KR20160011541A - Vacuum evaporator - Google Patents

Abstract

The purpose of an embodiment of the present invention is to provide a vacuum deposition device capable of improving productivity to coat a thin film on a case and a cover window of a mobile device. According to the present invention, the vacuum deposition device comprises: a loading chamber loading a jig on which an object to be coated on a loading rail using a trolley, and forming a space controlled to convert a state of atmospheric pressure into a first vacuum state; a coating chamber connected to the loading chamber by being partitioned by a first gate, coating a deposition source on the object to be coated transferred from the loading chamber, and forming a space controlled to convert the first vacuum state into a second vacuum state of which a vacuum pressure is higher than the first vacuum state; and an unloading chamber connected to the coating chamber by being partitioned by a second gate, unloading the jig on which the object to be coated transferred from the coating chamber from an unloading rail using the trolley, and forming a space controlled to convert the first vacuum state into the state of atmospheric pressure.

Description

[0001] VACUUM EVAPORATOR [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a vacuum evaporation apparatus for performing a thin film coating on a coating material, and more particularly, A lamp reflector), a cosmetic container, and the like.

A metal thin film can be deposited on a plastic injection molding to realize a metal texture in a plastic injection molding forming a mobile device appearance and a reflection metal thin film can be deposited on an injection molding product to impart a reflection function to an automobile interior and exterior injection molding product . In addition, anti-reflection and anti-fingerprint thin films can be deposited to improve visibility and contamination of touch screen and large screen.

In order to produce a metal thin film on a plastic injection molded article and an automobile interior and exterior injection molded component, a coating body is attached to a vertically rotating jig, and the jig is charged into a vacuum chamber to reach a predetermined degree of vacuum ), The coating material is evaporated to deposit a thin film on the coating material, the vacuum is made to stand-by (this is called "vacuum breaking") and the thin film coated product is taken out repeatedly in the vacuum chamber .

At this time, in order to reduce the time for charging the product into the vacuum chamber, the product is taken out and loaded in the vacuum exhausting time by using two doors (referred to as "Two Door system") with a fixture attached to one vacuum chamber.

It takes time for repetitive vacuum evacuation and vacuum evacuation, even though the two-door method, which saves product take-out and loading time, is utilized. Thus, the productivity of the thin film coating per unit time is lowered.

An embodiment of the present invention is to provide a vacuum deposition apparatus for improving productivity in performing thin film coating on various coating materials.

A vacuum deposition apparatus according to an embodiment of the present invention includes a loading chamber for loading a jig on which a coating material is mounted by a bogie onto a loading rail and forming a controlled space from an atmospheric pressure to a first vacuum state, A coating chamber which is partitioned and connected to a first gate and coats an evaporation source on the coating body conveyed in the loading chamber and forms a controlled space in a second vacuum state higher than the first vacuum, A jig mounting a coated body to be transferred in the coating chamber is unloaded from the unloading rail by the bogie, and a space controlled at atmospheric pressure is formed in the first vacuum Lt; / RTI >

Wherein the loading chamber includes a first transport roll for transporting the jig to the coating chamber, the first transport roll comprising: a first drive roll connected to or chained to a drive shaft of the first motor; And a first idle roll disposed on the first check side in parallel with the drive roll.

Wherein the coating chamber includes a second transport roll for transporting the jig transported from the first transport roll to the unloading chamber, wherein the second transport roll is connected to the drive shaft of the second motor, Can be formed as a driving roll.

Wherein the unloading chamber includes a third transport roll for transporting the jig transferred from the second transport roll, and the third transport roll comprises a third drive roll connected to the drive shaft of the third motor, And a third idle roll disposed on the second gate side in parallel with the third drive roll.

The loading chamber may include a first fixing plate mounted with the loading rail, a first guide installed perpendicularly to the first fixing plate, coupled to the vertical bar, And a loading lifting cylinder fixed to the first fixing plate and connected to the first lifting plate.

Wherein the coating chamber includes a second elevation plate, a coating elevating cylinder installed vertically to the second elevating plate and elevating and lowering operation, connected to a shaft supporting portion for supporting a rotation center shaft of the jig, And a stopper lifting cylinder vertically installed on the second fixing plate and lifted and lowered and connected to a stopper supporting the side of the jig.

The jig includes a base plate having a loading / unloading roll to which the loading rail is coupled, a base plate for supporting the rotation center shaft and supported and transported by the first transporting roll and the second transporting roll, And a rotating pinion gear connected to the first ring gear and coupled to the second ring gear and connected to the mounting rod on which the coating material is mounted to rotate, have.

The coating chamber may include a pinion gear and a driving gear mounted on the second fixing plate and coupled to the first ring gear, and a revolving motor connected to the driving gear to revolve the first ring gear.

The unloading chamber includes a first fixed plate mounted with the unloading rail, a first guide installed perpendicularly to the first fixed plate, coupled to the vertical rod, And an unloading lifting cylinder fixed to the first fixing plate and connected to the first lifting plate.

The bogie may include a main body having a wheel, and a guide rail mounted on the main body to load the jig on the loading rail or unload the jig from the unloading rail.

As such, an embodiment of the present invention provides an apparatus and method for providing a loading chamber, a coating chamber, and an unloading chamber in an in-line type, comprising a first chamber, By controlling each chamber at one vacuum to atmospheric pressure, the coating body can be continuously coated in the coating chamber. Therefore, the productivity of coating the coated body can be improved.

1 is a plan view of a vacuum deposition apparatus according to an embodiment of the present invention.
2 is a front view of the vacuum deposition apparatus shown in FIG.
Fig. 3 is a plan view of the bogie loaded with jig.
4 is a side view of the bogie shown in Fig.
FIG. 5 is a detailed view of the first transport roll and the jig engaging portion in the loading chamber shown in FIGS. 1 and 2. FIG.
6 is a detailed view of the second transport roll and the jig coupling in the coating chamber shown in Figs. 1 and 2. Fig.
7 is a perspective view of a resistance heating evaporation source provided in the jig.
Fig. 8 is a plan view of the jig with a coating body mounted thereon.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

FIG. 1 is a plan view of a vacuum deposition apparatus according to an embodiment of the present invention, and FIG. 2 is a front view of the vacuum deposition apparatus shown in FIG. 1 and 2, the vacuum deposition apparatus of an embodiment includes an loading chamber 10, a coating chamber 20, and an unloading chamber 30, which are configured in an inline form and are sequentially disposed .

Fig. 3 is a plan view showing a state where the jig is loaded on the bogie, and Fig. 4 is a side view of the bogie shown in Fig. 3 and 4, the jig 40 on which the coating material T is mounted can be loaded by the carriage 50. As shown in FIG. The jig 40 is configured so as to be able to mount a plurality of small-sized coated bodies T therein.

The loading chamber 10 is located in front of the coating chamber 20 so that the jig 40 is loaded by the carriage 50 and forms a controlled space from the atmospheric pressure to the first vacuum state. Accordingly, the loading chamber 10 can form an atmosphere similar to an atmosphere for coating the evaporation source in the coating chamber 20, that is, a lower vacuum than the coating chamber 20. [

The coating chamber 20 coats an evaporation source on the coating material T transferred from the loading chamber 10 and forms a controlled space in the second vacuum state higher than the first vacuum for this purpose. In fact, the coated body T is coated with an evaporation source which is evaporated in the second vacuum state of the coating chamber 20. [

For example, the evaporation source includes Al or Ni which can be used as a metal coating for coating organic compounds and cases that can be used as antifinger coatings for fingerprint protection of windows in mobile devices and mobile phones.

The unloading chamber 30 is configured such that the jig 40 carrying the coated material T transported in the coating chamber 20 is unloaded by the carriage 50 and is controlled to be atmospheric pressure in the first vacuum And is located behind the coating chamber 20 to form a space. Thus, the unloading chamber 30 can form an atmosphere similar to the atmosphere for coating the evaporation source in the coating chamber 20, that is, a lower vacuum than the coating chamber 20. [

The coating chamber 20 is controlled to a first vacuum state when connected with the loading chamber 10 and is disconnected from the loading chamber 10 and is then in a first vacuum (low vacuum) state to a second vacuum (high vacuum) state . The coating chamber 20 also maintains a second vacuum state before being connected to the unloading chamber 30 and is connected to the unloading chamber 30 in a first vacuum (low vacuum) state in a second vacuum ) State.

To this end, a first gate 61 is provided between the loading chamber 10 and the coating chamber 20. The first gate 61 may be opened to communicate with one another to transfer the jig 40 from the loading chamber 10 to the coating chamber 20.

A second gate (62) is provided between the coating chamber (20) and the unloading chamber (30). The second gate 62 may be opened to communicate with each other to transfer the jig 40 from the coating chamber 20 to the unloading chamber 30. [

The loading chamber 10 is controlled from the atmospheric pressure to the first vacuum and the first gate 61 is opened so that the loading chamber 10 and the coating chamber 20 are connected to the first vacuum 61, . With the first gate 61 closed, the loading chamber 10 is controlled to the atmospheric pressure and the coating chamber 20 is controlled to the second vacuum.

The loading chamber 10 is controlled to a pressure difference range of the atmospheric pressure and the first vacuum, and the coating chamber 20 is controlled to the pressure difference range of the first vacuum and the second vacuum. Therefore, the controlled pressure difference in the loading chamber 10 and the coating chamber 20 can be narrowed.

The unloading chamber 30 is controlled from the atmospheric pressure to the first vacuum and the unloading chamber 30 and the coating chamber 20 are opened by opening the second gate 62 And is controlled to the first vacuum. With the second gate 62 closed, the coating chamber 20 is controlled to the first vacuum or the second vacuum, and the unloading chamber 30 is controlled to the atmospheric pressure.

The coating chamber 20 is controlled to a pressure difference range of the second vacuum and the first vacuum, and the unloading chamber 30 is controlled to the pressure difference range of the first vacuum and the atmospheric pressure. Thus, the controlled pressure difference in the coating chamber 20 and the unloading chamber 30 can be narrowed.

To this end, the loading chamber 10 and the unloading chamber 30 are controlled at atmospheric pressure and first vacuum through a roughing valve 11, 12; 31, 32 connected to a vacuum pump (not shown). And the coating chamber 20 may be connected to a vacuum pump 21 and controlled to a first vacuum and a second vacuum.

The loading chamber 10, the coating chamber 20 and the unloading chamber 30 are provided with first, second and third doors 13, 23 and 33 separately from the first and second gates 61 and 62 So that the jig 40 can be loaded and unloaded.

The jig 40 on which the coating material T is mounted is loaded on the loading rail L1 installed in the loading chamber 10 through the first door 13 on the carriage 50. [ The jig 40 on which the coated object T is mounted is unloaded from the unloading rail L3 installed in the unloading chamber 30 to the truck 50 through the third door 33 .

The carriage 50 includes a main body 52 having a wheel 51 and a guide rail 53 provided on the main body 52. The guide rail 53 allows the jig 40 to be loaded onto the loading rail L1 or unload the jig 40 from the unloading rail L3.

The spacing of the guide rails 53 on the main body 52 coincides with the spacing of the loading rail L1 and the spacing of the unloading rail L3. The guide rail 53, the loading rail L1 and the unloading rail L3 support the loading / unloading roll 421 (see FIGS. 5 and 6) provided in the jig 40, Lt; RTI ID = 0.0 > and / or < / RTI >

FIG. 5 is a detailed view of the first transport roll and the jig engaging portion in the loading chamber shown in FIGS. 1 and 2. FIG. Referring again to Figures 1, 2 and 5, the loading chamber 10 has a first transfer roll 14 for transferring the jig 40 to the coating chamber 20.

The first conveying roll 14 includes a first driving roll 144 connected to the driving shaft 142 of the first motor 141 or connected to the chain 143 and a second driving roll 144 connected to the first driving roll 144 And a first idle roll 145 disposed on the gate 61 side.

The first transport roll 14, i.e., the first drive roll 144 and the first idler roll 145, are arranged side by side with the loading rail L1 to transport the jig 40 in the direction perpendicular thereto .

The loading chamber 10 also includes a first fixed plate 15, a first elevating plate 16 and a loading and elevating cylinder 17. The first fixing plate 15 forms a floor inside the loading chamber 10 and fixes the loading rail L1.

The first lifting plate 16 is connected to the first guide 151 installed in the vertical direction to the first fixing plate 15 by the vertical bar 161 and is lifted and lowered to be rotatable on the upper side. 144). The drive roll 144 is mounted to the first lift plate 16 via the bracket B1.

The loading and elevating cylinder 17 is vertically fixed to the first fixing plate 15 by a body and connected to the first elevating plate 16 by a rod. The first lifting plate 16 is lifted and lowered on the first fixing plate 15 and the first driving roll 144 is lifted and lowered according to the operation of the loading lifting cylinder 17. [

When the loading elevating cylinder 17 is lowered, the first elevating plate 16 is lowered and the jig 40 is transferred to the loading chamber 10 by the loading / unloading roll 421, .

On the other hand, when the loading / unloading cylinder 17 is lifted, the first lifting plate 16 is lifted to separate the loading / unloading roll 421 of the jig 40 from the loading rail L1, So that the jig 40 can be conveyed by rolling support of the jig 40 (state of FIG. 5).

The unloading chamber 30 includes a first fixed plate 15 and a first elevating plate 16 of the loading chamber 10 and a second elevating plate 16 of the loading and elevating cylinder 10, (17). A description thereof will be omitted.

The unloading chamber 30 is formed symmetrically with the loading chamber 10. The loading rail L1 and the first transport roll 14 of the loading chamber 10 are respectively replaced by the unloading rail L3 and the third transport roll 34 of the unloading chamber 30 2).

A first drive roll 144 is installed at the far side of the coating chamber 20 in the loading chamber 10 and a first idle roll 145 is installed in the vicinity of the coating chamber 20. In the unloading chamber 30, on the other hand, a third driving roll 344 is installed on the far side of the coating chamber 20, and a third idle roll 345 is provided in the vicinity of the coating chamber 20.

6 is a detailed view of the second transport roll and the jig coupling in the coating chamber shown in Figs. 1 and 2. Fig. 1, 2, and 6, the coating chamber 20 supports the jig 40 transferred from the first transfer roll 14 to coat the coated body T, To the unloading chamber (30).

The second conveying roll 24 is formed of driving rolls connected to the driving shaft 242 of the second motor 241 or connected to the chain 243. The second conveying rolls 24 are arranged side by side with the first conveying rolls 14 and the third conveying rolls 34 so as to receive or convey the jig 40 conveyed in the direction orthogonal thereto.

The coating chamber 20 includes a second fixing plate 25, a coating elevating cylinder 26, and a stopper elevating cylinder 27. The second fixing plate 25 forms a floor inside the coating chamber 20.

The coating lifting cylinder 26 is vertically fixed to the second fixing plate 25 by a body and is connected to a shaft support portion 261 which rotatably supports the rotation center shaft 41 of the jig 40 .

Therefore, when the coating and elevating cylinder 26 is raised, the shaft supporting portion 261 supports the rotation center shaft 41 of the jig 40 to enable rotation of the jig 40. When the coating lift cylinder 26 is lowered, the jig 40 is lowered so that the base plate 42 can be unloaded on the second feed roll 24 and transferred into the unloading chamber 30.

The stopper lifting cylinder 27 is vertically installed as a body on the second fixing plate 25 on both sides of the coating and lifting cylinder 26 and is lifted and lowered to a stopper 271 supporting the side of the jig 40, . When the stopper lifting cylinder 27 is lifted, the stopper 271 supports the side of the jig 40 (the side of the base plate 42) to stabilize the jig 40 at the time of coating

Referring again to Fig. 6, the jig 40 includes a base plate 42, a first ring gear 43, and a rotating pinion gear 44.

The base plate 42 includes a loading / unloading roll 421 to which the loading rail L1 or the unloading rail L3 is coupled and which is disposed at the lower side of the jig 40, 41). The base plate 42 is also supported by the first feed roll 14, the second feed roll 24 and the third feed roll 34 to enable the jig 40 to be transported.

The first ring gear 43 is rotatably mounted on the upper portion of the base plate 42 and supported by a bearing 431 on the inner side. In other words, the first ring gear 43 can be rotated separately while being transferred integrally with the base plate 42. The first ring gear 43 is connected to the drive motor 434 through the idle gear 432 and the pinion gear 433 provided on the second fixed plate 25. [

The rotating pinion gear 44 is rotatably mounted on the first ring gear 43 and rotates in accordance with the rotation of the first ring gear 43 so that the second ring gear 43 fixed to the coating chamber 20 441, and rotates when the first ring gear 43 rotates. The rotating pinion gear 44 is connected to a mounting rod 445 on which the coating material T is mounted to rotate and rotate the mounting rod 445.

7 is a perspective view of a resistance heating evaporation source provided in the jig. Referring to Fig. 7, the jig 40 is equipped with a bracket B3 on a mounting member 70, and a resistance-heating evaporation source 71 is mounted. A plurality of resistance heating evaporation sources 71 may be provided along the mounting member 70 in the jig 40.

Fig. 8 is a plan view of the jig with a coating body mounted thereon. Referring to FIG. 8, the coated member T may be mounted on the mounting rod 445 of the jig 40 in various states.

When the evaporation source is evaporated by providing the resistance heating evaporation source 71 in the mounting member 70 in the jig 40, when the jig 40 rotates, the mounting rod 445 rotates and rotates. Therefore, the coating material T provided on the mounting rod 445 can be effectively coated toward the evaporation source 71. [

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, And it goes without saying that the invention belongs to the scope of the invention.

10: loading chambers 11, 12; 31, 32: Luffing valve
13, 23, 33: first, second and third doors 14: first conveying roll
15: first fixing plate 16: first lift plate
17: Loading and lifting cylinder 20: Coating chamber
21: Vacuum pump 24: Second conveying roll
25: second fixing plate 26: coating lift cylinder
27: stopper lifting cylinder 30: unloading chamber
34: third conveying roll 40: jig
41: rotation center shaft 42: base plate
43: first ring gear 44: rotating pinion gear
50: Bogie 51: Wheel
52: main body 53: guide rail
61, 62: first and second gates 71: resistive heating evaporation source
141: first motor 142: drive shaft
143: chain 144: first drive roll
145: First idle roll 151: First guide
161: vertical rod 241: second motor
242: drive shaft 243: chain
261: Shaft support portion 271: Stopper
344: first drive roll 345: third idle roll
421: Loading / unloading roll 431: Bearing
432: Idle gear 433: Pinion gear
441: second ring gear 434: drive motor
445: Mounting rods B1, B3: Bracket
L1: Loading rail L3: Unloading rail
T: Coated body

Claims (10)

A loading chamber for loading a jig with a coating material loaded on the loading rail by a carriage and forming a controlled space from the atmospheric pressure to a first vacuum state;
A coating chamber which is partitioned and connected to the loading chamber by a first gate and forms a controlled space in a second vacuum state higher than the first vacuum by coating an evaporation source on the coating body conveyed in the loading chamber, ; And
A jig mounted with a coating material to be transferred in the coating chamber is unloaded from the unloading rail by the bogie, and a space controlled in the atmospheric pressure state in the first vacuum, Lt; / RTI >
.
The method according to claim 1,
The loading chamber includes:
And a first transfer roll for transferring the jig to the coating chamber,
Wherein the first transfer roll
A first drive roll connected to the drive shaft of the first motor or connected by a chain,
A first idle roll disposed on the first check side in parallel with the first drive roll,
.
3. The method of claim 2,
Wherein the coating chamber comprises:
And a second transfer roll for transferring the jig transferred from the first transfer roll to the unloading chamber,
The second conveying roll includes:
And a drive roller connected to the drive shaft of the second motor or connected by a chain
Vacuum deposition apparatus.
The method of claim 3,
Wherein the unloading chamber comprises:
And a third conveying roll for conveying the jig conveyed from the second conveying roll,
Wherein the third conveying roll includes:
A third drive roll connected to the drive shaft of the third motor or connected by a chain, and
A third idle roll disposed on the second cateck side in parallel with the third drive roll,
.
3. The method of claim 2,
The loading chamber includes:
A first fixing plate fixed by mounting the loading rail,
A first lifting plate coupled to a first guide installed in a direction perpendicular to the first fixing plate by a vertical bar and having a first transport roll on an upper side thereof,
A loading lifting cylinder fixed to the first lifting plate and connected to the first lifting plate;
.
6. The method of claim 5,
Wherein the coating chamber comprises:
The second fixing plate,
A coating lifting cylinder installed vertically to the second fixing plate and lifted and lowered to be connected to a shaft supporting portion for supporting a rotation center shaft of the jig,
And a stopper lifting cylinder connected to a stopper provided on both sides of the coating and lifting cylinder in a direction perpendicular to the second fixing plate and lifting and lowering operation,
.
The method according to claim 6,
The jig,
A base plate having a loading / unloading roll to which the loading rail is coupled and supporting the rotation center shaft and being transported while being supported by the first transporting roll and the second transporting roll,
A first ring gear rotatably installed on the base plate,
A second ring gear which is connected to the first ring gear and which is coupled to the second ring gear and which is connected to a mounting rod on which the coating material is mounted,
.
8. The method of claim 7,
Wherein the coating chamber comprises:
A pinion gear and a driving gear provided on the second fixed plate and coupled to the first ring gear,
An idle motor connected to the drive gear for revolving the first ring gear,
.
3. The method of claim 2,
Wherein the unloading chamber comprises:
A first fixing plate fixed by mounting the unloading rail,
A first lifting plate coupled to a first guide installed in a direction perpendicular to the first fixing plate by a vertical bar and having a first transport roll on an upper side thereof,
An unloading lifting cylinder fixed to the first fixing plate and connected to the first lifting plate
.
The method according to claim 1,
The bogie comprises:
A body having wheels, and
A guide rail provided on the main body for loading the jig into the loading rail or unloading the jig from the unloading rail,
.

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