KR20150125935A - 기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 - Google Patents

기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 Download PDF

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Publication number
KR20150125935A
KR20150125935A KR1020157022665A KR20157022665A KR20150125935A KR 20150125935 A KR20150125935 A KR 20150125935A KR 1020157022665 A KR1020157022665 A KR 1020157022665A KR 20157022665 A KR20157022665 A KR 20157022665A KR 20150125935 A KR20150125935 A KR 20150125935A
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KR
South Korea
Prior art keywords
substrate
mask
nozzle
bending deformation
amount
Prior art date
Application number
KR1020157022665A
Other languages
English (en)
Korean (ko)
Inventor
겐신 혼다
다카시 이와데
Original Assignee
토레이 엔지니어링 컴퍼니, 리미티드
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Priority claimed from JP2013036229A external-priority patent/JP6023610B2/ja
Priority claimed from JP2013036202A external-priority patent/JP6018522B2/ja
Application filed by 토레이 엔지니어링 컴퍼니, 리미티드 filed Critical 토레이 엔지니어링 컴퍼니, 리미티드
Publication of KR20150125935A publication Critical patent/KR20150125935A/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
    • B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
    • H01L51/0096—
    • B05B15/045—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • H01L51/0097—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates

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  • Electroluminescent Light Sources (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020157022665A 2013-02-26 2014-02-18 기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법 KR20150125935A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2013036229A JP6023610B2 (ja) 2013-02-26 2013-02-26 塗布装置および塗布方法
JPJP-P-2013-036202 2013-02-26
JP2013036202A JP6018522B2 (ja) 2013-02-26 2013-02-26 基板処理装置、膜形成装置およびマスクのセット方法
JPJP-P-2013-036229 2013-02-26
PCT/JP2014/053681 WO2014132831A1 (ja) 2013-02-26 2014-02-18 基板処理装置、マスクのセット方法、膜形成装置および膜形成方法

Publications (1)

Publication Number Publication Date
KR20150125935A true KR20150125935A (ko) 2015-11-10

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ID=51428103

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157022665A KR20150125935A (ko) 2013-02-26 2014-02-18 기판 처리 장치, 마스크의 세트 방법, 막 형성 장치 및 막 형성 방법

Country Status (3)

Country Link
KR (1) KR20150125935A (zh)
CN (1) CN105026051A (zh)
WO (1) WO2014132831A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11207707B2 (en) 2017-03-22 2021-12-28 Hefei Boe Optoelectronics Technology Co., Ltd. Curved surface coating device for curved surface display panel and glue coating apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108284032B (zh) * 2018-03-30 2019-10-01 宁波高新区神台德机械设备有限公司 喷涂工业机器人
JP7269000B2 (ja) * 2018-12-26 2023-05-08 キヤノントッキ株式会社 基板載置方法、成膜方法、成膜装置、および有機ｅｌパネルの製造システム
JP7113861B2 (ja) * 2020-03-13 2022-08-05 キヤノントッキ株式会社 マスク取付装置、成膜装置、マスク取付方法、成膜方法、電子デバイスの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5665980A (en) * 1979-11-05 1981-06-04 Hitachi Ltd Vacuum deposition device
JP2003133069A (ja) * 2001-10-29 2003-05-09 Ritsuo Inaba 有機ｅｌ素子の製造方法
JP4418262B2 (ja) * 2004-03-12 2010-02-17 三井造船株式会社 基板・マスク固定装置
JP4773834B2 (ja) * 2006-02-03 2011-09-14 キヤノン株式会社 マスク成膜方法およびマスク成膜装置
JP2007224396A (ja) * 2006-02-27 2007-09-06 Canon Inc 成膜方法および成膜用マスク
JP5258278B2 (ja) * 2007-12-13 2013-08-07 キヤノントッキ株式会社 成膜用マスク及びマスク密着方法
JP5531674B2 (ja) * 2009-05-19 2014-06-25 株式会社リコー 画像形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11207707B2 (en) 2017-03-22 2021-12-28 Hefei Boe Optoelectronics Technology Co., Ltd. Curved surface coating device for curved surface display panel and glue coating apparatus

Also Published As

Publication number Publication date
CN105026051A (zh) 2015-11-04
WO2014132831A1 (ja) 2014-09-04

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