KR20170131518A - Flooding device for a horizontal galvanic or wet-chemical process line for metal deposition on a substrate - Google Patents

Abstract

The present invention relates to a metal in a substrate to be treated, in particular a horizontal galvanic or wet-chemical process line for copper deposition, the flooding device comprising at least a flooding element and at least a first substrate guide element, The element is mechanically connected to at least the first substrate guide element and the first substrate guide element is spatially arranged on the inlet side of the flooding element.
The present invention is further directed to a processing module for metals, particularly horizontal galvanic or wet-chemical process lines for copper deposition, comprising at least a pair of such oppositely arranged flooding devices.

Description

Technical Field [0001] The present invention relates to a horizontal galvanic or wet-chemical process line flooding device for metal deposition on a substrate. BACKGROUND OF THE INVENTION < RTI ID = 0.0 >

The present invention relates to a metal in a substrate to be treated, in particular to a horizontal galvanic or wet-chemical process line flooding device for copper deposition.

The present invention relates to a process module of a horizontal galvanic or wet-chemical process line for metals, especially copper depositions, on the substrate to be further processed.

In industry, the process lines of horizontal galvanic (meaning application of current) or wet-chemical (meaning electroless) for metals, typically copper, tin or nickel deposits, It is already in use.

In the past, the substrates to be processed were relatively thick, rigid and heavy compared to the present. Nowadays, the market is demanding more circuit board area devices and process lines that can also safely handle substrates to be processed much thinner than what has been processed so far as a result of ongoing global technology miniaturization. Simultaneously with the resultant reduced thickness, the weight of each individual substrate to be processed is greatly reduced while the flexibility of the substrate to be processed is greatly increased.

This creates a whole new technical challenge in the transport and processing of substrates to be processed. Market requirements for substrates with thicknesses below 25 micrometers are not affected by thin flexible substrates wrinkled or unwanted between individual transfer rollers or wheel axes below or above the transport level of the transfer or process line And the thin flexible substrates can be transported safely.

Attempts have been made in the past to avoid such misleading guidance of flexible materials and the main approach had to fix the substrate to be processed on each side by clips, hooks or clamps on each side.

However, it is difficult to safely advance such a substrate through the entire process line even when the substrate is completely stretched for the first time. One problem that arises with this approach is that bending of the substrates occurs after a predetermined period of time while the substrate is still being processed through the process line. This results in qualitative metal deposition results and distributions. In the worst case, the bending effect is so strong that the substrate is crumpled between the individual transfer elements.

In view of the prior art, it is therefore an object of the present invention to provide a device which is capable of preventing any damage of the substrates to be thinned during processing and ensuring safe transport.

In particular, it is an object of the present invention to provide a device that is capable of avoiding that thin flexible substrates can generally proceed between separate transfer elements arranged above and below the transfer level of the process line.

Additionally, in particular, it is an object of the present invention to provide a method and apparatus for processing liquids at the most hazardous sites provided to provide the processing liquid in the individual processing modules of such process lines, i.e., around the applied flooding devices, It is possible to avoid moving upward or downward between individual transfer elements immediately after passage.

Additionally, it is an object to provide a device that can be installed in existing process lines without any significant effort or cost.

These objects and further objects which are not explicitly mentioned but can be derived or discerned directly from the connections discussed herein by means of the introduction are achieved by a flooding device having all the features of the first claim. Appropriate modifications to the device of the present invention are protected in the second to eleventh aspects. Additionally, the twelfth claim includes a processing module of a metal, especially a horizontal galvanic or wet-chemical process line for copper deposition, on a substrate to be treated comprising at least a pair of such flooding devices arranged in reverse. Appropriate modifications to the processing module of the present invention are protected in the dependent claims 13 to 15.

The invention thus provides a flooding device for a metal, in particular a horizontal galvanic or wet-chemical process line, for copper deposition on a substrate to be treated, the flooding device comprising at least a flooding element and at least a first substrate guide element, The flooding element is mechanically connected to at least the first substrate guide element and the first substrate guide element is spatially arranged at the inlet side of the flooding element.

It is therefore possible to provide a flooding device that avoids any damage to the substrates to be thinned during processing and ensures safe transport during unpredictable manner.

Additionally, the flooding device of the present invention allows thin flexible substrates to generally avoid progressing between separate transport elements arranged above and below the transport level of the process line.

In addition, the flooding device of the present invention can be used in the most hazardous locations, i.e. around the flooding device itself, to allow flexible, thin substrates to be processed to flow upwardly or downwardly between individual transfer elements immediately after passing through the flooding devices To avoid.

Additionally, the device of the present invention can be readily installed in existing process lines without any significant effort or expense.

BRIEF DESCRIPTION OF THE DRAWINGS For a more complete understanding of the present invention, reference is now made to the following detailed description of the invention, taken in conjunction with the accompanying drawings.

1 shows a schematic side view of a treatment module of the present invention comprising a pair of anti-flooding devices of the present invention arranged according to a first embodiment of the present invention.
FIG. 2 shows a schematic side perspective view of a treatment module of the present invention including a pair of anti-flooding devices of the present invention arranged according to a first embodiment of the present invention shown in FIG.
3 shows a schematic side perspective view of another inventive treatment module comprising a pair of anti-flooding devices of the present invention arranged according to the first embodiment of the present invention shown in Fig.
Fig. 4 shows a schematic plan perspective view of an individual inventive flooding device according to a first embodiment of the invention shown in Fig.
FIG. 5 shows a schematic plan perspective view of the first, second and third substrate guide elements of the inventive flooding device of FIG. 4 according to the first embodiment of the present invention shown in FIG.
Figure 6 shows a schematic side view of a treatment module of the present invention comprising a pair of anti-flooding devices of the present invention arranged according to a second embodiment of the present invention.
Figure 7 illustrates a schematic side view of a processing module of the present invention including a pair of oppositely disposed flooding devices of the present invention arranged according to a second embodiment of the present invention shown in Figure 6;
Fig. 8 shows a schematic plan perspective view of an individual inventive flooding device according to a second embodiment of the invention shown in Fig.
Figure 9 shows a schematic side view of a treatment module of the present invention comprising a pair of oppositely disposed flooding devices according to a third embodiment of the present invention.
10 shows a schematic side perspective view of a processing module of the present invention including a pair of anti-flooding devices of the present invention arranged according to a third embodiment of the invention shown in Fig.
Fig. 11 shows a schematic plan perspective view of an individual inventive flooding device according to a third embodiment of the invention shown in Fig. 9. Fig.

As used herein, the term "flooding device " refers to a device that is required to provide a process liquid into the processing module of a metal, particularly a horizontal galvanic or wet-chemical process line for copper deposition, on the substrate to be treated.

As used herein, the term "substrate guiding element" refers to a substrate that is required to support the transport of a substrate to be processed in a manner that does not proceed between two adjacent, separate transfer elements of the horizontal process line, Lt; / RTI > As a result, such substrate guide elements are provided to avoid damage to the substrates to be processed while passing through the horizontal process line.

As used herein, the term "inlet side" refers to the side of the flooding device of the horizontal process line, and the substrate to be processed is moved in the transport direction of the flooding device in the transport direction before entering the flooding device, ≪ / RTI >

As used herein, the term "outlet side " refers to the side of the flooding device of the horizontal process line, and the substrate to be processed is moved in the transport direction of the flooding device in the transport direction prior to advancing the previously- .

In one embodiment, the flooding device further comprises at least a second substrate guide element, wherein the flooding element is mechanically coupled to at least the second substrate guide element, and the second substrate guide element is spatially .

In one embodiment, the first substrate guide element and the second substrate guide element each comprise a plurality of protrusions, and the protrusions of the first substrate guide element extend axially from the flooding element with respect to the transport direction of the substrates to be processed , The protrusions of the second substrate guide element extend axially from the flooding element in the transport direction of the substrates to be processed.

The plurality of protrusions may extend axially in a strictly linear fashion or may be bent somewhat upwardly to enter the respective flooding device and flooding element or to pass through the flooding element, in particular into the flooding element, by simplifying the substrates to be processed.

Bending down the protrusions is disadvantageous because it increases the risk of entering the flooding element or advancing the flooding element, particularly damaging each substrate to be processed entering the flooding element.

In one embodiment, the plurality of projections of the first substrate guide element have longer axial dimensions relative to the transport direction of the substrate to be processed than the plurality of projections of the second substrate guide element in the transport direction of the substrate to be processed.

In principle, the plurality of protrusions on either side of the flooding element may have the same length or, in other words, the same axial dimension. The provision of the protrusions at the inlet side of the flooding element having longer or longer axial dimensions than the protrusions at the outlet side of the flooding element provides the additional advantage of further limiting the risk of damaging the substrates to be processed. Entry of flooding elements is much more dangerous than advancing flooding elements.

The introduction or advancement of flooding elements in the sense of the present invention, as exemplarily shown in the accompanying Figures 1, 2, 3, 6, 7, 9, and 10, Lt; RTI ID = 0.0 > a < / RTI > substrate to be processed into an area between two separate flooding elements.

In one embodiment, the individual protrusions of each of the plurality of protrusions of the first substrate guide element and the second substrate guide element are connected directly to the flooding element and act independently of the adjacent protrusions.

In yet another embodiment, the first substrate guide element and / or the second substrate guide element each comprise at least one section of at least two adjacent protrusions mechanically connected by at least mechanical connection elements.

Each section of protrusions connected to each side of the flooding element can be tailored to customer requirements such as specific substrate materials, thicknesses, or compositions. Such sections provide the advantage of being more flexible to align the first and / or second substrate guide elements depending on the process line conditions.

In yet another embodiment, all of the projections of the first substrate guide element and / or all of the projections of the second substrate guide element are mechanically connected by at least mechanical connection elements on each side of the flooding element.

As can be seen in some of the drawings (Figs. 2, 3, 4, 5, 7 and 8), such a case may be such that at least one side of the flooding element has a first and / 2 substrate guide element. Thus, the first and / or second substrate guiding elements can be readily adapted to existing flooding elements of already-progressing process lines using wheel axes as transport elements. An expensive change of the transfer system can thereby be avoided. The only requirement is to fit the free space between adjacent protrusions of the first and / or second substrate guide elements with the size of the wheels of the wheel axle. Both the wheel axle and the rollers are well-known discrete transfer elements in the prior art that are generally arranged in the form of a series of transfer elements at least beneath the transfer level of the substrates to be processed. Very often such a series of such upper individual transfer elements are also arranged above the transport level of the substrates to be processed.

In another embodiment of the present invention, the flooding element further comprises at least a third substrate guide element connecting the first substrate guide element from the inlet side of the flooding element and the second substrate guide element at the outlet side of the flooding element, The first, second and third substrate guide elements form an attachment portion that mechanically connects the flooding element to the piece.

This provides the additional advantage that the entire attachment portion of the first, second and third substrate guiding elements can be removed from each of the flooding elements of each processing module of the process line. This allows the entire attachment portion to be easily replaced without requiring the entire flooding device to be disconnected from the process line for maintenance or service reasons. This saves time, money and effort.

In one embodiment, the flooding element comprises at least a first step and a second step on the surface of the flooding element that is directed to the transport path of the substrate to be treated, and the process liquid flows out of the surface of the flooding element.

In one alternative embodiment, the first substrate guiding element and / or the second substrate guiding element is a continuous piece such as a sheet or a plate, and the first substrate guiding element is movable from the flooding element to the axis And the second substrate guide element extends axially from the flooding element in the transport direction of the substrates to be processed.

This provides the advantage that it is independent of the individual transfer elements used in each process line. There is no free space between the two sub-elements that need to be manufactured precisely to fit into the existing transfer elements of each process line. It is therefore inexpensively and quickly possible to generate at least a minimum substrate guidance which can minimize the risk of damaging the substrates to be processed while entering or advancing into each flooding element.

It is also preferred herein that the first substrate guiding element has longer axial dimensions relative to the transport direction of the substrate to be processed than the second substrate guiding element in the transport direction of the substrate to be processed.

Further, the invention also relates to a process module of a horizontal galvanic or wet-chemical process line for metals, in particular for copper deposition, on the substrate to be treated, At least one pair of flooding devices, each flooding device comprising at least a flooding element and at least a first substrate guide element, wherein the flooding element is mechanically coupled to at least a first substrate guide element, Are spatially arranged on the inlet side of the flooding element.

Such a pair of flooding devices thereby results in a defined flow of the processing liquid entering each processing module. This flow of treatment liquid can cause problems if the substrate to be treated is thin and flexible. In such a case, the substrates to be processed in general will advance to the desired transport level by going through the first transport elements that are affected by the generated process liquid flow and are in front of or behind each respective flooding device. This problem in the prior art can be solved by the processing module.

All the changes, modifications and embodiments described above for the flooding device of the present invention can be included in such a processing module of the present invention.

In one embodiment, each flooding element includes at least a first step and a second step on a flooding element surface that is directed to a transport path of the substrate to be processed, and the process liquid flows out of the flooding element surface.

This provides the additional advantage that there are two steps that increase in the transport direction in the cross-section of the area between the two oppositely disposed flooding elements. In the present application, the well known venturi effect will be generated and the speed of the treatment liquid will be reduced, which will positively affect the transport stability of the thin flexible substrates to be processed while advancing the respective regions between the two flooding elements will be.

In one embodiment, each of the flooding devices further comprises at least a second substrate guide element, wherein the flooding element is mechanically coupled to at least the second substrate guide element, and the second substrate guide element is located on the exit side of the flooding element Wherein each of the flooding elements further comprises at least a third substrate guide element connecting the first substrate guide element from the inlet side of the flooding element and the second substrate guide element at the outlet side of the flooding element, The second and third substrate guide elements form an attachment portion that is mechanically connected to the flooding element as a piece.

In one embodiment, the first substrate guiding element and the second substrate guiding element each comprise a plurality of protrusions, and the protrusions of the first substrate guiding element are axially spaced from the respective flooding elements with respect to the transport direction of the substrates to be processed And the protrusions of the second substrate guide element extend axially from the respective flooding elements in the transport direction of the substrates to be processed; All projections of the first substrate guiding element and / or all projections of the second substrate guiding element are mechanically connected at least on each side of the flooding element by a mechanical connecting element.

The present invention thus solves the problem of transferring thin (up to 25 micrometers) and flexible substrates to be processed through a horizontal process line without damaging the substrate to be processed. Particularly generally around the most dangerous sites, i.e. around the applied flooding devices, flexible thin substrates to be processed can no longer flow upward or downward between individual transport elements immediately after passing through the flooding devices.

The substrate guide elements of the present invention can also be attached to less hazardous sites of horizontal galvanic or wet-chemical process lines for metal. For example, substrate guide elements can be attached to ultrasonic devices included in corresponding process lines.

The following non-limiting examples are provided to facilitate understanding of the invention and to illustrate embodiments of the invention, but are not intended to limit the scope of the invention as defined by the appended claims.

The first embodiment is shown in the following Figs. 1-5.

Turning now to the drawings, FIG. 1 shows a schematic side view of a treatment module 1 of the present invention of a metal, in particular a horizontal galvanic or wet-chemical process line for copper deposition, on a substrate to be treated, The module 1 comprises a pair of such anti-flooding devices of the present invention arranged in an inverse manner according to the first embodiment of the present invention.

In the present application, each of the two illustrated flooding devices comprises a flooding element 2 and a first substrate guide element 5, the flooding element 2 being mechanically connected to the first substrate guide element 5 , The first substrate guiding element (5) is spatially arranged on the inlet side (8) of the flooding element (2).

Each of the illustrated flooding devices further comprises a second substrate guide element 6, the flooding element 2 being mechanically connected to the second substrate guide element 6 and the second substrate guide element 6 being flooded Are arranged spatially on the outlet side (9) of the element (2).

Further, the first substrate guiding element 5 and the second substrate guiding element 6 each comprise a plurality of protrusions, and the protrusions of the first substrate guiding element 5 are arranged in the direction of transport of the substrates to be processed, (2). The protrusions of the second substrate guiding element 6 extend axially from the flooding element 2 in the transport direction of the substrates to be processed.

In this first preferred embodiment, the plurality of projections of the first substrate guide element 5 are arranged in a direction of conveyance of the substrate to be processed with respect to the conveying direction of the substrate to be processed than the projections of the plurality of second substrate guide elements 6 And have longer axial dimensions.

In this application, the respective protrusions of each of the plurality of protrusions of the second substrate guiding element 6 are connected directly to the flooding element 2 and act independently from the adjacent protrusions.

Each of the flooding elements 2 shown in Figure 1 extends from the inlet side 8 of the flooding element 2 to the second substrate guide element 6 of the outlet side 9 of the flooding element 2, Wherein the first substrate guide element (5), the second substrate guide element (6), and the third substrate guide element (4) further comprise a third substrate guide element (4) To form an attachment portion mechanically connected to the flooding element (2).

The flooding element 2 comprises a first level difference 7a and a second level difference 7b at the surface of the flooding element 2 which is directed to the transport path of the substrate to be treated and the process liquid comprises the flooding element 2 ) Surface.

To better illustrate the entire processing module 1, a pair of conveying elements 3 arranged reversely at the inlet side 8 and the outlet side 9 of the processing module 1 are shown. As can be easily derived from the following Figures 2 and 3, the transfer elements 3 of the first preferred embodiment are wheel axles.

FIG. 2 shows a schematic side perspective view of a treatment module of the present invention including a pair of anti-flooding devices of the present invention arranged according to a first embodiment of the present invention shown in FIG.

Hereinafter, in this first embodiment of the present invention, all the protrusions of the first substrate guiding element 5 are mechanically connected at least at the inlet side 8 of the flooding element 2 by the mechanical connecting element 11 Can be easily understood.

In addition, a fastening element 10 is shown, the fastening element 10 having a first substrate guiding element 5, a second substrate guiding element 6, and a third substrate guiding element 6 on each of the flooding elements 2, Is provided for releasably connecting an attachment portion comprising the element (4). Such an attachment portion can also be used as a reinforcement to provide increased overall rigidity of the flooding device if the flooding element is made of a polymeric material such as polypropylene, polyvinyl chloride or polyethylene. In such cases, the attachment portion is made of metal or metal alloys such as stainless steel, titanium, or nickel alloys. Such a combination of the plastic flooding element 2 and the metal attachment portion is particularly advantageous when cleaning the modules of the horizontal process line.

For a better example, a series of transfer elements 3 on top of each other in the form of wheel axles on both sides 8, 9 of each flooding device are not shown.

Figure 3 shows another schematic side view of the treatment module of the present invention comprising a pair of anti-flooding devices of the present invention arranged according to the first embodiment of the present invention shown in Figure 1 of the present invention. Fig. 3 is basically the same as Fig. 2 except for the fact that all the transfer elements 3 are now shown here from now on.

Fig. 4 shows a schematic plan perspective view of an individual inventive flooding device according to a first embodiment of the invention shown in Fig.

Both FIGS. 4 and 5 are provided for individual illustration of a single attachment portion comprising a first substrate guide element 5, a second substrate guide element 6, and a third substrate guide element 4. In Fig. 4, each flooding element 2 is included, while in Fig. 5 the flooding element 2 is removed for illustration.

The second embodiment is shown in Figs. 6 to 8 below.

Figure 6 shows a schematic side view of the inventive treatment module 1 'of a horizontal galvanic or wet-chemical process line for metals, in particular for copper deposition, on the substrate to be treated, and the treatment module 1' Lt; RTI ID = 0.0 > of the < / RTI > invention according to the second embodiment of Figs.

In the present application, each of the two illustrated flooding devices comprises a flooding element 2 'and a first substrate guide element 5', the flooding element 2 'being connected to a first substrate guide element 5' And the first substrate guide element 5 'is spatially arranged on the inlet side 8' of the flooding element 2 '.

Each of the illustrated flooding devices further comprises a second substrate guiding element 6 ', the flooding element 2' being mechanically connected to the second substrate guiding element 6 'and the second substrate guiding element 6' 'Are spatially arranged on the outlet side 9' of the flooding element 2 '.

In addition, the first substrate guide element 5 'and the second substrate guide element 6' each include a plurality of protrusions, and the protrusions of the first substrate guide element 5 ' Extending axially from the flooding element 2 '. The protrusions of the second substrate guiding element 6 'extend axially from the flooding element 2' in the transport direction of the substrates to be processed.

For a better example of the entire processing module 1 ', transport elements 3' arranged reversely at the inlet side 8 'and the outlet side 9' of the processing module 1 'are shown. As can be easily deduced from the following FIG. 7, the transport elements 3 'of the second preferred embodiment are wheel axles.

In contrast to the embodiment shown in Figs. 1 to 5, there is no attachment portion that can be used or replaced as a reinforcement. Thus, if the processing module 1 'requires application of a higher temperature inside each processing module 1' or requires application of intense or oxidizing chemicals such as permanganate, this second embodiment Is preferably used. In such cases, the entire flooding device will be made of metal, preferably stainless steel, on the one hand to provide good chemical resistance of the material of the flooding device and on the other hand to provide sufficient mechanical stiffness to avoid material twists. Such twists occur particularly when the flooding devices made of plastic materials are used at higher process liquid temperatures.

Figure 7 shows a schematic side perspective view of a treatment module 1 'of the present invention comprising a pair of anti-flooding devices of the present invention arranged according to a second embodiment of the invention shown in Figure 6 of the present invention.

All protrusions of the first substrate guiding element 5 'and all protrusions of the second substrate guiding element 6' are fixed by a mechanical connecting element 11 'at each side of the flooding element 2' It is mechanically connected.

Fig. 8 shows a schematic plan perspective view of an individual inventive flooding device according to a second embodiment of the invention shown in Fig.

For a better example, a series of transfer elements 3 'on top of each other in the form of wheel axles on both sides 8', 9 'of each flooding device are not shown.

The third embodiment is shown in Figs. 9 to 11 below.

Figure 9 shows a schematic side view of the inventive treatment module 1 "of a horizontal galvanic or wet-chemical process line for metals, in particular for copper deposition, on the substrate to be treated, Lt; RTI ID = 0.0 > of the < / RTI > invention according to the third embodiment of Figs.

In the present application, each of the two illustrated flooding devices includes a flooding element 2 "and a first substrate guide element 5 ", the flooding element 2" And the first substrate guide element 5 "is spatially arranged on the inlet side 8" of the flooding element 2 ".

Each of the illustrated flooding devices further comprises a second substrate guide element 6 ", the flooding element 2 "being mechanically connected to the second substrate guide element 6 ", and the second substrate guide element 6 &Quot;) is spatially arranged on the outlet side 9 "of the flooding element 2 ".

Further, the first substrate guide element 5 "and the second substrate guide element 6" each include a plurality of protrusions, and the protrusions of the first substrate guide element 5 " Extends axially from the flooding element 2 ". The protrusions of the second substrate guiding element 6 "extend axially from the flooding element 2" in the transport direction of the substrates to be processed.

Herein, the flooding element 2 "includes a first step 7a 'and a second step 7b' at the surface of the flooding element 2" directed to the transport path of the substrate to be processed, Flows out of the surface of the flooding element 2 ".

A pair of transfer elements 3 "arranged opposite to the inlet side 8" and the outlet side 9 "of the processing module 1" are shown for a better illustration of the entire processing module 1 " . As can be easily derived from the following Fig. 10, the transfer elements 3 "of the first preferred embodiment are rollers, each roller comprising a plurality of recesses 13. Fig. The recesses minimize the amount of process liquid that can flow upwardly or downwardly (depending on whether the recesses, rollers with recesses, and corresponding protrusions are arranged above or below the transport level of the substrates to be processed) To be associated with corresponding protrusions.

Here, the flooding device provides a reinforcement element 12 for the flooding element 2 ", which may be necessary to increase the stiffness if the flooding element 2 "is made of plastics. The dam roller 14 is also shown for illustrative purposes.

10 shows a schematic side perspective view of a processing module of the present invention including a pair of anti-flooding devices of the present invention arranged according to a third embodiment of the invention shown in Fig.

In the present application, the individual protrusions of each of the plurality of protrusions of the first substrate guide element 5 '' and the second substrate guide element 6 '' are connected directly to the flooding element 2 '' and act independently from adjacent protrusions Can be derived from FIG.

Fig. 11 shows a schematic plan perspective view of an individual inventive flooding device according to a third embodiment of the invention shown in Fig. 9. Fig.

While the principles of the invention have been described in connection with certain specific embodiments thereof and are provided by way of illustration, it will be understood by those skilled in the art that various changes may be made therein without departing from the spirit and scope of the invention. It is, therefore, to be understood that the invention disclosed herein is intended to cover such modifications as fall within the scope of the appended claims. The scope of the invention is limited only by the scope of the appended claims.

1, 1 ', 1 "processing module
2, 2 ', 2 "flooding element
3, 3 ', 3 "transfer elements
4 Third substrate guide element
5, 5 ', 5 "first substrate guide element
6, 6 ', 6 "second substrate guide elements
7a, 7a 'the first step of the flooding element
7b, 7b 'The second step of the flooding element
8, 8 ", 8 "flooding elements on the inlet side
9, 9 ', 9 "outlet side of the flooding element
10 fastening elements
11, 11 'Mechanical connection elements
12 Reinforcement elements
13 recess
14 Dam roller

Claims (15)

As a flooding device for metals in substrates to be treated, particularly for horizontal galvanic or wet-chemical process lines for copper deposition,
The flooding device includes at least a flooding element (2, 2 ', 2 ") and at least a first substrate guide element (5, 5', 5"
The flooding element (2, 2 ', 2 ") is mechanically connected to at least the first substrate guiding element (5, 5', 5"
The first substrate guiding element 5, 5 ', 5 "may be a horizontal galvanic or wet-laid, - Flooding devices for chemical process lines. The method according to claim 1,
Wherein the flooding device further comprises at least a second substrate guide element (6, 6 ', 6 "),
The flooding element (2, 2 ', 2 ") is mechanically connected to at least the second substrate guiding element (6, 6', 6"
The second substrate guiding element 6, 6 ', 6 "is a horizontal galvanic or wet-laid flat plate, spatially arranged on the outlet side 9, 9', 9" of the flooding element 2, 2 ' - Flooding devices for chemical process lines. 3. The method according to claim 1 or 2,
Wherein the first substrate guide element (5,5 ', 5 ") and the second substrate guide element (6,6', 6") each comprise a plurality of protrusions,
The protrusions of the first substrate guiding element (5, 5 ', 5 ") extend axially from the flooding element (2, 2', 2") with respect to the transport direction of the substrates to be processed,
The protrusions of the second substrate guiding element (6, 6 ', 6 ") are arranged in a horizontal galvanic or wet-slab manner extending axially from the flooding element (2, 2', 2" Flooding devices for chemical process lines. The method of claim 3,
Wherein a plurality of said protrusions of said first substrate guiding element (5, 5 ', 5'') are arranged in a direction of conveyance of a substrate to be processed from a plurality of said protrusions of said second substrate guiding element (6, 6' A flooding device for a horizontal galvanic or wet-chemical process line, having longer axial dimensions with respect to the direction of transport of the substrate to be processed. The method according to claim 3 or 4,
Wherein the respective protrusions of each of the plurality of protrusions of the first substrate guiding element 5, 5 ', 5 "and the second substrate guiding element 6, 6', 6" , 2 ") and acts independently of adjacent protrusions. The method according to claim 3 or 4,
Characterized in that the first substrate guiding element (5, 5 ') and / or the second substrate guiding element (6, 6') comprise at least two of at least two adjacent protrusions mechanically connected by a mechanical connecting element (11, 11 ' A flooding device for a horizontal galvanic or wet-chemical process line, each comprising one section. The method according to claim 3 or 4,
All protrusions of the first substrate guiding element 5, 5 'and / or all of the protrusions of the second substrate guiding element 6, 6' are arranged at least on each side of the flooding element 2, 2 ' A flooding device for a horizontal galvanic or wet-chemical process line, which is mechanically connected by a mechanical connection element (11, 11 '). 8. The method according to any one of claims 2 to 7,
Characterized in that the flooding element (2) is arranged between the second substrate guide element (6) on the outlet side (9) of the flooding element (2) and the first substrate guide Further comprising at least a third substrate guiding element (4) connecting the element (5)
The first substrate guiding element (5), the second substrate guiding element (6) and the third substrate guiding element (4) are in the form of a horizontal A flooding device for a galvanic or wet-chemical process line. 9. The method according to any one of claims 1 to 8,
The flooding element 2, 2 '' comprises at least a first step 7a, 7a 'and a second step 7b, 7b' on the surface of the flooding element 2, 2 " Including,
Wherein the process liquid flows out of the surface of the flooding element 2, 2 ". 5. A flooding device for a horizontal galvanic or wet-chemical process line. 3. The method according to claim 1 or 2,
The first substrate guiding element 5, 5 ', 5 "and / or the second substrate guiding element 6, 6', 6" are continuous pieces such as sheets or plates,
The first substrate guiding element 5, 5 ', 5 "extends axially from the flooding element 2, 2', 2" with respect to the transport direction of the substrates to be processed,
The second substrate guiding element (6, 6 ', 6'') extends axially from the flooding element (2, 2', 2 ") in the transport direction of the substrates to be processed, Lt; / RTI > 11. The method of claim 10,
The first substrate guiding element 5, 5 ', 5 "has a longer axis 5 with respect to the transport direction of the substrate to be processed than the second substrate guiding element 6, 6', 6"≪ / RTI > wherein the horizontal galvanic or wet-chemical process line has a lateral dimension. Process modules (1, 1 ', 1 ") of metals in the substrate to be treated, in particular horizontal galvanic or wet-chemical process lines for copper deposition,
Wherein the processing module (1, 1 ', 1 ") comprises at least a pair of oppositely arranged flooding devices according to any one of claims 1 to 11,
Each flooding device comprising at least a flooding element 2, 2 ', 2 "and at least a first substrate guide element 5, 5', 5"
The flooding element (2, 2 ', 2 ") is mechanically connected to at least the first substrate guiding element (5, 5', 5"
Wherein the first substrate guiding element (5,5 ', 5 ") is spatially arranged on the inlet side (8,8', 8") of the flooding element (2, 2 ', 2 " 1, 1 ', 1 "). 13. The method of claim 12,
Each flooding element 2, 2 "has at least a first step 7a, 7a 'and a second step 7b, 7b' on the surface of the flooding element 2, 2"Lt; / RTI >
Wherein the process liquid flows out of the surface of the flooding element (2, 2 "). The method according to claim 12 or 13,
Each flooding device further comprising at least a second substrate guide element (6)
The flooding element (2) is mechanically connected to at least the second substrate guiding element (6)
The second substrate guide element (6) is spatially arranged on the outlet side (9) of the flooding element (2)
Characterized in that each flooding element (2) is connected to the second substrate guide element (6) on the outlet side (9) of the flooding element (2) and from the inlet side (8) Further comprising at least a third substrate guiding element (4) connecting the guiding element (5)
Wherein the first substrate guiding element (5), the second substrate guiding element (6) and the third substrate guiding element (4) form a mounting portion mechanically connected to the flooding element (2) Module (1). 15. The method according to any one of claims 12 to 14,
, Wherein the first substrate guide element (5, 5 ') and the second substrate guide element (6, 6') each comprise a plurality of protrusions,
The protrusions of the first substrate guiding element (5, 5 ') extend axially from each flooding element (2, 2') with respect to the transport direction of the substrates to be processed,
The protrusions of the second substrate guiding element (6, 6 ') extend axially from each flooding element (2, 2') in the transport direction of the substrates to be processed,
All protrusions of the first substrate guiding element 5, 5 'and / or all of the protrusions of the second substrate guiding element 6, 6' are arranged at least on each side of the flooding element 2, 2 ' (1, 1 ') mechanically connected by a mechanical connection element (11, 11').

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