KR20170048969A - 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치 - Google Patents

다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치 Download PDF

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Publication number
KR20170048969A
KR20170048969A KR1020150149730A KR20150149730A KR20170048969A KR 20170048969 A KR20170048969 A KR 20170048969A KR 1020150149730 A KR1020150149730 A KR 1020150149730A KR 20150149730 A KR20150149730 A KR 20150149730A KR 20170048969 A KR20170048969 A KR 20170048969A
Authority
KR
South Korea
Prior art keywords
laser beam
laser
light
stage
processed
Prior art date
Application number
KR1020150149730A
Other languages
English (en)
Korean (ko)
Inventor
박정래
이홍
Original Assignee
주식회사 이오테크닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이오테크닉스 filed Critical 주식회사 이오테크닉스
Priority to KR1020150149730A priority Critical patent/KR20170048969A/ko
Priority to PCT/KR2016/010232 priority patent/WO2017073907A1/ko
Priority to TW105130261A priority patent/TW201714694A/zh
Publication of KR20170048969A publication Critical patent/KR20170048969A/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020150149730A 2015-10-27 2015-10-27 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치 KR20170048969A (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020150149730A KR20170048969A (ko) 2015-10-27 2015-10-27 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치
PCT/KR2016/010232 WO2017073907A1 (ko) 2015-10-27 2016-09-12 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치
TW105130261A TW201714694A (zh) 2015-10-27 2016-09-20 雷射處理方法及使用多重聚焦的雷射處理裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150149730A KR20170048969A (ko) 2015-10-27 2015-10-27 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치

Publications (1)

Publication Number Publication Date
KR20170048969A true KR20170048969A (ko) 2017-05-10

Family

ID=58630494

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150149730A KR20170048969A (ko) 2015-10-27 2015-10-27 다중 초점을 이용한 레이저 가공방법 및 레이저 가공장치

Country Status (3)

Country Link
KR (1) KR20170048969A (zh)
TW (1) TW201714694A (zh)
WO (1) WO2017073907A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210123634A (ko) * 2020-04-03 2021-10-14 한국기계연구원 배터리용 유연 기판의 절단 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021108509A1 (de) 2021-02-02 2022-08-04 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zur Laserbearbeitung eines Werkstücks
DE102021108505A1 (de) 2021-02-02 2022-08-04 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zur Laserbearbeitung eines Werkstücks
DE102022204688B3 (de) 2022-05-13 2023-09-07 Carl Zeiss Smt Gmbh Vorrichtung zum Fokussieren eines Photonenstrahls in ein Material, entsprechendes Verfahren und Computerprogramm
DE102022204685B3 (de) 2022-05-13 2023-10-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Optik zur Erzeugung eines linearen Fokus, Vorrichtung und Verfahren zur Bearbeitung eines Werkstücks

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2798223B2 (ja) * 1991-05-22 1998-09-17 松下電工株式会社 レーザ切断方法
JP2000005892A (ja) * 1998-06-25 2000-01-11 Advanced Materials Processing Inst Kinki Japan レーザ加工方法
KR100824962B1 (ko) * 2006-10-25 2008-04-28 주식회사 코윈디에스티 극초단파 레이저를 이용한 기판의 절단 장치 및 방법
KR101217698B1 (ko) * 2010-08-16 2013-01-02 주식회사 이오테크닉스 순차적 멀티 포커싱을 이용한 레이저 가공방법 및 레이저 가공장치
KR101232008B1 (ko) * 2010-11-29 2013-02-08 한국과학기술원 깊이에 따른 개질면의 특성 조합을 통한 절단 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210123634A (ko) * 2020-04-03 2021-10-14 한국기계연구원 배터리용 유연 기판의 절단 장치

Also Published As

Publication number Publication date
WO2017073907A1 (ko) 2017-05-04
TW201714694A (zh) 2017-05-01

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