Hereinafter, preferred embodiments of a test tray collecting apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
2 to 5, the test tray collection apparatus 1 according to the present invention is installed in the inline test handler 100. The inline test handler 100 includes a plurality of chamber units 110 and a conveyor unit 120 for conveying the test tray 200. The chamber unit 110 includes a plurality of chamber units 110 for testing semiconductor devices accommodated in the test tray 200.
The chamber units 110 connect the semiconductor devices accommodated in the test tray 200 to the test equipment 400, respectively. When the semiconductor device is connected to the test equipment 400, the test equipment 400 performs a test process for testing the semiconductor device.
The conveyor unit 120 carries the test tray 200 such that the test tray 200 having completed the loading process performs the test process through at least one of the chamber units 110. The conveyor unit 120 carries the test tray 200 through at least one of the chamber units 110 so that the unloading process is performed on the test tray 200 that has been tested. That is, the conveyor unit 120 connects the chamber units 110 in-line by conveying the test tray 200 along a conveyance path (MP, shown in FIG. 2).
Here, the inline test handler 100 performs the test process using the test tray 200, which is different depending on the semiconductor device. For example, when testing a first semiconductor device having a first size, the inline test handler 100 may use a first test tray 210 capable of housing the first semiconductor device. When testing a second semiconductor device having a second size smaller than or greater than the first size, the inline test handler 100 uses a second test tray 220 capable of housing the second semiconductor device . The inline test handler 100 uses a test tray 200 corresponding to the semiconductor device according to at least one of the size of the semiconductor device, the number of the semiconductor devices connected to the test equipment 400 at one time, and the type of the semiconductor device .
The test tray collecting apparatus 1 according to the present invention collects the first test tray 210 from the conveyor unit 120. The first test tray 210 may be a semiconductor device in which the loading process, the test process, and the unloading process are completed and the semiconductor device to be loaded in the inline test handler 100 for a predetermined period of time has been stored. The first test tray 210 may be for storing semiconductor elements before the change in the semiconductor elements in the inline test handler 100. The first test tray 210 may be damaged or damaged in the course of performing any one of the loading process, the test process, and the unloading process, thereby requiring repair or replacement.
The test tray collecting apparatus 1 according to the present invention collects the first test tray 210 from the conveyor unit 120 so that the first test tray 210 is continuously conveyed by the conveyor unit 120 Can be prevented. Accordingly, the test tray collecting apparatus 1 according to the present invention can reduce the load applied to the conveyor unit 120, and the conveyance unit 120 can be conveyed to the test tray It is possible to prevent a delay in the operation of transporting the mobile terminal 200. Therefore, the test tray collecting apparatus 1 according to the present invention can improve the productivity of the tested semiconductor devices by reducing the time taken until the semiconductor devices are classified according to the test results after the test.
To this end, the test tray collecting apparatus 1 according to the present invention includes a collecting body 2 installed in the conveyor unit 120, a first collecting and elevating unit 3 for raising and lowering the first test tray 210, And a carry-out unit (4) for taking out the first test tray (210) from the collection body (2). The test tray collecting apparatus 1 according to the present invention operates as follows to recover the first test tray 210 from the conveyor unit 120. [
4, the first collecting and elevating unit 3 collects the first test tray 210 located on the conveying path MP at a collecting position WP located on the upper side of the conveying path .
5, the carry-out unit 4 moves the first test tray 210 to the collection body 2 (FIG. 2) by moving the first test tray 210 located at the collection position WP, .
The test tray collecting apparatus 1 according to the present invention collects the first test tray 210 from the conveyor unit 120 so that the first test tray 210 causes the conveyor unit 120 Can be prevented from delaying the operation of conveying the test tray 200, thereby improving the productivity of the semiconductor devices that have been tested through the in-line test handler 100 and classified according to the grade.
Hereinafter, the collecting body 2, the first collecting and elevating unit 3, and the taking-out unit 4 will be described in detail with reference to the accompanying drawings.
Referring to FIGS. 2 to 5, the collection body 2 is installed in the conveyor unit 120. The collection body 2 may be coupled to the conveyor unit 120 so as to be positioned above the conveyor unit 120. The recovery body (2) supports the first collection and elevation unit (3) and the carry-out unit (4). The collection body 2 may be installed in the conveyor unit 120 so as to be positioned between the chamber units 110. Although not shown, the collection body 2 may be installed in the conveyor unit 120 so as to be positioned at the front end of the chamber unit 110 positioned at the foremost position among the chamber units 110. The collecting body 2 may be formed as a hollow rectangular parallelepiped. However, the collecting body 2 may be formed in any other shape as long as the first test tray 210 can be positioned therein.
2 to 6, the first collection and elevation unit 3 is coupled to the collection body 2. The first collection and elevation unit 3 raises the first test tray 210 located at the conveyance path MP to the collection position WP. Accordingly, the first test tray 210 is separated from the conveyor unit 120, thereby being switched from the collecting main body 2 to a state capable of being carried out. That is, the first test tray 210 is switched from the conveyor unit 120 to a recoverable state. The first recovering and elevating unit 3 may include a first recovering and elevating member 31 and a first recovering and elevating device 32.
The first ascending / descending member (31) is coupled to the collection body (2) to be movable up and down. The first ascending / descending member 31 may support a first test tray 210 that is taken out from the collection body 2. The first test tray 210 is lifted from the conveyance path MP to the recovery position WP while being supported by the first recovery and elevating member 31, (2).
The first recovering and elevating member 31 may include a first recovering guide member 311. The first recovery guide member 311 may guide the first test tray 210 so that the first test tray 210 moves linearly in the process of removing the first test tray 210 from the collection body 2. [ The first recovering guide member 311 may be formed in the shape of a nickel ball as a whole. The first recovery guide member 311 may be installed so that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The first recovering and elevating mechanism 32 moves the first recovering and elevating member 31 up and down. The first recovering and elevating mechanism 32 is configured to raise the first recovering and elevating member 31 while the first recovering and elevating member 31 supports the first test tray 210, The tray 210 can be raised to the recovery position WP. When the test tray 200 is conveyed along the conveyance path MP so that the conveyor unit 120 passes through the test tray collecting apparatus 1 according to the present invention, The first retrieving and elevating member 31 can be raised so as to avoid the test tray 200 carried along the conveying path MP. Accordingly, the conveyor unit 120 can continuously convey the test tray 200 along the conveyance path MP without being disturbed by the first retrieving and elevating member 31. [0050]
The first take-up and elevator mechanism 32 includes a cylinder system using a hydraulic cylinder or a pneumatic cylinder, a ball screw system using a motor and a ball screw, a motor, a rack gear, and a pinion gear. A belt system using a motor, a pulley and a belt, a linear motor using a coil and a permanent magnet, and the like can be used to raise and lower the first take-up and elevating member 31. The first take-up device (32) can be coupled to the collection body (2). The first recovering and elevating member 31 may be coupled to the first recovering and elevating mechanism 32.
2 to 7, the first recovery and elevation unit 3 may include a first stopper 33 (shown in FIG. 6).
The first stopper 33 is coupled to the first retrieving and elevating member 31. Accordingly, the first stopper 33 can move up and down together with the first take-up and elevator tool 32 moving up and down the first take-up and elevated member 31. The first stopper 33 stops the first test tray 210 carried along the conveyance path MP at a position where it can be supported by the first retrieving and elevating member 31. When the first test tray 210 is stopped by the first stopper 33, the first recovering and elevating mechanism 32 raises the first recovering and elevating member 31 so that the first test tray 210 ) To the recovery position (WP). Therefore, the test tray collection apparatus 1 according to the present invention can improve the accuracy of the operation of raising the first test tray 210 to the collection position WP.
The first stopper 33 may include a first stopping member 331 (shown in Fig. 7) and a first moving means 332 (shown in Fig. 7).
The first stopping member 331 may be coupled to the first recovering and elevating member 31 so as to be positioned above the first recovering guide member 311. When the first take-up and elevating mechanism 32 moves down the first take-up and elevating member 31, the first stopping member 331 is positioned on the conveying path MP. Accordingly, the first stopping member 331 can stop the first test tray 210 by supporting the first test tray 210 carried along the transport path MP. When the first test tray 210 is stopped by the first stop member 331, the first recovering and elevating member 31 is lifted up by the first recovering and elevating mechanism 32, The test tray 210 can be supported and raised. The first stopping member 331 is coupled to the first moving means 332. The first stopping member 331 may be formed of a material having a predetermined elastic force. Accordingly, in the process of contacting the first test tray 210 with the first stop member 331, the first test tray 210 is damaged or damaged, It is possible to prevent breakage.
The first moving means 332 moves the first stopping member 331. The first moving means 332 moves the first stop member 331 from the first collecting guide member 311 to the inside of the collection body 2 before the first test tray 210 enters the collection body 2, The first stop member 331 can be moved in the first direction to protrude. The first moving means 332 is supported by the first recovering and elevating member 31 after the first test tray 210 is stopped and the first stopping member 331 is moved to the first recovering guide member 331. [ The first stopping member 331 can be moved in the second direction so as not to protrude from the first stopping member 311. And the second direction is a direction opposite to the first direction.
The first moving means 332 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, The first stationary member 331 can be moved by using a belt method, a linear motor using a coil and a permanent magnet, or the like. The first moving means 332 may be coupled to the first retrieving and elevating member 31.
2 to 10, the first collection and elevation unit 3 may include a first collection movement mechanism 34. [
The first recovering movement mechanism 34 moves the first recovering and elevating member 31 so that the first test tray 210 is supported by the first recovering and elevating member 31. [ As shown in FIG. 7, when the first test tray 210 is stopped by the first stopper 33, the first recovering movement mechanism 34 is moved by the first recovery guide 34, The member 311 can be moved toward the first test tray 210. Accordingly, the first recovery guide member 311 is positioned below the first test tray 210. Then, as shown in FIG. 10, as the first recovering and elevating mechanism 32 raises the first recovering and elevating member 31, the first recovering guide member 311 performs the first test The tray 210 can be supported and raised to the recovery position WP.
The first reciprocating mechanism 34 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, The first take-up and elevating member 31 can be moved using a belt system using a coil, a linear motor using a permanent magnet, or the like. The first recovery movement mechanism (34) can be coupled to the first recovery and elevating member (31).
Referring to FIGS. 2 to 10, the test tray collection apparatus 1 according to the present invention may further include a second collection and elevation unit 5.
The second collection and elevation unit (5) is coupled to the collection body (2). The second collecting and elevating unit 5 is disposed on the opposite side of the first collecting and elevating unit 3 on the basis of the first test tray 210 supported by the first collecting and elevating unit 3, 2). ≪ / RTI > That is, the first test tray 210 is positioned between the second recovery and elevation unit 5 and the first recovery and elevation unit 3. The second collecting and elevating unit 5 raises the first test tray 210 located at the conveying path MP together with the first collecting and elevating unit 3 to the collecting position WP. Accordingly, the test tray collection apparatus 1 according to the present invention can stably raise the first test tray 210 to the collection position WP while preventing the first test tray 210 from being inclined, The first test tray 210 is separated from the conveyor unit 120 and is switched from the collecting main body 2 to a state capable of being carried out. The second collection and elevation unit 5 may include a second collection and elevation member 51, a second collection and withdrawal unit 52, and a second collection movement unit 53.
The second ascending / descending member (51) is coupled to the collection body (2) so as to be able to ascend and descend. The second recovering and elevating member 51 can support the first test tray 210 carried out from the collecting body 2. The first test tray 210 is moved to the withdrawal position in the conveying path MP in a state where one side is supported by the first recovering and elevating member 31 and the other side is supported by the second recovering and elevating member 51 WP), and then can be taken out of the collection main body 2 by the take-out unit 4. [
The second recovering and elevating member 51 may include a second recovering guide member 511 (shown in FIG. 7). The second recovery guide member 511 may guide the first test tray 210 so that the first test tray 210 moves linearly while the first test tray 210 is taken out from the collection body 2. [ The first test tray 210 is guided by the first collecting guide member 311 and the other is guided by the second collecting guide member 511 so that the first test tray 210 is linearly moved from the collecting main body 2 It can be exported. The second recovery guide member 511 may be formed in the shape of a nickel silver as a whole. The second recovery guide member 511 may be installed so that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The second recovering and elevating mechanism (52) lifts the second recovering and elevating member (51). The second recovering and elevating mechanism 52 raises the second recovering and elevating member 51 while the second recovering and elevating member 51 supports the first test tray 210, The tray 210 can be raised to the recovery position WP. When the conveyor unit 120 carries the test tray 200 along the conveying path MP so as to pass through the test tray collecting apparatus 1 according to the present invention, The second retrieving and elevating member 51 can be raised so as to avoid the test tray 200 carried along the conveying path MP. Accordingly, the conveyor unit 120 can continuously carry the test tray 200 along the conveyance path MP without being disturbed by the second recovery and elevation member 51.
The second take-off elevator 52 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, The second recovery and ascending member 51 can be raised and lowered by using a belt system using a coil, a linear motor using a permanent magnet, or the like. The second collecting elevator 52 may be coupled to the collecting body 2. The second recovering and elevating member (51) may be coupled to the second recovering and elevating mechanism (52).
The second recovery movement mechanism 53 moves the second recovery and elevation member 51 so that the first test tray 210 is supported by the second recovery and elevation member 51. The second recovery movement mechanism 53 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear, and a pinion gear, a motor, , The linear motor using a coil and a permanent magnet, etc., can be used to move the second recovering and ascending member 51. The second recovery movement mechanism (53) can be coupled to the second recovery and elevation member (51).
5 and 7 to 10, the second collecting and elevating unit 5 and the first collecting and elevating unit 3 operate as follows to carry out a first test carried by the conveying unit 120 The tray 210 can be switched from the recovery body 2 to a state in which it can be taken out.
7, the second recovering and elevating mechanism 52 is disposed so that the second recovering and ascending / descending member 51 is positioned above the conveying path MP, . The first take-up and elevating mechanism 32 descends the first recovering and elevating member 31 so that the first stopping member 331 is positioned on the conveying path MP. When the first stopping member 331 is positioned on the transport path MP, the first moving means 332 moves the first stopping member 331 in the first direction. Accordingly, the first test tray 210 conveyed by the conveyor unit 120 (shown in FIG. 2) passes through the lower portion of the second recovery and elevating member 51, and then the first stop member 331 ).
Next, as shown in FIG. 8, the second recovering and elevating mechanism 52 descends the second recovering and ascending member 51. In this case, the second recovering and elevating member 51 and the first recovering and elevating member 31 are moved by the second collecting and moving mechanism 53 and the first collecting and moving mechanism 34 in the direction As shown in FIG. This is because the second recovering movement mechanism 53 and the first recovering movement mechanism 34 are arranged such that the interval between the second recovering guide member 511 and the first recovering guide member 311 becomes wide, The guide member 511 and the first recovery guide member 311. [
9, the second recovering movement mechanism 53 and the first recovering movement mechanism 34 are disposed between the second recovering and elevating member 51 and the first recovering and elevating member 31 The second recovering and elevating member 51 and the first recovering and elevating member 31 are moved so as to be narrowed. This is because the second recovering movement mechanism 53 and the first recovering movement mechanism 34 are arranged such that the interval between the second recovery guide member 511 and the first recovery guide member 311 is narrowed, The guide member 511 and the first recovery guide member 311. [ Accordingly, the second recovering and elevating member 51 and the first recovering and elevating member 31 are positioned below the first test tray 210.
Next, as shown in FIG. 10, the second take-up and elevator tool 52 raises the second take-off and elevating member 51. At the same time, the first recovering and elevating mechanism (32) raises the first recovering and elevating member (31). Accordingly, the first test tray 210 is elevated to the recovery position WP after one side is supported by the first recovery and elevation member 31 and the other side is supported by the second recovery and elevation member 51. [ The state of returning from the collection main body 2 is switched.
5, the take-out unit 4 is arranged so that the first test tray 210 positioned at the collecting position WP is taken out of the collecting body 2, . 10) and the second recovery guide member 511 (shown in FIG. 10) are moved in a straight line so that the first recovery guide member 311 (shown in FIG. 10) The first test tray 210 may be guided to be taken out of the main body 2. [
The test tray collecting apparatus 1 according to the present invention switches the first test tray 210 carried by the conveyor unit 120 from the collecting main body 2 to a state ready to be taken out from the collecting main body 2 The first test tray 210 can be taken out from the collection body 2.
2 to 5, the carry-out unit 4 carries out the function of taking out the first test tray 210 from the collection body 2. The take-out unit (4) can be coupled to the collection body (2). The carry-out unit 4 moves the first test tray 210 located at the recovery position WP to the first test tray 210 by moving the first test tray 210 in the take-out direction And can be taken out from the collection main body 2. The carry-out unit 4 may include a first carry-out mechanism 41.
The first delivery mechanism (41) is coupled to the collection body (2). The first unloading mechanism 41 may move the first test tray 210 located at the recovery position WP in the unloading direction (arrow E direction). As shown in FIG. 4, when the first take-up and landing unit 3 raises the first test tray 210 to the collection position WP, the first take-out unit 41 Can push out the first test tray 210 supported by the first take-up and elevator unit 3 and take it out of the collection main body 2. The first carrying-out mechanism 41 may include a first carrying-out member 411 and a first operating mechanism 412.
The first carry-out member 411 is coupled to the first operating mechanism 412. The first carry-out member 411 is moved by the first operating mechanism 412 so that the first test tray 210 located at the collection position WP is pushed and moved in the take-out direction (arrow E direction) . The first carry-out member 411 may have a rectangular shape as a whole, but the present invention is not limited thereto. The first carry-out member 411 may be formed in a different shape as long as the first test tray 210 can be moved.
The first actuating mechanism 412 moves the first carry-out member 411. The first operating mechanism 412 is coupled to the collection body 2 so as to be located outside the collection body 2. When the first take-up and elevator unit 3 raises the first test tray 210 to the return position WP, the first operating mechanism 412 moves the first carry-out member 411 to the return position (In the direction of the arrow E) by moving the first test tray 210 toward the first test tray 210 located in the first direction (WP). The first operating mechanism 412 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, It is possible to move the first carry-out member 411 by using a belt method, a linear motor using a coil and a permanent magnet, or the like.
Referring to Figs. 2 to 11, the test tray collecting apparatus 1 according to the present invention may further include a collecting and conveying unit 6 (shown in Fig. 11).
The recovery transport unit (6) is coupled to the collection body (2). The recovery conveying unit 6 is disposed on the outside of the recovery body 2 so as to support the bottom surface of the first test tray 210 carried out from the recovery body 2, .
The recovery transport unit 6 moves the first test tray 210 in the transport direction (arrow E direction). As shown in FIG. 5, the take-out unit 4 moves the first test tray 210 located at the collection position WP in the unloading direction (arrow E direction) A part of the first test tray 210 located outside the collection body 2 is supported by the collection and transportation unit 6 when a part of the collection tray 210 is taken out of the collection body 2. [ When the part of the first test tray 210 is supported by the recovery transport unit 6 as shown in FIG. 11, the recovery transport unit 6 moves the first test tray 210 in the transport direction E direction), the first test tray 210 can be completely removed from the collection body 2. Accordingly, the test tray recovering apparatus 1 according to the present invention can recover the first test tray 210 from the conveyor unit 120. [
The recovery transport unit 6 may include a recovery lower roller 61 (shown in Fig. 11) and a recovery rotation mechanism 62 (shown in Fig. 11).
The recovery lower roller (61) is rotatably installed in the recovery body (2). The recovery lower roller 61 is disposed on the outside of the recovery body 2 so as to support the bottom surface of the first test tray 210 carried out from the recovery body 2, .
The recovery and rotation mechanism 62 rotates the recovery lower roller 61. The recovery and rotation mechanism 62 may be installed in the recovery body 2 or the conveyor unit 120. 11, in a state in which the first test tray 210 is taken out of the collecting main body 2 and supported by the collecting lower roller 61, the collecting and rotating mechanism 62 rotates the take- The first test tray 210 can be moved in the unloading direction (arrow E direction) by rotating the second test tray 61.
The recovery and rotation mechanism 62 may include a motor that is directly coupled to the rotation shaft of the recovery lower roller 61 to rotate the recovery lower roller 61 about the rotation axis. When the rotation shaft of the motor and the recovery lower roller 61 are spaced apart from each other by a predetermined distance, the recovery rotation mechanism 62 may further include connection means for connecting the rotation shaft of the motor and the recovery lower roller 61 have. The connecting means may be a chain, a belt, a gear, or the like.
The recovery conveying unit 6 may include a plurality of the recovery lower rollers 61. The recovery lower rollers 61 are installed to be spaced from each other in the unloading direction (arrow E direction). Accordingly, the test tray collecting apparatus 1 according to the present invention can increase the distance for moving the first test tray 210 in the carrying-out direction (arrow E direction). In this case, the recovery conveying unit 6 may include a recovery interlocking mechanism 63.
The recovery interlocking mechanism 63 connects the recovery lower rollers 61 to each other. Accordingly, when the recovery and rotation mechanism 62 rotates at least one of the recovery lower rollers 61, the remaining recovery lower rollers 61 can be rotated by interlocking with the recovery and interlocking mechanism 63 have. Therefore, the test tray collecting apparatus 1 according to the present invention can rotate a plurality of collecting lower rollers 61 by using one collecting and rotating mechanism 62, so that not only the overall size can be reduced, 1 test tray 210 can be saved. The recovery interlocking mechanism 63 may be a belt, a chain, a gear, or the like.
11, the recovery conveying unit 6 may include a recovery upper roller 64 and a recovery roller elevating mechanism 65. As shown in FIG.
The recovery upper roller (64) is rotatably installed in the recovery body (2). The recovery upper roller 64 may be coupled to the recovery body 2 so as to be positioned above the recovery lower roller 61. The recovery upper roller 64 is disposed on the outside of the recovery body 2 so as to support the upper surface of the first test tray 210 carried out from the recovery body 2, .
The recovery roller elevating mechanism (65) lifts up the recovery upper roller (64). The recovery upper roller 64 is coupled to the recovery roller elevating mechanism 65. The recovery roller elevating mechanism 65 may be coupled to the recovery body 2 such that the recovery upper roller 64 is positioned above the recovery lower roller 61. The collection roller elevating mechanism 65 may be coupled to the collection body 2 so as to be located outside the collection body 2.
The recovery roller elevating mechanism 65 can raise the recovery upper roller 64 before the first test tray 210 located at the recovery position WP is taken out of the recovery body 2 . When the takeout unit 4 is taken out of the collection main body 2 so that the first test tray 210 located at the collection position WP is supported by the collection lower roller 61, 65 may be brought into contact with the upper surface of the first test tray 210 supported by the lower recovery roller 61 by lowering the upper recovery roller 64.
Accordingly, the first test tray 210 moves in the unloading direction (arrow E direction) while passing between the recovering upper roller 64 and the recovering lower roller 61, It is possible to prevent the occurrence of the shaking in the process of moving to the second position. In this case, the recovery upper roller 64 is moved to the first test tray 210 as the first test tray 210 is moved in the unloading direction (arrow E direction) by the recovery lower roller 61 And can be rotated in a contacted state. Therefore, the test tray collecting apparatus 1 according to the present invention can stably move the first test tray 210 in the unloading direction (direction of arrow E), and the first test tray 210 It can be prevented from being damaged or broken as it moves in contact with the recovered upper roller 64.
The recovery roller elevating mechanism 65 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear and a pinion gear, a motor, a pulley, The recovered upper roller 64 can be lifted and lowered by using a belt system, a linear motor using a coil and a permanent magnet, or the like.
Referring to FIGS. 2 to 12, the test tray collection apparatus 1 according to the present invention may further include a recovery storage unit 7 (shown in FIG. 12).
The recovery and storage unit 7 is installed apart from the conveyor unit 120. The recovery and storage unit (7) holds a first test tray (210) taken out from the collection body (2). Accordingly, the test tray collection apparatus 1 according to the present invention can continuously carry out the process of taking out the first test tray 210 from the collection body 2. Therefore, the test tray collecting apparatus 1 according to the present invention can save time for collecting the first test tray 210.
The recovery and storage unit 7 may include a recovery and storage member 71 and a recovery drive mechanism 72.
The recovering and storing member 71 may store the first test tray 210. The collecting and storing member 71 may stack a plurality of the first test trays 210 up and down. To this end, the recovery and storage member 71 may include a plurality of support means vertically spaced apart from each other. Each of the first test trays 210 may be stored in the recovery and storage member 71 by being supported by the support means. The collecting and storing member 71 may be formed in a rectangular parallelepiped shape having an empty interior as a whole, but the present invention is not limited thereto and may be formed in any other form as long as a plurality of supporting means can be installed up and down.
The recovery drive mechanism (72) lifts the recovery and storage member (71). The recovery drive mechanism 72 is configured to move the recovery and storage member 71 up and down so that the first test tray 210 delivered from the recovery transport unit 6 is stacked on the recovery storage member 71 . The recovery drive mechanism 72 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley and a belt The recovery and storage member 71 can be moved up and down by using a belt motor, a linear motor using a coil, a permanent magnet, or the like.
2 to 13, the carry-out unit 4 may include a second carry-out mechanism 42 (shown in FIG. 13).
The second unloading mechanism 42 moves the first test tray 210 supported by the recovering and conveying unit 6 to the collecting and storing unit 7. The first test tray 210 can be stored in the recovering and storing member 71 by being moved into the recovering and storing member 71 by the second delivering mechanism 42. The second delivery mechanism (42) can be coupled to the collection body (2). The second delivery mechanism 42 may include a second delivery member 421 and a second delivery mechanism 422.
And the second carry-out member 421 is coupled to the second actuating mechanism 422. The second carry-out member 421 may be moved by the second operating mechanism 422 so as to push the first test tray 210 in the carrying out direction (arrow E direction). The second carry-out member 421 may be formed in a rectangular shape as a whole, but the present invention is not limited thereto. The second carry-out member 421 may be formed in a different shape as long as the first test tray 210 can be pushed and moved.
The second operating mechanism 422 moves the second carry-out member 421. The second operating mechanism 422 is coupled to the collection body 2 so as to be located outside the collection body 2. The second operating mechanism 422 may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, It is possible to move the second carry-out member 421 by using a belt method, a linear motor using a coil and a permanent magnet, or the like.
The second actuating mechanism 422 may lift the second carry-out member 421. Before the first test tray 210 located at the collection position WP is taken out of the collection main body 2, the second operation mechanism 422 moves the second take-out member 421 to the first It is possible to raise the second carry-out member 421 so as not to interfere with the test tray 210. When the first test tray 210 is supported by the recovery transport unit 6 and is moved a predetermined distance, the second operation mechanism 422 moves the second delivery member 421 to the first test tray 210 The first test tray 210 can be moved to the collecting and storing unit 7 by moving the second carry-out member 421 after descending the second carry-out member 421 so as to contact the first test tray 210.
Hereinafter, preferred embodiments of the inline test handler according to the present invention will be described in detail with reference to the accompanying drawings.
2 to 19, an inline test handler 100 according to the present invention includes a plurality of chamber units 110 (shown in FIG. 14) in which a test process for semiconductor devices is performed, A sorting unit 130 (shown in FIG. 14) spaced apart from the chamber units 110, and a conveyor unit 120 (shown in FIG. 14) And a collecting device 1 for collecting the first test tray 210 from the unit 120. [ Since the recovery device 1 is the same as that described in the above-described test tray recovery device 1 of the present invention, a detailed description thereof will be omitted.
The sorting unit 130 performs a loading process and an unloading process for semiconductor devices. The loading process refers to a process of accommodating a semiconductor device to be tested in a test tray 200 (shown in FIG. 15). The unloading process refers to a process of separating the tested semiconductor devices from the test tray 200 and classifying them according to the test results. Each of the chamber units 110 performs the test process. A plurality of the chamber units 110 are installed along the conveyor unit 120. The conveyor unit 120 connects the sorting unit 130 and the chamber units 110 installed in a spaced relation to each other. Accordingly, the in-line test handler 100 according to the present invention can perform the loading process and the unloading process for the sorting unit 130 independently of the chamber units 11 have. Therefore, the inline test handler 100 according to the present invention can achieve the following operational effects.
First, since the inline test handler 100 according to the present invention can independently perform the test process for the loading process and the unloading process, the in-line test handler 100 can perform the test process independently of the chamber units 110 and the sorting unit 130 Even if one fails, the remaining device can continue to operate normally. Therefore, the inline test handler 100 according to the present invention prevents the entire system from stopping when any one of the chamber units 110 and the sorting unit 130 fails, .
Secondly, the inline test handler 100 according to the present invention can efficiently distribute the test tray 200 to the conveyor unit 120 in consideration of the time taken to perform each of the loading process, the unloading process, can do. Therefore, the inline test handler 100 according to the present invention can improve the equipment operation rate.
Thirdly, the inline test handler 100 according to the present invention can recover the first test tray 210 from the conveyor unit 120 so that the first test tray 210 is continuously conveyed by the conveyor unit 120 It can be prevented from being carried. Accordingly, the in-line test handler 100 according to the present invention can reduce the load applied to the conveyor unit 120, and the first test tray 210 can prevent the conveyor unit 120 from moving to the test tray 200 can be prevented from being delayed. Accordingly, the in-line test handler 100 according to the present invention can improve the productivity of the tested semiconductor devices by reducing the time taken until the semiconductor devices are classified according to the test results after testing the semiconductor devices.
Fourth, since the sorting unit 130 and the chamber units 110 are constituted by separate devices, the inline test handler 100 according to the present invention can reduce the number of mechanisms or devices installed in the sorting unit 130 . Accordingly, the inline test handler 100 according to the present invention can reduce the jam rate for the sorting unit 130. [ Accordingly, the inline test handler 100 according to the present invention increases the operation time of the sorting unit 130 by reducing the time required for the sorting unit 130 to stop as jamming occurs in the sorting unit 130 .
Hereinafter, the chamber unit 110, the conveyor unit 120, and the sorting unit 130 will be described in detail with reference to the accompanying drawings.
14 and 15, the chamber unit 110 performs the test process. The chamber unit 110 may perform the test process by connecting the semiconductor devices accommodated in the test tray 200 to the test equipment 400. The test equipment 400 tests the semiconductor device when the semiconductor device is electrically connected to the semiconductor device as the semiconductor device is connected thereto. The test tray 200 can accommodate a plurality of semiconductor elements. In this case, the chamber unit 110 may connect a plurality of semiconductor devices to the test equipment 400, and the test equipment 400 may test a plurality of semiconductor devices. The test equipment 400 may include a Hi-Fix Board.
The chamber unit 110 includes a first chamber 110a (shown in FIG. 15) in which the test process is performed. The test chamber 400 is installed in the first chamber 110a. The test equipment 400 is partially or wholly inserted into the first chamber 110a. The test equipment 400 includes test sockets (not shown) to which the semiconductor devices housed in the test tray 200 are connected. The test equipment 400 may include a number of test sockets that approximately match the number of semiconductor devices housed in the test tray 200. For example, the test tray 200 can accommodate 64, 128, 256, 512, etc. semiconductor elements. When the semiconductor devices housed in the test tray 200 are connected to the test sockets, the test equipment 400 can test the semiconductor devices connected to the test sockets. The first chamber 110a may be formed in a rectangular parallelepiped shape in which a portion where the test equipment 400 is inserted is opened.
The chamber unit 110 includes a contact unit 110b (shown in FIG. 15) for connecting the test tray 200 to the test equipment 400. The contact unit 110b is installed in the first chamber 110a. The contact unit 110b connects the semiconductor devices accommodated in the test tray 200 to the test equipment 400. The contact unit 110b may move the semiconductor devices accommodated in the test tray 200 toward the test equipment 400 and away from the test equipment 400. [ The semiconductor devices accommodated in the test tray 200 are moved to the test equipment 400 by moving the semiconductor devices housed in the test tray 200 toward the test equipment 400 Respectively. Accordingly, the test equipment 400 can test semiconductor devices. When the test for the semiconductor devices is completed, the contact unit 110b can move the semiconductor devices housed in the test tray 200 in a direction away from the test equipment 400. [
The test tray 200 is provided with carrier modules for accommodating semiconductor elements. The carrier modules may each contain at least one semiconductor element. The carrier modules are resiliently and movably coupled to the test tray 200 by springs (not shown), respectively. When the contact unit 110b pushes the semiconductor devices housed in the test tray 200 toward the test equipment 400, the carrier units can move toward the test equipment 400. When the contact unit 110b removes the pushing force of the semiconductor devices housed in the test tray 200, the carrier modules can move away from the test equipment 400 due to the restoring force of the springs. The test tray 200 may move together when the contact unit 110b moves the carrier modules and the semiconductor elements.
Although not shown, the contact unit 110b may include a plurality of contact sockets for contacting the semiconductor devices housed in the test tray 200. [ The contact sockets may contact the semiconductor devices housed in the test tray 200 to move the semiconductor devices, thereby connecting the semiconductor devices to the test equipment 400. The contact unit 110b may include a number of contact sockets that are approximately equal to the number of semiconductor elements received in the test tray 200. The contact unit 110b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, a belt using a motor, a pulley, Method, a linear motor using a coil and a permanent magnet, or the like.
14 through 19, the chamber unit 110 may be configured to allow the test equipment 400 (shown in FIG. 15) to test the semiconductor device in a high temperature or low temperature environment, A second chamber 110c (shown in Fig. 15), and a third chamber 110d (shown in Fig. 15).
The second chamber 110c regulates the semiconductor elements accommodated in the test tray 200 to a first temperature. The test tray 200 located in the second chamber 110c is a chamber in which a semiconductor device to be tested by the sorting unit 130 is received and is conveyed by the conveyor unit 120 And then transferred to the second chamber 110c. The first temperature is the temperature range that the semiconductor devices to be tested have when the semiconductor device to be tested is tested by the test equipment 400. The second chamber 110c includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the semiconductor device to be tested to the first temperature. When the semiconductor device to be tested is adjusted to the first temperature, the test tray 200 is transferred from the second chamber 110c to the first chamber 110a.
The third chamber 110d regulates the semiconductor devices accommodated in the test tray 200 to a second temperature. The test tray 200 located in the third chamber 110d is a semiconductor wafer in which the semiconductor devices tested through the testing process are accommodated and transferred from the first chamber 110a. The second temperature is a temperature range including room temperature or a temperature close thereto. The third chamber 110d includes at least one of an electrothermal heater and a liquefied nitrogen injection system to adjust the tested semiconductor device to the second temperature. When the tested semiconductor device is adjusted to the second temperature, the test tray 200 is transferred to the conveyor unit 120.
Although not shown, the chamber unit 110 may include a transfer means (not shown) for transferring the test tray 200. The conveying means can push or pull the test tray 200. The transferring means may transfer the test tray 200 containing the semiconductor elements to be tested from the second chamber 110c to the first chamber 110a. The transfer means may transfer the test tray 200 containing the tested semiconductor devices from the first chamber 110a to the third chamber 110d. The conveying means may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a belt type using a motor, a pulley and a belt, And a linear motor using a permanent magnet or the like can be used to transfer the test tray 200.
As shown in FIG. 16, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be horizontally arranged in the chamber unit 110. In this case, the chamber unit 110 may include a plurality of first chambers 110a. A plurality of the first chambers 110a may be vertically stacked.
As shown in FIG. 17, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be vertically stacked on the chamber unit 110. That is, the second chamber 110c, the first chamber 110a, and the third chamber 110d may be stacked vertically. The second chamber 110c may be disposed on the upper side of the first chamber 110a and the third chamber 110d may be disposed on the lower side of the first chamber 110a.
14 to 19, the chamber unit 110 may include a rotator 110e (shown in FIG. 16) for rotating the test tray 200 between a horizontal state and a vertical state.
The rotator 110e is installed in the chamber unit 110. The rotator 110e can rotate the test tray 200 in which the semiconductor device to be tested is housed from a horizontal state to a vertical state. Accordingly, the first chamber 110a can perform the test process on the test tray 200 that is vertically erected. Also, the sorting unit 130 may perform the loading process on the test tray 200 that is laid in a horizontal state. The rotator 110e can rotate the test tray 200 in which the tested semiconductor devices are housed from a vertical state to a horizontal state. Accordingly, the sorting unit 130 can perform the unloading process on the test tray 200 that is laid in a horizontal state.
The chamber unit 110 may include one rotator 110e, as shown in FIGS. In this case, the rotator 110e may be installed between the second chamber 110c and the third chamber 110d. The test tray 200 in which the semiconductor device to be tested is accommodated can be rotated by the rotator 110e to be vertical and then transferred from the rotator 110e to the second chamber 110c by the transferring means have. The test tray 200 in which the tested semiconductor device is accommodated is conveyed from the third chamber 110d to the rotator 110e by the conveying means and then rotated by the rotator 110e to be horizontal have.
Although not shown, the chamber unit 110 includes a first rotator for rotating the test tray 200 in which semiconductor elements to be tested are accommodated, and a second rotator for rotating the test tray 200 in which the tested semiconductor elements are housed, . ≪ / RTI > The first rotator may be installed inside the second chamber 110c or outside the second chamber 110c. The second rotator may be installed inside the third chamber 110d or outside the third chamber 110d.
Although not shown, the chamber unit 110 may perform a test process on the test tray 200 in a horizontal state without the rotator 110e. In this case, the test process may be performed while the test tray 200 is transferred between the second chamber 110c, the first chamber 110a, and the third chamber 110d in a horizontal state.
Although not shown, the conveying unit may convey the test tray 200 supported by the conveyor unit 120 to the chamber unit 110. [ The conveying unit may convey the test tray 200 supported by the conveyor unit 120 to the first chamber 110a. When the chamber unit 110 includes the second chamber 110c, the conveying unit conveys the test tray 200 supported by the conveyor unit 120 to the second chamber 110c via the second chamber 110c. 1 chamber 110a. The conveying unit may convey the test tray 200 having completed the testing process to the conveyor unit 120. The conveying unit may transfer the test tray 200 from the first chamber 110a to the conveyor unit 120 after the test process is completed. If the chamber unit 110 includes the third chamber 110d, the transfer unit may transfer the test tray 200 from the first chamber 110a to the third chamber 110d, To the conveyor unit (120).
Referring to FIGS. 2 and 14, a plurality of the chamber units 110 are installed along the conveyor unit 120. The chamber units 110 are installed at a predetermined distance from each other along the conveyor unit 120. For example, the first chamber unit and the second chamber unit may be installed on the conveyor unit 120 at a predetermined distance from each other. The inline test handler 100 according to the present invention may include N (N is an integer greater than 2) chamber units 110. [
2 and 14, the conveyor unit 120 conveys the test tray 200 such that the test tray 200 is transferred between the sorting unit 130 and the chamber units 110. The conveyor unit 120 carries the test tray 200 such that the test tray 200 discharged from the sorting unit 130 is supplied to the chamber unit 110. The conveyor unit 120 conveys the test tray 200 such that the test tray 200 discharged from the chamber unit 110 is supplied to the sorting unit 130. The inline test handler 1 according to the present invention circulates the test tray 200 between the sorting unit 130 and the chamber units 110 installed apart from each other through the conveyor unit 120, The testing process, and the unloading process for the semiconductor devices accommodated in the semiconductor device 200.
Referring to FIG. 18, the conveyor unit 120 includes a conveyor 120a for conveying the test tray 200. FIG. The conveyor 120a may include a plurality of rotary members 120b spaced apart from each other by a predetermined distance. The conveyor 120a rotates the rotatable members 120b around respective rotation axes. The test tray 200 may be carried as the rotating members 120b rotate while being supported by the rotating members 120b. The conveyor 120a can rotate the rotary members 120b in a clockwise direction and a counterclockwise direction about respective rotation axes. Accordingly, the conveyor 120a can adjust the direction in which the test tray 200 is conveyed by adjusting the direction in which the rotating members 120b rotate. Each of the rotary members 120b may be formed in a cylindrical shape.
Although not shown, the conveyor 120a may include a power source for rotating the rotary members 120b around respective rotation axes. The power source may be a motor. The conveyor 120a may include connecting means for connecting the rotational axis of each of the power source and the rotary member 120b. The connecting means may be a pulley and a belt. The conveyor 120a may further include a circulation member (not shown) coupled to surround the rotation members 120b. The test tray 200 is supported by the circulation member. The circulation member can circulate the test tray 200 while the rotatable members 120b disposed therein rotate around the respective rotation axes.
The conveyor 120a includes an installation mechanism 120c for supporting the rotary members 120b. The mounting mechanism 120c supports the rotating members 120b such that the test tray 200 supported by the rotating members 120b is positioned on the conveying path MP (shown in FIG. 4).
The conveyor unit 120 may include a plurality of conveyors 120a. The conveyors 120a are installed adjacent to each other. The test tray 200 may be transported along the conveyors 120a and thereby be transferred between the chamber unit 110 (shown in Fig. 14) and the sorting unit 130 (shown in Fig. 14). The conveyor 120a can move the test tray 200 individually while operating individually. For example, while at least one of the conveyors 120a is stationary, another conveyor 120a may operate to convey the test tray 200. [ The conveyor unit 120 may include a number of conveyors 120a corresponding to the number of the chamber units 110. [
2 and 19, the sorting unit 130 performs the loading process and the unloading process. The sorting unit 130 is spaced apart from the chamber units 110. The sorting unit 130 may include a loading unit 131 (shown in FIG. 19) for performing the loading process.
The loading unit 131 transfers the semiconductor devices to be tested from the customer tray to the test tray 200. The loading unit 131 may include a loading stacker 1311 (shown in FIG. 19) and a loading picker 1312 (shown in FIG. 19).
The loading stacker 1311 supports the customer tray. The customer tray supported on the loading stacker 1311 contains semiconductor elements to be tested. The loading stacker 1311 may store a plurality of customer trays containing semiconductor elements to be tested. The customer trays can be stacked up and down and stored in the loading stacker 1311.
The loading picker 1312 may pick up a semiconductor device to be tested from a customer tray located in the loading stacker 1311 and store the semiconductor device in a test tray 200. When the semiconductor element to be tested is received in the test tray 200, the test tray 200 can be placed in the loading position 131a (shown in FIG. 19). The loading picker 1312 can transfer the semiconductor device to be tested while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The loading picker 1312 may be raised or lowered.
The loading unit 131 may further include a loading buffer 1313 (shown in FIG. 19) for temporarily storing semiconductor elements to be tested. In this case, the loading picker 1312 picks up the semiconductor device to be tested from the customer tray and transfers the picked up semiconductor device to the test tray 200 located at the loading position 131a via the loading buffer 1313. [ As shown in Fig. The loading picker 1312 includes a first loading picker 1312a (shown in FIG. 19) for transferring semiconductor elements to be tested from the customer tray to the loading buffer 1313, and a loading buffer 1313 for transferring the semiconductor elements to be tested. (Shown in FIG. 19) that transports the test strip 200 from the test tray 200 to the test tray 200.
Although not shown, the loading unit 131 may include a loading and conveying means for conveying the test tray 200. The loading and conveying means may push or pull the test tray 200. The loading and conveying means may transfer the test tray 200 from which the loading process has been completed to the conveyor unit 120 from the loading position 131a. The loading transfer means may transfer the empty test tray 200 from the conveyor unit 120 to the loading position 131a.
2 and 19, the sorting unit 130 may include an unloading unit 132 (shown in FIG. 19) for performing the unloading process.
The unloading unit 132 separates the tested semiconductor device from the test tray 200 and transfers the separated semiconductor device to the customer tray. The unloading unit 132 may include an unloading stacker 1321 (shown in FIG. 19) and an unloading picker 1322 (shown in FIG. 19).
The unloading stacker 1321 supports the customer tray. The customer tray supported on the unloading stacker 1321 contains the tested semiconductor elements. The unloading stacker 1321 may store a plurality of customer trays containing the tested semiconductor elements. The customer trays can be stacked up and down and stored in the unloading stacker 1321.
The unloading picker 1322 picks up the tested semiconductor devices from the test tray 200 and stores them in a customer tray located in the unloading stacker 1321. When the tested semiconductor device is picked up from the test tray 200, the test tray 200 can be placed in the unloading position 132a (shown in FIG. 19). The unloading picker 1322 can store the tested semiconductor devices in a customer tray corresponding to the grade according to the test result. The unloading picker 1322 can transfer the tested semiconductor device while moving in the first axis direction (X axis direction) and the second axis direction (Y axis direction). The unloading picker 1322 may be raised or lowered. If the test tray 200 becomes empty as the unloading unit 132 separates all of the tested semiconductor devices from the test tray 200, the sorting unit 130 unloads the empty test tray 200 And can be transferred from the unit 132 to the loading unit 131.
The unloading unit 132 may further include an unloading buffer 1323 (shown in FIG. 19) for temporarily storing the tested semiconductor elements. In this case, the unloading picker 1322 picks up the tested semiconductor device from the test tray 200 located at the unloading position 132a, and then transfers the picked up semiconductor device to the unloading buffer 1323 And stored in the customer tray. The unloading picker 1322 includes a first unloading picker 1322a (shown in FIG. 19) for transferring the tested semiconductor element from the test tray 200 to the unloading buffer 1323, And a second unloading picker 1322b (shown in FIG. 19) for transferring the unloading buffer 1323 to the customer tray.
Although not shown, the unloading unit 132 may include unloading and conveying means for conveying the test tray 200. The unloading and conveying means can push or pull the test tray 200 to transport. The unloading and conveying means may transfer the test tray 200 from which the test process is completed to the unloading position 132a from the conveyor unit 120. [ The unloading and conveying means may convey the test tray 200 which is empty as the unloading process is completed, from the unloading position 132a to the conveyor unit 120. [ The unloading and conveying means may transfer the test tray 200 which becomes empty as the unloading process is completed, from the unloading position 132a to the loading position 131a.
Although not shown, the inline test handler 1 according to the present invention may include a plurality of sorting units 130. In this case, the sorting units 130 may be installed apart from each other along the conveyor unit 120. According to a modified embodiment of the present invention, the sorting unit 130 may be installed such that the loading unit 131 and the unloading unit 132 are spaced apart from each other. Accordingly, the inline test handler 1 according to the present invention can be implemented such that the loading process and the unloading process are performed independently of each other. Accordingly, since the loading process, the unloading process, and the testing process are performed independently of each other, the inline test handler 1 according to the present invention can minimize the influence of the working time on each process . The loading unit 131 and the unloading unit 132 may be installed apart from each other along the conveyor unit 120.
Although not shown, the collection device 1 may be installed between the sorting units 130. The inline test handler (1) according to the present invention may include a plurality of the collection devices (1). In this case, the collection apparatus 1 may be installed between the sorting unit 130 and the chamber unit 110, and the collection apparatus 1 may be installed between the chamber units 110 .
20 to 27, the inline test handler 100 according to the present invention may further include a supply device 300. [
The feeder 300 feeds the test tray 200 to the conveyor unit 120. The inline test handler 100 according to the present invention is configured such that when the semiconductor device is changed in the inline test handler 100 according to the present invention, the collecting device 1 is moved from the conveyor unit 120 to the pre- The second test tray 220 (shown in FIG. 14) corresponding to the semiconductor device after the change, and the second test tray 220 (shown in FIG. To the conveyor unit (120). That is, the in-line test handler 100 according to the present invention is configured to connect the first test tray 210 (shown in FIG. 2) to the second test tray (not shown) by using the collecting device 1 and the supplying device 300 220). Therefore, the inline test handler 100 according to the present invention can achieve the following operational effects.
First, when the semiconductor device is changed, the in-line test handler 100 according to the present invention can replace the existing test tray 200 with the test tray 200 corresponding to the changed semiconductor device, It is possible to improve the responsiveness to the user.
Second, the in-line test handler 100 according to the present invention is configured to replace the existing test tray 200 with the test tray 200 for the changed semiconductor device even when the conveyor unit 120 is not stopped, The operating rate of the conveyor unit 120 can be increased. Therefore, the inline test handler 100 according to the present invention can improve the productivity of the tested semiconductor devices by reducing the time taken until the semiconductor devices are classified according to the test results after the test.
Thirdly, even if a new semiconductor device to be tested is added to an existing semiconductor device, the in-line test handler 100 according to the present invention can be applied to a second test tray 220 corresponding to a semiconductor device added using the supply device 200 Can be supplied to the conveyor unit (120). Accordingly, the inline test handler 100 according to the present invention can improve the versatility of performing the loading process, the test process, and the unloading process for various semiconductor devices.
20 to 27, the supplying device 300 includes a supply main body 310 installed in the conveyor unit 120, a first supply elevating / lowering unit 320 for lifting and lowering the second test tray 220, And a second supply and elevation unit 330 and a loading unit 340 for loading the second test tray 220 into the supply body 310.
The supply body 310 is installed in the conveyor unit 120. The supply body 310 may be coupled to the conveyor unit 120 so as to be positioned above the conveyor unit 120. The supply main body 310 supports the first supply and elevation unit 320, the second supply and elevation unit 330, and the carry-in unit 340. The supply body 310 may be installed in the conveyor unit 120 so as to be positioned between the chamber units 110. Although not shown, the supply body 310 may be installed in the conveyor unit 120 so as to be positioned at the front end of the chamber unit 110 positioned at the foremost position among the chamber units 110. The supply body 310 may be installed in the conveyor unit 120 so as to be positioned between the chamber unit 110 and the sorting unit 130 located in the last chamber among the chamber units 110. [ The supply body 310 may be installed in the conveyor unit 120 at a position spaced apart from the collection body 2 (shown in FIG. 2). The supply body 310 may be formed as a hollow rectangular parallelepiped, but the present invention is not limited thereto and may be formed in any other form as long as the second test tray 220 can be positioned therein.
Referring to FIGS. 20 to 27, the first supply and elevation unit 320 is coupled to the supply body 310. The first supply elevating and lowering unit 320 lowers the second test tray 220 located at the supply position SP to the conveying path MP. The second test tray 220 located at the supply position SP is located above the transport path MP. Accordingly, the second test tray 220 is supported by the conveyor unit 120 so that the second test tray 220 can be transported by the conveyor unit 120. The first supply elevating and lowering unit 320 may include a first supply elevating member 320a, a first supply elevating mechanism 320b, and a first supply moving mechanism 320c.
The first supply and elevation member 320a is movably coupled to the supply body 310. The first supply and elevation member 320a may support a second test tray 220 that is carried into the supply body 310. [ The second test tray 220 is supported by the first supply and elevation member 320a as it is carried into the supply body 310 by the carry-in unit 340, Can be supported by the conveyor unit 120 by descending from the feeding position SP to the conveying path MP as the conveying unit MP is lowered.
The first supply and elevation member 320a may include a first supply guide member 321a. The first supply guide member 321a may guide the second test tray 220 so that the second test tray 220 moves linearly while the second test tray 220 is being loaded into the supply main body 310. [ The first supply guide member 321a may be formed in the form of a silver ball as a whole. The first supply guide member 321a may be installed so that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The first supply elevating and lowering mechanism 320b descends the first supply and elevation member 320a while the first supply and elevation member 320a supports the second test tray 220, The tray 220 can be lowered to the conveying path MP. When the conveyor unit 120 conveys the test tray 200 along the conveying path MP so as to pass through the feeding device 300, the first feeding and elevating device 320b is connected to the first feeding / The first supply and elevation member 320a can be raised so as to avoid the test tray 200 conveyed along the conveyance path MP. Accordingly, the conveyor unit 120 can continuously carry the test tray 200 along the conveyance path MP without being disturbed by the first supply and elevation member 320a. The first supply elevating mechanism 320b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear, and a pinion gear, a motor, A linear motor using a coil, a permanent magnet, or the like can be used to raise and lower the first supply and elevation member 320a. The first feed elevating mechanism 320b may be coupled to the feed body 310. [ The first supply elevating member 320a may be coupled to the first supply elevating mechanism 320b.
The first feeding and moving mechanism 320c moves the first feeding and elevating member 320a such that the second test tray 220 is supported by the first feeding and elevating member 320a. The first feed moving mechanism 320c may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, The first supply and elevation member 320a can be moved by using a belt method using a coil, a linear motor using a coil, a permanent magnet, or the like. The first feeding and moving mechanism 320c may be coupled to the first feeding and elevating member 320a.
Referring to FIGS. 20 to 27, the second supply / lift unit 330 is coupled to the supply body 310. The second supply and elevation unit 330 is disposed on the opposite side of the first supply and elevation unit 320 with respect to the second test tray 220 supported by the first supply and elevation unit 320, 310 < / RTI > That is, the second test tray 220 is positioned between the second supply and elevation unit 330 and the first supply and elevation unit 320. The second supply elevating and lowering unit 330 may include a second supply elevating member 330a, a second supply elevating mechanism 330b, and a second supply moving mechanism 330c.
The second supply and elevation member 330a is coupled to the supply main body 310 so as to be able to move up and down. The second supply and elevation member 330a may support a second test tray 220 that is carried into the supply body 310. [ The second test tray 220 is supported by the first supply and elevation member 320a and the second supply and elevation member 320b as one side is carried into the supply body 310 by the carry- 330a of the conveyor unit (330), descending from the supply position (SP) to the conveyance path (MP) as the first supply and elevation member (320a) and the second supply and elevation member 120, respectively.
The second supply and elevation member 330a may include a second supply guide member 331a (shown in Fig. 25). The second supply guide member 331a may guide the second test tray 220 so that the second test tray 220 moves linearly in the process of being transported to the supply main body 310. [ The second test tray 220 is guided by the first supply guide member 321a and the other is guided by the second supply guide member 331a so that the second test tray 220 is linearly moved to the supply main body 310 Can be imported. The second supply guide member 331a may be formed in the shape of a nickel ball as a whole. The second supply guide member 331a may be installed so that the conveyor unit 120 faces the direction perpendicular to the direction in which the test tray 200 is conveyed.
The second supply elevating and lowering mechanism 330b lifts up the second supply elevating and lowering member 330a. The second supply elevating and lowering mechanism 330b may lower the second supply and elevation member 330a while the second supply and elevation member 330a supports the second test tray 220, The tray 220 can be lowered to the conveying path MP. When the conveyor unit 120 conveys the test tray 200 along the conveyance path MP so as to pass through the feeder 300, the second feeder lift mechanism 330b is moved to the second feeder / The second supply elevating member 330a may be raised so as to avoid the test tray 200 carried along the conveying path MP. Accordingly, the conveyor unit 120 can continuously carry the test tray 200 along the conveyance path MP without being disturbed by the second supply and elevation member 330a.
The second supply elevating mechanism 330b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, a motor, A linear motor using a coil, a permanent magnet, or the like can be used to raise and lower the second supply and elevation member 330a. And the second supply elevator 330b may be coupled to the supply body 310. [ The second supply elevating member 330a may be coupled to the second supply elevating mechanism 330b.
The second feed moving mechanism 330c moves the second feed and elevation member 330a such that the second test tray 220 is supported by the second feed and elevation member 330a. The second feed moving mechanism 330c may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, A linear motor using a coil and a permanent magnet, or the like can be used to move the second supply and elevation member 330a. The second feed moving mechanism 330c may be coupled to the second feed elevating member 330a.
The second supply elevating and lowering unit 330 and the first supply elevating and lowering unit 320 operate as follows to move the second test tray 220 to the conveyor unit 120 To be transportable.
22, the take-in unit 340 is configured such that the second test tray 220 is supported by the first supply and elevation member 320a and the second supply and elevation member 330a, The test tray 220 is moved to the feeding position SP. In this case, the first supply guide member 321a (shown in FIG. 25) and the second supply guide member 331a (shown in FIG. 25) The second test tray 220 can be guided to be positioned at the position SP.
Next, as shown in FIG. 25, the second supply elevating mechanism 330b lowers the second supply elevating member 330a. The second supply elevating mechanism 330b descends the second supply elevating and lowering member 330a such that the second supply guide member 331a is positioned below the transfer path MP. At the same time, the first supply elevating mechanism 320b descends the first supply elevating and lowering member 320a. The first supply elevating mechanism 320b may lower the first supply elevating and lowering member 320a such that the first supply guide member 321a is positioned below the conveying path MP. Accordingly, the second test tray 220 is supported on the conveyor unit 120 at one side and the other side as shown in FIG.
26, the second feed moving mechanism 330c and the first feed moving mechanism 320c are disposed between the second feed and elevation member 330a and the first feed and elevation member 320a The second supply and elevation member 330a and the first supply and elevation member 320a are moved so that the first supply and elevation member 330a and the first supply and elevation member 320a are opened. This is because the second feed moving mechanism 330c and the first feed moving mechanism 320c are moved in the second feed direction so that the interval between the second feed guide member 331a and the first feed guide member 321a becomes wide, The guide member 331a and the first supply guide member 321a.
Next, as shown in Fig. 27, the second supply elevating mechanism 330b raises the second supply elevating member 330b. At the same time, the first supply elevating mechanism 320b raises the first supply elevating and lowering member 320a. Accordingly, the second supply and elevation member 330a and the first supply and elevation member 320a are located on the upper side of the transportation path MP. 23) is configured to allow the second test tray 220 to pass under the second supply and elevation member 330a or the first supply and elevation member 320a, 2 < / RTI > test tray 220 can be carried.
After the second test tray 210 is brought into the supply main body 310 and the second test tray 220 is conveyed to the conveyor unit 120 through the above- To be transportable.
Referring to FIGS. 20 to 27, the carry-in unit 340 performs a function of bringing the second test tray 220 into the supply body 310. The loading unit 340 may be coupled to the supply body 310. The transfer unit 340 moves the second test tray 220 to the supply main body 310 by moving the second test tray 220 in the loading direction (direction of the arrow I in FIG. 22) . The loading unit 340 may include a loading member 340a and a loading mechanism 340b.
The loading member 340a is coupled to the loading mechanism 340b. The carrying member 340a may be moved by the carrying mechanism 340b so as to move the second test tray 220 in the loading direction (direction of arrow I). The carrying member 340a may be formed in a rectangular shape as a whole, but the present invention is not limited thereto. The carrying member 340a may be formed in a different shape as long as the second test tray 220 can be pushed and moved.
The loading mechanism 340b moves the loading member 340a. The loading mechanism 340b is coupled to the supply body 310 so as to be positioned outside the supply body 310. [ The loading mechanism 340b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, a belt using a motor, a pulley, Method, a linear motor using a coil and a permanent magnet, or the like, can be used to move the carrying member 340a.
The loading mechanism 340b may lift the loading member 340a. The loading mechanism 340b may lift the loading member 340a such that the loading member 340a does not interfere with the second test tray 220. [ 22, the carry-in mechanism 340b may be configured such that the carry-in member 340a is moved to the second test tray 220, as shown in FIG. 22, when the part of the second test tray 220 is carried into the supply body 310. [ The second test tray 220 can be moved to the feeding position SP by moving the carrying member 340a after lowering the carrying member 340a so as to contact the second test tray 220. [
20 to 28, the feeding device 300 may further include a feeding and conveying unit 350 (shown in FIG. 28).
The supply and conveyance unit 350 is coupled to the supply body 310. The supply and conveyance unit 350 is coupled to the supply body 310 so as to be positioned outside the supply body 310 to support the bottom surface of the second test tray 220, . The supplying and conveying unit 350 moves the second test tray 220 in the loading direction (direction of arrow I), as shown in FIG. When the supply conveyance unit 350 moves the second test tray 220 in the loading direction (direction of the arrow I) and a part of the second test tray 220 is loaded into the supplying main body 310 And a part of the second test tray 220 is supported by the first supply and elevation unit 320. When a part of the second test tray 220 is supported by the first supply and elevation unit 320, as shown in FIG. 22, the carry-in unit 340 moves the second test tray 220 in the carrying direction (The direction of the arrow I) so that the second test tray 220 can be completely brought into the supply main body 310. [
20 to 28, the supply conveying unit 350 may include a supply lower roller 350a (shown in FIG. 28) and a supply rotating mechanism 350b (shown in FIG. 16).
The supply lower roller 350a is rotatably installed in the supply body 310. [ The supply lower roller 350a is coupled to the supply main body 310 so as to be positioned outside the supply main body 310 so as to support the bottom surface of the second test tray 220, .
The feed rotation mechanism 350b rotates the feed lower roller 350a. The supply rotation mechanism 350b may be installed in the supply body 310 or the conveyor unit 120. [ 28, in a state in which the second test tray 220 is supported by the supply lower roller 350a, the supply rotation mechanism 350b rotates the supply lower roller 350a, The test tray 220 can be moved in the loading direction (direction of arrow I).
The supply rotation mechanism 350b may include a motor that is directly coupled to the rotation shaft of the supply lower roller 350a to rotate the supply lower roller 350a about the rotation axis. When the rotation shaft of the motor and the supply lower roller 350a are spaced apart from each other by a predetermined distance, the supply rotation mechanism 350b may further include connection means for connecting the rotation shaft of the motor and the supply lower roller 350a have. The connecting means may be a chain, a belt, a gear, or the like.
The supplying and conveying unit 350 may include a plurality of the supplying lower rollers 350a. The supply lower rollers 350a are installed so as to be spaced apart from each other in the loading direction (direction of arrow I). Accordingly, the feeding device 300 can increase the distance for moving the second test tray 220 in the loading direction (arrow I direction). In this case, the supplying and conveying unit 350 may include a supplying interlocking mechanism 350c.
The supply interlocking mechanism 350c connects the supply lower rollers 350a to each other. Accordingly, when the feed rotation mechanism 350b rotates any one of the feed lower rollers 350a, the remaining feed lower rollers 350a can rotate together through the feed interlocking mechanism 350c . Accordingly, the supply device 300 can rotate the plurality of supply lower rollers 350a using one supply rotation mechanism 350b, thereby reducing the overall size, and the second test tray 220 ) Can be saved. The supply interlocking mechanism 350c may be a belt, a chain, a gear, or the like.
Referring to Fig. 28, the supply and conveyance unit 350 may include a supply upper roller 350d and a supply roller lift mechanism 350e.
The supply upper roller 350d is rotatably installed in the supply main body 310. [ The feeding upper roller 350d may be coupled to the feeding body 310 to be positioned above the feeding lower roller 350a. The supply upper roller 350d is coupled to the supply main body 310 so as to be positioned outside the supply main body 310 so as to support the upper surface of the second test tray 220, .
The supply roller elevating mechanism 350e lifts the supply upper roller 350d. And the supply upper roller 350d is coupled to the supply roller lifting mechanism 350e. The supply roller lifting mechanism 350e may be coupled to the supply main body 310 such that the supply upper roller 350d is positioned above the supply lower roller 350a. The supply roller lifting mechanism 350e may be coupled to the supply body 310 to be positioned outside the supply body 310. [
The feed roller lift mechanism 350e may raise the feed upper roller 350d before the second test tray 220 is supported by the feed lower roller 350a. When the second test tray 220 is supported by the supply lower roller 350a, the supply roller elevating mechanism 350e lowers the supply upper roller 350d to rotate the supply lower roller 350a, 2 test tray 220 on the upper side.
Accordingly, the second test tray 220 moves between the feeding upper roller 350d and the feeding lower roller 350a while moving in the loading direction (direction of the arrow I) It is possible to prevent the occurrence of the shaking in the process of moving to the second position. In this case, the feeding upper roller 350d is moved to the second test tray 220 as the second test tray 220 is moved in the feeding direction (direction of arrow I) by the feeding lower roller 350a And can be rotated in a contacted state. The second test tray 220 can move the second test tray 220 in the feeding direction (the direction of the arrow I) 350d from being damaged or damaged as they move in contact with each other.
The supply roller lifting mechanism 350e may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear, and a pinion gear, a motor, a pulley, The upper feeding roller 350d can be raised and lowered by using a belt system using a linear motor using a coil and a permanent magnet.
20 to 29, the supply device 300 may further include a supply storage unit 360 (shown in FIG. 29).
The supply storage unit 360 is installed so as to be spaced apart from the conveyor unit 120. The supply storage unit 360 stores a second test tray 220 for loading into the supply main body 310. Accordingly, the supplying device 300 can continuously carry out the process of bringing the second test tray 220 into the supplying main body 310. Accordingly, the supply device 300 can quickly cope with the change of the semiconductor device by reducing the time it takes to supply the second test tray 220 to the conveyor unit 120. [0050]
The supply storage unit 360 may include a supply storage member 360a and a supply mechanism 360b.
The supply storage member 360a can store the second test tray 220. The supply storage member 360a may store a plurality of the second test trays 220 stacked vertically. To this end, the supply storage member 360a may include a plurality of support means that are vertically spaced apart from each other. The second test trays 220 may be respectively stored in the supply storage member 360a by being supported by the support means. The supply storage member 360a can be raised and lowered by the supply drive mechanism 360c. The supply drive mechanism 360c may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a motor, a pulley, The supply storage member 360a can be lifted and lowered by using a belt motor, a linear motor using a coil, a permanent magnet, or the like. The supply storage member 360a may be formed in a rectangular parallelepiped shape having an empty interior as a whole. However, the supply storage member 360a may be formed in any other shape as long as the plurality of support means can be vertically spaced apart.
The supply mechanism 360b is configured to supply the second test tray 220 to the supply conveyance unit 350 so that the second test tray 220 stored in the supply storage member 360a is supported by the supply conveyance unit 350. [ ). The supply mechanism 360b can move the second test tray 220 to the supply conveyance unit 350 by moving the second test tray 220 in the loading direction . The transfer unit 340 transfers the second test tray 220 to the supply main body 320 so that the second test tray 220 moved by the supply mechanism 360b is supported by the first supply / 310). The supply mechanism 360b may be a cylinder type using a hydraulic cylinder or a pneumatic cylinder, a ball screw type using a motor and a ball screw, a gear type using a motor, a rack gear and a pinion gear, a belt using a motor, a pulley, Method, a linear motor using a coil and a permanent magnet, etc., the second test tray 220 can be moved.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It will be clear to those who have knowledge.
