KR20190063406A - Substrate unloading apparatus - Google Patents

Abstract

The present invention provides a substrate unloading apparatus capable of efficiently removing an end material of a substrate from a substrate placing unit. The substrate unloading apparatus comprises: a substrate placing unit (2) on which a substrate divided in a prescribed direction is placed; a driving unit (400) to move the substrate placing unit (2) between a horizontal position and an inclined position inclined downwards from the horizontal position; and an unloading unit (300) to unload the substrate (F) for each divided element. The substrate unloading apparatus also comprises a control unit (40). The control unit (40) inclines the substrate placing unit to the inclined position by the driving unit (400) to drop an end material (R) of the substrate from the substrate placing unit (2) after unloading all divided elements of the substrate by the unloading unit (300).

Description

[0001] SUBSTRATE UNLOADING APPARATUS [0002]

The present invention relates to a substrate carrying-out apparatus for carrying out a substrate.

A brittle material substrate such as a glass substrate is cut into a predetermined number of division elements depending on the shape of the final product. At this time, an end member is formed separately from the division element. Patent Document 1 below discloses a configuration in which a stage member is held by a chuck member in advance when a stage member is cut and the stage member is transported to an opening of a shooter by a chuck member and then dropped onto a shooter .

Patent Document 1: JP-A-2012-250871

In a system for generating a division element from a substrate, an apparatus is used in which a substrate divided into individual division elements is temporarily placed on a substrate placement section, and thereafter a predetermined number of division elements are taken out to the downstream apparatus . Here, the substrate to be placed on the substrate mounting portion may remain without being removed from the substrate in the upstream-side division process. Therefore, in a state in which all the divided elements are conveyed to the apparatus on the downstream side, these members may scatter on the substrate mounting portion. This step needs to be removed before the next substrate is carried. In the configuration disclosed in Patent Document 1, since the termination is removed at the time of dividing the substrate, it can not be applied to an apparatus having a configuration in which the divided substrates are temporarily placed on the substrate mounting portion.

In view of these problems, the present invention aims to provide a substrate carry-out apparatus capable of efficiently removing an end member of a substrate from a substrate mounting portion.

An aspect of the present invention relates to a substrate carry-out apparatus. A substrate carrying apparatus according to this aspect includes a substrate placing section on which a substrate is placed, a driving section for moving the substrate placing section between a horizontal position and an inclined position inclined downward from the horizontal position, .

After the substrate is taken out from the substrate mounting portion, a new substrate is brought into the substrate mounting portion. At this time, nothing needs to be placed on the substrate mounting portion. According to the substrate carry-out apparatus of this embodiment, when the substrate placing portion is moved between the horizontal position and the tilted position by the driving portion, the substrate remaining portion on the substrate mounting portion, for example, It can be dropped along the photographic substrate mount. In this way, what remains on the substrate mounting portion can be removed.

In the substrate transfer apparatus according to this embodiment, the substrate is divided into a carry-out object and a non-carry-out object, and after the carry-out section carries out the carry-out object, To-be-unloaded object from the substrate mounting portion by inclining the non-unloading object to the non-unloading object.

With this configuration, by unloading the substrate and tilting the substrate mounting portion, the non-unloading object remaining on the substrate mounting portion can be dropped and removed from the substrate mounting portion. The "non-unloading object" means, for example, a substrate that is formed when a plurality of substrates are cut. Therefore, the object to be unloaded, that is, the substrate (hereinafter referred to as "substrate to be unloaded") can be efficiently removed from the substrate mounting portion. In addition, if a rotating container or the like is provided in the lower portion of the substrate mounting portion, it is also possible to efficiently recover the end member.

In the substrate carry-out apparatus according to this embodiment, the substrate placing section is configured to be capable of applying a pressure to the lower surface of the substrate placed on the substrate placing section, and to apply pressure to the lower surface of the substrate placed on the substrate placing section And the control section may be configured to control the pressure applying section so as to apply a positive pressure to the lower surface of the non-unloading object when the step material falls from the substrate mounting section.

Since a static pressure is applied to the lower surface of the edge member in this manner, the edge member is easily detached from the substrate placement portion. Therefore, if the substrate placement portion is inclined, the edge member falls more easily. Therefore, the end member can fall more reliably and smoothly from the substrate mounting portion, and can be efficiently removed.

In the substrate carry-out apparatus according to this embodiment, the substrate placing portion is divided into a plurality of portions in the horizontal direction, and the driving portion is configured to drive the plurality of portions between the horizontal position and the tilt position .

In order to remove the substrate from the substrate mounting portion, it is necessary to tilt the substrate mounting portion to such a degree that the substrate can be reliably dropped. Therefore, it is necessary to secure a space for receiving the inclination of the substrate mounting portion in the lower portion of the substrate mounting portion. In this respect, in the substrate carrying-out apparatus according to this embodiment, since the substrate placing portion is divided into a plurality of portions, the lower space required for tilting each portion by a predetermined angle is made smaller than when a single substrate placing portion is tilted . Therefore, it is possible to suppress the enlargement of the substrate carry-out apparatus, in particular, the enlargement in the height direction. In addition, since each part can be largely rotated, the end material on each part can be smoothly dropped and efficiently removed.

In the substrate carry-out apparatus according to this embodiment, the substrate placing section may be configured to be divided into two parts in the horizontal direction.

With this configuration, since the two portions can be rotated largely while adequately ensuring the space below the substrate mounting portion, the non-unloading object can be dropped more smoothly and efficiently from the substrate mounting portion.

In the substrate carry-out apparatus according to this embodiment, the drive unit may be configured to tilt the two portions so that the edge on the boundary side of the two portions moves downward, and to position the two portions at the tilt position have.

As a result, the non-unloading object has a range from the vicinity of the boundary position of each portion when the two portions are in the horizontal state to the vicinity of the position of the end portion of each portion when the two portions are inclined to the inclined position . Therefore, by providing a container for recovering the end material in this range, the end material can be dropped from the two parts and dropped on the container. This makes it easier to recover the end members from the respective portions to the container at once, thereby improving the recovery efficiency of the end members.

In the substrate carry-out apparatus according to this embodiment, the driving unit may include a driving mechanism that rotatably supports the substrate mounting portion in the vertical direction, and rotates the substrate mounting portion between the horizontal position and the inclined position Lt; / RTI >

With this configuration, the substrate mounting portion smoothly moves from the horizontal position to the inclined position. Therefore, the termite can be surely dropped from the substrate mounting portion and can be removed.

As described above, according to the present invention, it is possible to provide a substrate carrying-out apparatus capable of efficiently removing a substrate section from a substrate mounting section.

The effect or significance of the present invention will become more apparent from the description of the embodiments described below. It should be noted, however, that the embodiments described below are merely examples of the embodiment of the present invention, and the present invention is not limited to what is described in the following embodiments.

Fig. 1 is a perspective view showing an external configuration of a substrate carry-out apparatus according to the embodiment. Fig.
Fig. 2 is a perspective view of the substrate carry-out apparatus of Fig. 1, in which the substrate, the pressure applying unit, and the carry-out apparatus are omitted.
3 is a perspective view for explaining a configuration of the sheet conveying portion of the substrate carrying-out apparatus according to the embodiment.
4 is an exploded perspective view for explaining the structure of the sheet guide portion of the substrate carry-out apparatus according to the embodiment.
Fig. 5 is an exploded perspective view for explaining a configuration of a driver of a substrate carry-out apparatus according to the embodiment.
Fig. 6 is a block diagram showing a configuration of a substrate carry-out apparatus according to the embodiment.
7 is a flowchart showing the operation of the substrate carrying-out apparatus according to the embodiment.
8 (a) to 8 (d) are front views schematically showing the operation of the substrate taking-out apparatus according to the embodiment, respectively.
9 (a) and 9 (b) are front views schematically showing the operation of the substrate taking-out apparatus according to the embodiment, respectively.
10A to 10C are side views schematically showing the operation of the substrate carry-out apparatus according to the embodiment, respectively.
11 is a flowchart showing the operation of the substrate take-out apparatus according to the modified example of the embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the X axis, the Y axis, and the Z axis are orthogonal to one another for the sake of convenience. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction. The Z axis positive side is the upper side and the Z axis side (negative side) is the lower side.

<Embodiment>

A brittle material substrate such as a glass substrate and a ceramics substrate, a resin substrate such as a PET (polyethylene terephthalate resin) substrate and a polyimide resin substrate (hereinafter simply referred to as &quot; substrate &quot;), Product. Such processing includes, for example, a process of cutting a substrate into a predetermined number of divided elements, a process of removing an end material that occurs when the substrate is cut, a process of cleaning the surface of the substrate, and the like. The substrate is transported to a predetermined stage for each process, and is transported to another stage for the next process when the process is finished. The substrate carry-out apparatus 1 according to the present embodiment is an apparatus for carrying out a substrate F divided into a plurality of divided elements at least in a predetermined direction in a plurality of times. In the present embodiment, the predetermined direction is the forward direction of the X-axis, and coincides with the direction in which the division elements are moved out.

In the substrate carrying device 1 according to the present embodiment, the substrate F in a state in which the end material R formed in the cutting process is contained is carried. The stage R includes a stage formed along the outer periphery of the substrate F and a stage formed between the divided stages. The term R is an object which should not be carried out, that is, a non-carried object. The substrate carry-out apparatus 1 according to the present embodiment is configured to remove the stage R from the substrate mounting section 2. [

Fig. 1 is a perspective view showing an external configuration of the substrate carrying-out apparatus 1 according to the embodiment. 1, the substrate carry-out apparatus 1 includes a substrate mounting section 2, a sheet 3, a pressure applying section 4, a mount table 8, a sheet transfer section 100, A sheet guide portion 200, a carry-out portion 300, and a driving portion 400. 2 is a perspective view in which the substrate mounting portion 2, the pressure applying portion 4, and the carry-out portion 300 are omitted from the substrate carrying device 1 of FIG.

In the substrate mounting section 2, a substrate F divided into a plurality of divisional elements in at least a predetermined direction is placed. Here, the predetermined direction is the carry-out direction of the substrate F. Further, the substrate F may be divided in a predetermined direction and further divided vertically in a predetermined direction. In the substrate F thus divided, the dividing elements are formed in a checkerboard shape.

The substrate mounting portion 2 is a component having a flat surface for mounting a substrate F to be taken out, for example, and includes a table, a belt conveyor, and the like. 1, the sheet guide portion 200 and the sheet conveying portion 100 are arranged from the negative side in the X-axis direction with respect to the substrate placing portion 2. [ Here, the substrate carry-out apparatus 1 shown in Fig. 1 shows a state immediately before the substrate F is transported, and the substrate F is omitted. The state of the substrate carry-out apparatus 1 shown in Fig. 1 is &quot; initial state &quot;. In this initial state, the state of the substrate carry-out apparatus 1 immediately before the substrate F is carried into the substrate carry-in apparatus 1 and placed on the substrate placing section 2 and the split elements of the substrate F are carried out . A plurality of fine holes are formed in the substrate mounting portion 2 and the pressure by the pressure applying portion 4 to be described next is sent to the substrate F through the fine holes.

In the present embodiment, the substrate mounting section 2 is divided into two parts in the horizontal direction, and the parts located on the positive side and the negative side of the Y axis are the substrate mounting sections 2a and 2b, respectively. The area and shape of the substrate mounting portions 2a and 2b are equal.

Examples of the substrate include a substrate such as a polyimide resin, a polyamide resin, a polyester resin such as PET, a polyolefin resin such as polyethylene or polypropylene, or a resin substrate such as polyvinyl resin such as polystyrene or polyvinyl chloride And a brittle material substrate such as a glass substrate or a ceramics substrate. However, the substrate F to be unloaded from the substrate carry-out apparatus 1 according to the present embodiment is a resin Substrate. The resin substrate may be laminated with other substrates, for example, PET, polyimide resin, or PET laminated in this order from the bottom.

The sheet (3) covers the upper surface of the substrate (F). The material of the sheet 3 is not particularly limited, but a polymer resin is preferable, and specifically, polyethylene, polystyrene, PET and the like are suitable.

The pressure applying unit 4 includes a pneumatic source and is provided on the lower surface of the substrate mounting unit 2 and applies pressure to the lower surface of the substrate F. [ When the pressure applying unit 4 applies pressure to the substrate F, pressure is applied to the lower surface of the substrate F through a plurality of minute holes formed in the lower surface of the substrate mounting unit 2 do. The substrate F is attracted to the substrate placing portion 2 when the pressure applying portion 4 gives a negative pressure to the substrate F. [ This makes it difficult for the substrate F to be dropped from the substrate mounting portion 2. Therefore, the positional deviation of the divisional elements of the substrate F is suppressed. In contrast, when the pressure applying unit 4 does not apply a negative pressure to the substrate F and when a positive pressure is applied, the adsorption of the substrate mounting unit 2 to the substrate F is released. Therefore, the substrate F can be easily dropped from the substrate mounting portion 2. [

The mount 8 is provided below the substrate mounting portion 2 and supports the driver 400. [ The base 8 has a space 8a formed therein and an opening 8b formed on the upper surface thereof. 1 and 2, the bottom surface of the base 8 does not have a bottom, but it may have a bottom.

The sheet conveying section 100 conveys the sheet 3 to the upper surface of the substrate F placed on the substrate placing section 2. [ The sheet guide portion 200 smoothly conveys the sheet 3 when the sheet 3 is fed to the sheet feeding portion 100 and when the fed sheet 3 is collected. The sheet conveying unit 100 and the sheet guide unit 200 will be described later in detail.

The take-out unit 300 takes out the divided elements of the substrate F which are not covered by the sheet 3. [ As shown in Fig. 1, in the initial state of the substrate carry-in apparatus 1, the carry-out portion 300 is disposed on the upper side with respect to the substrate placing portion 2 as a positive side in the X- In the substrate carrying-out apparatus 1, two rails 301 and 302 are arranged in the X-axis direction as the upper portion of the substrate mounting section 2. [ The carry-out portion 300 is hooked on the rails 301 and 302, and is configured to be slidable along the rails 301 and 302 in the X-axis direction.

The take-out unit 300 includes a suction unit 310 capable of being sucked onto the substrate F and a flexible tube member 320. [ The take-out unit 300 moves in the negative direction of the X-axis so that the attracting unit 310 is positioned just above the split element to be unloaded. When the carry-out part 300 moves to a predetermined position, the pipe member 320 is stretched and the split element to be carried out is attracted to the attracting part 310. [ The take-out unit 300 contracts the pipe member 320 to lift up the split element. The adsorption unit 310 may be divided by a plurality of adsorption units in the Y-axis direction, or the adsorption units may adsorb a plurality of division elements divided in the Y-axis direction. The take-out unit 300 moves in the forward direction of the X-axis in a state of sucking the split elements to be carried out, and places the split elements at a predetermined position. In this way, the carry-out unit 300 takes out the substrate F for each division element.

The driving unit 400 tilts the substrate placement unit 2. The drive unit 400 includes a plurality of the same drive mechanisms 410. In this embodiment, the drive unit 400 includes four drive mechanisms 410 on each of the substrate placement units 2a and 2b . The driving unit 400 will be described in detail later.

3 is a perspective view for explaining the configuration of the sheet conveying unit 100 of the substrate carrying apparatus 1 according to the embodiment. Fig. 3 is a perspective view showing an initial state of the sheet conveying unit 100, corresponding to Fig. 1 and Fig.

1 to 3, the sheet conveying unit 100 includes a conveying roller 110, a conveying unit 120, and a guide roller 130. The conveying roller 110 moves in the forward and backward directions of the X axis while not rolling on the substrate F on the upper surface side of the substrate F and rolling. The length of the conveying roller 110 in the Y-axis direction is longer than the length of the substrate placing portion 2 in the Y-axis direction.

In the conveying roller 110, a conveying bracket 111a is provided on the positive side in the Y-axis direction, and a conveying bracket 111b is provided on the side in the Y-axis direction. The conveyance bracket 111a is provided with pulleys 112a, 113a, and 114a in this order from the side in the X-axis direction. Although not shown, pulleys 112b, 113b, and 114b are also provided in this order from the side in the X-axis direction in the conveyance bracket 111b. Further, conveying sliders 125a and 125b are provided below the conveying brackets 111a and 111b, respectively. The conveyance sliders 125a and 125b will be described next.

The carry section 120 moves the conveying roller 110 on the upper surface side of the substrate F. [ The carry section 120 is provided with a carrying belt 121a, a pulley 122a, a pulley 123a, a carrying rail 124a, and a carrying slider 125a on the positive side in the Y-axis direction.

The carrying belt 121a is disposed along the X axis direction of the substrate mounting portion 2 and is caught by the pulley 122a and the pulley 123a. The pulley 122a is disposed on the side in the X axis direction with respect to the substrate mounting portion 2 and the pulley 123a is disposed on the positive side in the X axis direction with respect to the substrate mounting portion 2. [ The pulleys 122a and the pulleys 123a are fixed to the fixing plates 5a and 6a respectively and the fixing plates 5a and 6a are fixed to the frame 7a of the substrate carrying- The conveyor belt 121a is engaged with the lower end face of the pulley 112a of the conveyance bracket 111a, the upper face of the pulley 113a and the lower end face of the pulley 114a in this order from the positive direction of the X axis .

A conveying rail 124a fixed to the frame 7a is disposed below the conveying belt 121a along the conveying belt 121a. The conveyance slider 125a is provided below the conveyance bracket 111a and mounted on the conveyance rail 124a so as to allow the conveyance rail 124a to slide.

As shown in Fig. 3, the above-described configuration is also applicable to the side in the Y-axis direction. That is, the carry section 120 includes a conveyor belt 121b, a pulley 122b, a pulley 123b, and a conveyor rail 124b on the side in the Y-axis direction, and the pulleys 122b, The pulleys 123b are fixed to the fixing plates 5b and 6b respectively and the fixing plates 5b and 6b are fixed to the frame 7b of the substrate carrying- The conveyance slider 125b is provided below the conveyance bracket 111b and mounted on the conveyance rail 124b so as to allow the conveyance rail 124b to slide. The pulley 122a and the pulley 122b are connected by a shaft 126. [

The conveying slider 125a slides the conveying rail 124a when a driving force is applied from a driving unit (not shown). On the other hand, the conveyance slider 125b also slides the conveyance rail 124b like the conveyance slider 125a. As described above, the conveyor belt 121a is engaged with the pulleys 112a, 113a, and 114a of the conveyor bracket 111a, and the pulleys 112b, 113b, and 114b of the conveyor bracket 111b are engaged with the conveyor belt 121a. The conveying roller 110 can stably move in the X-axis direction. The pulleys 122a and 122b are connected to each other by a shaft 126 so that the amount of rotation of the pulleys 122a and 122b coincides with each other. Therefore, the moving speeds of the transport sliders 125a and 125b coincide with each other.

4 is an exploded perspective view for explaining the structure of the sheet guide portion 200 of the substrate carrying-out apparatus 1 according to the embodiment. Fig. 4 is a perspective view showing an initial state of the sheet guide portion 200, corresponding to Figs. 1 and 2.

4, the sheet guide portion 200 includes weights 210 and 220 and a shaft 260. As shown in Fig. The sheet guide portion 200 is provided with a guide plate 230a, a guide rail 240a and a guide slider 250a as guide members on the positive side in the Y-axis direction.

The weight 210 imparts tension to the sheet 3 while the sheet 3 is being conveyed by the sheet conveying unit 100. [ The weight 210 is a shaft and is provided with shafts 211a and 211b at the ends 210a and 210b in the Y axis direction, respectively. The projections 212a and 212b are further provided on each of the shafts 211a and 211b. The weight 220 is the same member as the weight 210 and is provided with shafts 221a and 221b at the ends 220a and 220b in the Y axis direction and each of the shafts 221a and 221b also has, And protrusions 222a and 222b are provided.

In the guide plate 230a, grooves 231a and 232a having the same size are formed in the Z-axis direction. The width of the groove 231a is smaller than the diameter of the shaft portion of the weight 210 and the diameter of the projection 212a and is set larger than the diameter of the shaft 211a. The shaft 211a of the weight 210 is inserted into the groove 231a and the projection 212a is fitted to the end of the shaft 211a. Similarly, the shaft 221a of the weight 220 is fitted in the groove 232a, and the projection 222a is mounted on the tip of the shaft 221a. As a result, the weights 210 and 220 can move stably up and down without protruding from the seat 3. [

The guide plate 230a is provided with guide rails 240a along the grooves 231a and 232a. A guide slider 250a slidable on the guide rail 240a is mounted and the guide slider 250a is engaged with the protrusion 212a of the weight 210 and the protrusion 222a of the weight 220. [

The substrate carry-out apparatus 1 is provided with a guide plate 230b which is paired with the guide plate 230a on the side in the Y-axis direction. In the guide plate 230b, grooves 231b and 232b having the same size are formed in the Z-axis direction, like the guide plate 230a. The shaft 211b of the weight 210 is fitted into the groove 231b and the projection 212b is fitted to the tip of the shaft 211b. Likewise, the shaft 221b of the weight 220 is fitted in the groove 232b, and the projection 222b is fitted to the tip of the shaft 221b.

The guide plate 230b is provided with guide rails 240b (not shown) along the grooves 231b and 232b. And a guide slider 250b slidable on the guide rail 240b is mounted. The guide slider 250b is engaged with the protrusion 212b of the weight 210 and the protrusion 222b of the weight 220. [

The sheet 3 is set in the substrate carry-out apparatus 1 as follows. The sheet 3 is fixed by a sheet fixing portion (not shown) at an end edge portion 3a extending in the Y-axis direction. The seat 3 extends downward from the end edge portion 3a and extends downward along the outer peripheral surface of the weight 210 and extends downward along the outer peripheral surface of the shaft 260 to extend downward. The sheet 3 is folded along the outer circumferential surface of the weight 220 and extends upward and folded along the outer circumferential surface of the guide roller 130. [ From which the sheet 3 extends in the positive direction of the X axis and is folded along the outer circumferential surface of the conveying roller 110 and extends in the minor direction of the X axis and the edge portion of the end edge portion 3b of the sheet 3 And sandwiched between the holding portions 270a and 270b. As shown in Fig. 1, the sheet holding portions 270a and 270b are fixed to the frames 7a and 7b, respectively.

When the conveying roller 110 moves in the forward direction of the X axis, the guide sliders 250a and 250b slide upwardly along the guide rails 240a and 240b. The sheet 3 moves upward while being in slide contact with the outer peripheral surfaces of the weights 210 and 220. In this state, The sheet 3 is fed to the upper surface side of the substrate F and covers the upper surface of the substrate F by the weight of the sheet 3. [ The tension by the weights 210 and 220 is such a balance as to balance the frictional force with the sheet 3 and the conveying roller 110 and the weight of the portion of the sheet 3 covering the substrate F. [

When the conveying roller 110 is moved in the negative direction of the X axis, the guide sliders 250a and 250b slide the guide rails 240a and 240b downward. During this time, the sheet 3 moves downward while slidingly contacting the weights 210 and 220. Thus, the sheet 3 fed to the upper surface of the substrate F returns to the original state, that is, the folded state.

5 is an exploded perspective view for explaining the structure of the driving unit 400 of the substrate carrying-out apparatus 1 according to the present embodiment. As shown in FIG. 5, the driving unit 400 includes a driving mechanism 410 and a pneumatic source 420. The air pressure source 420 is shown in Fig. The drive mechanism 410 includes a cylinder 411, a rod 412, a support member 413, and a rotation shaft 414. [ Four drive mechanisms 410 are disposed on the positive and negative sides of the Y axis, that is, on the substrate mounts 2a and 2b, respectively, in the drive unit 400 of the substrate carry- The state of the driving unit 400 shown in Fig. 5 corresponds to Figs. 1 and 2, and is in an initial state, like the sheet conveying unit 100, the sheet guide unit 200, and the carrying unit 300.

The cylinder 411 accommodates the rod 412 therein, and the longitudinal direction of the cylinder 411 is arranged so as to be parallel to the Y axis direction.

The support member 413 is disposed on the lower surface of the substrate mounting portion 2a and supports the substrate mounting portion 2a from the lower surface. The upper surface of the support member 413 is a surface that abuts the lower surface of the substrate mounting portion 2a and is a support surface 413a. A shaft hole 413c for inserting the rotation shaft 414 is formed at an end portion of the side surface 413b which is continuous from the support surface 413a and which faces the X-axis direction and which is closer to the cylinder 411. On the lower side of the side surface 413b of the support member 413, a grip portion 413d is formed. A gripping member 415 for gripping the gripping portion 413d of the support member 413 is attached to the end portion 412a on the opposite side of the cylinder 411 from the rod 412. [ The gripping member 415 grasps the gripping portion 413d so that the cylinder 411 is connected to the rod 412 and the support member 413. 1 and 5, in the initial state of the substrate carry-in apparatus 1, the supporting surface 413a of the supporting member 413 positions the substrate placing portion 2 in a horizontal position.

The cylinder 411 is connected to and fixed to the base 8 by a connecting member 416 connected to the end 411a of the cylinder 411 farther from the rod 412. [ The rotating shaft 414 is inserted into each of the shaft holes 413c of the driving mechanism 410. [

The driving mechanism 410 causes the rod 412 to slide the cylinder 411 to position the substrate placing portions 2a and 2b in the horizontal position and the inclined position. Specifically, when a negative pressure is applied to the cylinder 411 from the pneumatic source 420 shown in Fig. 6, the rod 412 slides toward the end 411a of the cylinder 411. Fig. At this time, the grip portion 413d of the support member 413 connected to the end portion 412a of the rod 412 also moves toward the end portion 411a. Thereby, the support member 413 rotates downward about the rotation shaft 414, and the support surface 413a is inclined downward.

The angle of inclination of the support member 413, that is, the inclination angle of the substrate mounting portion 2, is appropriately set in accordance with the size and weight of the substrate placing portion 2 and the substrate F, 90 degrees. With this range, the end material R scattered on the substrate mounting portion 2 can be smoothly dropped and removed.

The intervals and the number of the drive mechanisms 410 are appropriately adjusted in accordance with the size and weight of the substrate placement unit 2a and the substrate F. [ In the substrate carry-out apparatus 1 according to the present embodiment, four drive mechanisms 410 are arranged in each of the substrate placement sections 2a and 2b, but it is sufficient that at least one drive mechanism 410 is arranged. It may be arranged.

A stand 9 and a stand 10 are disposed at both ends of the rotating shaft 414. The stand 9 is fixed to the mount 8 and supports the frames 7a and 7b. The stand 10 is fixed to the mount 8 and supports the frames 7a and 7b. The stand 10 also supports the fixing plates 6a and 6b.

Fig. 6 is a block diagram showing the configuration of the substrate carrying-out apparatus 1. Fig. 6, the substrate carry-out apparatus 1 includes a substrate mounting section 2 shown in Fig. 1, a pressure applying section 4, a sheet conveying section 100, a sheet guide section 200, A carry-out unit 300 and a drive unit 400 and further includes an input unit 20, a detection unit 30, and a control unit 40.

The input section 20 accepts the number of division elements of the substrate F carried out by the carry-out section 300. The detection unit 30 detects the position of the conveying roller 110. The detecting section 30 may be, for example, an encoder. In this case, as shown in Fig. 2, the servo motor 127 may be provided on the pulley 122b. The encoder detects the number of revolutions of the servo motor 127 and controls the position of the conveying roller 110. In addition to this, the detecting section 30 need only be capable of properly detecting the position of the conveying roller 110, and may be, for example, a sensor, an image pickup apparatus, or the like.

The control unit 40 includes an arithmetic processing circuit such as a CPU and a memory such as a ROM, a RAM, and a hard disk. The control unit 40 controls each unit according to the program stored in the memory.

7 is a flowchart showing the operation of the substrate carrying apparatus 1 according to the first embodiment. This control is executed by the control unit 40 shown in Fig. Hereinafter, the control by the control unit 40 is appropriately described with reference to Figs. 8A to 8D, 9A, 9B, and 10A to 10C do. Figs. 8A to 8D and 9A and 9B are front views schematically showing the operation of the substrate carry-in apparatus 1, respectively. Figs. 10 (a) to 10 (c) are side views schematically showing the operation of the substrate carrying-out apparatus 1. Fig.

The state of the substrate carry-out apparatus 1 shown in Fig. 8 (a) is an initial state. Here, the substrate F is subjected to a process of cutting the substrate F into a predetermined number of divisional elements in the previous stage before being carried into the substrate carry-in apparatus 1, and includes the substrate R, (F) is carried out to the substrate carry-out apparatus 1. [ In the initial state, the carry-out section 300 waits on the upper side as the positive side in the X-axis direction, and the weights 210 and 220 are located at the lowermost end of the grooves 231a and 232a, respectively. That is, the protrusions 212a and 222a are positioned at the lowermost ends of the grooves 231a and 232a. The control unit 40 applies a negative pressure to the substrate F to the pressure applying unit 4 to cause the substrate F to be adsorbed to the substrate mounting units 2a and 2b. In the flowchart of Fig. 7, the state of the substrate carry-out apparatus 1 at the "start" is the initial state of the substrate carry-out apparatus 1 shown in Fig. 8 (a).

The control unit 40 causes the input unit 20 to receive the number of division elements of the substrate F to be unloaded by the unloading unit 300 by one unloading operation. This number can be appropriately determined by the user depending on the size of the substrate F, the size of the division element, and the like. Alternatively, for example, the number of division elements to be carried out for each type of substrate may be stored in advance in the control unit 40, and when the user inputs the type of the substrate to the input unit 20, You can also set it to read the number of elements. The substrate carry-out apparatus 1 takes out the division elements toward the side of the X-axis in order from the divisional element A located on the positive side of the X-axis of the substrate F in order.

8 (b), the control unit 40 moves the conveying roller 110 in the forward direction of the X-axis and moves the conveying roller 110 other than the dividing element A by the sheet 3 (S11). At this time, the control section 40 causes the sheet 3 to be fed to the sheet guide section 200 by a distance at which the conveying roller 110 is moved. As a result, the guide slider 250a slides upward on the guide rail 240a, and the weights 210 and 220 rise while slidingly contacting the seat 3.

Next, the control unit 40 causes the adsorption unit 310 of the carry-out unit 300 to adsorb the partitioning element A (S12). At this point in time, the control section 40 applies a negative pressure to the substrate F to the pressure applying section 4. [ As a result, the suction unit 310 can reliably suck the divided element A in the aligned state on the substrate mounting portions 2a and 2b. Thereafter, the control unit 40 causes the pressure applying unit 4 to apply a positive pressure to the substrate F (S13). As a result, the adsorption state between the substrate mounting portions 2a and 2b and the substrate F is released. 8 (c), the control unit 40 carries out the division element A to the carry-out unit 300 (S14). At this time, in the substrate F, the division element A Is not covered by the sheet 3, even if air is blown onto the lower surface of the substrate F, the positional deviation of the divided elements of the substrate F does not occur. Since the adsorption state between the substrate mounting portions 2a and 2b and the substrate F is released, the dividing element A is in a state in which it is likely to be separated from the substrate mounting portions 2a and 2b. Therefore, the control unit 40 can smoothly carry out the division element A to the carry-out unit 300. [ At this time, the stage R remains on the substrate mounting portions 2a and 2b.

After the carry-out unit 300 removes the partition element A, the control unit 40 determines whether there is a partition element of the substrate F to be unloaded (S15). If there is a dividing element of the substrate F to be carried out, the process proceeds to step S16. On the other hand, when there is no division element of the substrate F to be unloaded, that is, when all the divided elements are unloaded, the unloading of the substrate F is terminated.

If NO in step S15, the control unit 40 gives a negative pressure to the substrate F to the pressure applying unit 4 (S16). Thereby, the substrate F is sucked to the substrate mounting portions 2a and 2b.

After step S16, the control section 40 controls the steps S11 to S16 to be repeated until all of the division elements of the substrate F are unloaded. For example, the control unit 40 moves the conveying roller 110 in the negative direction of the X-axis so that the sheet 3 other than the divisional element B of the substrate F is covered by the sheet 3 (S11). At this time, the weights 210 and 220 descend while slidingly contacting the sheet 3, and the sheet 3 is folded by the length of the conveying roller 110 moved in the negative direction of the X axis. Fig. 8 (d) shows this state. The following steps are the same as those described above. In this manner, the substrate carrying-out apparatus 1 carries out the transfer of the substrate F for each of the divisional elements.

As shown in Fig. 9 (a), as the carrying-out operation of the substrate F by the carry-out unit 300 proceeds, the stage R remains on the substrate placing portions 2a and 2b. 9 (b), the control unit 40 returns the conveying roller 110 and the take-out unit 300 to their initial states. On the substrate mounting portions 2a and 2b after the substrate F is carried out, the end members R are scattered.

Next, the substrate carry-out apparatus 1 removes the interim material R scattered on the substrate mounting portions 2a and 2b shown in Fig. 10 (a). 10 (b), when the control unit 40 controls the air pressure source 420 of the driving unit 400 to apply a negative pressure to the cylinder 411, the rod 412 is moved to the cylinder 411, To the end portion 411a side. At this time, the grip portion 413d of the support member 413 connected to the end portion 412a of the rod 412 moves toward the end portion 411a. Thereby, the support member 413 rotates downward about the rotation axis 414, and the support surface 413a is inclined downward. Therefore, the substrate mounting portions 2a and 2b are inclined downward.

The stage material R dispersed to the substrate mounting portions 2a and 2b slides on the upper surface of the inclined substrate mounting portions 2a and 2b. 10 (c), the support member 413 is moved in the direction in which the support surface 413 is in contact with the support surface 413, (413a) is inclined to a predetermined angle. Therefore, the substrate mounting portions 2a and 2b are inclined to a predetermined angle. The stage R slides off the upper surfaces of the inclined substrate mounts 2a and 2b and is removed from the substrate mounts 2a and 2b (S17).

10 (a) to 10 (c), in a space 8a of the table 8, a container (not shown) for collecting the dropped end material R is disposed in the lower portion of the substrate mounting portions 2a and 2b P may be provided. The size of the container P may be appropriately set in accordance with the size of the substrate mounting portion 2. [

The stage R scattered on the substrate placing portions 2a and 2b is completely removed from the substrate placing portions 2a and 2b and the control portion 40 is moved to the cylinder 411 with respect to the pneumatic source 420 The rod 412 slides to the side away from the cylinder 411. [ As a result, the grip portion 413d of the support member 413 moves to the side away from the cylinder 411. [ At this time, the support member 413 rotates upward about the rotation axis 414, and the support surface 413a is positioned at the horizontal position. Thus, the substrate mounting portions 2a and 2b are positioned in the horizontal position (S18). The state of the substrate carry-out apparatus 1 in step S18 is the initial state shown in Fig. 8 (a).

Thus, the substrate F is carried out for each division element, and after the stage R scattered on the substrate mounting portions 2a and 2b is removed from the substrate mounting portions 2a and 2b, the new substrate F Are carried into the substrate carrying-out apparatus 1. [

&Lt; Effect of Embodiment &gt;

According to the present embodiment, the following effects are exhibited.

As shown in Figs. 8 (a) to 8 (d), the division elements other than the object to be taken out of the division elements of the substrate F are covered by the sheet 3. [ That is, the area covered by the sheet 3 is pressed by the weight of the sheet 3. Here, in the case where the division element to be taken out of the board F is carried out in a state in which the seat 3 is absent, the division element other than the object to be taken out of the board F (the division element to be taken out in the subsequent carrying out operation) It is easy for deviation to occur. Although the substrate F has been brought into the substrate carry-out apparatus 1 in the aligned state, if the positional deviation occurs in the split element to be taken out in the carry-out operation, it is difficult to smoothly carry out the substrate F. In the present embodiment, since the divided elements other than the divided elements to be unloaded are pressed by the sheet 3, the division elements of the substrate F covered by the sheet 3 do not deviate. Therefore, the carry-out unit 300 can smoothly and appropriately carry out the remaining partition elements in the subsequent carry-out operation.

Furthermore, since it is clear that the partition element not covered by the sheet 3 is the object to be taken out, the takeout unit 300 can surely take out the partition element.

As shown in Fig. 1, the substrate carrying-out apparatus 1 is provided with a pressure imparting unit 4. Thus, when the negative pressure with respect to the substrate F is released by the pressure applying unit 4 or when a positive pressure is applied to the substrate F, the adsorption state between the substrate mounting unit 2 and the substrate F The substrate F is likely to be dropped from the substrate mounting section 2. [0051] In this case, the positional deviation of the divisional elements of the substrate F is apt to occur. However, in the present embodiment, since the partition elements other than the divided elements to be unloaded are covered by the sheet 3 and pressed by the own weight of the sheet 3, the pressure imparting unit 4 does not apply negative pressure to the substrate F Or even if the pressure applying unit 4 applies a positive pressure to the substrate F, positional deviation does not occur in the partitioning factor element covered by the sheet 3. [ Therefore, the exporting unit 300 can smoothly carry out the partitioning elements to be exported, and smoothly and properly carry out the remaining partitioning elements in the subsequent exporting operation.

As shown in Figs. 8A to 8D, the weights 210 and 220 are not mounted on the seat 3, but are loaded on the seat 3. Fig. As described above, the seat 3 is given appropriate tension by the simple structure using the gravity of the weights 210 and 220. [ Therefore, it is possible to appropriately cover the surface of the substrate F by the self weight of the sheet 3. [

The weights 210 and 220 have an outer peripheral surface in an arc shape. As a result, the arcuate portions of the weights 210 and 220 are moved up and down by the movement of the seat 3 while slidingly contacting the seat 3. Therefore, the weights 210 and 220 can appropriately apply tension to the sheet 3 while the sheet 3 is being conveyed by the movement of the conveying roller 110. [ The weights 210 and 220 may be moved up and down while being rotated by the movement of the seat 3. [

The weights 210 and 220 are configured to move the grooves formed in the guide plates 230a and 230b up and down by a slider. As a result, it is possible to restrain the weights 210 and 220 from deviating from the seat 3, so that the seat 3 can be stably tensioned.

The material of the sheet 3 is, for example, polyethylene, has flexibility, and the conveying roller 110 is not in contact with the substrate F. [ The sheet 3 covers the substrate F by its own weight so that the conveying roller 110 can cover the upper surface of the substrate F without damaging the substrate F. [

As shown in Figs. 8A to 8D and steps S12 and S16 in Fig. 7, in accordance with the timing of the suction and discharge of the division element by the carry-out unit 300, A positive or negative pressure is applied to the substrate (F), or the pressure is released. That is, the control unit 40 maintains or releases the adsorption state between the substrate placing unit 2 and the substrate F to the pressure applying unit 4. Thereby, while the upper surface of the substrate F is covered with the sheet 3, the adsorption state between the substrate placing portion 2 and the substrate F is released (the pressure is released or the positive pressure is applied) The positional deviation does not occur in the divisional elements of the substrate F. Therefore, the subsequent carry-out operation can be performed smoothly. The divided elements which are not covered with the sheet 3 but are the objects to be taken out are also held by the suction element 310 of the carry-out section 300 until the split elements are covered by the sheet 3 But the positional deviation does not occur because it is in an integrated state. Therefore, the exporting unit 300 can smoothly and surely carry out the partitioning elements to be exported.

As shown in Fig. 5, the support member 413 is positioned from the horizontal position to the inclined position by making the inside of the cylinder 411 a positive pressure or a negative pressure. As a result, the stage R scattered in the substrate mounting section 2 slips down on the substrate mounting section 2. [ As such, the stage R falls smoothly from the substrate mounting portion 2 and is efficiently removed from the substrate mounting portion 2. [

10 (a) to 10 (c), the stage R is divided into two portions when the substrate mounting portion 2 is in a horizontal state, and from the vicinity of the boundary positions of the respective portions, It is preferable to arrange the container P for the end portion R in this range since the portions fall within a range from the vicinity of the position of the end portion of each portion when the respective portions are inclined to the inclined position. This makes it possible to smoothly and efficiently drop and remove the end material R from the substrate mounting portion 2. [ In addition, since the end material R can be collected at once from the substrate mounting portion 2, the recovery efficiency of the end material R is improved.

In addition, since the substrate mounting portion 2 is divided as described above, the lower space required for tilting each portion by a predetermined angle can be made smaller than when the single substrate mounting portion 2 is tilted . Therefore, it is possible to suppress the enlargement of the substrate carry-out apparatus 1, in particular, the increase in the height direction. In addition, since each part can be rotated largely, the end material R on each part can be smoothly dropped and efficiently removed.

<Modification Example of Embodiment>

7, if step S15 is NO, that is, if all of the divisional elements of the substrate F have been carried out, the process proceeds to step S17, where the stage R is mounted on the substrate mounting section 2). As described above, when a static pressure is applied to the substrate mounting portion 2 on which the substrate F is placed, the substrate F can easily fall off from the substrate mounting portion 2. [ 11, when all of the division elements of the substrate F are carried out in step S15, the control section 40 controls the substrate placement sections 2a and 2b to move, To the pressure applying unit (4). Thereby, the stage R can be easily detached from the substrate mounting portions 2a and 2b. In this state, if the control section 40 tilts the support member 413 downward in step S18, the stage R slides more smoothly along the upper surface of the substrate mounting sections 2a and 2b. Therefore, the stage R can be more efficiently removed from the substrate mounting portions 2a and 2b. Step S18 corresponds to step S17 in Fig. 7 in the embodiment.

11, the substrate R is completely removed from the substrate mounting portions 2a and 2b in Step S18, and then the substrate mounting portions 2a and 2b are again returned to the substrate mounting portions 2a and 2b by the control portion 40 And is positioned in the horizontal position. Step S19 corresponds to step S18 in Fig.

<Other Embodiments>

(1) About division of board mount part

In the above embodiment, the substrate mounting section 2 is divided into two parts. For example, when the size of the substrate mounting section 2 is relatively small, a space is secured in the lower part of the substrate mounting section 2 It is not necessary to divide the substrate mounting section 2. Or if the substrate mounting section 2 is large enough to allow a space that is acceptable when the substrate mounting section 2 is tilted under the substrate mounting section 2, ) Need not be divided.

Further, the substrate mounting portion 2 may be divided into three or more portions, and the driving mechanism 410 may be disposed at each portion. In this case, the number of the driving mechanisms 410 can be arranged according to the size and weight of each part or the substrate F. [ When dividing the substrate mounting portion 2, the ratio can be appropriately changed depending on the size of the substrate mounting portion 2 and the size of the entire substrate carrying-out apparatus 1. [

(2) About the shape of the weight

In the above embodiment, shafts are used for the weights 210 and 220, and the shape of the outer peripheral surface is circular. Here, the weights 210 and 220 may be of any shape as long as the sheet 3 can slide in contact with it, and the shape of the outer peripheral surface is not limited to a circular shape.

Thus, the weights 210 and 220 may be formed such that at least a part of the outer circumferential surface is an outwardly convex curved surface. As such a shape, for example, a portion other than the convex curved surface may be formed in a concave shape or a straight shape. Even if the weights 210 and 220 are formed in this shape, the sheet 3 can slide-contact with the convex curved surface portion.

The embodiments of the present invention can suitably be modified in various ways within the scope of the technical idea shown in the claims.

1 - substrate carrying device 2 - substrate mounting part
2a, 2b - Substrate mounting part 3 - Sheet
4 - Pressure supply 300 -
400 - driving unit 410 - driving mechanism
F - Substrate R - Component

Claims (7)

A substrate mounting section for mounting the substrate,
A driving unit for moving the substrate placing unit between a horizontal position and an inclined position inclined downward from the horizontal position;
And a carry-out section for carrying out the substrate. The method according to claim 1,
Wherein the substrate is divided into a carry-out object and a non-carry-out object,
Further comprising a control section for causing the drive section to tilt the substrate placement section to the inclined position after the carry-out section carries out the carry-out object, and to drop the non-carry-out object from the substrate placement section. Device. The method of claim 2,
Wherein the substrate mounting portion is configured to be capable of applying pressure to a lower surface of the substrate placed on the substrate mounting portion,
Further comprising a pressure applying unit for applying pressure to a bottom surface of the substrate placed on the substrate mounting unit,
Wherein the control unit controls the pressure applying unit to apply a positive pressure to the lower surface of the non-unloading object when the non-unloading object is dropped from the substrate mounting unit. The method according to any one of claims 1 to 3,
Wherein the substrate mounting portion is divided into a plurality of portions in a horizontal direction,
Wherein the driving unit drives the plurality of portions between the horizontal position and the inclined position, respectively. The method according to any one of claims 1 to 3,
Wherein the substrate placing portion is divided into two portions in the horizontal direction. The method of claim 5,
Wherein the drive unit tilts the two portions so that an end of the two portions on the boundary side moves downward and positions the two portions at the inclined position. The method according to any one of claims 1 to 3,
Wherein the driving unit includes a driving mechanism that rotatably supports the substrate mounting portion in the vertical direction and rotates the substrate mounting portion between the horizontal position and the inclined position.

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