KR20180018829A - 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스 - Google Patents

투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스 Download PDF

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Publication number
KR20180018829A
KR20180018829A KR1020187003691A KR20187003691A KR20180018829A KR 20180018829 A KR20180018829 A KR 20180018829A KR 1020187003691 A KR1020187003691 A KR 1020187003691A KR 20187003691 A KR20187003691 A KR 20187003691A KR 20180018829 A KR20180018829 A KR 20180018829A
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South Korea
Prior art keywords
substrate
reference pattern
image
camera
support
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KR1020187003691A
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English (en)
Korean (ko)
Inventor
미쉘 피숑
프랑 다벵느
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쌩-고벵 글래스 프랑스
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Publication of KR20180018829A publication Critical patent/KR20180018829A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020187003691A 2010-04-01 2011-03-28 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스 Ceased KR20180018829A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1052477A FR2958404B1 (fr) 2010-04-01 2010-04-01 Procede et dispositif d'analyse de la qualite optique d'un substrat transparent
FR1052477 2010-04-01
PCT/FR2011/050675 WO2011121219A1 (fr) 2010-04-01 2011-03-28 Procede et dispositif d'analyse de la qualite optique d'un substrat transparent

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020127025532A Division KR20130014528A (ko) 2010-04-01 2011-03-28 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스

Publications (1)

Publication Number Publication Date
KR20180018829A true KR20180018829A (ko) 2018-02-21

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ID=42666144

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187003691A Ceased KR20180018829A (ko) 2010-04-01 2011-03-28 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스
KR1020127025532A Ceased KR20130014528A (ko) 2010-04-01 2011-03-28 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020127025532A Ceased KR20130014528A (ko) 2010-04-01 2011-03-28 투명 기판의 광학 품질을 분석하기 위한 방법 및 디바이스

Country Status (13)

Country Link
US (1) US8736688B2 (https=)
EP (1) EP2553439B1 (https=)
JP (1) JP2013524192A (https=)
KR (2) KR20180018829A (https=)
CN (1) CN103097879B (https=)
BR (1) BR112012023274B1 (https=)
EA (1) EA026441B1 (https=)
ES (1) ES2751989T3 (https=)
FR (1) FR2958404B1 (https=)
MX (1) MX2012010900A (https=)
PL (1) PL2553439T3 (https=)
PT (1) PT2553439T (https=)
WO (1) WO2011121219A1 (https=)

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* Cited by examiner, † Cited by third party
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DE102011109793B4 (de) * 2011-08-08 2014-12-04 Grenzbach Maschinenbau Gmbh Verfahren und Vorrichtung zur sicheren Detektion von Materialfehlern in transparenten Werkstoffen
FR2983583B1 (fr) * 2011-12-02 2013-11-15 Saint Gobain Dispositif d'analyse des defauts d'aspect d'un substrat transparent
US9007454B2 (en) * 2012-10-31 2015-04-14 The Aerospace Corporation Optimized illumination for imaging
CN103454287A (zh) * 2013-09-05 2013-12-18 深圳市维图视技术有限公司 一种玻璃管缺陷视觉检测方法及其装置
CN103472072A (zh) * 2013-09-09 2013-12-25 深圳市维图视技术有限公司 一种新的玻璃管缺陷视觉检测方法及其装置
CN105764860B (zh) 2013-11-25 2019-01-11 康宁股份有限公司 用于确定基本上圆柱形镜面反射表面的形状的方法
NL2014399A (en) * 2014-04-24 2015-11-02 Asml Holding Nv Compact two-sided reticle inspection system.
JP6559225B2 (ja) * 2014-08-08 2019-08-14 ヘレーウス クオーツ ノース アメリカ エルエルシーＨｅｒａｅｕｓ Ｑｕａｒｔｚ Ｎｏｒｔｈ Ａｍｅｒｉｃａ ＬＬＣ 光ファイバ母材の幾何学的特性を求めるための方法及び装置
US20160178535A1 (en) * 2014-12-17 2016-06-23 Xerox Corporation Inspection Device And Method
WO2018133945A1 (en) * 2017-01-20 2018-07-26 Hp Indigo B.V. Identifying linear defects
IT201700075428A1 (it) * 2017-07-05 2019-01-05 Antares Vision S R L Dispositivo di ispezione di contenitori particolarmente per il rilevamento di difetti lineari
KR102358582B1 (ko) * 2017-08-23 2022-02-04 삼성전자 주식회사 휴대 단말의 커버 글래스의 광학적 특성을 확인하는 검사 장치 및 커버 글래의 광학적 특성의 확인 방법
FR3085205B1 (fr) * 2018-08-22 2020-07-24 Livbag Sas Dispositif et methode de controle de verre de protection de soudeuse laser
EP3640630B1 (en) * 2018-10-18 2026-03-11 Infineon Technologies AG Embedded wafer inspection
WO2020187994A1 (en) * 2019-03-19 2020-09-24 Central Glass Co., Ltd. Optical pattern for information acquisition system
CN111107257A (zh) * 2020-01-20 2020-05-05 成都德图福思科技有限公司 针对透明介质表面刻蚀或浮雕图案进行高对比度成像的方法
EP3875893A1 (en) * 2020-03-02 2021-09-08 Trifid Automation, s.r.o. Method and device for contactless measurement of geometric objects
FR3151094B1 (fr) * 2023-07-10 2025-07-18 Sas Woodoo Procede d’evaluation de la clarte d’un materiau, notamment non-homogene

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61176839A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査装置
US5175601A (en) * 1991-10-15 1992-12-29 Electro-Optical Information Systems High-speed 3-D surface measurement surface inspection and reverse-CAD system
JP2795595B2 (ja) * 1992-06-26 1998-09-10 セントラル硝子株式会社 透明板状体の欠点検出方法
JPH10111252A (ja) * 1996-10-02 1998-04-28 Asahi Glass Co Ltd ガラス板の欠点検出装置
US6509967B1 (en) 1996-10-18 2003-01-21 Innomess Gelsellschaft Fur Messtechnik Mbh Method for detecting optical errors in large surface panels
US6208412B1 (en) 1999-06-14 2001-03-27 Visteon Global Technologies, Inc. Method and apparatus for determining optical quality
JP4633245B2 (ja) * 2000-11-06 2011-02-16 住友化学株式会社 表面検査装置及び表面検査方法
DE10301941B4 (de) * 2003-01-20 2005-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kamera und Verfahren zur optischen Aufnahme eines Schirms
KR100615576B1 (ko) * 2003-02-06 2006-08-25 주식회사 고영테크놀러지 3차원형상 측정장치
US7369253B2 (en) * 2004-10-13 2008-05-06 Akrometrix, Llc Systems and methods for measuring sample surface flatness of continuously moving samples
US20060092276A1 (en) * 2004-10-28 2006-05-04 Ariglio James A Inspection system and method for identifying surface and body defects in a glass sheet
FR2898969B1 (fr) * 2006-03-24 2008-10-24 Peugeot Citroen Automobiles Sa Procede et installation de controle de la qualite de pieces
US8736677B2 (en) * 2008-08-07 2014-05-27 Kde Corporation Inspection system
NL2003263A (en) * 2008-08-20 2010-03-10 Asml Holding Nv Particle detection on an object surface.
FR2936605B1 (fr) 2008-10-01 2014-10-31 Saint Gobain Dispositif d'analyse de la surface d'un substrat
CN101592621A (zh) * 2009-05-18 2009-12-02 济南佳美视觉技术有限公司 一种使用折射栅格光源检验玻璃瓶表面缺陷及内部缺陷的自动光学检验设备

Also Published As

Publication number Publication date
BR112012023274B1 (pt) 2020-05-26
WO2011121219A1 (fr) 2011-10-06
PT2553439T (pt) 2019-11-22
US8736688B2 (en) 2014-05-27
EA201290998A1 (ru) 2013-03-29
FR2958404A1 (fr) 2011-10-07
EA026441B1 (ru) 2017-04-28
EP2553439B1 (fr) 2019-08-14
KR20130014528A (ko) 2013-02-07
ES2751989T3 (es) 2020-04-02
US20130010175A1 (en) 2013-01-10
CN103097879A (zh) 2013-05-08
EP2553439A1 (fr) 2013-02-06
FR2958404B1 (fr) 2012-04-27
BR112012023274A2 (pt) 2016-05-17
PL2553439T3 (pl) 2020-02-28
CN103097879B (zh) 2017-01-18
MX2012010900A (es) 2012-11-06
JP2013524192A (ja) 2013-06-17

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