guide plate alternately along the central axis and stacking them at a constant height. ;
Forming a molding layer supporting the aligned plurality of vertical contactor arrays by injecting and curing a molding member into the set of guide plates;
And separating the contactor blocks buried in the molding layer through the razor cutting process for separating the plurality of vertical contactor arrays from the set of guide plates. Method of manufacturing a contactor block of a vertical probe card. The method of claim 13,
The first and second guide plates are provided with a base plate and a connecting plate, respectively, in a flat shape,
The connecting element formed on the base plate and the connecting plate has a fitting protrusion and an edge hole that can be combined with male and female,
In the connection plate, an incision groove through which the upper and lower vertical contactor arrays face each other is formed,
When the first and second guide plates are aligned by the connecting element, the plurality of vertical contactor arrays formed on the set of guide plates are aligned with respect to a central axis. Method of manufacturing a contactor block. The method of claim 14,
Self-aligning vertical probe characterized in that the base plate of the second guide plate is connected to the connecting plate of the first guide plate, and a new base plate of the first guide plate is connected to the connecting plate of the second guide plate. Method of manufacturing the contactor block of the card. The method of claim 15,
In the base plate, a vertical contact array is integrally formed at a central position, and an edge hole is formed at the edge, and the connecting plate is formed with an upwardly projecting fitting protrusion,
A method of manufacturing a contactor block of a self-aligning vertical probe card, characterized in that a fitting protrusion protruding from the connecting plate of the first guide plate is fitted into an edge hole formed in the base plate of the second guide plate. The method of claim 13,
The molding layer is a method of manufacturing a contactor block of a self-aligning vertical probe card, characterized in that a plurality of vertical contactor arrays are formed in a buried cube shape. The method of claim 13,
The laser cutting process is a method of manufacturing a contactor block of a self-aligning vertical probe card, characterized in that the ends of the vertical contactor array connected to the first and second guide plates. The method of claim 13,
The molding layer is composed of an elastic material of an insulating material, and the elastic material of the insulating material is one of PDMS (Polydimethylsiloxane), polyurethane (PU), polyurethane acrylate (PUA), and silicone rubber (silicon rubber). A method of manufacturing a contactor block of a self-aligning vertical probe card, which is characterized by its characteristics.

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