KR20160037961A - 나노구조체의 제조 방법 및 나노구조화 물품 - Google Patents

나노구조체의 제조 방법 및 나노구조화 물품 Download PDF

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Publication number
KR20160037961A
KR20160037961A KR1020167004660A KR20167004660A KR20160037961A KR 20160037961 A KR20160037961 A KR 20160037961A KR 1020167004660 A KR1020167004660 A KR 1020167004660A KR 20167004660 A KR20167004660 A KR 20167004660A KR 20160037961 A KR20160037961 A KR 20160037961A
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KR
South Korea
Prior art keywords
substrate
plasma
nanostructure
article
film
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Ceased
Application number
KR1020167004660A
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English (en)
Korean (ko)
Inventor
모세스 엠 데이비드
타-화 유
다니엘 에스 베이츠
제이쉬리 세쓰
마이클 에스 버거
카르스텐 프랑케
세바스챤 에프 제헨트마이어
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 캄파니
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Priority to KR1020217039500A priority Critical patent/KR20210151999A/ko
Publication of KR20160037961A publication Critical patent/KR20160037961A/ko
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • C09J7/0264—
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
    • C09J2201/606—
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2301/00—Additional features of adhesives in the form of films or foils
    • C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
    • C09J2301/302—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive being pressure-sensitive, i.e. tacky at temperatures inferior to 30°C
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S70/00—Details of absorbing elements
    • F24S70/60—Details of absorbing elements characterised by the structure or construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3321—CVD [Chemical Vapor Deposition]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3341—Reactive etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Laminated Bodies (AREA)
  • Drying Of Semiconductors (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020167004660A 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품 Ceased KR20160037961A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020217039500A KR20210151999A (ko) 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201361858670P 2013-07-26 2013-07-26
US61/858,670 2013-07-26
US201361867733P 2013-08-20 2013-08-20
US61/867,733 2013-08-20
US201462018761P 2014-06-30 2014-06-30
US62/018,761 2014-06-30
PCT/US2014/047782 WO2015013387A1 (en) 2013-07-26 2014-07-23 Method of making a nanostructure and nanostructured articles

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020217039500A Division KR20210151999A (ko) 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품

Publications (1)

Publication Number Publication Date
KR20160037961A true KR20160037961A (ko) 2016-04-06

Family

ID=52393807

Family Applications (2)

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KR1020167004660A Ceased KR20160037961A (ko) 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품
KR1020217039500A Ceased KR20210151999A (ko) 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품

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KR1020217039500A Ceased KR20210151999A (ko) 2013-07-26 2014-07-23 나노구조체의 제조 방법 및 나노구조화 물품

Country Status (8)

Country Link
US (1) US10119190B2 (https=)
EP (1) EP3024777B1 (https=)
JP (1) JP6505693B2 (https=)
KR (2) KR20160037961A (https=)
CN (1) CN105431376B (https=)
BR (1) BR112016001710A2 (https=)
SG (2) SG11201600606TA (https=)
WO (1) WO2015013387A1 (https=)

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CN108136065A (zh) * 2015-06-29 2018-06-08 3M创新有限公司 抗微生物制品及其使用方法
TWI769988B (zh) 2015-10-07 2022-07-11 美商3M新設資產公司 拋光墊與系統及其製造與使用方法
WO2017083482A1 (en) 2015-11-13 2017-05-18 3M Innovative Properties Company Anti-microbial articles and methods of using same
US10617784B2 (en) 2015-11-13 2020-04-14 3M Innovative Properties Company Anti-microbial articles and methods of using same
US20190144726A1 (en) * 2016-05-13 2019-05-16 3M Innovative Properties Company Thermally stable siloxane-based protection film
CN106542494B (zh) * 2016-09-26 2017-12-26 西北工业大学 一种用于制备多层不等高微纳结构的方法
CN106549074A (zh) * 2016-12-08 2017-03-29 上海空间电源研究所 一种用于临近空间环境的薄硅太阳电池组件及其制备方法
US20200094537A1 (en) * 2017-05-10 2020-03-26 3M Innovative Properties Company Fluoropolymer Articles and Related Methods
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WO2020039347A1 (en) 2018-08-23 2020-02-27 3M Innovative Properties Company Photochromic articles
EP3844224A1 (en) 2018-08-31 2021-07-07 3M Innovative Properties Company Articles including nanostructured surfaces and interpenetrating layers, and methods of making same
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DE112019007446T5 (de) * 2019-06-11 2022-03-03 Nalux Co., Ltd. Verfahren zur herstellung eines kunststoffelements, das mit feineroberflächenrauigkeit bereitgestellt ist
CN110329985B (zh) * 2019-06-18 2022-02-15 长沙新材料产业研究院有限公司 一种金刚石表面复杂结构及其制备方法
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EP4284176A1 (en) 2021-01-28 2023-12-06 3M Innovative Properties Company Antimicrobial compositions and articles and related methods
CN114171641B (zh) * 2021-11-30 2024-05-31 北京燕东微电子科技有限公司 氧化钒薄膜的刻蚀方法与半导体器件的制造方法
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Also Published As

Publication number Publication date
EP3024777A1 (en) 2016-06-01
US10119190B2 (en) 2018-11-06
US20170067150A1 (en) 2017-03-09
CN105431376A (zh) 2016-03-23
BR112016001710A2 (pt) 2017-08-01
SG11201600606TA (en) 2016-02-26
SG10201704677QA (en) 2017-07-28
WO2015013387A1 (en) 2015-01-29
CN105431376B (zh) 2018-08-31
KR20210151999A (ko) 2021-12-14
JP6505693B2 (ja) 2019-04-24
EP3024777B1 (en) 2024-05-15
EP3024777A4 (en) 2017-01-11
JP2016532576A (ja) 2016-10-20

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