KR100988277B1 - A barrel with treatment heating fuction and coating device with the barrel - Google Patents

Abstract

The present invention relates to a barrel having a function of heating a to-be-processed object and a coating device having the barrel. More particularly, the present invention relates to surface treatment of a to-be-processed object such as various electronic component exteriors in a vacuum or plasma coating apparatus. It relates to a barrel and a coating device having the same to fasten the object to be charged to the coating device.

Barrel, workpiece, coating, vacuum coating equipment, plasma coating equipment

Description

Barrel with object heating function and coating device with same {A barrel with treatment heating fuction and coating device with the barrel}

The present invention relates to a barrel having a function of heating a to-be-processed object and a coating apparatus having the barrel. It relates to a barrel and a coating device having the same to fasten the object to be charged to the coating device.

As international environmental regulations such as RoHS and REACH have recently emerged seriously, the use of wet exterior coatings using various chemicals such as plating and painting is being restricted, and most of them are being replaced by vacuum or plasma coating, which is an eco-friendly dry coating technology. .

In particular, in the exterior coating of electronic parts exterior coating, especially the main export items such as mobile phones and flat panel displays, various environmental regulations are rapidly leading to the replacement of eco-friendly dry vacuum and plasma coating technology.

Vacuum and plasma coatings are already being produced in many parts of mobile phone exterior coating such as electromagnetic shielding coating, mobile phone window coating and keypad coating.

However, the conventional vacuum and plasma coating apparatus is manufactured with the concept of a dedicated machine for each coating purpose, and thus it is not possible to carry out other coating processes other than the intended coating, thereby incurring economic burden on the user by purchasing different equipment according to the coating type. .

Especially in the case of exterior aesthetic coating, various tastes of consumers are required, and numerous color coatings are required for the processed materials of various materials. However, only one or two coating sources cannot cope with the conventional vacuum and plasma coating equipment. Only limited colors can be implemented in three restricted materials.

This puts a burden on coating companies to have separate equipment for each type of material and color or function of coating film to be implemented.

In addition, due to the structural disadvantages of the existing vacuum and plasma coating equipment, as well as inconvenience in use, the quality of the coating process is reduced, causing a lot of defects.

SUMMARY OF THE INVENTION An object of the present invention is to provide a barrel having a heating function capable of uniformly heating an object by providing a barrel heater in the center thereof.

Another object of the present invention is to provide a coating apparatus having a barrel with a heating function.

In addition, another object of the present invention is to provide a coating apparatus having a means for supplying power to the barrel to implement the heating function in the barrel.

Further, another object of the present invention is to provide a coating apparatus having a door type deposition source.

Still another object of the present invention is to provide a coating apparatus having a baffle having a vacuum degree control function as well as condensing moisture in the vacuum chamber.

In addition, another object of the present invention is to provide a coating apparatus having excellent characteristics of the coating film formed on the surface of the workpiece by means of applying a bias power to the jig shaft for fastening the workpiece.

The present invention to achieve the above object is the central axis; A barrel heater provided at a predetermined interval from the central axis; A circular upper plate fastened to the upper end of the central axis; A circular lower plate fastened to the lower end of the central axis; And a jig shaft which is fastened to the upper plate and the lower plate, respectively, revolves about the central axis, rotates about its own axis, and is coupled with a plurality of jigs for mounting the workpiece. To provide a barrel with a function.

In a preferred embodiment, the barrel heaters are arranged in the same interval while the rod-shaped unit heaters are spaced at a constant distance from the central axis, both ends of the barrel heater in the U-shaped lower portion of the upper plate to be connected to the lower plate It is curved.

In a preferred embodiment, it is provided between the central axis and the barrel heater, and further comprises a central axis heat shield for protecting the central axis from heat generated in the barrel heater.

The present invention to achieve the above object is a vacuum chamber; And a barrel mounted inside the vacuum chamber, wherein the barrel includes: a central axis; A barrel heater provided at a predetermined interval from the central axis; A circular upper plate fastened to an upper end of the central axis; A circular lower plate fastened to the lower end of the central axis; And a jig shaft which is fastened to the upper plate and the lower plate, respectively, revolves about the central axis, rotates about its own axis, and is coupled with a plurality of jigs for mounting the workpiece. Provided is a coating apparatus having a barrel having a function.

In a preferred embodiment, the barrel heaters are arranged at the same interval while the rod-shaped unit heaters are maintained at a constant distance from the central axis, both ends of the barrel heater in the lower plate to be connected to the heater electrode module of the lower plate It is curved in a U-shape.

In a preferred embodiment, it is provided between the central axis and the barrel heater, and further comprises a central axis heat shield for protecting the central axis from heat generated in the barrel heater.

In a preferred embodiment, the vacuum chamber includes: a sidewall having a plurality of deposition source ports and a pair of coating deposition sources provided at one of left and right positions of each of the deposition source ports; A lower surface having a transfer rail for charging or withdrawing the barrel on an inner surface thereof, the rod of the heater electrode docking cylinder and the heater electrode feedthrough protruding therein; And an upper surface on which the rod of the barrel position fixing cylinder protrudes.

In an exemplary embodiment, a bias electrode busbar protrudes from an upper surface of the vacuum chamber to contact the upper plate and apply a bias power to a jig shaft fastened to the upper plate.

In a preferred embodiment, the end of the rod of the barrel position fixing cylinder is inclined so that its vertical section is inverted trapezoidal, and the end of the central axis corresponding to the rod of the barrel position fixing cylinder is fixed to the barrel position. The trapezoidal accommodating space is provided so that the end of the rod of the cylinder can be inserted. The rod of the barrel position fixing cylinder descends and is inserted into the accommodating space formed at the end of the central axis, thereby fixing the central axis. .

In a preferred embodiment, the lower plate: the central axis and the barrel heater is fastened, the heater electrode busbar in contact with the heater electrode feed-through and the heater electrode docking plate in contact with the rod of the heater docking cylinder A heater electrode module provided; And a barrel driving module to which the jig shaft is fastened and having a revolution driving unit and a rotation driving unit for revolving and rotating the jig shaft.

In a preferred embodiment, the lower portion of the barrel driving module at a position corresponding to the transfer rail may be provided with a roller to charge or withdraw the barrel into the chamber.

In a preferred embodiment, a predetermined position of the side wall is provided with an exhaust port for connecting a vacuum pump for exhausting the inside of the vacuum chamber to a vacuum atmosphere.

In a preferred embodiment, the exhaust port is provided with a moving baffle module to condense moisture in the vacuum chamber as well as to adjust the amount of gas sucked into the exhaust port.

In a preferred embodiment, the moving baffle module: the front and the back is open, two sides of the four opposite sides of the case having a plurality of sliding holes having an arc shape; It has a rectangular shape and has four protrusions provided at the edges of each of the two sides facing each other, and two protrusions provided at one side of the four protrusions in the longitudinal direction of the four protrusions have the ends of the sliding holes. A plurality of baffle plates which are inserted to protrude through and are respectively fastened to two sides of the case, the plurality of baffle plates being rotatable about an axis connecting the remaining two protrusions; Ends of the protrusions exposed through the sliding hole are fastened to one of two side surfaces of the case, and a driving means is connected to the protrusions exposed through the sliding hole along the sliding hole. Sliding jig to move along the; And a cooling module inside the case, through which a cooling medium supplied from the outside passes.

The present invention has the following excellent effects.

First, the barrel having the to-be-processed object heating function of the present invention and the coating apparatus having the same have a heating function that has a barrel heater in the center to uniformly heat the to-be-processed object so that the characteristics of the coated film of the to-be-processed object are excellent. It is possible to obtain a barrel equipped with.

In addition, the barrel with the to-be-processed object heating function of the present invention and the coating apparatus having the same can provide a coating device having a barrel with the heating function to obtain excellent coating properties.

In addition, the barrel with the workpiece heating function of the present invention and the coating device having the same can obtain a coating device having a means for supplying power to the barrel so as to implement the heating function in the barrel.

In addition, the barrel with the workpiece heating function of the present invention and the coating device having the same provide a coating apparatus having a door type deposition source, and can be coated on the surface of various workpieces with various deposition sources as well as various coating films. It is possible to obtain a coating apparatus that can coat the.

In addition, the barrel with the workpiece heating function of the present invention and the coating apparatus having the same can not only condense moisture in the vacuum chamber, but also obtain a coating apparatus having a baffle having a vacuum degree control function.

In addition, the barrel having a workpiece heating function of the present invention and a coating device having the same include a means for applying a bias power to a jig shaft for fastening the workpiece, and the characteristics of the coating film formed on the surface of the workpiece. This excellent coating apparatus can be obtained.

The terms used in the present invention were selected as general terms as widely used as possible, but in some cases, the terms arbitrarily selected by the applicant are included. In this case, the meanings described or used in the detailed description of the present invention are considered, rather than simply the names of the terms. The meaning should be grasped.

Hereinafter, the technical structure of the present invention will be described in detail with reference to preferred embodiments shown in the accompanying drawings.

However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Like reference numerals designate like elements throughout the specification.

1 is a perspective view showing a barrel with a heating function according to an embodiment of the present invention.

Referring to FIG. 1, the barrel 100 having a heating function according to an embodiment of the present invention includes a central axis 110, a barrel heater 120, an upper plate 130, a lower plate 140, and a barrel. The jig shaft 150 is provided.

In addition, the barrel 100 may further include a plate fixing bar 160 and a transfer plate 170.

The plate fixing bar 160 serves to fasten and fix the upper plate 130 and the lower plate 140, so that the upper plate 130 and the lower plate 140 can be fixed by other means. It may be omitted.

In addition, the transfer plate 170 is provided with a roller 172 at a lower portion thereof, and a handle 174 at a predetermined position of a side thereof, so that the barrel 172 can be charged or withdrawn into a vacuum chamber to be described later. At this time, it may be provided to be easily transported to the roller 172.

On the other hand, the central axis 110 is a component consisting of the center of the barrel 100 serves as a center when the jig axis 150 rotates and revolves.

Barrel heater 120 is a characteristic component in the barrel 100 with a heating function according to an embodiment of the present invention is provided by maintaining a predetermined distance from the central axis (110).

As shown in FIG. 1, the barrel heater 120 may be provided with unit heaters 122 having a rod shape provided at equal intervals while maintaining a constant interval about the central axis 110. At this time, since the unit heaters 122 of the barrel heater 120 are supplied with power from the lower plate 140 to be described later, the unit heaters 122 are bent in a U-shape under the upper plate 130 (partial enlargement of FIG. 1). Shown on the road).

Therefore, the barrel heater 120 is arranged at the same interval while maintaining a constant distance from the central axis 110, both ends are connected to the lower plate 140, the lower portion of the upper plate 130 The unit heater 122 of the rod-shaped bent in a U-shape.

In this embodiment, the barrel heater 120 has been described as being composed of the unit heaters 122 in the form of rods, but may be configured in various forms such as a plate form or a coil form.

Meanwhile, since the heat generated by the barrel heater 120 may affect the central axis 110, a central axis heat shield 180 may be provided to protect the central axis 110 from heat. .

In addition, other heat shields may be further provided to protect other components of the barrel 100, such as the upper plate 130 and the lower plate 140, from heat generated from the barrel heater 120. .

The upper plate 130 is fastened to the upper end of the central axis 110 in a circular shape.

On the other hand, the upper plate 130 is to supply a bias power to the jig shaft 150 to be described later to play a role to make the coating on the workpiece 190 fastened to the jig shaft 150 to be made smoothly. It is preferable that the conductive material is made of electricity.

The upper plate 130 and other components connected to the upper plate 130 will be described in detail later with reference to FIG. 4.

The lower plate 140 is circularly fastened to the lower end of the central shaft 110.

The lower plate 140 is provided with a rotation drive unit and a revolution drive unit to allow the jig shaft 150 to be described later to rotate and revolve, and serves to supply power to the barrel heater 120.

The lower plate 140 and other components connected to the lower plate will be described in detail later with reference to FIG. 3.

The jig shaft 150 is fastened to the upper plate 130 and the lower plate 140, respectively, and rotates about the central axis 110, and rotates about its own center, that is, its axis. This is because the jig 152 equipped with the workpiece 190 to be coated on the jig shaft 150 is provided.

That is, the jig shaft 150 serves to uniformly form a coating film on the workpiece 190 mounted by the jig 152 through rotation and revolution.

In this case, although only one jig shaft 150 is illustrated in order to avoid the complexity of the drawing, a plurality of jig shafts 150 are actually provided, and the jig 152 to which the plurality of workpieces 190 are fastened is also the jig shaft ( 150 are provided with a plurality.

2 is a diagram illustrating a scene in which a barrel having a heating function is mounted in a vacuum chamber according to an exemplary embodiment.

Referring to FIG. 2, the barrel 100 described above is charged into the vacuum chamber 200 to form a desired coating film on the surface of the workpiece 190 fastened to the barrel 100. .

The vacuum chamber 200 is hinged by a sidewall 210 having a cylindrical shape, an upper surface 220 and a lower surface 230 that block the upper and lower portions of the sidewall 210, and a portion of the sidewall 210. Is connected to and is provided with a chamber door 240 for opening the interior of the vacuum chamber 200 to charge the barrel 100 and the like.

In this case, although not shown in detail in the side wall 210 of the vacuum chamber 200, a vacuum pump capable of exhausting the inside of the vacuum chamber 200 in a vacuum atmosphere is connected through an exhaust port.

A moving baffle module 300 is provided at the portion where the vacuum chamber 200 and the exhaust port are connected, thereby controlling the degree of vacuum as well as condensing moisture in the vacuum chamber 200. A detailed description of the moving baffle module 300 will be described later with reference to FIG. 5.

In addition, a plurality of deposition source ports 400 are provided at predetermined positions of the sidewall 210 and the chamber door 240 of the vacuum chamber 200.

As illustrated in FIG. 2, the evaporation source ports 400 are provided in a rectangular open area at a predetermined position of the side wall 210.

A pair of coating mounting sources 410 are provided at left and right positions of each of the evaporation source ports 400. Detailed descriptions of the deposition source ports 400 and the coating deposition source 410 will be described later with reference to FIG. 6.

Meanwhile, as shown in FIG. 2, the barrel 100 is transferred to the vacuum chamber 200 using a trolley 500 or the like and charged.

At this time, the barrel 100 is seated on the transport rail 510 provided in the trolley 500, the roller 172 of the lower portion of the transport plate 170 described with reference to Figure 1 is the transport rail 510 It is seated on).

As shown in FIG. 2, the barrel 100 has the roller 172 seated on the transfer rail 232 provided on the lower surface 230 of the vacuum chamber 200. It is transferred into the vacuum chamber 200 along the transfer rail 232 provided on the 230.

When the barrel 100 moves to a predetermined position inside the vacuum chamber 200, a rod of a heater electrode docking cylinder to be described later with reference to FIG. 3 and a rod of a barrel position fixing cylinder to be described with reference to FIG. 4. The position is fixed by.

3 is a diagram illustrating a part of a gating device having a barrel with a heating function according to an embodiment of the present invention. 3 illustrates a portion of the bottom plate 140 of the barrel 100 and a bottom surface 230 of the vacuum chamber 200.

Referring to FIG. 3, first, the lower surface 230 of the vacuum chamber 200 is provided with a heater electrode docking cylinder 250 and penetrates the lower surface 230 to form the vacuum chamber 200. Not only has at least two rods 252 of the heater electrode docking cylinder 250 protruding by a predetermined length therein, but also a heater electrode feedthrough 260 for supplying external power to the barrel heater 120. Protrudes through the lower surface 230.

In addition, the lower plate 140 of the barrel 100 is the heater electrode module 142 and the jig shaft 150 to which the central axis 110, barrel heater 120 and the central axis heat shield 180 are fastened. And a barrel driving module 144 to which the plate fixing bar 160 and the like are fastened.

The heater electrode module 142 has a cylindrical shape having a predetermined height, and the barrel driving module 144 has a donut shape in which a center of the heater electrode module 142 is located in an empty shape.

On the other hand, the heater electrode module 142 is the upper plate 610, the upper plate 610 to which the central shaft 110, barrel heater 120 and the central shaft heat shield 180 is fastened at a predetermined interval. A heater electrode docking plate 620 having a docking groove 622 and having a docking protrusion 624 protruding to a predetermined length, and the upper plate 610 and the heater electrode docking are provided spaced apart from each other. And a side plate 630 for fastening the plate 620 and protecting the inside thereof, and inside the heater electrode plates 632 and 634 for supplying (−) power and (+) power to the barrel heater 120. And a pair of heater electrode busbars 640 connected to the heater electrode plates 632 and 634, respectively, and exposed through the heater electrode docking plate 620.

In addition, the barrel driving module 144 may include a rotating driver (not shown) for rotating the jig shaft 150 therein and an idle driver for revolving the jig shaft 150 about the central axis 110. Not only), but also on the surface thereof, the jig shaft connecting portion 650 coupled to the jig shaft 150 (in this case, the jig shaft connecting portion 650 is the jig shaft 150 transmits the rotational motion). However, a portion thereof is provided with an insulating member to insulate between the jig shaft 150 and the barrel driving module 144).

As described with reference to FIG. 1, when the barrel 100 is moved to a predetermined position inside the vacuum chamber 200 using the transfer rail 232 provided on the lower surface 230, the lower surface ( The rods 252 of the heater electrode docking cylinder 250 protruding from the 230 are inserted into the docking groove 622 provided in the heater electrode docking plate 620 of the heater electrode module 142. At this time, it can be seen that the barrel 100 is located at a proper position inside the vacuum chamber 200.

In this case, a principle in which the rod 252 of the heater electrode docking cylinder 250 is docked in the docking groove 622 is illustrated in FIG. 7, wherein the barrel 100 is transferred to the vacuum chamber 200. When transferred to the inside, the rods 252 are inserted into the docking groove 622 by the rods 252 larger than the diameter of the other end portion is caught by the docking protrusions 624.

At this time, the docking groove 622 is processed to be inclined so as to decrease the diameter from the top to the bottom, the end portion of the rod 252 is the diameter of the end portion is larger, the diameter becomes smaller as it goes down The docking groove 622 is processed to be inclined in the opposite direction.

The rods 252 of the heater electrode docking cylinder 250 are inserted into a docking groove 622 provided in the heater electrode docking plate 620 and then loaded into the heater electrode docking cylinder 250. Lowering the 252 causes the ends of the rods 252 to be caught in the docking groove 622 so that the heater electrode module 142 is lowered, and the heater electrode module 142 is lowered to lower the heater electrode. Feedthroughs 260 The heater electrode busbars 640 are in contact with each other.

Because of this, after the role of the rod of the barrel for fixing the position of the barrel to be described with reference to Figure 4 and the end of the central shaft 110 together with the role of fixing the barrel 100 in the vacuum chamber 200 as well. Rather, power is supplied to the barrel heater 120 through the pair of heater electrode feedthroughs 260, the pair of heater electrode busbars 640, and the pair of heater electrode plates 632 and 634.

In this case, the barrel heater 120 is composed of unit heaters 122 as described with reference to FIG. 1, wherein both ends of each of the unit heaters 122 are the pair of heater electrode plates 632 and 634, respectively. One of the heater electrode plates 632 or 634 is connected to supply (+) power or (−) power to both ends of each of the unit heaters 122, respectively.

4 is a view illustrating a part of a gating device having a barrel with a heating function according to an embodiment of the present invention. 4 illustrates a portion of the top plate 130 of the barrel 100 and the top surface 220 of the vacuum chamber 200.

Referring to Figure 4, the upper surface 220 of the vacuum chamber 200 is provided with a barrel position fixing cylinder 710, the rod 720 of the barrel position fixing cylinder 710 is It penetrates the upper surface 220 and protrudes into the vacuum chamber 220.

In addition, the central shaft 110 is fastened to the upper plate 130 as described above, but the end portion thereof is fastened to protrude through the center of the upper plate 130.

At this time, the end of the central axis 110 is inclined to be inclined into the interior from the end of the end as shown in Figure 4 is provided with a receiving space 112, the shape of the vertical cross-section is inverted trapezoidal consist of.

In addition, the end portion of the rod 720 of the barrel position fixing cylinder 710 is inclined so as to have an inverted trapezoid having the same shape as the receiving space 112 and its vertical cross section.

Accordingly, as described with reference to FIG. 3, the rod 252 of the heater electrode docking cylinder 250 is inserted into the docking groove 622 of the heater electrode module 142 and then the heater electrode module 142. ) By lowering the heater electrode feedthroughs 260 and the heater electrode busbars 640, and then the rod 720 of the barrel fixing cylinder 710 descends to lower the rod 720. An end portion is inserted into the accommodation space 112 of the central shaft 110 to fix the central shaft 110 so that the barrel 200 is completely fixed in the vacuum chamber 200.

Meanwhile, an insulating member 830 may be inserted between the central shaft 110 and the upper plate 130, which causes the upper plate 130 to supply bias power to the jig shaft 150. If so, it may be provided to insulate the central axis 110.

Meanwhile, in order to serve as an electrode for supplying bias power to the jig shaft 150 to the upper plate 130, the bias power must be supplied from the outside to the upper plate 130. As described above, the bias electrode bus bar 820 protrudes through the upper surface 220 of the vacuum chamber 200.

The bias electrode busbar 820 is connected to a bias electrode docking cylinder 810 provided on the upper surface 220 of the vacuum chamber 200, and the bias electrode docking cylinder 810 is the bias electrode. Lowering the bus bar 820 serves to contact the bias electrode plate 822 provided at the end of the bias electrode bus bar 820 to the upper plate 130.

In this case, the bias electrode plate 822 is provided in a form surrounding the central axis 110, as shown in Figure 4, the edge of the insulating member 830 surrounding the end of the central axis 110 The bias electrode plate 822 is configured to supply bias power to the upper plate 130 without being rotated even when the upper plate 130 is rotated by being coupled to the bearing member 824 provided at the upper surface 130.

5 is a view illustrating a moving baffle module provided in the vacuum chamber according to an embodiment of the present invention. At this time, Figure 5 is a road showing a fully open state and a completely short force state of the moving baffle module, the left side shows a fully closed state and the right side is a diagram showing a fully open state.

Referring to FIG. 5, the moving baffle module 300 includes a vacuum pump (not shown) and the vacuum chamber 200 for exhausting the inside of the vacuum chamber 200 to a vacuum atmosphere, as shown in FIG. 1. Is provided in the exhaust port (not shown) for connecting.

The moving baffle module 300 serves to remove moisture from the vacuum chamber 200 by condensing moisture in the vacuum chamber 200 and to adjust the amount of gas sucked into the exhaust port. Equipped.

The moving baffle module 300 is provided with a case 310 consisting of only four side surfaces of which the front and rear surfaces are open.

At this time, the two sides 312 and 314 facing each other among the four sides constituting the case 310 are sliding holes 320 having a circular arc shape, precisely 1/4 of a circular arc shape at regular intervals. There are a plurality.

The area corresponding to the front position of the case 310 is provided with a plurality of baffle plates 330 having a rectangular surface.

The baffle plates 330 are provided with two protrusions 332 and 334, that is, one baffle plate 330 at four edges of each of two side surfaces facing each other.

At this time, the two projections provided on one side of the four projections on the basis of the longitudinal direction of the baffle plate 330, that is, the projections indicated by the reference numeral 332 and the reference surface 332 on the opposite side of the baffle plate 330 The protrusion corresponding to is inserted into the sliding hole 320 to protrude through the sliding hole 320.

In addition, the other two protrusions of the four protrusions, that is, the protrusions indicated by reference numeral 334 and the protrusions corresponding to the reference numeral 334 on the opposite side of the baffle plate 330, the sides 312 and 314 of the case 310. ) Is fastened so as to rotate about an axis connecting the two protrusions, that is, the protrusion indicated by reference numeral 334 and the corresponding protrusion.

In addition, the baffle plate 330 may have a protrusion protruding through the sliding hole 320 at any one of two side surfaces 312 and 314 in which the sliding holes 320 are formed, for example, the side surface indicated by reference numeral 314. 332 is provided with a sliding jig 340 to connect and move at the same time.

At this time, the sliding jig 340 is not shown in the figure is connected to a driving means such as a motor to move the protrusions 332 along the sliding hole 320 to move the moving baffle module 300 To change the status to fully open or fully closed.

That is, when the protrusions 332 are positioned at one end of the sliding hole 320, the baffle plate 330 is completely closed to completely close the inlet of the exhaust port as shown on the left side. When the positions 332 are located at the other end of the sliding hole 320, the baffle plate 330 is in a fully open state as shown in the right side, completely opening the inlet of the exhaust port. Although not shown in the drawing, the protrusions 332 are positioned at a predetermined position of the sliding hole 320 so that the baffle plate 330 partially opens or closes the exhaust port inlet so that the amount of gas sucked into the exhaust port. To adjust.

In addition, the moving baffle module 300 includes a cooling module 350 through which a cooling medium supplied from the outside passes at a predetermined position inside the case 310.

The cooling module 350 condenses moisture in the vacuum chamber 200 to remove moisture in the vacuum chamber 200.

6 is a view illustrating a deposition source port provided in a vacuum chamber and a pair of coating deposition sources provided in the deposition source port according to an embodiment of the present invention.

Referring to FIG. 6, the deposition source port 400 may be provided on the sidewall 210 and the chamber door 240 of the vacuum chamber 200 as described with reference to FIG. 1.

In FIG. 6, the deposition source port 400 provided in the chamber door 240 is illustrated, but the deposition source port 400 provided in the vacuum chamber 200 may be configured in the same configuration.

As illustrated in FIG. 6, the deposition source port 400 is a rectangular open area having a predetermined size at a predetermined position of the chamber door 240.

Both sides of the evaporation source port 400 are each provided with a coating deposition source 410 in the form of a door, as shown in the coating deposition source 410 is a hinge for the deposition source port 420 It is fastened to both sides of the 400, it may be provided with two coating deposition source 410 in the one deposition source port 400.

Accordingly, when one of the two coating deposition sources 410 is mounted in a form covering the deposition source port 400, the target material 190 may be coated using the mounted coating deposition source 410. It becomes possible. In addition, the coating deposition source 410 is fastened by the hinge 420 can be easily removable to attach a variety of coating deposition sources.

In this case, the coating deposition source 410 illustrated in FIG. 6 is illustrated as having a plurality of circular targets 430, but the target 430 provided in the coating deposition source 410 is one of a rectangular shape. It may be provided as a target of may be provided with a target of various forms and types.

Therefore, two coating deposition sources 410 may be provided for each of the deposition source ports 400, so that five deposition source ports 400 are provided in the vacuum chamber 200. 410 may be provided with ten.

This serves to enable the coating apparatus according to an embodiment of the present invention to form various kinds of coating films on the surface of the feature 190.

Therefore, the barrel according to an embodiment of the present invention has a barrel heater at the center of the barrel to uniformly heat the target object, thereby obtaining a barrel having an excellent coated film formed thereon. There is an effect that can be obtained.

In addition, the barrel according to an embodiment of the present invention can supply a bias power to the jig shaft for fastening the workpiece to form a plasma on the workpiece to establish the adhesion of the coating film formed on the surface of the workpiece It has the effect of making it possible.

In addition, the coating apparatus according to an embodiment of the present invention includes a plurality of coating deposition source ports, and each of the coating deposition source ports is provided with two door-type coating deposition sources and various coating films with various deposition sources. There is an effect of providing a coating apparatus capable of forming a.

In addition, the coating apparatus according to an embodiment of the present invention is provided with a moving baffle module in the exhaust port connected to the vacuum chamber to condense and remove moisture inside the vacuum chamber, and to adjust the amount of gas sucked into the exhaust port. There is an effect of providing a coating apparatus capable of controlling the degree of vacuum of the vacuum chamber.

As described above, the preferred embodiments have been illustrated and described, but are not limited to the above-described embodiments, and various modifications may be made by those skilled in the art without departing from the spirit of the present invention. And modifications will be possible.

1 is a perspective view showing a barrel with a heating function according to an embodiment of the present invention.

2 is a diagram illustrating a scene in which a barrel having a heating function is mounted in a vacuum chamber according to an exemplary embodiment.

3 is a diagram illustrating a part of a gating device having a barrel with a heating function according to an embodiment of the present invention.

4 is a view illustrating a part of a gating device having a barrel with a heating function according to an embodiment of the present invention.

5 is a view illustrating a moving baffle module provided in the vacuum chamber according to an embodiment of the present invention.

6 is a view illustrating a deposition source port provided in a vacuum chamber and a pair of coating deposition sources provided in the deposition source port according to an embodiment of the present invention.

7 is a view showing a state in which a rod of the heater electrode docking cylinder is mounted in the docking groove.

<Description of the symbols for the main parts of the drawings>

100: barrel 110: central axis

120: barrel heater 130: upper plate

140: lower plate 150: jig shaft

160: plate fixing bar 170: transfer plate

180: central axis heat shield 190: the workpiece

200: vacuum chamber

Claims (14)

Central axis; A barrel heater provided to uniformly heat the object by maintaining a predetermined interval on the central axis; A circular upper plate fastened to an upper end of the central axis; A circular lower plate fastened to the lower end of the central axis; And And a jig shaft fastened to the upper plate and the lower plate, respectively, revolving about the central axis and rotating about its own axis, wherein a plurality of jigs are fastened to mount the workpiece. Barrel with. The method of claim 1, The barrel heater is a rod-shaped unit heater is arranged at equal intervals while maintaining a predetermined distance from the central axis, both ends are bent in a U-shape in the lower portion of the upper plate to be connected to the lower plate. Barrel with the object heating function to. The method of claim 1, A barrel having an object to be heated, which is provided between the central axis and the barrel heater, further comprising a central axis heat shield for protecting the central axis from heat generated by the barrel heater. A vacuum chamber; And And a barrel mounted inside the vacuum chamber. The barrel: silver Central axis; A barrel heater provided to uniformly heat the object by maintaining a predetermined interval on the central axis; A circular upper plate fastened to an upper end of the central axis; A circular lower plate fastened to the lower end of the central axis; And And a jig shaft fastened to the upper plate and the lower plate, respectively, revolving about the central axis and rotating about its own axis, wherein a plurality of jigs are fastened to mount the workpiece. Coating device with a barrel provided with. The method of claim 4, wherein The barrel heaters are arranged at equal intervals while the rod-shaped unit heaters are maintained at a constant distance from the central axis, and both ends thereof are bent in a U-shape at the bottom of the upper plate so as to be connected to the heater electrode module of the lower plate. Coating device provided with a barrel having a workpiece heating function, characterized in that there is. The method of claim 4, wherein It is provided between the central axis and the barrel heater, further comprising a central axis heat shield for protecting the central axis from the heat generated by the barrel heater having a barrel with a workpiece heating function, characterized in that Coating equipment. The method of claim 4, wherein The vacuum chamber: Sidewalls provided with a plurality of deposition source ports and a pair of coating deposition sources provided one at left and right positions of each of the deposition source ports; A lower surface having a transfer rail for charging or withdrawing the barrel on an inner surface thereof, the rod of the heater electrode docking cylinder and the heater electrode feedthrough protruding therein; And A coating device with a barrel having an object to be heated, characterized in that it comprises a; upper surface protruding the rod of the barrel for fixing the barrel position. The method of claim 7, The upper surface of the vacuum chamber is provided with a barrel having a workpiece heating function, characterized in that the bias electrode busbar for projecting the bias power to the jig shaft fastened to the upper plate in contact with the upper plate protrudes. One coating equipment. The method of claim 7, wherein The end of the rod of the barrel for fixing the barrel position is inclined so that its vertical section becomes inverted trapezoidal, The central shaft corresponding to the rod of the barrel for fixing the barrel position has an inclined trapezoid accommodating space so that the end thereof can be inserted into the barrel of the barrel for the barrel fixing cylinder. The barrel having the barrel heating function to be treated with the object, characterized in that the rod is lowered by inserting the barrel for fixing the barrel position is inserted into the receiving space formed at the end of the center axis. The method of claim 4, wherein The lower plate: A heater electrode module having the central shaft and the barrel heater coupled thereto, the heater electrode busbar being in contact with the heater electrode feed-through, and a heater electrode docking plate being in contact with the rod of the heater docking cylinder; And And a barrel driving module having the jig shaft fastened therein, and a barrel driving module including an orbital driving unit and a rotating driving unit for rotating and rotating the jig shaft. The method of claim 4, wherein A coating having a barrel with an object to be heated, characterized in that the lower portion of the barrel drive module corresponding to the transfer rail has a roller so that the barrel can be charged or withdrawn into the chamber. Device. The method of claim 4, wherein A coating device having a barrel with an object to be heated, characterized in that the exhaust port for connecting a vacuum pump for exhausting the inside of the vacuum chamber into a vacuum atmosphere at a predetermined position of the side wall. 13. The method of claim 12, The exhaust port is provided with a moving baffle module to not only condense the moisture in the vacuum chamber, but also to control the amount of gas sucked into the exhaust port. . The method of claim 13, The moving baffle module: silver The front and the back is open, the case having a plurality of sliding holes having an arc shape in the two opposite sides of the four sides; It has a rectangular shape and has four protrusions provided at the edges of each of the two sides facing each other, and two protrusions provided at one side of the four protrusions in the longitudinal direction of the four protrusions have the ends of the sliding holes. A plurality of baffle plates which are inserted to protrude through and are respectively fastened to two sides of the case, the plurality of baffle plates being rotatable about an axis connecting the remaining two protrusions; Ends of the protrusions exposed through the sliding hole are fastened to one of two side surfaces of the case, and a driving means is connected to the protrusions exposed through the sliding hole along the sliding hole. Sliding jig to move along the; And And a cooling module through which a cooling medium supplied from the outside passes through the casing.

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