KR20160038766A - Plate type member suction apparatus - Google Patents
Plate type member suction apparatus Download PDFInfo
- Publication number
- KR20160038766A KR20160038766A KR1020150133750A KR20150133750A KR20160038766A KR 20160038766 A KR20160038766 A KR 20160038766A KR 1020150133750 A KR1020150133750 A KR 1020150133750A KR 20150133750 A KR20150133750 A KR 20150133750A KR 20160038766 A KR20160038766 A KR 20160038766A
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- South Korea
- Prior art keywords
- suction
- plate
- facing
- base plate
- hole
- Prior art date
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
- H05K13/0069—Holders for printed circuit boards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
- B23Q3/08—Work-clamping means other than mechanically-actuated
- B23Q3/088—Work-clamping means other than mechanically-actuated using vacuum means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Handling Of Sheets (AREA)
- Jigs For Machine Tools (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
The object of the present invention is to form a suction region corresponding to the size of the flat plate member by a simple operation without making the entire structure of the flat plate member suction apparatus large scale.
A base plate side suction hole 211 is formed in the base plate 210 and a member side face plate 220 Face plate side suction hole 221 is formed and the member face plate side suction hole 221 is formed by additional suction holes 221b and 221c formed between the reference suction hole 221a and the reference suction hole The reference suction area 221a and the base plate side suction hole 211 are opposed to each other to form the reference suction area. When the slide plate is set to the slide position, for example, A specific suction region having a size different from that of the reference suction region is formed so that the suction hole 221b and the suction hole 211 on the base plate side face each other.
Description
The present invention relates to a plate-shaped member suction device for sucking a plate-shaped member under negative pressure.
2. Description of the Related Art Conventionally, a flat plate member such as a circuit board (hereinafter referred to as a substrate) and a coverlay film for covering an electronic component mounted on the substrate is subjected to some processing or the flat plate member is returned to the next step (Hereinafter, referred to as a flat-plate-like member suction device) for temporarily holding the flat plate-like member at the time when the flat plate-shaped member is suctioned is variously proposed.
Such a flat plate-like member suction device is a device in which a suction plate having a plurality of suction holes formed thereon is brought into contact with a flat plate-like member to be sucked, and the flat plate member is sucked under negative pressure. At this time, in order to prevent the suction force from being lowered, it is important to reduce the suction leakage as much as possible. The term " suction leakage " refers to a state in which a part of the suction holes of the plurality of suction holes is exposed from the flat plate-like member when the suction operation of the flat plate-like member is performed.
In order to reduce the suction leakage as much as possible, it is important to set the suction area on the suction plate to be substantially equal to or slightly smaller than the size of the plate-like member when facing the plate-like member to the suction plate. Here, the " suction region " refers to a region in the suction hole formed in the suction plate, in which the flat plate member to be sucked can be sucked. Further, the suction region can be formed in various shapes, but here, the shape is rectangular.
Here, if the size of the flat plate member to be sucked is one, if the suction region is set to be substantially equal to or slightly smaller than the size of the flat plate member, It may be desired to perform suction of the flat plate member having a size smaller than the size of the suction region. In such a case, if the size of the suction region is fixed, the flat plate member having a size smaller than the size of the suction region can not cover the entire suction region, and suction leakage occurs.
As described above, a plate-shaped member suction device capable of suctioning a flat plate member having a size smaller than the size of the suction region of the suction plate in the flat plate-like member suction device without causing suction leakage has been conventionally known For example, see Patent Document 1).
Fig. 11 is a view for explaining the plate-like
Before describing the configuration of the flat plate-
As shown in Fig. 11B, the strip-
11A, the plate-shaped
A plurality of suction holes (not shown) are formed in the
According to the flat plate
However, in the flat plate shaped
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a flat plate shaped aspirator which can form a suction region corresponding to the size of a flat plate member to be sucked, And it is an object of the present invention to provide a suction device.
[1] A plate-shaped member suction apparatus according to the present invention is a plate-like member suction apparatus for suctioning a flat plate member by negative pressure, comprising: a base plate provided in a suction device body forming a negative pressure chamber; And a member-facing plate which is stacked on the base plate in a state of being in a planar close state and is capable of making a reference position and a slide position slidable from the reference position with respect to the base plate, Wherein a plurality of suction holes are formed in the member facing plate as suction holes on the member facing plate side and the suction holes on the base plate are formed in a predetermined arrangement on the base plate, Member facing plate side Wherein the plurality of reference suction holes are formed so as to face all the suction holes of the base plate side suction holes or the base plate side suction holes when the member face plate is in the reference position, And a further suction hole formed between a reference suction hole adjacent to the member-facing plate in the predetermined area of the member-facing plate along the sliding direction of the member-facing plate, and when the member-facing plate is at the reference position, The reference suction region is formed in the member-facing plate by opposing the hole and the suction hole on the base plate formed at the same position as the reference suction hole, and when the member-facing plate is in the slide position, Additional aspiration And a specific suction region having a size different from that of the reference suction region is formed on the member facing plate by opposing the hole and the suction hole on the base plate formed at the same position as the additional suction hole.
According to the flat plate-like member suction device of the present invention, when the member-facing plate is in the reference position and in the slide position, the suction region for allowing the plate member to be sucked is referred to as a reference suction region and the reference suction region has a different size Can be formed. As described above, according to the flat plate member suction apparatus of the present invention, the size of the suction region can be changed by simply changing the position of the member-facing plate relative to the base plate. Thus, the suction region corresponding to the size of the flat plate member to be sucked can be formed by a simple operation without making the entire configuration of the flat plate shaped member suction apparatus large-scale. Specifically, a suction region (specific suction region) smaller than the suction region (reference suction region) originally possessed by the flat plate member suction apparatus of the present invention can be formed. Thus, even when the flat plate member having a size smaller than that of the flat plate member having a size suitable for the suction region (reference suction region) originally possessed by the flat plate member suction apparatus of the present invention is sucked, Suction can be performed without leakage.
When the member-facing plate is moved from the reference position and the reference position to the slide position in which the member-facing plate is slid from the reference position, the position of the base plate may be fixed together with the suction apparatus main body to slide the member- Conversely, the position of the member-facing plate may be fixed and the base plate may be slid together with the suction device body.
[2] In the flat plate-like suction device according to the present invention, when the member-facing plate is at the reference position and when the member-facing plate is at the slide position, the member- Or a position determining section for determining the position of the slide position relative to the slide position.
By having such a positioning portion, the suction holes of the member-facing plate-side suction holes of the member-facing plate and the suction holes of the base plate-side suction holes of the base plate can be accurately confronted with each other and both confronting relationship can be maintained. Thus, even during the suction operation, a proper sucking operation can be performed for a long period of time without collapsing the opposing relationship between the sucking holes of the member-facing plate side suction holes of the member-facing plate and the suction holes of the base plate-
[3] In the flat plate-like member suction device of the present invention, the positioning portion may include: a base plate side positioning hole formed to penetrate the base plate; and a positioning hole provided in the member-facing plate, A plurality of member-facing-plate-side positioning holes opposed to the base plate-side positioning holes in each of the reference position and the slide position when in the reference position or the slide position, And a positioning pin insertable into the positioning hole on the side of the member facing plate facing the base plate side positioning hole.
With such a configuration of the positioning portion, the mechanism of the positioning portion can be simplified. The operation for positioning is performed only by a simple operation of inserting the positioning pin into the positioning hole on the base plate side and the positioning hole on the side of the member facing plate side facing the positioning hole on the base plate side And it is possible to perform reliable positioning only by performing such an operation.
[4] In the flat plate member suction device of the present invention, the positioning portion may include a driving device for sliding the member-facing plate and a control device for controlling the driving device, It is also preferable that the member-facing plate is positioned at the reference position or the slide position by controlling the apparatus.
With such a configuration of the positioning portion, the positioning of the member-facing plate can be automatically performed. For example, by operating the selection button for selecting the slide position, the operator can automatically set the slide position to the predetermined slide position or the slide position to the reference position. As the driving device, for example, a driving device having a motor and an actuator can be exemplified. When such a positioning unit is constituted, the size of the flat plate member to be sucked is recognized based on the image data of the image of the flat plate member to be sucked, using image processing technology, and based on the recognition result, It is possible to automatically control the member-facing plate to be in a predetermined position.
[5] In the plate-shaped member suction device of the present invention, there is a region where the additional suction holes formed between the adjacent reference suction holes are formed in n (n is an integer of 2 or more) And the n additional suction holes are sequentially arranged from the first-stage additional suction hole to the n-th additional suction hole along the sliding direction, the slide position is set to n Wherein the n additional suction holes are sequentially opposed to the suction holes on the base plate side of the base plate for each of the slide positions of the n stages so that the specific suction region It is preferable that they are formed in different sizes.
Thereby, in the member-facing plate, in addition to the reference suction region formed when the member-facing plate is at the reference position, n kinds of specific suction regions .
[6] In the flat plate member aspirating apparatus of the present invention, the reference suction hole and the additional suction hole may be formed so that, in some of the reference suction region and the specific suction region, Face plate so that the number of the reference suction holes and the number of the additional suction holes is larger than the area other than the partial area.
As described above, in the reference suction region and some of the specific suction regions, the reference suction holes and the additional suction holes of the member-facing plate are formed in a larger number than the regions other than the partial regions, And in a certain region of the specific suction region, more reliable suction can be performed than in a region other than the partial region. By doing so, it is suitable when, for example, a predetermined region of the flat plate-shaped member needs to be sucked more reliably.
[7] In the flat plate-like member suction device of the present invention, it is preferable that the part of the area is an area opposed to a region on one end side of the flat plate member.
As described above, since a part of the area is an area opposed to one end side of the flat plate member, for example, when the peel which is peelably adhered to the sheet is peeled from the sheet, As shown in Fig. That is, when peeling off a film from a film having such a ground, it is important to surely peel off the front end of the film, and for this purpose, it is preferable to more reliably hold the front end region. Therefore, in this case, if the reference suction region or a part of the specific suction region is set so as to face the region on the front end side of the film, peeling of the film can be reliably performed.
[8] In the plate-like member suction device of the present invention, the flat plate member is preferably a sheet-like member.
As described above, since the flat plate member is a sheet-like member, various sizes of films, flexible substrates, and the like can be sucked.
[9] In the plate-shaped member suction apparatus of the present invention, the sheet-like member is preferably a cover-lay film.
As described above, since the sheet-like member is a cover-ray film, it is suitable as a suction device for holding and holding the cover-lay film when peeling the cover-lay film which is peelably adhered to the ground from the ground.
Fig. 1 is a view for explaining the plate-shaped member suction apparatus 10 according to the first embodiment.
2 is a schematic view showing the
3 is a schematic diagram showing a suction region formed in the member-facing
4 is a schematic diagram showing a suction region formed in the member-facing
5 is a schematic diagram showing a suction region formed in the member-facing
Fig. 6 is a schematic diagram for explaining the
7 is a schematic diagram showing a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the reference position Pa.
8 is a schematic diagram showing a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the first slide position Pb.
9 is a schematic diagram showing a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the second slide position Pc.
10 is a view for explaining the
11 is a view for explaining the flat plate-like
Hereinafter, an embodiment of the present invention will be described.
[First Embodiment]
Fig. 1 is a view for explaining the plate-shaped member suction apparatus 10 according to the first embodiment. As shown in Fig. 1, a flat plate suction apparatus 10 according to the first embodiment is provided with a negative pressure chamber (not shown) inside and a suction apparatus body 100 A
The
The
In the plate-like member suction device 10 of the first embodiment, when the member-facing
A plurality of suction holes 211 (see FIG. 2) are formed in a predetermined arrangement on the
Returning to Fig. The member-facing
The operator can perform the operation to slide the
The
The reference position Pa is a position of the
The
The base plate
The member-facing-plate-
Among these member-facing-plate-
The member-facing-plate-side positioning holes 220b among the member-facing-plate-
The member-facing-plate-
The reference
The first slide
The second slide
2 is a schematic view for explaining the
2 (a), the base plate side suction holes 211 (sometimes abbreviated as the base suction holes 211) are formed in the
On the other hand, as shown in FIG. 2 (b), a plurality of member-facing-plate-side suction holes 221 are formed in the member-facing
The member-facing-plate-side suction holes 221 are formed in such a manner that when the member-facing
In the member-facing
Of the two additional suction holes 221b and 221c, the additional suction holes located on the front side in the slide direction (the direction of the arrow y direction) are referred to as " first
The first
As a result, each first
As a result, when the member-facing
Specifically, when the member-facing
The area C1 indicated by the broken line in FIG. 2 (b) is a suction region (not shown) formed in the member-facing
The
The diameter of the
The diameter of the
In the
That is, when the member-facing
As described above, when the member-facing
3 is a schematic diagram showing a suction region formed in the member-facing
3, each of the
As a result, the base suction holes 211 of the
When the member-facing
Thereby, the member-facing
In this state, the reference suction area Aa faces the flat plate member (for example, a cover film) having a size substantially equal to or slightly larger than the reference suction area Aa, The suction leakage from the suction holes of the suction plate 200 (the
4 is a schematic diagram showing a suction region formed in the member-facing
4, when the member-facing
As a result, the first
When the member-facing
Thereby, the member-facing
In this state, in order to face a specific suction region Ab against a flat plate member (for example, a coverlay film) having a size substantially equal to or slightly larger than the specific suction region Ab, The suction leakage from the suction holes of the suction plate 200 (the
5 is a schematic diagram showing a suction region formed in the member-facing
5, when the member-facing
As a result, the second
When the member-facing
Thus, the member-facing
In this state, in order to face the plate-like member (for example, a coverlay film) having a size substantially equal to or slightly larger than the specific suction region Ac, the specific suction region Ac faces the member The suction leakage from the suction holes of the suction plate 200 (the
As described above, according to the flat plate-like member suction device 10 of the first embodiment, the
That is, when the member-facing
In the flat plate shaped suction apparatus 10 according to the first embodiment, when the
When the
When the
When the
As a result, when any one of the suction regions Aa, Ab, and Ac is formed, the opposed relationship between the suction holes facing each other in the suction regions Aa, Ab, and Ac can be maintained. Thus, even when the suction operation is performed, a proper suction operation can be performed for a long period of time without collapsing the opposing relationship between the suction holes 221 of the member-facing
[Second Embodiment]
In the flat plate shaped suction apparatus 10 according to the first embodiment, the suction holes 221 (the
At this time, in each of the suction regions Aa, Ab, and Ac formed in the member-facing
The plate-like
The plate-shaped
6 is a schematic diagram for explaining the
Since the
The flat plate
As shown in FIG. 6B, the member-facing plate 220 'is provided with a suction hole (the
7 is a schematic view for illustrating a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the reference position Pa. Here, it is assumed that the member-facing plate 220 'is positioned at the reference position Pa because the positioning pins 410 are inserted into the reference
7, when the member-facing plate 220 'is at the reference position Pa, the
As a result, the
Here, in a part of the area Sa (the area corresponding to the partial area S0 in Fig. 6 (b)) located at the right end side of the reference suction area Aa shown in Fig. 7, The
On the other hand, in the region other than the partial region Sa in the reference suction region Aa, the
8 is a schematic diagram showing a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the first slide position Pb. Here, it is assumed that the member-facing plate 220 'is positioned at the first slide position Pb by inserting the
8, when the member-facing plate 220 'is at the first slide position Pb, each first
As a result, the first additional suction holes 221b and the base suction holes 211 existing at the same positions as the respective first
Here, in the partial area Sb (hereinafter referred to as the partial area Sb) located on the right end side of the specific suction area Ab shown in Fig. 8, the first additional suction hole The
On the other hand, in the region other than the partial region Sb in the specific suction region Ab, the first
9 is a schematic diagram showing a suction region formed in the member-facing plate 220 'when the member-facing plate 220' is at the second slide position Pc. Here, it is assumed that the member-facing plate 220 'is positioned at the second slide position Pc by inserting the
9, when the member-facing plate 220 'is in the second slide position Pc, the second
As a result, the second additional suction holes 221c and the base suction holes 211 existing at the same positions as the respective second
Here, in a partial area Sc (hereinafter referred to as a partial area Sc) positioned on the right end side of the specific suction area Ac shown in Fig. 9, the second additional suction hole The
On the other hand, in the region other than the partial region Sc in the specific suction region Ac, the second
As described above, in the flat plate
In other words, in each of the partial areas Sa, Sb and Sc, the
Such a flat plate-like member suction device (flat plate
10 is a view for explaining the
A
In addition, the
7 is a schematic view, the
The peeling of the film in the
The partial area Sa in the reference suction area Aa of the
In this state, the
In this case, as shown in Fig. 7, the member-facing
As described above, FIG. 7 is a schematic diagram, so that in the region other than the partial region Sa, the suction holes (
In the flat plate-
The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention. For example, the following modifications are possible.
(1) In each of the above-described embodiments, for the sake of simplicity of the drawings and the description, two additional suction holes (the first additional suction holes 221b and the second
(2) In each of the above embodiments, the area for forming the additional suction hole is limited to the area (for example, the area (C1, C2) in FIG. 2 (b) And the area for forming the additional suction hole can be set as required. Thereby, the suction region formed in the member-facing
Further, in order to enable formation of various suction regions in this way, it is possible to set the number of additional suction holes and the arrangement of additional suction holes in one
(3) In each of the above embodiments, the
For example, although not shown, the
With this arrangement of the
Further, in the positioning unit 400 (positioning unit having a driving device for sliding the member-facing
(4) In each of the above embodiments, the slide direction of the member-facing
(5) In each of the above embodiments, when the member-facing
(6) In each of the above-described embodiments, the base suction holes 211 of the
(7) In each of the above embodiments, the suction holes (the
(8) In each of the above embodiments, the
(9) In each of the above-described embodiments, the flat plate member is a film, and in particular, a cover film is exemplified. However, the present invention is not limited thereto, and if it is a member that can be attracted by the flat plate member suction apparatus of the present invention, For example, a circuit board, a metal plate, or the like.
(10) A film peeling apparatus is exemplified as an example of use of the flat plate member suction apparatus of the present invention (see Fig. 10), but the present invention is not limited thereto. The flat plate member suction apparatus of the present invention is a (For example, an exposure apparatus or the like) which performs a certain process in a state where the process is performed.
A base plate side suction hole (base plate side suction hole, a base plate suction hole, a base plate suction hole, and a base plate side suction hole) 221a: reference suction hole, 221b: first additional suction hole (first-stage suction hole), 221b: second additional suction hole (second-stage suction hole) (Second additional suction hole), 225: grip portion, 400: positioning portion, 410: positioning pin, 500: peeling mechanism portion of the film peeling device, 510 A0: Suction area formed on the
Claims (9)
A base plate provided in a suction device body forming a negative pressure chamber,
Face plate facing the flat plate-like member and stacked in a state of being in a planar close relation to the base plate so that the base plate and the slide plate can slide from the reference position and the reference position,
Wherein a plurality of suction holes are formed in the base plate as the suction holes on the base plate side and a plurality of suction holes are formed in the member face plate as suction holes on the member facing plate side,
The suction holes on the base plate side are formed in a predetermined arrangement on the base plate,
The member-facing-plate-side suction hole
A plurality of reference suction holes formed so as to face predetermined suction holes among all the suction holes of the base plate side suction holes or the base plate side suction holes when the member face plate is in the reference position,
And an additional suction hole formed in a predetermined region of the member-facing plate between adjacent reference suction holes along the sliding direction of the member-facing plate,
When the member-facing plate is in the reference position, the reference suction hole and the base plate-side suction hole formed at the same position as the reference suction hole face each other, so that the reference suction region Formed,
When the member-facing plate is in the slide position, the additional suction hole and the suction hole on the base plate side formed at the same position as the additional suction hole are opposed to each other, A specific suction region having a different size is formed,
(N is an integer of 2 or more) are formed along the slide direction, and the n additional suction holes are formed in order along the slide direction When the additional suction hole in the first stage is replaced with the additional suction hole in the n-th stage,
Wherein the slide position is set in n stages from the first stage to the n-th stage, and each of the n additional suction holes for each of the slide positions of the n stages is successively placed in the suction hole on the base plate side of the base plate Wherein the specific suction region is formed to have a different size for each of the slide positions of the n stages.
A base plate provided in a suction device body forming a negative pressure chamber,
Face plate facing the flat plate-like member and stacked in a state of being in a planar close relation to the base plate so that the base plate and the slide plate can slide from the reference position and the reference position,
Wherein a plurality of suction holes are formed in the base plate as the suction holes on the base plate side and a plurality of suction holes are formed in the member face plate as suction holes on the member facing plate side,
The suction holes on the base plate side are formed in a predetermined arrangement on the base plate,
The member-facing-plate-side suction hole
A plurality of reference suction holes formed so as to face predetermined suction holes among all the suction holes of the base plate side suction holes or the base plate side suction holes when the member face plate is in the reference position,
And an additional suction hole formed in a predetermined region of the member-facing plate between adjacent reference suction holes along the sliding direction of the member-facing plate,
When the member-facing plate is in the reference position, the reference suction hole and the base plate-side suction hole formed at the same position as the reference suction hole face each other, so that the reference suction region Formed,
When the member-facing plate is in the slide position, the additional suction hole and the suction hole on the base plate side formed at the same position as the additional suction hole are opposed to each other, A specific suction region having a different size is formed,
Wherein the reference suction hole and the additional suction hole are formed such that the number of the reference suction hole and the additional suction hole facing the base plate side suction hole in the region of the reference suction region and the specific suction region Face plate is formed on the member-facing plate so as to be larger than an area other than the area of the plate-like member.
A base plate side positioning hole formed to penetrate the base plate,
And a plurality of member-facing plates provided on the member-facing plate and opposed to the base plate-side positioning holes in the reference position and the slide position when the member-facing plate is in the reference position or the slide position, Side positioning hole,
And a positioning pin which can be inserted into the positioning hole on the side of the base plate side and the positioning hole on the side of the base plate facing the base plate side positioning hole.
A driving device for sliding the member-facing plate;
And a control device for controlling the drive device,
Wherein the control device controls the drive device to position the member-facing plate to the reference position or the slide position.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014201448A JP5732583B1 (en) | 2014-09-30 | 2014-09-30 | Flat member suction device |
| JPJP-P-2014-201448 | 2014-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160038766A true KR20160038766A (en) | 2016-04-07 |
| KR101653930B1 KR101653930B1 (en) | 2016-09-02 |
Family
ID=53486878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020150133750A KR101653930B1 (en) | 2014-09-30 | 2015-09-22 | Plate type member suction apparatus |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5732583B1 (en) |
| KR (1) | KR101653930B1 (en) |
| CN (1) | CN105472958B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190005719A (en) * | 2017-07-07 | 2019-01-16 | 토와 가부시기가이샤 | Holding member, method of manufacturing holding member, holding apparatus, conveying apparatus, and manufacturing apparatus of electronic component |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105722328A (en) * | 2016-04-06 | 2016-06-29 | 捷讯精密橡胶（苏州）有限公司 | Automatic laminating machine for improving mylar film and rubber dome process yield |
| CN113453534B (en) * | 2021-07-01 | 2022-01-28 | 哈尔滨学院 | Mounting equipment for flexible electronic device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH11239991A (en) * | 1997-12-22 | 1999-09-07 | Shipley Far East Kk | Object holder and object holding method using it |
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- 2015-09-24 CN CN201510617417.7A patent/CN105472958B/en active Active
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| JPH11239991A (en) * | 1997-12-22 | 1999-09-07 | Shipley Far East Kk | Object holder and object holding method using it |
| JPH11260896A (en) * | 1998-03-13 | 1999-09-24 | Okamoto Machine Tool Works Ltd | Chucking mechanism for wafer |
| JP2004322254A (en) | 2003-04-24 | 2004-11-18 | Fuji Photo Film Co Ltd | Base board sucking-fixing device |
| JP2008117811A (en) * | 2006-10-31 | 2008-05-22 | Sunx Ltd | Vacuum suction table |
| KR20110007337U (en) * | 2010-01-17 | 2011-07-25 | 오르보테크 엘티디. | - vacuum hold-down apparatus |
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| KR20190005719A (en) * | 2017-07-07 | 2019-01-16 | 토와 가부시기가이샤 | Holding member, method of manufacturing holding member, holding apparatus, conveying apparatus, and manufacturing apparatus of electronic component |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5732583B1 (en) | 2015-06-10 |
| JP2016068217A (en) | 2016-05-09 |
| CN105472958A (en) | 2016-04-06 |
| CN105472958B (en) | 2018-05-22 |
| KR101653930B1 (en) | 2016-09-02 |
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